Microfluidic capillary in a waveguide resonator for chemical and biochemical sensing

This thesis presents a novel microwave sensor for the characterisation of fluids with the integration of a microfluidic capillary. Various designs and fabrication methods were investigated for the integrated microfluidic capillary. SU-8 and PDMS were investigated as possible materials, however proved difficult to produce large volumes of capillaries. PMMA a cheap readily available material was also investigated. Using an Epilog CO2 laser ablation machine rapid prototyping of microfluidic capillaries was achieved using PMMA. Two microwave resonator designs are proposed as non-contact sensing devices. The first design utilizes an E-plane filter in a split-block rectangular waveguide housing. This offers advantages in enhanced near fields and simple manufacturing techniques. Simulation and experimental results are presented, demonstrating sensitivity of such microwave sensors. Various materials under test were used: Methylated spirit/water concentrations, lubricant and motor oils and animal red blood cell concentrations. Resonant frequency shifts in the region of 10s of MHz were observed. However most notably in the methylated spirit concentrations there was no resonant frequency shift, only a shift in the return losses were observed. The integration of the E-plane filter and the microfluidic capillary resulted in poor repeatability due to alignment issues of the filter and capillary. The second design incorporates the use of Distributed Bragg Reflectors for a compact and fully integrated, no moving parts, device. The simulation results produced a Q-factor 1,942 at a resonant frequency of 23.3 GHz. The Bragg sensor produced promising simulation results as well as initial experimental results. There was up to 20 MHz resonant frequency shift between the samples. Samples included Eppendorf tubes filled with water and oil

Acoustic Wave Based MEMS Devices, Development and Applications

Acoustic waves based MEMS devices offer a promising technology platform for a wide range of applications due to their high sensitivity and the capability to operate wirelessly. These devices utilize acoustic waves propagating through or on the surface of a piezoelectric material. An acoustic wave device typically consists of two layers, metal transducers on top of piezoelectric substrate or thin films. The piezoelectric material has inherent capabilities of generating acoustic waves related to the input electrical sinusoidal signals placed on the transducers. Using this characteristic, different transducer designs can be placed on top of the piezoelectric material to create acoustic wave based filters, resonators or sensors. Historically, acoustic wave devices have been and are still widely used in telecommunications industry, primarily in mobile cell phones and base stations. Surface Acoustic Wave (SAW) devices are capable of performing powerful signal processing and have been successfully functioning as filters, resonators and duplexers for the past 60 years. Although SAW devices are technological mature and have served the telecommunication industry for several decades, these devices are typically fabricated on piezoelectric substrates and are packaged as discrete components. Considering the wide flexibility and capabilities of the SAW device to form filters, resonators there has been motivation to integrate such devices on silicon substrates as demonstrated in (Nordin et al., 2007; M. J. Vellekoop et al., 1987; Visser et al., 1989). One such example is illustrated in (Nordin et al., 2007) where a CMOS SAW resonator was fabricated using 0.6 m AMIs CMOS technology process with additional MEMS post-processing. The traditional SAW structure of having the piezoelectric at the bottom was inverted. Instead, the IDTs were cleverly manufactured using standard complementary-metal-oxide-semiconductor (CMOS) process and the piezoelectric layer was placed on the top. Active circuitry can be placed adjacent to the CMOS resonator and can be connected using the integrated metal layers. A SAW device can also be designed to have a long propagation path between the input and output transducer. The propagating acoustic waves will then be very sensitive to ambient changes, allowing the device to act as a sensor. Any variations to the characteristics of the propagation path affect the velocity or amplitude of the wave. Important application for acoustic wave devices as sensors include torque and tire pressure sensors (Cullen et al., 1980; Cullen et al., 1975; Pohl et al., 1997), gas sensors (Levit et al., 2002; Nakamoto et al., 1996; Staples, 1999; Wohltjen et al., 1979), biosensors for medical applications (Andle et al., 1995; Ballantine et al., 1996; Cavic et al., 1999; Janshoff et al., 2000), and industrial and commercial applications (vapor, humidity, temperature, and mass sensors) (Bowers et al., 1991; Cheeke et al., 1996; Smith, 2001; N. J. Vellekoop et al., 1999; Vetelino et al., 1996; Weld et al., 1999). In recent years, the interest in the development of highly sensitive acoustic wave devices as biosensor platforms has grown. For biological applications the acoustic wave device is integrated in a microfluidic system and the sensing area is coated with a biospecific layer. When a bioanalyte interacts with this sensing layer, physical, chemical, and/or biochemical changes are produced. Typically, mass and viscosity changes of the biospecific layer can be detected by analyzing changes in the acoustic wave properties such as velocity, attenuation and resonant frequency of the sensor. An important advantage of the acoustic wave biosensors is simple electronic readout that characterizes these sensors. The measurement of the resonant frequency or time delay can be performed with high degree of precision using conventional electronics. This chapter is focused on two important applications of the acoustic-wave based MEMS devices; (1) biosensors and (2) telecommunications. For biological applications these devices are integrated in a microfluidic system and the sensing area is coated with a biospecific layer. When a bioanalyte interacts with this sensing layer, physical, chemical, and/or biochemical changes are produced. Typically, mass and viscosity changes of the biospecific layer can be detected by analyzing changes in the acoustic wave properties such as velocity, attenuation and resonant frequency of the sensor. An important advantage of the acoustic wave biosensors is simple electronic readout that characterizes these sensors. The measurement of the resonant frequency and time delay can be performed with high degree of precision using conventional electronics. Only few types of acoustic wave devices could be integrated in microfluidic systems without significant degradation of the quality factor. The acoustic wave based MEMS devices reported in the literature as biosensors are film bulk acoustic wave resonators (FBAR) and surface acoustic waves (SAW) resonators and SAW delay lines. Different approaches to the realization of FBARs and SAW resonators and SAW delay lines used for various biochemical applications are presented. Next, acoustic wave MEMS devices used in telecommunications applications are presented. Telecommunication devices have different requirements compared to sensors, where acoustic wave devices operating as a filter or resonator are expected to operate at high frequencies (GHz), have high quality factors and low insertion losses. Traditionally, SAW devices have been widely used in the telecommunications industry, however with advancement in lithographic techniques, FBARs are rapidly gaining popularity. FBARs have the advantage of meeting the stringent requirement of telecommunication industry of having Qs in the 10,000 range and silicon compatibility

Review of recent microwave planar resonator-based sensors: Techniques of complex permittivity extraction, applications, open challenges and future research directions

Recent developments in the field of microwave planar sensors have led to a renewed interest in industrial, chemical, biological and medical applications that are capable of performing real-time and non-invasive measurement of material properties. Among the plausible advantages of microwave planar sensors is that they have a compact size, a low cost and the ease of fabrication and integration compared to prevailing sensors. However, some of their main drawbacks can be considered that restrict their usage and limit the range of applications such as their sensitivity and selectivity. The development of high-sensitivity microwave planar sensors is required for highly accurate complex permittivity measurements to monitor the small variations among different material samples. Therefore, the purpose of this paper is to review recent research on the development of microwave planar sensors and further challenges of their sensitivity and selectivity. Furthermore, the techniques of the complex permittivity extraction (real and imaginary parts) are discussed based on the different approaches of mathematical models. The outcomes of this review may facilitate improvements of and an alternative solution for the enhancement of microwave planar sensors’ normalized sensitivity for material characterization, especially in biochemical and beverage industry applications

Analysis And Investigation Of A Novel Microwave Sensor With High Q-Factor For Liquid Characterization

In this paper, a new design of microwave sensor with high Q-factor for liquid characterization is analyzed and investigated. The new microwave sensor is based on a gap waveguide cavity resonator (GWCR). The GWCR consists of upper plate, lower plate and array of pins on the lower plate. The liquid under test (LUT) is characterized by placing it inside the GWCR where the electric field concentrates using a quartz capillary that is passing through microfluidic channels. The results show that the proposed sensor has a high Q-factor of 4832. Moreover, the proposed sensor has the ability to characterize different typesof liquids such as oils, ethanol, methanol and distilled water. The polynomial fitting method is used to extract the equation of the unknown permittivity of the LUT. The results show that the evaluated permittivity using the proposed sensor has a good agreement with the reference permittivity. Therefore, the proposed sensor is a good candidate for food and pharmaceutical application

Analysis and investigation of a novel microwave sensor with high Q-factor for liquid characterization

In this paper, a new design of microwave sensor with high Q-factor for liquid characterization is analyzed and investigated. The new microwave sensor is based on a gap waveguide cavity resonator (GWCR). The GWCR consists of upper plate, lower plate and array of pins on the lower plate. The liquid under test (LUT) is characterized by placing it inside the GWCR where the electric field concentrates using a quartz capillary that is passing through microfluidic channels. The results show that the proposed sensor has a high Q-factor of 4832. Moreover, the proposed sensor has the ability to characterize different types of liquids such as oils, ethanol, methanol and distilled water. The polynomial fitting method is used to extract the equation of the unknown permittivity of the LUT. The results show that the evaluated permittivity using the proposed sensor has a good agreement with the reference permittivity. Therefore, the proposed sensor is a good candidate for food and pharmaceutical applications

Microwave Devices for Wearable Sensors and IoT

The Internet of Things (IoT) paradigm is currently highly demanded in multiple scenarios and in particular plays an important role in solving medical-related challenges. RF and microwave technologies, coupled with wireless energy transfer, are interesting candidates because of their inherent contactless spectrometric capabilities and for the wireless transmission of sensing data. This article reviews some recent achievements in the field of wearable sensors, highlighting the benefits that these solutions introduce in operative contexts, such as indoor localization and microwave sensing. Wireless power transfer is an essential requirement to be fulfilled to allow these sensors to be not only wearable but also compact and lightweight while avoiding bulky batteries. Flexible materials and 3D printing polymers, as well as daily garments, are widely exploited within the presented solutions, allowing comfort and wearability without renouncing the robustness and reliability of the built-in wearable sensor

Planar Microwave Sensors for Accurate Measurement of Material Characterization: A Review

Microwave sensor is used in various industrial applications and requires highly accurate measurements for material properties. Conventionally, cavity waveguide perturbation, free-space transmission, open-ended coaxial probe, and planar transmission line technique have been used for characterizing materials. However, these planar transmission lines are often large and expensive to build, further restricting their use in many important applications. Thus, this technique is cost effective, easy to manufacture and due to its compact size, it has the potential to produce sensitivity and a high Q-factor for various materials. This paper reviews the common characteristics of planar transmission line and discusses numerous studies about several designs of the microstrip resonator to improve the sensor performance in terms of the sensitivity and accuracy. This technique enables its use for several industrial applications such as agriculture and quality control. It is believed that previous studies would lead to a promising solution of characterizing materials with high sensitivity, particularly in determining a high Q-factor resonator sensor

Nano-Fluidic Millimeter-Wave Lab-on-a-Waveguide Sensor for Liquid-Mixture Characterization

This paper reports on a miniaturized lab-on-a-waveguide liquid-mixture sensor, achieving highly-accurate nanoliter liquid sample characterization, for biomedical applications. The nanofluidic-integrated millimeter-wave sensor design is based on near-field transmission-line technique implemented by a single loop slot antenna operating at 91 GHz, fabricated into the lid of a photolaser-based subtractive manufactured WR-10 rectangular waveguide. The nanofluidic subsystem, which is mounted on top of the antenna aperture, is fabricated by using multiple Polytetrafluoroethylene (PTFE) layers to encapsulate and isolate the liquid sample during the experiment, hence, offering various preferable features e.g. noninvasive and contactless measurements. Moreover, the sensor is reusable by replacing only the nanofluidic subsystem, resulting a cost-effective sensor. The novel sensor can measure a liquid volume of as low as 210 nanoliters, while still achieving a discrimination accuracy of better than 2% of ethanol in the ethanol/deionized-water liquid mixture with a standard deviation of lower than 0.008 from at least three repeated measurements, resulting in the highest accurate ethanol and DI-water discriminator reported to date. The nanofluidic-integrated millimeter-wave sensor also offers other advantages such as ease of design, low fabrication and material cost, and no life-cycle limitation of the millimeter-wave subsystem

Substrate-integrated waveguide (SIW) microwave sensor theory and model in characterising dielectric material : A review

Microwave sensors offer appealing features such as susceptibility, quick response, and non-invasiveness, making them valuable tools for highly accurate measurements of material characterisation. A wide range of techniques, including cavity waveguide, planar transmission line, cavity waveguide perturbation, open-ended coaxial probe, and free-space transmission, have been employed to characterise materials that are essential for their cost-effectiveness, ease of manufacturing, high sensitivity, good quality factor (Q-factor), and compact size, allowing them to be applied to different material types. Among the microwave sensor types, the substrate-integrated waveguide (SIW) has emerged as a promising technology in order to characterise materials in an efficient manner. This paper presents a review of the current state and potential opportunities of SIW microwave sensors in the characterisation of dielectric materials. It provides insights into various design principles, techniques, and applications of SIW microwave sensors across different sectors, highlighting their advantages and limitations compared to conventional waveguide-based sensors. Furthermore, the paper summarises several fabrication methods that can be implemented for SIW microwave sensors to enable the production of efficient and reliable sensors. Additionally, the future directions provided in this paper aim to contribute to the ongoing development and optimisation of SIW-based microwave sensors for accurate and efficient dielectric material characterisation. Overall, this review article serves as a beneficial resource for new researchers seeking to understand the role of SIW microwave sensors in material characterisation. It outlines the current status, opportunities, and potential advancements of SIW sensors, shedding light on their significance and potential impact in the field of material characterisatio

Trends of biosensing: plasmonics through miniaturization and quantum sensing

Despite being extremely old concepts, plasmonics and surface plasmon resonance-based biosensors have been increasingly popular in the recent two decades due to the growing interest in nanooptics and are now of relevant significance in regards to applications associated with human health. Plasmonics integration into point-of-care devices for health surveillance has enabled significant levels of sensitivity and limit of detection to be achieved and has encouraged the expansion of the fields of study and market niches devoted to the creation of quick and incredibly sensitive label-free detection. The trend reflects in wearable plasmonic sensor development as well as point-of-care applications for widespread applications, demonstrating the potential impact of the new generation of plasmonic biosensors on human well-being through the concepts of personalized medicine and global health. In this context, the aim here is to discuss the potential, limitations, and opportunities for improvement that have arisen as a result of the integration of plasmonics into microsystems and lab-on-chip over the past five years. Recent applications of plasmonic biosensors in microsystems and sensor performance are analyzed. The final analysis focuses on the integration of microfluidics and lab-on-a-chip with quantum plasmonics technology prospecting it as a promising solution for chemical and biological sensing. Here it is underlined how the research in the field of quantum plasmonic sensing for biological applications has flourished over the past decade with the aim to overcome the limits given by quantum fluctuations and noise. The significant advances in nanophotonics, plasmonics and microsystems used to create increasingly effective biosensors would continue to benefit this field if harnessed properly