Design, Characterization And Analysis Of Electrostatic Discharge (esd) Protection Solutions In Emerging And Modern Technologies

Electrostatic Discharge (ESD) is a significant hazard to electronic components and systems. Based on a specific processing technology, a given circuit application requires a customized ESD consideration that includes the devices’ operating voltage, leakage current, breakdown constraints, and footprint. As new technology nodes mature every 3-5 years, design of effective ESD protection solutions has become more and more challenging due to the narrowed design window, elevated electric field and current density, as well as new failure mechanisms that are not well understood. The endeavor of this research is to develop novel, effective and robust ESD protection solutions for both emerging technologies and modern complementary metal–oxide–semiconductor (CMOS) technologies. The Si nanowire field-effect transistors are projected by the International Technology Roadmap for Semiconductors as promising next-generation CMOS devices due to their superior DC and RF performances, as well as ease of fabrication in existing Silicon processing. Aiming at proposing ESD protection solutions for nanowire based circuits, the dimension parameters, fabrication process, and layout dependency of such devices under Human Body Mode (HBM) ESD stresses are studied experimentally in company with failure analysis revealing the failure mechanism induced by ESD. The findings, including design methodologies, failure mechanism, and technology comparisons should provide practical knowhow of the development of ESD protection schemes for the nanowire based integrated circuits. Organic thin-film transistors (OTFTs) are the basic elements for the emerging flexible, printable, large-area, and low-cost organic electronic circuits. Although there are plentiful studies focusing on the DC stress induced reliability degradation, the operation mechanism of OTFTs iv subject to ESD is not yet available in the literature and are urgently needed before the organic technology can be pushed into consumer market. In this work, the ESD operation mechanism of OTFT depending on gate biasing condition and dimension parameters are investigated by extensive characterization and thorough evaluation. The device degradation evolution and failure mechanism under ESD are also investigated by specially designed experiments. In addition to the exploration of ESD protection solutions in emerging technologies, efforts have also been placed in the design and analysis of a major ESD protection device, diodetriggered-silicon-controlled-rectifier (DTSCR), in modern CMOS technology (90nm bulk). On the one hand, a new type DTSCR having bi-directional conduction capability, optimized design window, high HBM robustness and low parasitic capacitance are developed utilizing the combination of a bi-directional silicon-controlled-rectifier and bi-directional diode strings. On the other hand, the HBM and Charged Device Mode (CDM) ESD robustness of DTSCRs using four typical layout topologies are compared and analyzed in terms of trigger voltage, holding voltage, failure current density, turn-on time, and overshoot voltage. The advantages and drawbacks of each layout are summarized and those offering the best overall performance are suggested at the en

Design of Low-Capacitance Electrostatic Discharge (ESD) Protection Devices in Advanced Silicon Technologies.

Electrostatic discharge (ESD) related failure is a major IC reliability concern and this is particularly true as technology continues shrink to nano-metric dimensions. ESD design window research shows that ESD robustness of victim devices keep decreasing from 350nm bulk technology to 7nm FinFET technologies. In the meantime, parasitic capacitance of ESD diode with same It2 in FinFET technologies is approximately 3X compared with that in planar technologies. Thus transition from planar to FinFET technology requires more robust ESD protection however the large parasitic capacitance of ESD protection cell is problematic in high-speed interface design. To reduce the parasitic capacitance, a dual diode silicon controlled rectifier (DD-SCR) is presented in this dissertation. This design can exhibit good trade-offs between ESD robustness and parasitic capacitance characteristics. Besides, different bounding materials lead to performance variations in DD-SCRs are compared. Radio frequency (RF) technology is also demanded low capacitance ESD protection. To address this concern, a ?-network is presented, providing robust ESD protection for 10-60 GHz RF circuit. Like a low pass ? filter, the network can reflect high frequency RF signals and transmit low frequency ESD pulses. Given proper inductor value, networks can work as robust ESD solutions at a certain Giga Hertz frequency range, making this design suitable for broad band protection in RF input/outputs (I/Os). To increase the holding voltage and reduce snapback, a resistor assist triggering heterogeneous stacking structure is presented in this dissertation, which can increase the holding voltage and also keep the trigger voltage nearly as same as a single SCR device

Electrostatic Discharge

As we enter the nanoelectronics era, electrostatic discharge (ESD) phenomena is an important issue for everything from micro-electronics to nanostructures. This book provides insight into the operation and design of micro-gaps and nanogenerators with chapters on low capacitance ESD design in advanced technologies, electrical breakdown in micro-gaps, nanogenerators from ESD, and theoretical prediction and optimization of triboelectric nanogenerators. The information contained herein will prove useful for for engineers and scientists that have an interest in ESD physics and design

Miniaturized Transistors

What is the future of CMOS? Sustaining increased transistor densities along the path of Moore's Law has become increasingly challenging with limited power budgets, interconnect bandwidths, and fabrication capabilities. In the last decade alone, transistors have undergone significant design makeovers; from planar transistors of ten years ago, technological advancements have accelerated to today's FinFETs, which hardly resemble their bulky ancestors. FinFETs could potentially take us to the 5-nm node, but what comes after it? From gate-all-around devices to single electron transistors and two-dimensional semiconductors, a torrent of research is being carried out in order to design the next transistor generation, engineer the optimal materials, improve the fabrication technology, and properly model future devices. We invite insight from investigators and scientists in the field to showcase their work in this Special Issue with research papers, short communications, and review articles that focus on trends in micro- and nanotechnology from fundamental research to applications

Characterization of 28 nm FDSOI MOS and application to the design of a low-power 2.4 GHz LNA

IoT is expected to connect billions of devices all over world in the next years, and in a near future, it is expected to use LR-WPAN in a wide variety of applications. Not all the devices will require of high performance but will require of low power hungry systems since most of them will be powered with a battery. Conventional CMOS technologies cannot cover these needs even scaling it to very small regimes, which appear other problems. Hence, new technologies are emerging to cover the needs of this devices. One promising technology is the UTBB FDSOI, which achieves good performance with very good energy efficiency. This project characterizes this technology to obtain a set of parameters of interest for analog/RF design. Finally, with the help of a low-power design methodology (gm/Id approach), a design of an ULP ULV LNA is performed to check the suitability of this technology for IoT

Uncalibrated TCAD methodology for analysis of ESD protection devices

In this work, an uncalibrated TCAD methodology for simulation of electrostatic discharge (ESD) devices is presented. The methodology addresses TCAD setup issues including device construction, boundary conditions, and choosing a physical model and parameters. A major trade-off between computation complexity and accuracy, 2D vs. 3D simulations, is examined in detail. TCAD simulation results for the GGNMOS in 32 nm CMOS technology is compared with published measurement results for methodology validation. The established TCAD methodology is then applied to ESD protection silicon controlled rectifier (SCR) devices to identify physical causes for high overshoot of a certain SCR layout, and to verify proposed improvements. The performance of the SCR with the improved layout structure is characterized in silicon to prove its consistency with TCAD prediction

Device and Circuit Level EMI Induced Vulnerability: Modeling and Experiments

Electro-magnetic interference (EMI) commonly exists in electronic equipment containing semiconductor-based integrated circuits (ICs). Metal-oxide-semiconductor field-effect-transistors (MOSFETs) in the ICs may be disrupted under EMI conditions due to transient voltage-current surges, and their internal states may change undesirably. In this work, the vulnerabilities of silicon MOSFETs under EMI are studied at the device and the circuit levels, categorized as non-permanent upsets (``Soft Errors'') and permanent damages (``Hard Failures''). The Soft Errors, such as temporary bit errors and waveform distortions, may happen or be intensified under EMI, as the transient disruptions activate unwanted and highly non-linear changes inside MOSFETs, such as Impact Ionization and Snapback. The system may be corrected from the erroneous state when the EMI condition is removed. We simulate planar silicon n-type MOSFETs at the device level to study the physical mechanisms leading to or complicate the short-term, signal-level Soft Errors. We experimentally tested commercially available MOSFET devices. Not included in regular MOSFET models, exponential-like current increases as the terminal voltage increases are observed and explained using the device-level knowledge. We develop a compact Soft Error model, compatible with circuit simulators using lumped (or compact-model) components and closed-form expressions, such as SPICE, and calibrate it with our in-house experimental data using an in-house extraction technique based on the Genetic Algorithm. Example circuits are simulated using the extracted device model and under EMI-induced transient disruptions. The EMI voltage-current disruptions may also lead to permanent Hard Failures that cannot be repaired without replacement. One type of Hard Failures, the MOSFET gate dielectric (or ``oxide'') breakdown, can result in input-output relation changes and additional thermal runaway. We have fabricated individual MOSFET devices at the FabLab at the University of Maryland NanoCenter. We experimentally stress-test the fabricated devices and observe the rapid, permanent oxide breakdown. Then, we simulate a nano-scale FinFET device with ultra-thin gate oxide at the device level. Then, we apply the knowledge from our experiments to the simulated FinFET, producing a gate oxide breakdown Hard Failure circuit model. The proposed workflow enables the evaluation of EMI-induced vulnerabilities in circuit simulations before actual fabrication and experiments, which can help the early-stage prototyping process and reduce the development time

Characterisation of thermal and coupling effects in advanced silicon MOSFETs

PhD ThesisNew approaches to metal-oxide-semiconductor field effect transistor (MOSFET) engineering emerge in order to keep up with the electronics market demands. Two main candidates for the next few generations of Moore’s law are planar ultra-thin body and buried oxide (UTBB) devices and three-dimensional FinFETs. Due to miniature dimensions and new materials with low thermal conductivity, performance of advanced MOSFETs is affected by self-heating and substrate effects. Self-heating results in an increase of the device temperature which causes mobility reduction, compromised reliability and signal delays. The substrate effect is a parasitic source and drain coupling which leads to frequency-dependent analogue behaviour. Both effects manifest themselves in the output conductance variation with frequency and impact analogue as well as digital performance. In this thesis self-heating and substrate effects in FinFETs and UTBB devices are characterised, discussed and compared. The results are used to identify trade-offs in device performance, geometry and thermal properties. Methods how to optimise the device geometry or biasing conditions in order to minimise the parasitic effects are suggested. To identify the most suitable technique for self-heating characterisation in advanced semiconductor devices, different methods of thermal characterisation (time and frequency domain) were experimentally compared and evaluated alongside an analytical model. RF and two different pulsed I-V techniques were initially applied to partially depleted silicon-on-insulator (PDSOI) devices. The pulsed I-V hot chuck method showed good agreement with the RF technique in the PDSOI devices. However, subsequent analysis demonstrated that for more advanced technologies the time domain methods can underestimate self-heating. This is due to the reduction of the thermal time constants into the nanosecond range and limitations of the pulsed I-V set-up. The reduction is related to the major increase of the surface to volume ratio in advanced MOSFETs. Consequently the work showed that the thermal properties of advanced semiconductor devices must be characterised within the frequency domain. For UTBB devices with 7-8 nm Si body and 10 nm ultra-thin buried oxide (BOX) the analogue performance degradation caused by the substrate effects can be stronger than the analogue performance degradation caused by self-heating. However, the substrate effects can be effectively reduced if the substrate doping beneath the buried ii oxide is adjusted using a ground plane. In the MHz – GHz frequency range the intrinsic voltage gain variation is reduced ~6 times when a device is biased in saturation if a ground plane is implemented compared with a device without a ground plane. UTBB devices with 25 nm BOX were compared with UTBB devices with 10 nm BOX. It was found that the buried oxide thinning from 25 nm to 10 nm is not critical from the thermal point of view as other heat evacuation paths (e.g. source and drain) start to play a role. Thermal and substrate effects in FinFETs were also analysed. It was experimentally shown that FinFET thermal properties depend on the device geometry. The thermal resistance of FinFETs strongly varies with the fin width and number of parallel fins, whereas the fin spacing is less critical. The results suggest that there are trade-offs between thermal properties and integration density, electrostatic control and design complexity, since these aspects depend on device geometry. The high frequency substrate effects were found to be effectively reduced in devices with sub-100 nm wide fins.Engineering and Physical Sciences Research Council (EPSRC) and EU fundin