6,546 research outputs found
Parylene-based electret power generators
n electret power generator is developed using a new electret made of a charged parylene HTÂź thin-film polymer. Here, parylene HTÂź is a room-temperature chemical-vapor-deposited thin-film polymer that is MEMS and CMOS compatible. With corona charge implantation, the surface charge density of parylene HTÂź is measured as high as 3.69 mC m^â2. Moreover, it is found that, with annealing at 400 °C for 1 h before charge implantation, both the long-term stability and the high-temperature reliability of the electret are improved. For the generator, a new design of the stator/rotor is also developed. The new micro electret generator does not require any sophisticated gap-controlling structure such as tethers. With the conformal coating capability of parylene HTÂź, it is also feasible to have the electret on the rotors, which is made of either a piece of metal or an insulator. The maximum power output, 17.98 ”W, is obtained at 50 Hz with an external load of 80 MΩ. For low frequencies, the generator can harvest 7.7 ”W at 10 Hz and 8.23 ”W at 20 Hz
Micro-Contacts Testing Using a Micro-Force Sensor Compatible with Biological Systems
This paper presents the performance and reliability testing of microelectromechanical systems (MEMS) switches by using a micro-force sensor which was originally designed/used to conduct mechanical testing of biological cells. MEMS switches are key components for radio frequency (RF) applications due to their extremely low power consumption and small geometries over conventional technologies. However, unstable electrical contact resistance severely degrades the performance and reliability of such micro-switches. Therefore, our focus is to improve the performance and reliability of âcoldâ switched micro-contacts by using novel contact materials and engineered micro-contact surfaces. The contact metallurgies considered in this work are âsimilarâ thin film combinations of Au, and composite Au/CNT. The non-engineered switch consists of a metallic hemispherical bump and a planar sheet as upper and lower contacts, respectively. On the other hand, the engineered switches have 2D pyramid structure in lower contacts while having a hemispherical bump at upper contact. Hemisphere on planar, Au-Au, contact pairs resulted in initial contact resistance (RC) values of ~0.1Ω (FC=200”N) that linearly increased to ~1.0Ω after ~10Ă106 cycles and then failed open (~10.0Ω) at ~20Ă106 switching cycles. The Au-Au/CNT composite, hemisphere on planar contact pair showed similar RC performance with extended reliability (~40Ă106 switching cycles) when the composite film was integrated into the lower planar contacted. Upper hemisphere on the 2D pyramid, Au-Au, contact pairs resulted in initial RC values of ~0.9Ω (FC=200”N) that linearly decreased to ~0.5Ω at \u3e10Ă106 cycles (not failed). This work suggests that the combination of engineered lower contacts and composite materials can significantly improve the performance and reliability of micro-switches
Load Sensor in An Elastomer Suspension Element
Knowledge of the loading applied to railcar suspension elements is necessary for improved rail safety, efficiency, and for monitoring bearing health. An economical, reliable system for keeping track of both dynamic and static loads on a rail car bearing offers potential for many improvements in rail service. The difficulties of implementing such a system are considerable because the sensor must be in the bearing load path and is thus subject to all the stressors of that environment including high impact, high load, high temperature, and corrosion. This thesis describes an attempt to incorporate a load measurement system in a polyurethane suspension element. It reviews existing technology and describes several experiments using strain gauges, Micro-Electro-Mechanical pressure sensors, and piezo electric materials as load measurement devices
Micro-manufacturing : research, technology outcomes and development issues
Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in Micro-manufacturing is also in Non-MEMS-based manufacturing. Research and technological development (RTD) in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid-processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing
Future of smart cardiovascular implants
Cardiovascular disease remains the leading cause of death in Western society. Recent technological advances have opened the opportunity of developing new and innovative smart stent devices that have advanced electrical properties that can improve diagnosis and even treatment of previously intractable conditions, such as central line access failure, atherosclerosis and reporting on vascular grafts for renal dialysis. Here we review the latest advances in the field of cardiovascular medical implants, providing a broad overview of the application of their use in the context of cardiovascular disease rather than an in-depth analysis of the current state of the art. We cover their powering, communication and the challenges faced in their fabrication. We focus specifically on those devices required to maintain vascular access such as ones used to treat arterial disease, a major source of heart attacks and strokes. We look forward to advances in these technologies in the future and their implementation to improve the human condition
Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensor
In this paper, we report real-time measurement results of various contact forces exerted on a new flexible capacitive three-axis tactile sensor array based on polydimethylsiloxane (PDMS). A unit sensor consists of two thick PDMS layers with embedded copper electrodes, a spacer layer, an insulation layer and a bump layer. There are four capacitors in a unit sensor to decompose a contact force into its normal and shear components. They are separated by a wall-type spacer to improve the mechanical response time. Four capacitors are arranged in a square form. The whole sensor is an 8 _ 8 array of unit sensors and each unit sensor responds to forces in all three axes. Measurement results show that the full-scale range of detectable force is around 0â20 mN (250 kPa) for all three axes. The estimated sensitivities of a unit sensor with the current setup are 1.3, 1.2 and 1.2%/mN for the x- , y- and z -axes, respectively. A simple mechanical model has been established to calculate each axial force component from the measured capacitance value. Normal and shear force distribution images are captured from the fabricated sensor using a real-time measurement system. The mechanical response time of a unit sensor has been estimated to be less than 160 ms. The flexibility of the sensor has also been demonstrated by operating the sensor on a curved surface of 4 mm radius of curvature.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/90798/1/0960-1317_21_3_035010.pd
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Experimentation and Multiphysical Modeling of Bioanalytical Microdevices
Bioanalytics involves quantitative measurements of complex biological samples that contain metabolites, DNA, RNA, and proteins. Efficient sample preparation for downstream analysis and sensitive detection of analytes can be achieved via bioanalytical microdevices. Fully realizing the potential of these devices requires tool characterization and bioprocess optimization, in addition to understanding device physics. Therefore, this thesis introduces multiphysical modeling and experimentation of microdevices, with applications to diabetes care and single-cell analysis.
To understand the physics of viscometric glucose microsensors, this thesis presents a model of the sensor, which couples the fluid flow with vibrating diaphragms. The model is used to predict the sensor response to glucose via theory of squeeze-film damping and vibrations of pre-stressed plate. A first-principle-based model resulting from the theory can be evaluated from the device's geometric and material properties, and quantitatively determines the device response to vibrational excitations at varying glucose concentrations.
Next, this thesis introduces a theoretical model for viscometric glucose microsensors that employ harmonic microcantilever oscillation in the sensing liquid. The presented model associates the unsteady Stokes equation with the motion of a bounded viscous liquid to understand the hydrodynamic impact on the cantilever. With a proper consideration of the viscosity and bounded geometry of liquid media, the model relaxes the thin-film assumption required for the diaphragm-based model, enabling an accurate representation of fluid-structure interactions based on fundamental structural vibration and fluid flow equations.
Next, this thesis presents an experimental exploration of a hydrogel-based affinity microsensor for glucose monitoring via dielectric measurements. The microsensor incorporates a synthetic hydrogel that is attached to the device surface via in situ polymerization, which eliminates mechanical moving parts required in the viscometric glucose sensors. Changes in the dielectric properties of the hydrogel when binding reversibly with glucose molecules have been measured using a MEMS capacitive transducer to determine the glucose concentration. Experimental results demonstrate that in a glucose concentration range of 0â500Â mg/dL and with a resolution of 0.35Â mg/dL or better, the microsensor exhibits a repeatable and reversible response, and can potentially be useful for continuous glucose monitoring in diabetes care.
Additionally, this thesis presents a microfluidic preprocessing method that integrates single-cell picking, lysing, reverse transcription and digital polymerase chain reaction to enable the isolation, tracking and gene expression analysis at single-cell level for individual cells. The approach utilizes a photocleavable bead-based microfluidic device to synthesize and deliver stable complementary DNA for downstream gene expression analysis, thereby allowing chip-based integration of multiple reactions and facilitating the minimization of sample loss or contamination.
Finally, this thesis ends with concluding remarks and directions of future work towards continuous glucose monitoring and high-throughput single-cell genetic analysis
Microfluidics for Advanced Drug Delivery Systems.
Considerable efforts have been devoted towards developing effective drug delivery methods. Microfluidic systems, with their capability for precise handling and transport of small liquid quantities, have emerged as a promising platform for designing advanced drug delivery systems. Thus, microfluidic systems have been increasingly used for fabrication of drug carriers or direct drug delivery to a targeted tissue. In this review, the recent advances in these areas are critically reviewed and the shortcomings and opportunities are discussed. In addition, we highlight the efforts towards developing smart drug delivery platforms with integrated sensing and drug delivery components
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