Development of suspended thermoreflectance technique and its application in thermal property measurement of semiconductor materials

Doctor of PhilosophyDepartment of Mechanical and Nuclear EngineeringGurpreet SinghThis dissertation details the development of a new scientific tool for the thermal characterization of freestanding micro/nano-scale materials, with specific application to thin films. The tool consists of a custom-designed and calibrated opto-electric system with superior spatial and temporal resolutions in thermal measurement. The tool, termed as Suspended ThermoReflectance (STR), can successfully perform thermal mappings at the submicron level and is able to produce unconstrained thermal conductivity unlike other optical measurement techniques where independent conductivity measurement is not possible due to their reliance on heat capacity. STR works by changing the temperature of a material and collecting the associated change in light reflection from multiple points on the sample surface. The reflection is a function of the material being tested, the wavelength of the probe light and the composition of the specimen for transparent and quasi-transparent materials. Coupling the change in reflection, along the sample’s length, with the knowledge of heat conduction allows for the determination of the thermal properties of interest. A thermal analytical model is developed and incorporated with optical equations to characterize the conductivity of thin films. The analytical model is compared with a finite element model to check its applicability in the STR experiment and data analysis. Ultimately, thermal conductivity of 2 µm and 3 µm thick Si samples were determined using STR at a temperature range of 20K – 350K and compared to literature as a validation of the technique. The system was automated using a novel LabView-based program. This program allowed the user to control the equipment including electronics, optics and optical cryostat. Moreover, data acquisition and real-time monitoring of the system are also accomplished through this computer application. A description of the development, fabrication and characterization of the freestanding thin films is detailed in this dissertation. For the most part, the thin films were fabricated using standard microfabrication techniques. However, different dry and wet etching techniques were compared for minimum surface roughness to reduce light scattering. The best etching technique was used to trim the Si films for the desired thicknesses. Besides, vapor HF was used to avoid stiction-failure during the release of suspended films

Optical Responses of Localized and Extended Modes in a Mesoporous Layer on Plasmonic Array to Isopropanol Vapor

Mesoporous silica features open and accessible pores that can intake substances from the outside. The combination of mesoporous silica with plasmonic nanostructures represents an interesting platform for an optical sensor based on the dependence of plasmonic modes on the refractive index of the medium in which metallic nanoparticles are embedded. However, so far only a limited number of plasmonic nanostructures are combined with mesoporous silica, including random dispersion of metallic nanoparticles and fl at metallic thin fi lms. In this study, we make a mesoporous silica layer on an aluminum nanocylinder array. Such plasmonic arrangements support both localized surface plasmon resonances (LSPRs) and extended modes which are the result of the hybridization of LSPRs and photonic modes extending into the mesoporous layer. We investigate in situ optical re fl ectance of this system under controlled pressure of isopropanol vapor. Upon exposure, the capillary condensation in the mesopores results in a gradual spectral shift of the re fl ectance. Our analysis demonstrates that such shifts depend largely on the nature of the modes; that is, the extended modes show larger shifts compared to localized ones. Our materials represent a useful platform for the fi eld of environmental sensingEspaña MINECO grant MAT2017-88584-R

Ultrasonic nondestructive materials characterization

A brief review of ultrasonic wave propagation in solid materials is presented with consideration of the altered behavior in anisotropic and nonlinear elastic materials in comparison with isotropic and linear elastic materials. Some experimental results are described in which ultrasonic velocity and attenuation measurements give insight into materials microstructure and associated mechanical properties. Recent developments with laser beam non-contact generation and detection of ultrasound are presented. The results of several years of experimental measurements using high-power ultrasound are discussed, which provide substantial evidence of the inability of presently accepted theories to fully explain the interaction of ultrasound with solid materials. Finally, a special synchrotron X-ray topographic system is described which affords the possibility of observing direct interaction of ultrasonic waves with the microstructural features of real crystalline solid materials for the first time

Fast measurement of diffusing patterns and its parameterization

When light strikes on a diffuser surface a new energy redistribution is created. The diffusion patterns depends on the material of the diffuser and how light reach the diffuser. The aim of this project is to characterize a simple and compact system that allows us to obtain transmission patterns of different diffusers in order to make a mathematical, experimental fitted, model of them. After define, and construct the experimental device a first characterization step is done; this steps covers a geometrical, photo-temporal and photo-spatial characterization of the system; with the experimental device well characterized a set of six different diffusers are analyzed obtaining the equations that describe their diffusion patterns