Advanced interface systems for readout, control, and self-calibration of MEMS resonant gyroscopes

MEMS gyroscopes have become an essential component in consumer, industrial and automotive applications, owing to their small form factor and low production cost. However, their poor stability, also known as drift, has hindered their penetration into high-end tactical and navigation applications, where highly stable bias and scale factor are required over long period of time to avoid significant positioning error. Improving the long-term stability of MEMS gyroscopes has created new challenges in both the physical sensor design and fabrication, as well as the system architecture used for interfacing with the physical sensor. The objective of this research is to develop interface circuits and systems for in-situ control and self-calibration of MEMS resonators and resonant gyroscopes to enhance the stability of bias and scale factor without the need for any mechanical rotary stage, or expensive bulky lab characterization equipment. The self-calibration techniques developed in this work provide 1-2 orders of magnitude improvement in the drift of bias and scale factor of a resonant gyroscope over temperature and time.Ph.D

CMOS systems and circuits for sub-degree per hour MEMS gyroscopes

The objective of our research is to develop system architectures and CMOS circuits that interface with high-Q silicon microgyroscopes to implement navigation-grade angular rate sensors. The MEMS sensor used in this work is an in-plane bulk-micromachined mode-matched tuning fork gyroscope (M² – TFG ), fabricated on silicon-on-insulator substrate. The use of CMOS transimpedance amplifiers (TIA) as front-ends in high-Q MEMS resonant sensors is explored. A T-network TIA is proposed as the front-end for resonant capacitive detection. The T-TIA provides on-chip transimpedance gains of 25MΩ, has a measured capacitive resolution of 0.02aF /√Hz at 15kHz, a dynamic range of 104dB in a bandwidth of 10Hz and consumes 400μW of power. A second contribution is the development of an automated scheme to adaptively bias the mechanical structure, such that the sensor is operated in the mode-matched condition. Mode-matching leverages the inherently high quality factors of the microgyroscope, resulting in significant improvement in the Brownian noise floor, electronic noise, sensitivity and bias drift of the microsensor. We developed a novel architecture that utilizes the often ignored residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching (i.e.0Hz split between the drive and sense mode frequencies), as well as electronically control the sensor bandwidth. A CMOS implementation is developed that allows mode-matching of the drive and sense frequencies of a gyroscope at a fraction of the time taken by current state of-the-art techniques. Further, this mode-matching technique allows for maintaining a controlled separation between the drive and sense resonant frequencies, providing a means of increasing sensor bandwidth and dynamic range. The mode-matching CMOS IC, implemented in a 0.5μm 2P3M process, and control algorithm have been interfaced with a 60μm thick M2−TFG to implement an angular rate sensor with bias drift as low as 0.1°/hr ℃ the lowest recorded to date for a silicon MEMS gyro.Ph.D.Committee Chair: Farrokh Ayazi; Committee Member: Jennifer Michaels; Committee Member: Levent Degertekin; Committee Member: Paul Hasler; Committee Member: W. Marshall Leac

System architecture for mode-matching a MEMS gyroscope

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2009.Includes bibliographical references (p. 127-128).MEMS gyroscopes are used to detect rotation rates and have enabled a variety of motion-based technologies in a range of industries. They are composed of micro-machined polysilicon structures that resonate and deflect when a rotation is experienced. The topic of this thesis surrounds a system architecture to optimize the performance of a gyroscope. The MEMS gyroscope contains a resonator and an accelerometer, modeled as a two degree-of-freedom mass-spring system. When the resonant frequencies of each mode are matched, the mechanical output of the gyroscope is maximal. Feedback is used to match the two modes by automatically tuning the voltage on the poly-silicon structure until the accelerometer resonant frequency matches that of the resonator. A square wave dither signal is introduced as quadrature error and is used to track the phase across the gyroscope's accelerometer. At mode-match, the phase lag is 90°, so the feedback mechanism maintains this 90° of phase lag between the input acceleration and mechanical output to keep the modes matched. Two controllers were tried in the feedback mechanism, a linear controller and a bang-bang controller. The bang-bang controller was found to produce better results, and was able to bring a pre-fabricated sensor die to mode-match and achieve a resolution floor of 12°/hr.by Henry Wu.M.Eng

Characterization, Control and Compensation of MEMS Rate and Rate-Integrating Gyroscopes.

Inertial sensing has important applications in navigation, safety, and entertainment. Areas of active research include improved device structures, control schemes, tuning methods, and detection paradigms. A powerful and flexible characterization and control system built on commercial programmable hardware is especially needed for studying mode-matched gyroscopes and rate-integrated gyroscopes. A gyroscope can be operated in a mode-matched rate-mode for increased sensitivity or rate-integrating mode for greatly increased dynamic range and bandwidth, however control is challenging and the performance is sensitive to the matching of the modes. This thesis proposes a system built on open and inexpensive software-defined radio (SDR) hardware and open source software for gyroscope characterization and control. The characterization system measures ring-down of devices with damping times and automatically tunes the vibration modes from over 40 Hz mismatch to better than 100 mHz in 3 minutes. When used for rate-gyroscope operation the system provides an FPGA implementation of rate gyroscope control with amplitude, rate and quadrature closed-loop control in the SDR hardware which demonstrates 400% improvement in noise and stability over open-loop operation. The system also operates in a RIG mode with hybrid software/firmware control and demonstrates continuous operation for several hours, unlike previous systems which are limited by the gyroscope ring-down time. The hybrid mode also has a simulation module for development of advanced gyroscope control algorithms. Advanced controls proposed for RIG operation show over 1000% improvement in effective frequency and damping mismatch in simulation and 25% reduction in drift due to damping mismatch in a test RIG. By tuning the compensation, the drift can be reduced by almost 90%, with worst case drift decreased to -41 deg/s and RMS drift to -21 deg/s. Harmonic analysis of the anisotropy in a rate-integrating gyroscope measured with this control system is presented to guide development of new error models which will further improve performance.PHDElectrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/96121/1/jagregor_1.pd

System and circuit design for a capacitive MEMS gyroscope

In this thesis, issues related to the design and implementation of a micro-electro-mechanicalangular velocity sensor are studied. The work focuses on a system basedon a vibratory microgyroscope which operates in the low-pass mode with a moderateresonance gain and with an open-loop configuration of the secondary (sense) resonator.Both the primary (drive) and the secondary resonators are assumed to have a high qualityfactor. Furthermore, the gyroscope employs electrostatic excitation and capacitivedetection. The thesis is divided into three parts. The first part provides the background informationnecessary for the other two parts. The basic properties of a vibratory microgyroscope,together with the most fundamental non-idealities, are described, a shortintroduction to various manufacturing technologies is given, and a brief review of publishedmicrogyroscopes and of commercial microgyroscopes is provided. The second part concentrates on selected aspects of the system-level design of amicro-electro-mechanical angular velocity sensor. In this part, a detailed analysis isprovided of issues related to different non-idealities in the synchronous demodulation,the dynamics of the primary resonator excitation, the compensation of the mechanicalquadrature signal, and the zero-rate output. The use of ΣΔ modulation to improveaccuracy in both primary resonator excitation and the compensation of the mechanicalquadrature signal is studied. The third part concentrates on the design and implementation of the integratedelectronics required by the angular velocity sensor. The focus is primarily on the designof the sensor readout circuitry, comprising: a continuous-time front-end performingthe capacitance-to-voltage (C/V) conversion, filtering, and signal level normalization;a bandpass ΣΔ analog-to-digital converter, and the required digital signal processing(DSP). The other fundamental circuit blocks, which are a phase-locked loop requiredfor clock generation, a high-voltage digital-to-analog converter for the compensationof the mechanical quadrature signal, the necessary charge pumps for the generationof high voltages, an analog phase shifter, and the digital-to-analog converter used togenerate the primary resonator excitation signals, together with other DSP blocks, areintroduced on a more general level. Additionally, alternative ways to perform the C/Vconversion, such as continuous-time front ends either with or without the upconversionof the capacitive signal, various switched-capacitor front ends, and electromechanicalΣΔ modulation, are studied. In the experimental work done for the thesis, a prototype of a micro-electro-mechanicalangular velocity sensor is implemented and characterized. The analog partsof the system are implemented with a 0.7-µm high-voltage CMOS (ComplimentaryMetal-Oxide-Semiconductor) technology. The DSP part is realized with a field-programmablegate array (FPGA) chip. The ±100°/s gyroscope achieves 0.042°/s/√H̅z̅spot noise and a signal-to-noise ratio of 51.6 dB over the 40 Hz bandwidth, with a100°/s input signal. The implemented system demonstrates the use of ΣΔ modulation in both the primaryresonator excitation and the quadrature compensation. Additionally, it demonstratesphase error compensation performed using DSP. With phase error compensation,the effect of several phase delays in the analog circuitry can be eliminated, andthe additional noise caused by clock jitter can be considerably reduced

Integrated interface electronics for capacitive MEMS inertial sensors

This thesis is composed of 13 publications and an overview of the research topic, which also summarizes the work. The research presented in this thesis concentrates on integrated circuits for the realization of interface electronics for capacitive MEMS (micro-electro-mechanical system) inertial sensors, i.e. accelerometers and gyroscopes. The research focuses on circuit techniques for capacitive detection and actuation and on high-voltage and clock generation within the sensor interface. Characteristics of capacitive accelerometers and gyroscopes and the electronic circuits for accessing the capacitive information in open- and closed-loop configurations are introduced in the thesis. One part of the experimental work, an accelerometer, is realized as a continuous-time closed-loop sensor, and is capable of achieving sub-micro-g resolution. The interface electronics is implemented in a 0.7-µm high-voltage technology. It consists of a force feedback loop, clock generation circuits, and a digitizer. Another part of the experimental work, an analog 2-axis gyroscope, is optimized not only for noise, but predominantly for low power consumption and a small chip area. The implementation includes a pseudo-continuous-time sense readout, analog continuous-time drive loop, phase-locked loop (PLL) for clock generation, and high-voltage circuits for electrostatic excitation and high-voltage detection. The interface is implemented in a 0.35-µm high-voltage technology within an active area of 2.5 mm². The gyroscope achieves a spot noise of 0.015 °/s/√H̅z̅ for the x-axis and 0.041 °/s/√H̅z̅ for the y-axis. Coherent demodulation and discrete-time signal processing are often an important part of the sensors and also typical examples that require clock signals. Thus, clock generation within the sensor interfaces is also reviewed. The related experimental work includes two integrated charge pump PLLs, which are optimized for compact realization but also considered with regard to their noise performance. Finally, this thesis discusses fully integrated high-voltage generation, which allows a higher electrostatic force and signal current in capacitive sensors. Open- and closed-loop Dickson charge pumps and high-voltage amplifiers have been realized fully on-chip, with the focus being on optimizing the chip area and on generating precise spurious free high-voltage signals up to 27 V

Design and implementation of a control scheme for a MEMS rate integrating gyroscope

PhD ThesisMEMS gyroscopes are found across a large range of applications, from low precision low cost applications through to high budget projects that require almost perfect accuracy. MEMS gyroscopes fall into two categories – ‘rate’ and ‘rate integrating’, with the latter offering superior performance. The key advantage that the rate integrating type possesses is that it directly measures angle, eliminating the need for any integration step. This reduces the potential for errors, particularly at high rates. However, the manufacturing precision required is far tighter than that of the rate gyroscope, and this has thus far limited the development of rate integrating gyroscopes. This thesis proposes a method for reducing the effect of structural imperfections on the performance of a rate integrating gyroscope. By taking a conventional rate gyroscope and adjusting its control scheme to operate in rate integrating mode, the thesis shows that it is possible to artificially eliminate the effect of some structural imperfections on the accuracy of angular measurement through the combined use of electrostatic tuning and capacitive forcing. Further, it demonstrates that it is viable to base the designs for rate integrating gyroscopes on existing rate gyroscope architectures, albeit with some modifications. Initially, the control scheme is derived through the method of multiple scales and its potential efficacy demonstrated through computational modelling using Simulink. The control scheme is then implemented onto an existing rate gyroscope architecture, with a series of tests conducted that benchmark the gyroscope performance in comparison to standard performance measures. Experimental work demonstrates the angle measurement capability of the rate integrating control scheme, with the gyroscope shown to be able to measure angle, although not to the precision necessary for commercial implementation. However, the scheme is shown to be viable with some modifications to the gyroscope architecture, and initial tests on an alternative architecture based on these results are presented.United Technologies and System

Inertial MEMS: readout, test and application

This thesis moves towards the investigation of Micro Electro-Mechanical Systems (MEMS) intertial sensors from different perspectives and points of view: readout, test and application. Chapter 1 deals with the state-of-the-art for the interfaces usually employed for 3- axes micromachined gyroscopes. Several architecture based on multiplexing schemes in order to extremely simplify the analog front-end which can be based on a single charge amplifier are analysed and compared. A novel solution that experiments an innovative readout technique based on a special analog-Code Division Multiplexing Access (CDMA) is presented; this architecture can reach a considerable reduction of the Analog Front-End (AFE) with reference to other multiplexing schemes. Many family codes have been considered in order to find the best trade-off between performance and complexity. System-level simulations prove the effectiveness of this technique in processing all the required signals. A case study is also analysed: a comparison with the SD740 micro-machined integrated inertial module with tri-axial gyroscope by SensorDynamics AG is provided. MEMS accelerometers are widely used in the automotive and aeronautics fields and are becoming extremely popular in a wide range of consumer electronics products. The cost of testing is a major one within the manufacturing process, because MEMS accelerometer characterization requires a series of tests that include physical stimuli. The calibration and the functional testing are the most challenging and a wide selection of Automatic Test Equipments (ATEs) is available on the market for this purpose; those equipments provide a full characterization of the Device Under Test (DUT), from low-g to high-g levels, even over temperature. Chapter 2 presents a novel solution that experiments an innovative procedure to perform a characterization at medium-g levels. The presented approach can be applied to low-cost ATEs obtaining challenging results. The procedure is deeply investigated and an experimental setup is described. A case study is also analysed: some already trimmed Three Degrees of Freedom (3DoF)-Inertial Measurement Unit (IMU) modules (three-axes accelerometer integrated with a mixed signal ASIC), from SensorDynamics AG are tested with the experimental setup and analysed, for the first time, at medium-g levels. Standard preprocessing techniques for removing the ground response from vehicle- mounted Ground Penetrating Radar (GPR) data may fail when used on rough terrain. In Chapter 3, a Laser Imaging Detection and Ranging (LIDAR) system and a Global Positioning System (GPS)/IMU is integrated into a prototype system with the GPR and provided high-resolution measurements of the ground surface. Two modifications to preprocessing were proposed for mitigating the ground bounce based on the available LIDAR data. An experiment is carried out on a set of GPR/LIDAR data collected with the integrated prototype vehicle over lanes with artificially rough terrain, consisting of targets buried under or near mounds, ruts and potholes. A stabilization technique for multi-element vehicle-mounted GPR is also presented

Adaptively controlled MEMS triaxial angular rate sensor

Prohibitive cost and large size of conventional angular rate sensors have limited their use to large scale aeronautical applications. However, the emergence of MEMS technology in the last two decades has enabled angular rate sensors to be fabricated that are orders of magnitude smaller in size and in cost. The reduction in size and cost has subsequently encouraged new applications to emerge, but the accuracy and resolution of MEMS angular rate sensors will have to be greatly improved before they can be successfully utilised for such high end applications as inertial navigation. MEMS angular rate sensors consist of a vibratory structure with two main resonant modes and high Q factors. By means of an external excitation, the device is driven into a constant amplitude sinusoidal vibration in the first mode, normally at resonance. When the device is subject to an angular rate input, Coriolis acceleration causes a transfer of energy between the two modes and results in a sinusoidal motion in the second mode, whose amplitude is a measure of the input angular rate. Ideally the only coupling between the two modes is the Coriolis acceleration, however fabrication imperfections always result in some cross stiffness and cross damping effects between the two modes. Much of the previous research work has focussed on improving the physical structure through advanced fabrication techniques and structural design; however attention has been directed in recent years to the use of control strategies to compensate for these structural imperfections. The performance of the MEMS angular rate sensors is also hindered by the effects of time varying parameter values as well as noise sources such as thermal-mechanical noise and sensing circuitry noise. In this thesis, MEMS angular rate sensing literature is first reviewed to show the evolu- tion of MEMS angular rate sensing from the basic principles of open-loop operation to the use of complex control strategies designed to compensate for any fabrication imperfections and time-varying effects. Building on existing knowledge, a novel adaptively controlled MEMS triaxial angular rate sensor that uses a single vibrating mass is then presented. Ability to sense all three components of the angular rate vector with a single vibrating mass has advantages such as less energy usage, smaller wafer footprint, avoidance of any mechanical interference between multiple resonating masses and removal of the need for precise alignment of three separate devices. The adaptive controller makes real-time estimates of the triaxial angular rates as well as the device cross stiffness and cross damping terms. These estimates are then used to com- pensate for their effects on the vibrating mass, resulting in the mass being controlled to follow a predefined reference model trajectory. The estimates are updated using the error between the reference model trajectory and the mass's real trajectory. The reference model trajectory is designed to provide excitation to the system that is sufficiently rich to enable all parameter estimates to converge to their true values. Avenues for controller simplification and optimisation are investigated through system simulations. The triaxial controller is analysed for stability, averaged convergence rate and resolution. The convergence rate analysis is further utilised to determine the ideal adaptation gains for the system that minimises the unwanted oscillatory behaviour of the parameter estimates. A physical structure for the triaxial device along with the sensing and actuation means is synthesised. The device is realisable using MEMS fabrication techniques due to its planar nature and the use of conventional MEMS sensing and actuation elements. Independent actuation and sensing is achieved using a novel checkerboard electrode arrangement. The physical structure is refined using a design automation process which utilises finite element analysis (FEA) and design optimisation tools that adjust the design variables until suitable design requirements are met. Finally, processing steps are outlined for the fabrication of the device using a modified, commercially available polysilicon MEMS process

Enhancements of MEMS design flow for Automotive and Optoelectronic applications

In the latest years we have been witnesses of a very rapidly and amazing grown of MicroElectroMechanical systems (MEMS) which nowadays represent the outstanding state-of-the art in a wide variety of applications from automotive to commercial, biomedical and optical (MicroOptoElectroMechanicalSystems). The increasing success of MEMS is found in their high miniaturization capability, thus allowing an easy integration with electronic circuits, their low manufacturing costs (that comes directly from low unit pricing and indirectly from cutting service and maintaining costs) and low power consumption. With the always growing interest around MEMS devices the necessity arises for MEMS designers to define a MEMS design flow. Indeed it is widely accepted that in any complex engineering design process, a well defined and documented design flow or procedure is vital. The top-level goal of a MEMS/MOEMS design flow is to enable complex engineering design in the shortest time and with the lowest number of fabrication iterations, preferably only one. These two characteristics are the measures of a good flow, because they translate directly to the industry-desirable reductions of the metrics “time to market” and “costs”. Like most engineering flows, the MEMS design flow begins with the product definition that generally involves a feasibility study and the elaboration of the device specifications. Once the MEMS specifications are set, a Finite Element Method (FEM) model is developed in order to study its physical behaviour and to extract the characteristic device parameters. These latter are used to develop a high level MEMS model which is necessary to the design of the sensor read out electronics. Once the MEMS geometry is completely defined and matches the device specifications, the device layout must be generated, and finally the MEMS sensor is fabricated. In order to have a MEMS sensor working according to specifications at first production run is essential that the MEMS design flow is as close as possible to the optimum design flow. The key factors in the MEMS design flow are the development of a sensor model as close as possible to the real device and the layout realization. This research work addresses these two aspects by developing optimized custom tools (a tool for layout check (LVS) and a tool for parasitic capacitances extraction) and new methodologies (a methodology for post layout simulations) which support the designer during the crucial steps of the design process as well as by presenting the models of two cases studies belonging to leading MEMS applications (a micromirror for laser projection system and a control loop for the shock immunity enhancement in gyroscopes for automotive applications)