3 research outputs found

    Automation and Integration in Semiconductor Manufacturing

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    Comparing Transport Policies in a Full-scale 300mm Wafer Manufacturing Facility

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    Research in semiconductor manufacturing ideally wants to determine the ā€œbestā€ transport policy to ensure continuous production. Determining such a policy is difficult because it depends on many factors such as the layout, the product types, the equipment, etc. Most of the transport policies found in the literature combine dispatching policies (scheduling of transport requests) and routing policies (selection of the path to move from one point to another). This paper investigates a policy called minimum service which consists in keeping a minimum number of available vehicles in bays, so that they can quickly answer transport requests and empty travel times can be minimized. This paper aims at comparing, through experimental tests on actual instances of a real semiconductor manufacturing facility, two types of transport policies in terms of cycle time, throughput and Carrier Exchange Time. Moreover, the behavior of the ā€œminimum serviceā€ policy is studied when the number of vehicles and the number of starting lots are varied. The results show that the ā€œminimum serviceā€ policy is in general more effective than a classical policy, but that its key parameters must carefully be determined

    Lot Dispatching and Scheduling Integrating OHT Traffic Information in the 300mm Wafer Fab

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