FABRICATION OF MAGNETIC TWO-DIMENSIONAL AND THREE-DIMENSIONAL MICROSTRUCTURES FOR MICROFLUIDICS AND MICROROBOTICS APPLICATIONS

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods can only fabricate flat, layered geometries; the few that can fabricate real 3D microstructures are not cost efficient and cannot realize mass production. This dissertation explores two solutions to these microfabrication problems: first, a method for integrating magnetically responsive regions into microstructures using photolithography, and second, a method for creating three-dimensional freestanding microstructures using a modified micromolding technique. The first method is a facile method of producing inexpensive freestanding photopatternable polymer micromagnets composed NdFeB microparticles dispersed in SU-8 photoresist. The microfabrication process is capable of fabricating polymer micromagnets with 3 µm feature resolution and greater than 10:1 aspect ratio. This method was used to demonstrate the creation of freestanding microrobots with an encapsulated magnetic core. A magnetic control system was developed and the magnetic microrobots were moved along a desired path at an average speed of 1.7 mm/s in a fluid environment under the presence of external magnetic field. A microfabrication process using aligned mask micromolding and soft lithography was also developed for creating freestanding microstructures with true 3D geometry. Characterization of this method and resolution limits were demonstrated. The combination of these two microfabrication methods has great potential for integrating several material types into one microstructure for a variety of applications

Towards green 3D-microfabrication of Bio-MEMS devices using ADEX dry film photoresists

Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully replace conventional silicon-technologies being associated with high-energy demands and the intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFPs outperform conventional spin-on photoresists, such as SU-8, especially when three-dimensional architectures are required for micro-analytical devices (e.g. microfluidics). In this study, we utilize the commercial epoxy-based DFP ADEX to demonstrate various application scenarios ranging from the direct modification of microcantilever beams via the assembly of microfluidic channels to lamination-free patterning of DFPs, which employs the DFP directly as a substrate material. Finally, kinked, bottom-up grown silicon nanowires were integrated in this manner as prospective ion-sensitive field-effect transistors in a bio-probe architecture directly on ADEX substrates. Hence, we have developed the required set of microfabrication protocols for such an assembly comprising metal thin film deposition, direct burn-in of lithography alignment markers, and polymer patterning on top of the DFP

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully replace conventional silicon-technologies being associated with high-energy demands and the intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFPs outperform conventional spin-on photoresists, such as SU-8, especially when three-dimensional architectures are required for micro-analytical devices (e.g. microfluidics). In this study, we utilize the commercial epoxy-based DFP ADEX to demonstrate various application scenarios ranging from the direct modification of microcantilever beams via the assembly of microfluidic channels to lamination-free patterning of DFPs, which employs the DFP directly as a substrate material. Finally, kinked, bottom-up grown silicon nanowires were integrated in this manner as prospective ion-sensitive field-effect transistors in a bio-probe architecture directly on ADEX substrates. Hence, we have developed the required set of microfabrication protocols for such an assembly comprising metal thin film deposition, direct burn-in of lithography alignment markers, and polymer patterning on top of the DFP

Graphene-based flexible sensors towards electronic wearables

Flexible electronics and wearable devices have attracted considerable attention because they produce mechanical liberty, in terms of flexibility and stretchability that can enable the possibility of a wide range of new applications. The term “wearable electronics” can be used to define devices that can be worn or mated with the sensed surface to continuously monitor signals without limitations on mechanical deformability of the devices and electronic performance of the functional materials. The use of polymeric substrates or other nonconventional substrates as base materials brings novel functionalities to sensors and other electronic devices in terms of being flexible and light weight. Conductive nanomaterials, such as carbon nanotubes and graphene have been utilized as functional materials for flexible electronics and wearable devices. Graphene has specifically been considered for producing next-generation sensors due to its impressive electrical and mechanical properties and a result, incorporation of flexible substrates and graphene-based nanomaterials has been widely utilized to form versatile flexible sensors and other wearable devices through use of different fabrication processes. Creation of a large-scale, simple, high-resolution and cost-effective technique that overcomes fabrication limitations and supports production of flexible graphene-based sensors with high flexibility and stretch ability is highly demanding. Soft lithography can be merged with a mechanical exfoliation process using adhesive tape followed by transfer printing to form a graphene sensor on a desired final substrate. In situ microfluidic casting of graphene into channels is another promising platform driving the rapid development of flexible graphene sensors and wearable devices with a wide dynamic detection range. Selective coating of graphene-based nanomaterials (e.g. graphene oxide (GO)) on flexible electrode tapes can, because of its flexibility and adhesive features, be used to track relative humidity (RH) variations at the surface of target surfaces. This thesis describes the design and development of flexible and wearable strain, pressure and humidity sensors based on a novel tape-based cost-effective patterning and transferring technique, an in situ microfluidic casting method, and a novel selective coating technique for graphene-based nanomaterials. First of all, we present a tape-based graphene patterning and transferring approach to production of graphene sensors on elastomeric substrates and adhesive tapes. The method utilizes the work of adhesion at the interface between two contacting materials as determined by their surface energies to pattern graphene on PDMS substrate and transfer it onto a target tape. We have achieved patterning and transferring method with the features of high pattern spatial resolution, thickness control, and process simplicity with respect to functional materials and pattern geometries. We have demonstrated the usage of flexible graphene sensors on tape to realize interaction with structures, humans, and plants for real-time monitoring of important signals. Secondly, we present a helical spring-like piezo resistive graphene sensor formed within a microfluidic channel using a unique and easy in situ microfluidic casting method. Because of its helical shape, the sensor exhibits a wide dynamic detection range as well as mechanical flexibility and stretch ability. Finally, we present a flexible GO-based RH sensor on an adhesive polyimide thin film realized by selectively coating and patterning GO at the surface of Au Interdigitated electrodes (IDEs) and subsequently peeling the device from a temporary PDMS film. Real-time monitoring of the water movement inside the plant has been demonstrated by installing GO-based RH sensor at the surfaces of different plant leaves

A mechanically-guided approach to three-dimensional functional mesostructures towards unconventional applications

Controlled formation of three-dimensional functional mesostructures (3DFMs) has broad engineering implications in biomedical devices, microelectromechanical systems (MEMS), optics, and energy storage. Most existing 3D techniques, however, not only lack compatibility with essential electronic materials (silicon, metals, ceramics) that exist in solid-state or crystalline forms, but also produce in a slow and inefficient manner. This is in stark contrast to the planar technologies widely adopted by the modern semiconductor industry. I propose to solve these challenges by a novel 3D assembly strategy based on the planar technologies, which involves precisely controlled 2D-to-3D transformations via the substrate-induced mechanical buckling. This lithography-based, mechanically-guided 3D approach is compatible with virtually any engineering thin films including semiconductors, metals, and polymers, applies to a wide range of length scales and geometries and produces in a high throughput. In this dissertation, I present strategies that combine fabrications and mechanics to achieve a set of complex 3D geometries. I also study the potentials of the 3DFMs in micro-robotics. I further demonstrate the unique applications in energy harvesting, bio-integrated systems, and nanoscale sensing. The results may enlighten the development of advanced, multi-functional 3D electronic micro-systems inaccessible to other 3D techniques

Mechanics and applications of stretchable serpentine structures

Stretchable structures have been developed for various applications, including expandable coronary stents, deployable sensor networks and stretchable bio-mimetic and bio-integrated electronics. High-performance, stretchable electronics have to utilize high-quality and long-lasting inorganic electronic materials such as silicon, oxide dielectrics and metals, which are intrinsically stiff and often brittle. It is therefore an interdisciplinary challenge to make inorganic electronics stretchable while retaining their electronic functionality. Patterning stiff materials into serpentine-shaped wavy ribbons has become a popular strategy for fabricating stretchable inorganic electronics. However due to a lack of mechanics understanding, design of serpentine structures is still largely empirical, whether for freestanding or substrate supported serpentines. This dissertation systematically investigates the mechanics of serpentine structures with emphasis on the effects of serpentine geometry and substrate stiffness, which involves theoretical analysis, numerical simulation, and experimental validation. Our theory has successfully predicted the stretchability and stiffness of various serpentine shapes and has been applied to the optimization of serpentine designs under practical constraints. We are also the first to point out that not all geometric effects are monotonic and serpentines are not always more stretchable than linear ribbons. To manufacture high quality serpentine ribbons with high throughput and low cost, we have invented a “cut-and-paste” method to fabricate both metallic and ceramic serpentines. As a demonstration of our method, a noninvasive, tattoo-like multifunctional epidermal sensor system has been built for the measurement of electrophysiological signals, skin temperature, skin hydration, and respiratory rate. Engineering of epidermal stretchable antenna for wireless communication is also detailed and rationalized.Mechanical Engineerin

The Development Of Mems-Based Implantable Oxygen Sensing Systems

Oxygen-based cues are direct assessments for a wide range of in vivo biological effects, ranging from mitochondrial disease to tissue engineering/regenerative medicine. Existing electrochemical oxygen sensors are permanent systems applicable to short-term intraoperative use; devices are extracted before wound closure. Development of biocompatible oxygen sensors for long-term, post-surgery monitoring are therefore, desirable for clinical trials where objective oxygen measures are lacking. A biodegradable oxygen sensor that can break down into non-toxic components after a targeted lifespan, reducing the risk of chronic inflammatory response frequently observed with permanent devices, is another promising approach to advance the postoperative monitoring of oxygen tension and provide an additional means to monitor a number of diseases and injuries that are transient in nature, such as bone fracture, traumatic brain injury and wound healing. In this dissertation, we improved the current oxygen sensing technology to the point that it could be used for long-term applications, and further developed a biodegradable oxygen sensor along with a transient energy source to support the design of completely biodegradable oxygen sensing systems. Specifically, a biocompatible oxygen sensor, integrated with a customized circuit and an off-the-shelf battery were designed, built and tested. Oxygen levels in mouse gluteus muscle and zebrafish trunk muscle were both investigated to examine the sensor’s ability to monitor dynamic oxygen tension in vivo. In addition, a biodegradable battery featuring long shelf life and stable performance in the presence of changing body conditions was designed, fabricated and examined in vitro. Finally, a completely biodegradable oxygen sensor featuring a Mg-Mo galvanic pair was demonstrated. This approach measures physiological oxygen tension in a transient, harmless manner in the body, while simultaneously acting as a potential energy source for additional devices. Additionally, such sensors may have application in transient monitoring of the environment, such as environmental spills and algal tides