Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism

This paper presents a 3-DOF (Degree of freedom) stage with T-shape flexible hinge mechanism for the applications in the precision measurement equipments and micro/nano manipulation systems. The stage is driven by three piezoelectric actuators (PEAs) and guided by a flexible hinge based mechanism with three symmetric T-shape hinges. The proposed T-shape flexible hinge mechanism can provide excellent planar motion capability with high stability, and thus guarantee the outstanding dynamics characteristics. The theoretical modeling of the stage was carried out and the stiffness and the dynamic resonance frequency have been obtained. The kinematic model of the 3-DOF stage was established and the workspace has been analyzed. The characteristics of the stage were investigated using finite element analysis (FEA). Experiments were conducted to examine the performance of the stage, through this stage, X-axis translational motion stroke of 6.9 µm, Y-axis translational motion stroke of 8.5 µm and rotational motion stroke along Z-axis of 289 µrad can be achieved. A hybrid feedforward/feedback control methodology has been proposed to eliminate the nonlinear hysteresis, the trajectory tracking performances and to reduce external disturbance of the 3-DOF stage

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

A 3-DOF (X–Y–θZ) planar flexure-based mechanism is designed and monolithically manufactured using Wire Electro-Discharge Machining (WEDM) technology. The compact flexure-based mechanism is directly driven by three piezoelectric actuators (PZTs) through decoupling mechanisms. The orthogonal configuration in the x and y directions can guarantee the decoupling translational motion in these axes. The rotational motion and translational displacement in the x direction can be decoupled by controlling the piezoelectric actuators in the x axis with the same displacement values in same and opposite motion directions, respectively. The static and dynamic models of the developed flexure-based mechanism have been developed based on the pseudo-rigid-body model methodology. The mechanical design optimization is conducted to improve the static and dynamic characteristics of the flexure-based mechanism. Finite Element Analyses (FEA) are also carried out to verify the established models and optimization results. A novel hybrid feedforward/feedback controller has been provided to eliminate/reduce the nonlinear hysteresis and external disturbance of the flexure-based mechanism. Experimental testing has been performed to examine the dynamic performance of the developed flexure-based mechanism

Design, modelling and characterization of a 2-DOF precision positioning platform

This paper presents the mechanical design, parameter optimization and experimental tests of a 2-degree-of-freedom (DOF) flexure-based precision positioning platform, which has great potential application in many scientific and engineering fields. During the mechanical design, the leaf parallelogram structures provide the functions of joint mechanisms and transmission mechanisms with excellent decoupling properties. The dynamic model of the developed positioning platform is established and analysed using pseudo rigid body model methodology. A particle swarm algorithm optimization approach is utilized to perform the parameter optimization and thus improve the static and dynamic characteristics of the positioning platform. The prototype of the developed 2-DOF positioning platform has been fabricated using a wire electric discharge machining technique. A number of experimental tests have been conducted to investigate the performance of the platform and verify the established models and optimization methodologies. The experimental results show that the platform has a workspace range in excess of 8.0×8.0 μm with a stiffness of 4.97 N/µm and first-order natural frequency of 231 Hz. The cross-axis coupling ratio is less than 0.6%, verifying the excellent decoupling performance

Parallel Manipulators

In recent years, parallel kinematics mechanisms have attracted a lot of attention from the academic and industrial communities due to potential applications not only as robot manipulators but also as machine tools. Generally, the criteria used to compare the performance of traditional serial robots and parallel robots are the workspace, the ratio between the payload and the robot mass, accuracy, and dynamic behaviour. In addition to the reduced coupling effect between joints, parallel robots bring the benefits of much higher payload-robot mass ratios, superior accuracy and greater stiffness; qualities which lead to better dynamic performance. The main drawback with parallel robots is the relatively small workspace. A great deal of research on parallel robots has been carried out worldwide, and a large number of parallel mechanism systems have been built for various applications, such as remote handling, machine tools, medical robots, simulators, micro-robots, and humanoid robots. This book opens a window to exceptional research and development work on parallel mechanisms contributed by authors from around the world. Through this window the reader can get a good view of current parallel robot research and applications

A 2 degree-of-freedom SOI-MEMS translation stage with closed loop positioning

This research contains the design, analysis, fabrication, and characterization of a closed loop XY micro positioning stage. The XY micro positioning stage is developed by adapting parallel-kinematic mechanisms, which have been widely used for macro and meso scale positioning systems, to silicon-based micropositioner. Two orthogonal electrostatic comb drives are connected to moving table through 4-bar mechanism and independent hinges which restrict unwanted rotation in 2-degree-of-freedom translational stage. The XY micro positioning stage is fabricated on SOI wafer with three photolithography patterning processes followed by series of DRIE etching and HF etching to remove buried oxide layer to release the end-effector of the device. The fabricated XY micro positioning stage is shown in Fig1 with SEM images. The device provides a motion range of 20 microns in each direction at the driving voltage of 100V. The resonant frequency of the XY stage under ambient conditions is 811 Hz with a high quality factor of 40 achieved from parallel kinematics. The positioning loop is closed using a COTS capacitance-to-voltage conversion IC and a PID controller built in D-space is used to control position with an uncertainty characterized by a standard distribution of 5.24nm and a approximate closed-loop bandwidth of 27Hz. With the positioning loop, the rise time and settling time for closed-loop system are 50ms and 100ms. With sinusoidal input of ω=1Hz, the maximum phase difference of 108nm from reference input is obtained with total motion range of 8μm

A simple and visually orientated approach for type synthesis of overconstrained 1T2R parallel mechanisms

This paper presents a simple and highly visual approach for the type synthesis of a family of overconstrained parallel mechanisms that have one translational and two rotational movement capabilities. It considers, especially, mechanisms offering the accuracy and dynamic response needed for machining applications. This family features a spatial limb plus a member of a class of planar symmetrical linkages, the latter connected by a revolute joint either to the machine frame at its base link or to the platform at its output link. Criteria for selecting suitable structures from among numerous candidates are proposed by considering the realistic practical requirements for reconfigurability, movement capability, rational component design and so on. It concludes that a few can simultaneously fulfil the proposed criteria, even though a variety of structures have been presented in the literature. Exploitation of the proposed structures and evaluation criteria then leads to a novel five degrees of freedom hybrid module named TriMule. A significant potential advantage of the TriMule over the Tricept arises because all the joints connecting the base link and the machine frame can be integrated into one single, compact part, leading to a lightweight, cost effective and flexible design particularly suitable for configuring various robotized manufacturing cells

PKM mechatronic clamping adaptive device

This study proposes a novel adaptive fixturing device based on active clamping systems for smart micropositioning of thin-walled precision parts. The modular architecture and the structure flexibility make the system suitable for various industrial applications. The proposed device is realized as a Parallel Kinematic Machine (PKM), opportunely sensorized and controlled, able to perform automatic error-free workpiece clamping procedures, drastically reducing the overall fixturing set-up time. The paper describes the kinematics and dynamics of this mechatronic system. A first campaign of experimental trails has been carried out on the prototype, obtaining promising results

Design and computational optimization of a flexure-based XY nano-positioning stage

This thesis presents the design and computational optimization of a two-axis nano-positioning stage. The devised stage relies on double parallelogram flexure bearings with under-constraint eliminating linkages to enable motion in the primary degrees-of-freedom. The structural parameters of the underlying flexures were optimized to provide a large-range and high bandwidth with sub-micron resolution while maintaining a compact size. A finite element model was created to establish a functional relationship between the geometry of the flexure elements and the stiffness behavior. Then, a neural network was trained from the simulation results to explore the design space with a low computational expense. The neural net was integrated with a genetic algorithm to optimize the design of the flexures for compactness and dynamic performance. The optimal solutions resulted in a reduction of stage footprint by 14% and an increase in the first natural frequency by 75% relative to a baseline design, all while preserving the same 50mm range in each axis with a factor of safety of 2. This confirms the efficacy of the proposed approach in improving stage performance through an optimization of its constituent flexures.Mechanical Engineerin

Experiment design in compliant mechanisms and kinematic identification of parallel mechanisms

This article discusses a procedure for force-displacement modeling compliant mechanisms by using a design of computer experiments methodology -- This approach produces a force-displacement meta-model that is suited for real-time control of compliant mechanisms -- The term meta-model is used to represent a simplified and efficient mathematical model of unknown phenomena -- The meta-modeling of compliant mechanisms is performed from virtual experiments based on factorial- and space-filling design of experiments -- The procedure is used to model the quasi-static behavior of the HexFlex compliant mechanism -- The HexFlex is a parallel compliant mechanism for nano-manipulation that allows six degrees of freedom of its moving stage -- The meta-model of the HexFlex is calculated from experiments with the Finite Element Method (FEM) -- The obtained meta-model for the HexFlex is linear for the range of movement of the mechanism -- The accuracy of the meta-model was calculated conducting a set of computer experiments with random uniform distribution of the input forces -- Three criteria were calculated in each displacement direction (x, y, z, θx, θy, θz) comparing the meta-model prediction with respect to the results of the virtual experiments: 1. maximum of the absolute value of the error, 2. relative error, and 3. root mean square error -- The maximum errors were founded adequate with respect to demanding manufacturing tolerances (absolute errors) and lower than errors reported by other authors (relative errors