Lateral shearing interferometry for high-NA EUV wavefront metrology

We present a lateral shearing interferometer suitable for high-NA EUV wavefront metrology. In this interferometer, a geometric model is used to accurately characterize and predict systematic errors that come from performing interferometry at high NA. This interferometer is compatible with various optical geometries, including systems where the image plane is tilted with respect to the optical axis, as in the Berkeley MET5. Simulation results show that the systematic errors in tilted geometries can be reduced by aligning the shearing interferometer grating and detector parallel to the image plane. Subsequent residual errors can be removed by linear fitting

Test of Local Scale Invariance from the direct measurement of the response function in the Ising model quenched to and to below TCT_C

In order to check on a recent suggestion that local scale invariance [M.Henkel et al. Phys.Rev.Lett. {\bf 87}, 265701 (2001)] might hold when the dynamics is of Gaussian nature, we have carried out the measurement of the response function in the kinetic Ising model with Glauber dynamics quenched to $T_C$ in $d=4$, where Gaussian behavior is expected to apply, and in the two other cases of the $d=2$ model quenched to $T_C$ and to below $T_C$, where instead deviations from Gaussian behavior are expected to appear. We find that in the $d=4$ case there is an excellent agreement between the numerical data, the local scale invariance prediction and the analytical Gaussian approximation. No logarithmic corrections are numerically detected. Conversely, in the $d=2$ cases, both in the quench to $T_C$ and to below $T_C$, sizable deviations of the local scale invariance behavior from the numerical data are observed. These results do support the idea that local scale invariance might miss to capture the non Gaussian features of the dynamics. The considerable precision needed for the comparison has been achieved through the use of a fast new algorithm for the measurement of the response function without applying the external field. From these high quality data we obtain $a=0.27 \pm 0.002$ for the scaling exponent of the response function in the $d=2$ Ising model quenched to below $T_C$, in agreement with previous results.Comment: 24 pages, 6 figures. Resubmitted version with improved discussions and figure