Doctor of Philosophy

dissertationOptics is an old topic in physical science and engineering. Historically, bulky materials and components were dominantly used to manipulate light. A new hope arrived when Maxwell unveiled the essence of electromagnetic waves in a micro perspective. On the other side, our world recently embraced a revolutionary technology, metasurface, which modifies the properties of matter-interfaces in subwavelength scale. To complete this story, diffractive optic fills right in the gap. It enables ultrathin flat devices without invoking the concept of nanostructured metasurfaces when only scalar diffraction comes into play. This dissertation contributes to developing a new type of digital diffractive optic, called a polychromat. It consists of uniform pixels and multilevel profile in micrometer scale. Essentially, it modulates the phase of a wavefront to generate certain spatial and spectral responses. Firstly, a complete numerical model based on scalar diffraction theory was developed. In order to functionalize the optic, a nonlinear algorithm was then successfully implemented to optimize its topography. The optic can be patterned in transparent dielectric thin film by single-step grayscale lithography and it is replicable for mass production. The microstructures are 3?m wide and no more than 3?m thick, thus do not require slow and expensive nanopatterning techniques, as opposed to metasurfaces. Polychromat is also less demanding in terms of fabrication and scalability. The next theme is focused on demonstrating unprecedented performances of the diffractive optic when applied to address critical issues in modern society. Photovoltaic efficiency can be significantly enhanced using this optic to split and concentrate the solar spectrum. Focusing through a lens is no news, but we transformed our optic into a flat lens that corrects broadband chromatic aberrations. It can also serve as a phase mask for microlithography on oblique and multiplane surfaces. By introducing the powerful tool of computation, we devised two imaging prototypes, replacing the conventional Bayer filter with the diffractive optic. One system increases light sensitivity by 3 times compared to commercial color sensors. The other one renders the monochrome sensor a new function of high-resolution multispectral video-imaging

Optical MEMS

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

Silicon is an excellent material for microelectronics and integrated photonics1–3 with untapped potential for mid-IR optics4. Despite broad recognition of the importance of the third dimension5,6, current lithography methods do not allow fabrication of photonic devices and functional microelements directly inside silicon chips. Even relatively simple curved geometries cannot be realised with techniques like reactive ion etching. Embedded optical elements, like in glass7, electronic devices, and better electronic-photonic integration are lacking8. Here, we demonstrate laser-based fabrication of complex 3D structures deep inside silicon using 1 µm-sized dots and rod-like structures of adjustable length as basic building blocks. The laser-modified Si has a different optical index than unmodified parts, which enables numerous photonic devices. Optionally, these parts are chemically etched to produce desired 3D shapes. We exemplify a plethora of subsurface, i.e., “in-chip” microstructures for microfluidic cooling of chips, vias, MEMS, photovoltaic applications and photonic devices that match or surpass the corresponding state-of-the-art device performances

Polymer based microfabrication and its applications in optical MEMS and bioMEMS

Due to its ease of fabrication, low cost and great variety of functionalities, polymer has become an important material in microfabrication. MEMS devices with polymer as the structure material have found applications in various fields, especially in BioMEMS and optical MEMS. In this dissertation, three polymer based microfabricated devices/components have been developed and tested. Various polymer based fabrication techniques, such as high aspect ratio SU-8 photolithography, three dimensional polydimethylsiloxane (PDMS) soft lithography, multi-layer soft lithography and PDMS double casting technique have been developed/studied and employed in the device fabrication process. The main contribution of this dissertation includes: (1) Developed two novel methods for the fabrication of out-of-plane microlens. The PDMS and UV curable polymer (NOA73) replication technique made possible the fast replication of out-of-plane microlens and broaden the lens material selection. The in-situ pneumatical microlens fabrication technique, on the other hand, provides feasible method to integrate out-of-plane microlens into microfluidic chips requiring minimal design footprint and fabrication complexity. (2) Design, fabrication and test of a microchip flow cytometer with 3-D hydrofocusing chamber and integrated out-of-plane microlens as on-chip optical detection component. The developed micro flow cytometer offers 3-D hydrofocusing like conventional cytometer cuvette, and has on-chip microlens for optical signal collection to improve the detection efficiency. With the latest design improvement, the hydrofocusing chamber can focus the sample stream down to less than 10 m in diameter in both vertical and horizontal directions. (3) Development of a PDMS microchip based platform for multiplex immunoassay applications. Integrated micro valves were employed for manipulation of fluidic reagents in the microchannel network. PDMS surface was used as the solid phase substrate for immuno-reactions. Preliminary results showed that, even with low cost polyclonal goat anti-mouse IgG as the reporter antibody, the detection limit of goat mouse IgG can reach as low as 5 ng/mL (about 33 pM). With the continuous advance in microfabrcation technique and polymer science, polymer based microfabrication and polymer MEMS devices will keep to evolve. In the future, more work needs to be done in this field with great potential and endless innovations

Atomic-Scale Insights into Light Emitting Diode

In solid-state lightning, GaN-based vertical LED technology has attracted tremendous attention because its luminous efficacy has surpassed the traditional lightning technologies, even the 2014 Nobel Prize in Physics was awarded for the invention of efficient blue LEDs, which enabled eco-friendly and energy-saving white lighting sources. Despite today’s GaN-based blue VLEDs can produce IQE of 90% and EQE of 70-80%, still there exist a major challenge of efficiency droop. Nonetheless, state-of-the-art material characterization and failure analysis tools are inevitable to address that issue. In this context, although LEDs have been characterized by different microscopy techniques, they are still limited to either its semiconductor or active layer, which mainly contributes towards the IQE. This is also one of the reason that today’s LEDs IQE exceeded above 80% but EQE of 70-80% remains. Therefore, to scrutinize the efficiency droop issue, this work focused on developing a novel strategy to investigate key layers of the LED structure, which play the critical role in enhancing the EQE = IQE x LEE factors. Based on that strategy, wafer bonding, reflection, GaN-Ag interface, MQWs and top-textured layers have been systematically investigated under the powerful advanced microscopy techniques of SEM-based TKD/EDX/EBSD, AC-STEM, AFM, Raman spectroscopy, XRD, and PL. Further, based on these correlative microscopy results, optimization suggestions are given for performance enhancement in the LEDs. The objective of this doctoral research is to perform atomic-scale characterization on the VLED layers/interfaces to scrutinize their surface topography, grain morphology, chemical composition, interfacial diffusion, atomic structure and carrier localization mechanism in quest of efficiency droop and reliability issues. The outcome of this research advances in understanding LED device physics, which will facilitate standardization in its design for better smart optoelectronics products

Mechanical BioMEMS Technologies for Advanced Label-free Sensing of Biomolecular Species in Microfluidic Channels

The aim of this PhD project is to investigate alternative sensing methodologies that can possibly improve the sensing performances of lab–on–chip (LOC) designed for biochemical applications. Suspended microchannel resonator (SMR) for bio–mechanical sensing applications have become very popular as detection of weigths of chemicals integrated in LOC. They exploit laser doppler vibrometry (LDV) for dynamic mode detection. In this thesis two different SMRs designs have been investigated, involving either technological challenges – the use of polymers as material and processing techniques based on laser micromachining – and different sensing phenomena – the use of the parametric resonance rather than the standard harmonic resonance response. The flexibility of two–photon direct laser writing is exploited to optimize a highly– versatile fabrication strategy based on a shell–writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for LOCs. With respect to standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step, by virtue of its intrinsically three– dimensional nature. A SMR fixed-fixed beam has been fabricated and characterized by LDV. A different sensing mechanism based on the parametric resonance instead of the harmonic resonance has been investigated to develop a novel platform for the characterization of biomolecules in free–flow with unique specificity, sensitivity, and speed: to this purpose a PDMS based device was realized by laser machining, a rapid prototype fabrication technique; beside to it, a commercial fused silica capillary tubing was also employed in the realization of a prototype for this sensing mechanism, and both solutions were tested through LDV

Defining cellular microenvironments using multiphoton lithography

textTo understand the chemistry of life processes in detail is largely a challenge of resolving them in their native, cellular environment. Cell culture, first developed a century ago, has proven to be an essential tool for reductionist studies of cellular biochemistry and development. However, for the technology of cell culture to move forward and address increasingly complex problems, in vitro environments must be refined to better reflect the cellular environment in vivo. This dissertation work has focused on the development of methods to define cellular microenvironments using the high resolution, 3D capabilities of multiphoton lithography. Here, site-specific photochemistry using multiphoton excitation is applied to the photocrosslinking of proteins, providing the means to organize bioactive species into well-defined 3D microenvironments. Further, conditions have been identified that enable microfabrication to be performed in the presence of cells -- allowing cell outgrowth and motility to be directed in real time. In addition to the intrinsic chemical functionality of microfabricated protein structures, 3D protein matrices are shown to respond mechanically to changes in the chemical environment, enabling new avenues for micro-scale actuation to be explored. Complex 2D and 3D protein photocrosslinking is further facilitated by integrating transparency and automated reflectance photomasks into the fabrication system. These advances could be transformative in efforts to fabricate precise cellular scaffolding that replicates the morphological (and potentially biochemical) features of in vivo tissue microenvironments. Finally, these methods are applied to the study of microorganism behavior with single-cell resolution. Microarchitectures are designed that allow the position and motion of motile bacterial to generate directional microfluidic flow -- providing a foundation to develop micro-scale devices powered by cells.Chemistry and BiochemistryBiochemistr

Integrated polymer photonics : fabrication, design, characterization and applications

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Doctor of Philosophy

dissertationDiffractive optics, an important part of modern optics, involves the control of optical fields by thin microstructured elements via diffraction and interference. Although the basic theoretical understanding of diffractive optics has been known for a long time, many of its applications have not yet been explored. As a result, the field of diffractive optics is old and young at the same time. The interest in diffractive optics originates from the fact that diffractive optical elements are flat and lightweight. This makes their applications into compact optical systems more feasible compared to bulky refractive optics. Although these elements demonstrate excellent diffraction efficiency for monochromatic light, they fail to generate complex intensity profiles under broadband illumination. This is due to the fact that the degrees-of-freedom in these elements are insufficient to overcome their strong chromatic aberration. As a result, despite their so many advantages over refractive optics, their applications are somewhat limited in broadband systems. In this dissertation, a recently developed diffractive optical element, called a polychromat, is demonstrated for several broadband applications. The polychromat is comprised of linear "grooves" or square "pixels" with feature size in the micrometer scale. The grooves or pixels can have multiple height levels. Such grooved or pixelated structures with multilevel topography provide enormous degrees-of-freedom which in turn facilitates generation of complex intensity distributions with high diffraction efficiency under broadband illumination. Furthermore, the super-wavelength feature size and low aspect ratio of this micro-optic make its fabrication process simpler. Also, this diffractive element is not polarization sensitive. As a result, the polychromat holds the potential to be used in numerous technological applications. Throughout this dissertation, the broadband operation of the polychromat is demonstrated in four different areas, namely, photovoltaics, displays, lenses and holograms. Specifically, we have developed a polychromat-photovoltaic system which facilitates better photon-to-electron conversion via spectrum splitting and concentration, a modified liquid crystal display (LCD) that offers higher luminance compared to a standard LCD, a cylindrical lens that demonstrates super-achromatic focusing over the entire visible band, a planar diffractive lens that images over the visible and near-IR spectrum and broadband transmission holograms that project complex full-color images with high efficiency. In each of these applications, a unique figure of merit was defined and the height topography of the polychromat was optimized to maximize the figure of merit. The optimization was achieved with the aid of scalar diffraction theory and a modified version of direct binary search algorithm. Single step grayscale lithography was developed and optimized to fabricate these devices with the smallest possible fabrication errors. Rigorous characterization of these systems demonstrated broadband performance of the polychromat in all of the applications