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1 research outputs found
Surface roughness analysis of SiO2 for PECVD, PVD and IBD on different substrates
Author
A Jäkel
A Tarraf
+28Â more
BG Orr
Bhatt Chandra
C Teichert
D Dudeck
DM Mattox
E Gadelmawla
G Battistona
G Bose
G Dennler
G Panomsuwan
H Klauk
H Lüth
H Morkoç
J Elam
JR McNeil
K Bordo
K Reichelt
M Morita
M Ohring
MA Cotta
N Semaltianos
N Tas
SH Lee
TV Vorburger
V Lindroos
V Viereck
X Peng
Z Chen
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
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