Silicon and Polymer Components for Microrobots

This dissertation presents the characterization and implementation of the first microfabrication process to incorporate high aspect ratio compliant polymer structures in-plane with traditional silicon microelectromechanical systems (MEMS). This discussion begins with in situ mechanical characterization of microscale polymer springs using silicon-on-insulator-MEMS (SOI-MEMS). The analysis compares microscale samples that were tested on-chip with macroscale samples tested using a dynamic mechanical analyzer. The results describe the effect of the processing steps on the polymer during fabrication and help to guide the design of mechanisms using polymers. Characterization of the dielectric breakdown of polymer thin films with thicknesses from 2 to 14 μm between silicon electrodes was also performed. The results demonstrate that there is a strong dependence of the breakdown field on both the electrode gap and shape. The breakdown fields ranged from 250 V/μm to 635 V/μm, depending on the electrode geometry and gap, approaching 10x the breakdown fields for air gaps of the same size. These materials were then used to create compliant all-polymer thermal and electrostatic microactuators. All-polymer thermal actuators demonstrated displacements as large at 100 μm and forces as high as 55 μN. A 1 mm long electrostatic dielectric elastomer actuator demonstrated a tip displacement as high as 350 μm at 1.1 kV with a electrical power consumption of 11μW. The actuators are fabricated with elastomeric materials, so they are very robust and can undergo large strains in both tension and bending and still operate once released. Finally, the compliant polymer and silicon actuators were combined in an actuated bio-inspired system. Small insects and other animals use a multitude of materials to realize specific functions, including locomotion. By incorporating compliant elastomer structures in-plane with traditional silicon actuators, compact energy storage systems based on elastomer springs for small jumping robots were demonstrated. Results include a 4 mm x 4 mm jumping mechanism that has reached heights of 32 cm, 80x its own height, and an on-chip actuated mechanism that has been used to propel a 1.4mg projectile over 7 cm

FABRICATION OF MAGNETIC TWO-DIMENSIONAL AND THREE-DIMENSIONAL MICROSTRUCTURES FOR MICROFLUIDICS AND MICROROBOTICS APPLICATIONS

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods can only fabricate flat, layered geometries; the few that can fabricate real 3D microstructures are not cost efficient and cannot realize mass production. This dissertation explores two solutions to these microfabrication problems: first, a method for integrating magnetically responsive regions into microstructures using photolithography, and second, a method for creating three-dimensional freestanding microstructures using a modified micromolding technique. The first method is a facile method of producing inexpensive freestanding photopatternable polymer micromagnets composed NdFeB microparticles dispersed in SU-8 photoresist. The microfabrication process is capable of fabricating polymer micromagnets with 3 µm feature resolution and greater than 10:1 aspect ratio. This method was used to demonstrate the creation of freestanding microrobots with an encapsulated magnetic core. A magnetic control system was developed and the magnetic microrobots were moved along a desired path at an average speed of 1.7 mm/s in a fluid environment under the presence of external magnetic field. A microfabrication process using aligned mask micromolding and soft lithography was also developed for creating freestanding microstructures with true 3D geometry. Characterization of this method and resolution limits were demonstrated. The combination of these two microfabrication methods has great potential for integrating several material types into one microstructure for a variety of applications

DESIGN, MODELING, AND FABRICATION OF MICROROBOT LEGS

This dissertation presents work done in the design, modeling, and fabrication of magnetically actuated microrobot legs. Novel fabrication processes for manufacturing multi-material compliant mechanisms have been used to fabricate effective legged robots at both the meso and micro scales, where the meso scale refers to the transition between macro and micro scales. This work discusses the development of a novel mesoscale manufacturing process, Laser Cut Elastomer Refill (LaCER), for prototyping millimeter-scale multi-material compliant mechanisms with elastomer hinges. Additionally discussed is an extension of previous work on the development of a microscale manufacturing process for fabricating micrometer-sale multi-material compliant mechanisms with elastomer hinges, with the added contribution of a method for incorporating magnetic materials for mechanism actuation using externally applied fields. As both of the fabrication processes outlined make significant use of highly compliant elastomer hinges, a fast, accurate modeling method for these hinges was desired for mechanism characterization and design. An analytical model was developed for this purpose, making use of the pseudo rigid-body (PRB) model and extending its utility to hinges with significant stretch component, such as those fabricated from elastomer materials. This model includes 3 springs with stiffnesses relating to material stiffness and hinge geometry, with additional correction factors for aspects particular to common multi-material hinge geometry. This model has been verified against a finite element analysis model (FEA), which in turn was matched to experimental data on mesoscale hinges manufactured using LaCER. These modeling methods have additionally been verified against experimental data from microscale hinges manufactured using the Si/elastomer/magnetics MEMS process. The development of several mechanisms is also discussed: including a mesoscale LaCER-fabricated hexapedal millirobot capable of walking at 2.4 body lengths per second; prototyped mesoscale LaCER-fabricated underactuated legs with asymmetrical features for improved performance; 1 centimeter cubed LaCER-fabricated magnetically-actuated hexapods which use the best-performing underactuated leg design to locomote at up to 10.6 body lengths per second; five microfabricated magnetically actuated single-hinge mechanisms; a 14-hinge, 11-link microfabricated gripper mechanism; a microfabricated robot leg mechansim demonstrated clearing a step height of 100 micrometers; and a 4 mm x 4 mm x 5 mm, 25 mg microfabricated magnetically-actuated hexapod, demonstrated walking at up to 2.25 body lengths per second

Rapid Polymer Prototyping for Low Cost and Robust Microrobots

The Rapid Microrobot Prototyping (RaMP) Process uses Loctite(R) photo-patternable polymer products and photolithography to rapidly fabricate robust, inexpensive, and compliant robots. The process is developed and examined on two size scales. On the size scale of several centimeters, two functional robots and a small gripper have been designed and demonstrated with shape memory alloy (SMA) used for actuation. The gripper is 1.2g and costs $3.21 while the inchworm robot is 7.4g and costs$7.76 in small numbers. The second robot costs $14.93 in small numbers. On the sub-centimeter scale, designs and considerations for a walking microrobot fabricated with the process and its control are fully described. The design and kinematics of a thermally actuated, one degree of freedom leg for the microrobot are developed and simulated. Several of these units could be combined to rapidly build a 30 mg functional and simple walking microrobot with the ability to lift several grams

Design, evaluation, and control of nexus: a multiscale additive manufacturing platform with integrated 3D printing and robotic assembly.

Additive manufacturing (AM) technology is an emerging approach to creating three-dimensional (3D) objects and has seen numerous applications in medical implants, transportation, aerospace, energy, consumer products, etc. Compared with manufacturing by forming and machining, additive manufacturing techniques provide more rapid, economical, efficient, reliable, and complex manufacturing processes. However, additive manufacturing also has limitations on print strength and dimensional tolerance, while traditional additive manufacturing hardware platforms for 3D printing have limited flexibility. In particular, part geometry and materials are limited to most 3D printing hardware. In addition, for multiscale and complex products, samples must be printed, fabricated, and transferred among different additive manufacturing platforms in different locations, which leads to high cost, long process time, and low yield of products. This thesis investigates methods to design, evaluate, and control the NeXus, which is a novel custom robotic platform for multiscale additive manufacturing with integrated 3D printing and robotic assembly. NeXus can be used to prototype miniature devices and systems, such as wearable MEMS sensor fabrics, microrobots for wafer-scale microfactories, tactile robot skins, next generation energy storage (solar cells), nanostructure plasmonic devices, and biosensors. The NeXus has the flexibility to fixture, position, transport, and assemble components across a wide spectrum of length scales (Macro-Meso-Micro-Nano, 1m to 100nm) and provides unparalleled additive process capabilities such as 3D printing through both aerosol jetting and ultrasonic bonding and forming, thin-film photonic sintering, fiber loom weaving, and in-situ Micro-Electro-Mechanical System (MEMS) packaging and interconnect formation. The NeXus system has a footprint of around 4m x 3.5m x 2.4m (X-Y-Z) and includes two industrial robotic arms, precision positioners, multiple manipulation tools, and additive manufacturing processes and packaging capabilities. The design of the NeXus platform adopted the Lean Robotic Micromanufacturing (LRM) design principles and simulation tools to mitigate development risks. The NeXus has more than 50 degrees of freedom (DOF) from different instruments, precise evaluation of the custom robots and positioners is indispensable before employing them in complex and multiscale applications. The integration and control of multi-functional instruments is also a challenge in the NeXus system due to different communication protocols and compatibility. Thus, the NeXus system is controlled by National Instruments (NI) LabVIEW real-time operating system (RTOS) with NI PXI controller and a LabVIEW State Machine User Interface (SMUI) and was programmed considering the synchronization of various instruments and sequencing of additive manufacturing processes for different tasks. The operation sequences of each robot along with relevant tools must be organized in safe mode to avoid crashes and damage to tools during robots’ motions. This thesis also describes two demonstrators that are realized by the NeXus system in detail: skin tactile sensor arrays and electronic textiles. The fabrication process of the skin tactile sensor uses the automated manufacturing line in the NeXus with pattern design, precise calibration, synchronization of an Aerosol Jet printer, and a custom positioner. The fabrication process for electronic textiles is a combination of MEMS fabrication techniques in the cleanroom and the collaboration of multiple NeXus robots including two industrial robotic arms and a custom high-precision positioner for the deterministic alignment process

ENABLING HARDWARE TECHNOLOGIES FOR AUTONOMY IN TINY ROBOTS: CONTROL, INTEGRATION, ACTUATION

The last two decades have seen many exciting examples of tiny robots from a few cm3 to less than one cm3. Although individually limited, a large group of these robots has the potential to work cooperatively and accomplish complex tasks. Two examples from nature that exhibit this type of cooperation are ant and bee colonies. They have the potential to assist in applications like search and rescue, military scouting, infrastructure and equipment monitoring, nano-manufacture, and possibly medicine. Most of these applications require the high level of autonomy that has been demonstrated by large robotic platforms, such as the iRobot and Honda ASIMO. However, when robot size shrinks down, current approaches to achieve the necessary functions are no longer valid. This work focused on challenges associated with the electronics and fabrication. We addressed three major technical hurdles inherent to current approaches: 1) difficulty of compact integration; 2) need for real-time and power-efficient computations; 3) unavailability of commercial tiny actuators and motion mechanisms. The aim of this work was to provide enabling hardware technologies to achieve autonomy in tiny robots. We proposed a decentralized application-specific integrated circuit (ASIC) where each component is responsible for its own operation and autonomy to the greatest extent possible. The ASIC consists of electronics modules for the fundamental functions required to fulfill the desired autonomy: actuation, control, power supply, and sensing. The actuators and mechanisms could potentially be post-fabricated on the ASIC directly. This design makes for a modular architecture. The following components were shown to work in physical implementations or simulations: 1) a tunable motion controller for ultralow frequency actuation; 2) a nonvolatile memory and programming circuit to achieve automatic and one-time programming; 3) a high-voltage circuit with the highest reported breakdown voltage in standard 0.5 μm CMOS; 4) thermal actuators fabricated using CMOS compatible process; 5) a low-power mixed-signal computational architecture for robotic dynamics simulator; 6) a frequency-boost technique to achieve low jitter in ring oscillators. These contributions will be generally enabling for other systems with strict size and power constraints such as wireless sensor nodes

Towards the Use of Dielectric Elastomer Actuators as Locomotive Devices for Millimeter-Scale Robots

Dielectric elastomer actuators (DEAs) are electromechanical transducers that are promising for small scale applications. The work presented in this thesis seeks to develop DEAs as an actuation technology that would serve the purpose of ambulating millimeter-scale robots in a robust and predictable manner. To begin, the "planar" DEA configuration was characterized and the performances of various elastomers were investigated. Then, based on the requirements of a proposed robot walking gait, two principles were examined as means of converting in-plane actuation strain to bending actuation. Bending DEAs were fabricated and tested, and a maximum end displacement of 1.5 mm was achieved for a 10 mm long sample. Bending actuator design was optimized by maximizing both speed and payload capabilities. Finally, some challenges facing the design of robots ambulated by DEAs were outlined; of particular note is the DEAs' electrostatic interaction with each other and their surroundings

Lab-on-a-Chip Fabrication and Application

The necessity of on-site, fast, sensitive, and cheap complex laboratory analysis, associated with the advances in the microfabrication technologies and the microfluidics, made it possible for the creation of the innovative device lab-on-a-chip (LOC), by which we would be able to scale a single or multiple laboratory processes down to a chip format. The present book is dedicated to the LOC devices from two points of view: LOC fabrication and LOC application

MicroBioRobots for Single Cell Manipulation

One of the great challenges in nano and micro scale science and engineering is the independent manipulation of biological cells and small man-made objects with active sensing. For such biomedical applications as single cell manipulation, telemetry, and localized targeted delivery of chemicals, it is important to fabricate microstructures that can be powered and controlled without a tether in fluidic environments. These microstructures can be used to develop microrobots that have the potential to make existing therapeutic and diagnostic procedures less invasive. Actuation can be realized using various different organic and inorganic methods. Previous studies explored different forms of actuation and control with microorganisms. Bacteria, in particular, offer several advantages as controllable micro actuators: they draw chemical energy directly from their environment, they are genetically modifiable, and they are scalable and configurable in the sense that any number of bacteria can be selectively patterned. Additionally, the study of bacteria inspires inorganic schemes of actuation and control. For these reasons, we chose to employ bacteria while controlling their motility using optical and electrical stimuli. In the first part of the thesis, we demonstrate a bio-integrated approach by introducing MicroBioRobots (MBRs). MBRs are negative photosensitive epoxy (SU8) microfabricated structures with typical feature sizes ranging from 1-100 μm coated with a monolayer of the swarming Serratia marcescens. The adherent bacterial cells naturally coordinate to propel the microstructures in fluidic environments, which we call Self-Actuation. First, we demonstrate the control of MBRs using self-actuation, DC electric fields and ultra-violet radiation and develop an experimentally-validated mathematical model for the MBRs. This model allows us to to steer the MBR to any position and orientation in a planar micro channel using visual feedback and an inverted microscope. Examples of sub-micron scale transport and assembly as well as computer-based closed-loop control of MBRs are presented. We demonstrate experimentally that vision-based feedback control allows a four-electrode experimental device to steer MBRs along arbitrary paths with micrometer precision. At each time instant, the system identifies the current location of the robot, a control algorithm determines the power supply voltages that will move the charged robot from its current location toward its next desired position, and the necessary electric field is then created. Second, we develop biosensors for the MBRs. Microscopic devices with sensing capabilities could significantly improve single cell analysis, especially in high-resolution detection of patterns of chemicals released from cells in vitro. Two different types of sensing mechanisms are employed. The first method is based on harnessing bacterial power, and in the second method we use genetically engineered bacteria. The small size of the devices gives them access to individual cells, and their large numbers permit simultaneous monitoring of many cells. In the second part, we describe the construction and operation of truly micron-sized, biocompatible ferromagnetic micro transporters driven by external magnetic fields capable of exerting forces at the pico Newton scale. We develop micro transporters using a simple, single step micro fabrication technique that allows us to produce large numbers in the same step. We also fabricate microgels to deliver drugs. We demonstrate that the micro transporters can be navigated to separate single cells with micron-size precision and localize microgels without disturbing the local environment