Universal Framework for Linear Motors and Multi-Axis Stages with Magnetic Levitation

This dissertation presents the electromagnetic design and experimental validation of a new framework for linear permanent-magnet (PM) machines with targeted applications in precision motion control. In this framework, a single forcer, which can generate two independent force components in two perpendicular directions, consists of a stationary Halbach magnet array and two Lorentz coils with a phase difference of 90° or 270°. Any number of coil pairs can be attached on the same moving frame to work with a common magnet array or matrix, forming a linear or planar PM motor. Key advantages of this framework are simple force calculation, a linear system model, and a reduced number of coils for force generation and allocation in multi-axis positioners. The proposed framework effectively allows for decoupled dynamics, simplifying the linear controller design and real-time implementation. To experimentally verify the theoretical framework proposed herein, a high-precision 6-axis magnetically levitated (maglev) stage is designed, constructed, and controlled. The development of this 6-axis positioning system is an integrated work, including magnetic-force calculation and analysis, mechanical design, fabrication, assembly, system modeling, system identification, and control system design. The mechanical components of the system include a stationary superimposed Halbach magnet matrix, which was previously built, and a moving platen with a plastic frame, four sets of 2-phase coils, and two precision mirrors. For position measurements, there are three laser interferometers for in-plane position measurements, three laser displacement sensors for out-of-plane position sensing, and two 2-channel Hall-effect sensors for the position feedback to initialize the position and expand the travel ranges of the platen in the XY plane. The positioning resolutions of 10 nm in the xy plane and in the vertical axis are demonstrated. In out-of-plane rotation about the two horizontal axes, experimental results show the unprecedented positioning resolution of 0.1 μrad. The maximum travel range in X and Y with nanoscale positioning resolution is 56 mm × 35 mm, limited by the lengths of the precision mirrors attached to the platen. With the trapezoidal-velocity input shaping, achieved performance specifications include the maximum acceleration and velocity of 0.6 m/s2 and 0.06 m/s, respectively, in translations in the horizontal plane. With the platen supported by the air bearings, the maximum acceleration and speed are 1.5 m/s2 and 0.15 m/s, respectively. A load test is performed with the platen carrying a load of 0.54 kg, which is 72% of its total mass, magnetically levitated in 6- axis closed-loop control. Experimental results show the reduced coupled dynamics between different axes in magnetic levitation. This framework of 2-phase Lorentz coils and linear Halbach arrays is highly applicable in precision-positioning linear motors and multi-axis stages, steppers, scanners, nano-scale manipulation and alignment systems, and vibration isolators

Second International Symposium on Magnetic Suspension Technology, part 2

In order to examine the state of technology of all areas of magnetic suspension and to review related recent developments in sensors and controls approaches, superconducting magnet technology, and design/implementation practices, the 2nd International Symposium on Magnetic Suspension Technology was held at the Westin Hotel in Seattle, WA, on 11-13 Aug. 1993. The symposium included 18 technical sessions in which 44 papers were presented. The technical sessions covered the areas of bearings, bearing modelling, controls, vibration isolation, micromachines, superconductivity, wind tunnel magnetic suspension systems, magnetically levitated trains (MAGLEV), rotating machinery and energy storage, and applications. A list of attendees appears at the end of the document

Third International Symposium on Magnetic Suspension Technology

In order to examine the state of technology of all areas of magnetic suspension and to review recent developments in sensors, controls, superconducting magnet technology, and design/implementation practices, the Third International Symposium on Magnetic Suspension Technology was held at the Holiday Inn Capital Plaza in Tallahassee, Florida on 13-15 Dec. 1995. The symposium included 19 sessions in which a total of 55 papers were presented. The technical sessions covered the areas of bearings, superconductivity, vibration isolation, maglev, controls, space applications, general applications, bearing/actuator design, modeling, precision applications, electromagnetic launch and hypersonic maglev, applications of superconductivity, and sensors

Magnetically levitated hysteresis motor driven linear stage for in-vacuum transportation tasks

This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2019Cataloged from PDF version of thesis.Includes bibliographical references (pages 241-246).This thesis presents a new in-vacuum reticle transportation mechanism for extreme ultraviolet (EUV) photolithography machines. In the photolithography process, the reticle is a quartz plate that contains a pattern of the integrated circuit, which needs to be transported between a storage position and the exposure stage. In next-generation EUV lithography machines, the reticle handling system must satisfy the following requirements: (1) transport the reticle through a distance of 2 meters, (2) the height of the mechanism needs to be within 100 mm, (3) operate in vacuum, and (4) satisfy ultra-tight contamination requirements. To fulfill these requirements, a conventional robotic reticle handler is inadequate. In this work, we designed, built, and tested a magnetically-levitated linear stage prototype, targeting at the reticle transportation application. Compared with robot manipulators, linear stages typically require less volume for long-distance transportation tasks.Magnetic suspension is used to eliminate mechanical contact and thereby avoid particle generation that can contaminate the reticle. The stage's linear motion is driven by linear hysteresis motors, which allows using solid-steel motor secondaries on the moving stage. This is desirable for in-vacuum operation, since permanent magnets can out-gas in high vacuum when not encapsulated. The magnetic suspension of the stage is achieved using a novel linear bearingless slice motor design, where the stage's magnetic suspension in three degrees of freedom, including vertical, pitch, and roll, are achieved passively. This compact design effectively reduces the number of sensors and actuators being used. The prototype system has successfully levitated the moving stage. The resonance frequency of the passively levitated degrees of freedom is approximately 10 Hz, and the suspension bandwidth of the actively-controlled degrees of freedom is about 60 Hz.The stage's maximum thrust force is 5.8 N under a 2.5 A current amplitude, which corresponds to a stage acceleration of 1200 M/s². This is able to satisfy the acceleration requirement for reticle transportation task. The stage was tested to track a reticle handling reference trajectory, where the maximum position tracking error of our linear stage is 50 [mu]m. The stage's lateral displacements during motion is below 50 [mu]m, which is well below making mechanical contact to the side walls. To our knowledge, this work represents the first study of linear hysteresis motors, and the first linear bearingless slice motor design. Hysteresis motors are a type of electric machine that operates using the magnetic hysteresis effect of the secondary material. Since the magnetization in the rotor lags behind the external field, a thrust force/torque can be generated.In prior usage, hysteresis motors have been operated in open-loop, which makes them unsuitable for applications where dynamic performance is critical. As a part of this thesis work, we also studied the modeling and closed-loop torque and position control for hysteresis motors. The proposed control method was tested with three rotary hysteresis motors, including two custom-made motors of different rotor materials and one off-the-shelf hysteresis motor. Experimental results show that position control for all three motors can reach a bandwidth of 130 Hz. To our best knowledge, this is the first work that enabled high-bandwidth torque and position control for hysteresis motors, which allows this motor to be used for servo applications.Sponsored by ASMLby Lei Zhou.Ph. D.Ph.D. Massachusetts Institute of Technology, Department of Mechanical Engineerin

Magnetically levitated planar actuator with moving magnets

Mechanical systems with multiple degrees of freedom typically consist of several one degree-of-freedom electromechanical actuators. Most of these electromechanical actuators have a standard, often integrated, commutation (i.e. linearization and decoupling) algorithm deriving the actuator inputs which result in convenient control properties and relatively simple actuator constraints. Instead of using several one degree-of-freedom actuators, it is sometimes advantageous to combine multiple degrees of freedom in one actuator to meet the ever more demanding performance specifications. Due to the integration of the degrees of freedom, the resulting commutation and control algorithms are more complex. Therefore, the involvement of control engineering during an early stage of the design phase of this class of actuators is of paramount importance. One of the main contributions of this thesis is a novel commutation algorithm for multiple degree-of-freedom actuators and the analysis of its design implications. A magnetically levitated planar actuator is an example of a multiple degree of freedom electromechanical actuator. This is an alternative to xy-drives, which are constructed of stacked linear motors, in high-precision industrial applications. The translator of these planar actuators is suspended above the stator with no support other than magnetic fields. Because of the active magnetic bearing the translator needs to be controlled in all six mechanical degrees of freedom. This thesis presents the dynamics, commutation and control design of a contactless, magnetically levitated, planar actuator with moving magnets. The planar actuator consists of a stationary coil array, above which a translator consisting of an array of permanent magnets is levitated. The main advantage of this actuator is that no cables from the stator to the translator are required. Only coils below the surface of the magnet array effectively contribute to its levitation and propulsion. Therefore, the set of active coils is switched depending on the position of the translator in the xy-plane. The switching in combination with the contactless translator, in principle, allows for infinite stroke in the xy-plane. A model-based commutation and control approach is used throughout this thesis using a real-time analytical model of the ironless planar actuator. The realtime model is based on the analytical solutions to the Lorentz force and torque integrals. Due to the integration of propulsion in the xy-plane with an active magnetic bearing, standard decoupling schemes for synchronous machines cannot be applied to the planar actuator to linearize and decouple the force and the torque components. Therefore, a novel commutation algorithm has been derived which inverts the fully analytical mapping of the force and torque exerted by the set of active coils as a function of the coil currents and the position and orientation of the translator. Additionally, the developed commutation algorithm presents an optimal solution in the sense that it guarantees minimal dissipation of energy. Another important contribution of this thesis is the introduction of smooth position dependent weighing functions in the commutation algorithm. These functions enable smooth switching between different active coil sets, enabling, in principle, an unlimited stroke in the xy-plane. The resulting current waveform through each individually excited active coil is non-sinusoidal. The model-based approach, in combination with the novel commutation algorithm, resulted in a method to evaluate/design controllable topologies. Using this method several stator coil topologies are discussed in this thesis. Due to the changing amount of active coils when switching between active coil sets, the actuator constraints (i.e. performance) depend on the xy-position of the translator. An analysis of the achievable acceleration as a function of the position of the translator and the current amplifier constraints is given. Moreover, the dynamical behavior of the decoupled system is analyzed for small errors and a stabilizing control structure has been derived. One of the derived coil topologies called the Herringbone Pattern Planar Actuator (HPPA) has been analyzed into more detail and it has been manufactured. The stator of the actuator consists of a total of 84 coils, of which between 15 and 24 coils are simultaneously used for the propulsion and levitation of the translator. The real-time model, the dynamic behavior and the commutation algorithm have been experimentally verified using this fully-operational actuator. The 6-DOF contactless, magnetically levitated, planar actuator with moving magnets (HPPA) has been designed and tested and is now operating successfully according to all initial design and performance specifications

Third International Symposium on Magnetic Suspension Technology

In order to examine the state of technology of all areas of magnetic suspension and to review recent developments in sensors, controls, superconducting magnet technology, and design/implementation practices, the Third International Symposium on Magnetic Suspension Technology was held at the Holiday Inn Capital Plaza in Tallahassee, Florida on 13-15 Dec. 1995. The symposium included 19 sessions in which a total of 55 papers were presented. The technical sessions covered the areas of bearings, superconductivity, vibration isolation, maglev, controls, space applications, general applications, bearing/actuator design, modeling, precision applications, electromagnetic launch and hypersonic maglev, applications of superconductivity, and sensors

Materials Research in Microgravity 2012

Reducing gravitational effects such as thermal and solutal buoyancy enables investigation of a large range of different phenomena in materials science. The Symposium on Materials Research in Microgravity involved 6 sessions composed of 39 presentations and 14 posters with contributions from more than 14 countries. The sessions concentrated on four different categories of topics related to ongoing reduced-gravity research. Highlights from this symposium will be featured in the September 2012 issue of JOM. The TMS Materials Processing and Manufacturing Division, Process Technology and Modeling Committee and Solidification Committee sponsored the symposium

Development of the Paracorporeal Ambulatory Assist Lung (PAAL)

Lung disease is a major healthcare problem as the third leading cause of death in the United States. Extracorporeal membrane oxygenation (ECMO) and mechanical ventilation are the only means for respiratory support once patients reach a critical condition. Confinement during these treatments causes muscle deconditioning which increases morbidity and mortality after lung transplant. Advancements in ECMO have improved treatment outcomes by introducing ambulation into the clinical practice. Current systems are cumbersome and limited to short term use. We are developing the Paracorporeal Ambulatory Assist Lung (PAAL), an artificial lung device that is durable, wearable and simplifies ambulation. The PAAL integrates a hollow fiber membrane (HFM) bundle for oxygenation and a centrifugal blood pump into a compact unit. Device size is reduced by decreasing the HFM area and increasing the oxygenation efficiency (oxygenation per unit area). This dissertation investigates passive flow, active mixing and recirculation as means for increasing oxygenation efficiency. A 1D mass-transfer model guided the choice of the HFM bundle form factor. Prototypes were manufactured for evaluating hydrodynamics, oxygenation, and hemolysis on the bench. The passive flow PAAL was selected for in-vivo testing in sheep (6-hours) while hemodynamics, oxygenation and hemolysis were assessed. The device was then optimized using computational fluid dynamics and tested for 5-days in-vivo. In-vitro performance targets were met for all proposed designs. Hemodynamics did not change relative to baseline in all in-vivo studies. The PAAL fully oxygenated blood, and plasma-free hemoglobin remained under 20 mg/dL in all in-vivo studies. Gross examination of devices after in-vivo testing showed minimal to no thrombus in the HFM bundle and no thrombus in the centrifugal pump. Platelet activation remained under 15% after 5-days. Artificial lungs incorporating passive flow, active mixing and blood recirculation have been designed. Relative to the clinical standard, HFM area was reduced by ~1.7 times using passive flow and active mixing, and by ~3 times using recirculation. An integrated and wearable PAAL was developed based on the passive flow design. This design was evaluated up to 5 days in sheep with no device related complications. Chronic (30-day) in-vivo studies on the PAAL are in progress