Advanced process/equipment control for thermal processing in lithography

Ph.DDOCTOR OF PHILOSOPH

Real-time monitoring and control of critical dimensions in Lithography.

Ph.DDOCTOR OF PHILOSOPH

Thermal processing in lithography: Equipment design, control and metrology

Ph.DDOCTOR OF PHILOSOPH

In-situ measurement and control of photoresist processing in lithography

Ph.DDOCTOR OF PHILOSOPH

Nanogap Device: Fabrication and Applications

A nanogap device as a platform for nanoscale electronic devices is presented. Integrated nanostructures on the platform have been used to functionalize the nanogap for biosensor and molecular electronics. Nanogap devices have great potential as a tool for investigating physical phenomena at the nanoscale in nanotechnology. In this dissertation, a laterally self-aligned nanogap device is presented and its feasibility is demonstrated with a nano ZnO dot light emitting diode (LED) and the growth of a metallic sharp tip forming a subnanometer gap suitable for single molecule attachment. For realizing a nanoscale device, a resolution of patterning is critical, and many studies have been performed to overcome this limitation. The creation of a sub nanoscale device is still a challenge. To surmount the challenge, novel processes including double layer etch mask and crystallographic axis alignment have been developed. The processes provide an effective way for making a suspended nanogap device consisting of two self-aligned sharp tips with conventional lithography and 3-D micromachining using anisotropic wet chemical Si etching. As conventional lithography is employed, the nanogap device is fabricated in a wafer scale and the processes assure the productivity and the repeatability. The anisotropic Si etching determines a final size of the nanogap, which is independent of the critical dimension of the lithography used. A nanoscale light emitting device is investigated. A nano ZnO dot is directly integrated on a silicon nanogap device by Zn thermal oxidation followed by Ni and Zn blanket evaporation instead of complex and time consuming processes for integrating nanostructure. The electrical properties of the fabricated LED device are analyzed for its current-voltage characteristic and metal-semiconductor-metal model. Furthermore, the electroluminescence spectrum of the emitted light is measured with a monochromator implemented with a CCD camera to understand the optical properties. The atomically sharp metallic tips are grown by metal ion migration induced by high electric field across a nanogap. To investigate the growth mechanism, in-situ TEM is conducted and the growing is monitored. The grown dendrite nanostructures show less than 1nm curvature of radius. These nanostructures may be compatible for studying the electrical properties of single molecule

Production of uniform droplets using membrane, microchannel and microfluidic emulsification devices

This review provides an overview of major microengineering emulsification techniques for production of monodispersed droplets. The main emphasis has been put on membrane emulsification using Shirasu Porous Glass and microsieve membrane, microchannel emulsification using grooved-type and straight-through microchannel plates, microfluidic junctions and flow focusing microfluidic devices. Microfabrication methods for production of planar and 3D poly(dimethylsiloxane) devices, glass capillary microfluidic devices and single-crystal silicon microchannel array devices have been described including soft lithography, glass capillary pulling and microforging, hot embossing, anisotropic wet etching and deep reactive ion etching. In addition, fabrication methods for SPG and microseive membranes have been outlined, such as spinodal decomposition, reactive ion etching and ultraviolet LIGA (Lithography, Electroplating, and Moulding) process. The most widespread application of micromachined emulsification devices is in the synthesis of monodispersed particles and vesicles, such as polymeric particles, microgels, solid lipid particles, Janus particles, and functional vesicles (liposomes, polymersomes and colloidosomes). Glass capillary microfluidic devices are very suitable for production of core/shell drops of controllable shell thickness and multiple emulsions containing a controlled number of inner droplets and/or inner droplets of two or more distinct phases. Microchannel emulsification is a very promising technique for production of monodispersed droplets with droplet throughputs of up to 100 l h−1

Tribology of Microball Bearing MEMS

This dissertation explores the fundamental tribology of microfabricated rolling bearings for future micro-machines. It is hypothesized that adhesion, rather than elastic hysteresis, dominates the rolling friction and wear for these systems, a feature that is unique to the micro-scale. To test this hypothesis, specific studies in contact area and surface energy have been performed. Silicon microturbines supported on thrust bearings packed with 285 µm and 500 µm diameter stainless steel balls have undergone spin-down friction testing over a load and speed range of 10-100mN and 500-10,000 rpm, respectively. A positive correlation between calculated contact area and measured friction torque was observed, supporting the adhesion-dominated hysteresis hypothesis. Vapor phase lubrication has been integrated within the microturbine testing scheme in a controlled and characterized manner. Vapor-phase molecules allowed for specifically addressing adhesive energy without changing other system properties. A 61% reduction of friction torque was observed with the utilization of 18% relative humidity water vapor lubrication. Additionally, the relationship between friction torque and normal load was shown to follow an adhesion-based trend, highlighting the effect of adhesion and further confirming the adhesion-dominant hypothesis. The wear mechanisms have been studied for a microfabricated ball bearing platform that includes silicon and thin-film coated silicon raceway/steel ball materials systems. Adhesion of ball material, found to be the primary wear mechanism, is universally present in all tested materials systems. Volumetric adhesive wear rates are observed between 4x10^-4 µm^3/mN*rev and 4x10^-5 µm3/mN*rev were determined by surface mapping techniques and suggest a self-limiting process. This work also demonstrates the utilization of an Off-The-Shelf (OTS) MEMS accelerometer to confirm a hypothesized ball bearing instability regime which encouraged the design of new bearing geometries, as well as to perform in situ diagnostics of a high-performance rotary MEMS device. Finally, the development of a 3D fabrication technique with the potential of significantly improving the performance of micro-scale rotary structures is described. The process was used to create uniform, smooth, curved surfaces. Micro-scale ball bearings are then able to be utilized in high-speed regimes where load can be accommodated both axially and radially, allowing for new, high-speed applications. A comprehensive exploration of the fundamental tribology of microball bearing MEMS has been performed, including specific experiments on friction, wear, lubrication, dynamics, and geometrical optimization. Future devices utilizing microball bearings will be engineered and optimized based on the results of this dissertation

Geometric Effects on the Wear of Microfabricated Silicon Journal Bearings

This dissertation presents an investigation of geometric effects on the wear of large aspect ratio silicon journal microbearings. The consideration of geometric conformality of rotor and hub as a critical design parameter manifests from the inherent properties of deep reactive ion etching as part of the current MEMS fabrication process employed in this dissertation. The investigation is conducted in two phases, each characterized by novel microbearing designs, fabrication processes, experimental test methodologies, and characterization techniques. The intent of Phase 1 is to focus on the effects of conformality of wear, while the intent of Phase 2 is to focus on the effects of clearance on wear. Manual assembly of rotors and hubs allows a broader range of custom bearing clearances than would otherwise be available from lithographic, pattern transfer, and etching capabilities of current in situ MEMS fabrication technologies. Novel wear indicators, intended to facilitate the rapid quantitative and qualitative determination of wear, are incorporated in the Phase 2 rotor designs. Two particular enabling features of the novel fabrication processes, namely the sprue and float etching methods, are developed in this dissertation. The sprues, patterned using the DRIE mask, hold the rotors in place during the KOH etching process. The float etching technique entails floating the device wafer on top of the KOH etchant bath. The results obtained from using the first apparatus indicate that microbearing performance, as measured by rotor rotational speed and rotor cumulative wear, is strongly dependent on conformality. The results obtained using the second apparatus indicate that microbearing rotor rotational velocity is strongly dependent on radial clearance parameter C0. A dynamic impact model of the bearing system based on classical impulse-momentum relations is formulated in order to assess the effect of clearance on rotor rotational speed. A coefficient of restitution is obtained for silicon-on-silicon surfaces over the range of kinematically allowable radial clearance specifications