358 research outputs found

    Microelectromechanical Systems and Devices

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    The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators

    MME2010 21st Micromechanics and Micro systems Europe Workshop : Abstracts

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    Metamaterials for Decoupling Antennas and Electromagnetic Systems

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    This research focuses on the development of engineered materials, also known as meta- materials, with desirable effective constitutive parameters: electric permittivity (epsilon) and magnetic permeability (mu) to decouple antennas and noise mitigation from electromagnetic systems. An interesting phenomenon of strong relevance to a wide range of problems, where electromagnetic interference is of concern, is the elimination of propagation when one of the constitutive parameters is negative. In such a scenario, transmission of electromagnetic energy would cease, and hence the coupling between radiating systems is reduced. In the first part of this dissertation, novel electromagnetic artificial media have been developed to alleviate the problem of mutual coupling between high-profile and ow-profile antenna systems. The developed design configurations are numerically simulated, and experimentally validated. In the mutual coupling problem between high-profile antennas, a decoupling layer based on artificial magnetic materials (AMM) has been developed and placed between highly-coupled monopole antenna elements spaced by less than Lambda/6, where Lambda is the operating wavelength of the radiating elements. The decoupling layer not only provides high mutual coupling suppression (more than 20-dB) but also maintains good impedance matching and low correlation between the antenna elements suitable for use in Multiple-Input Multiple-Output (MIMO) communication systems. In the mutual coupling problem between low-profile antennas, novel sub-wavelength complementary split-ring resonators (CSRRs) are developed to decouple microstrip patch antenna elements. The proposed design con figuration has the advantage of low-cost production and maintaining the pro file of the antenna system unchanged without the need for extra layers. Using the designed structure, a 10-dB reduction in the mutual coupling between two patch antennas has been achieved. The second part of this dissertation utilizes electromagnetic artificial media for noise mitigation and reduction of undesirable electromagnetic radiation from high-speed printed-circuit boards (PCBs) and modern electronic enclosures with openings (apertures). Numerical results based on the developed design configurations are presented, discussed, and compared with measurements. To alleviate the problem of simultaneous switching noise (SSN) in high-speed microprocessors and personal computers, a novel technique based on cascaded CSRRs has been proposed. The proposed design has achieved a wideband suppression of SSN and maintained a robust signal integrity performance. A novel use of electromagnetic bandgap (EBG) structures has been proposed to mitigate undesirable electromagnetic radiation from enclosures with openings. By using ribbon of EBG surfaces, a significant suppression of electromagnetic radiation from openings has been achieved

    Dental Implant Systems

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    Among various dental materials and their successful applications, a dental implant is a good example of the integrated system of science and technology involved in multiple disciplines including surface chemistry and physics, biomechanics, from macro-scale to nano-scale manufacturing technologies and surface engineering. As many other dental materials and devices, there are crucial requirements taken upon on dental implants systems, since surface of dental implants is directly in contact with vital hard/soft tissue and is subjected to chemical as well as mechanical bio-environments. Such requirements should, at least, include biological compatibility, mechanical compatibility, and morphological compatibility to surrounding vital tissues. In this review, based on carefully selected about 500 published articles, these requirements plus MRI compatibility are firstly reviewed, followed by surface texturing methods in details. Normally dental implants are placed to lost tooth/teeth location(s) in adult patients whose skeleton and bony growth have already completed. However, there are some controversial issues for placing dental implants in growing patients. This point has been, in most of dental articles, overlooked. This review, therefore, throws a deliberate sight on this point. Concluding this review, we are proposing a novel implant system that integrates materials science and up-dated surface technology to improve dental implant systems exhibiting bio- and mechano-functionalities

    A mechanically-guided approach to three-dimensional functional mesostructures towards unconventional applications

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    Controlled formation of three-dimensional functional mesostructures (3DFMs) has broad engineering implications in biomedical devices, microelectromechanical systems (MEMS), optics, and energy storage. Most existing 3D techniques, however, not only lack compatibility with essential electronic materials (silicon, metals, ceramics) that exist in solid-state or crystalline forms, but also produce in a slow and inefficient manner. This is in stark contrast to the planar technologies widely adopted by the modern semiconductor industry. I propose to solve these challenges by a novel 3D assembly strategy based on the planar technologies, which involves precisely controlled 2D-to-3D transformations via the substrate-induced mechanical buckling. This lithography-based, mechanically-guided 3D approach is compatible with virtually any engineering thin films including semiconductors, metals, and polymers, applies to a wide range of length scales and geometries and produces in a high throughput. In this dissertation, I present strategies that combine fabrications and mechanics to achieve a set of complex 3D geometries. I also study the potentials of the 3DFMs in micro-robotics. I further demonstrate the unique applications in energy harvesting, bio-integrated systems, and nanoscale sensing. The results may enlighten the development of advanced, multi-functional 3D electronic micro-systems inaccessible to other 3D techniques

    Optics and Fluid Dynamics Department annual progress report for 2001

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    research within three scientific programmes: (1) laser systems and optical materials, (2) optical diagnostics and information processing and (3) plasma and fluid dynamics. The department has core competences in: optical sensors, optical materials, optical storage, biooptics, numerical modelling and information processing, non-linear dynamics and fusion plasma physics. The research is supported by several EU programmes, including EURATOM, by Danish research councils and by industry. A summary of the activities in 2001 is presented. ISBN 87-550-2993-0 (Internet

    Synthesis and properties of epitaxial oxide thin films prepared by polymer assisted deposition

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    This thesis describes the most relevant aspects in PAD method as well the process of optimization to obtain high quality epitaxial thin films of multicationic oxides. For this we have analyzed the structure and the behavior of polymers both in solution and under thermal degradation, and it has been determined the degree of retention for different metals in combination with various chelating agents. The synthesis and characterization of thin films have been applied to a set of oxides with different compositions and properties, controlling the thickness, stoichiometry, etc. The effect of growth conditions was studied by comparison with films prepared by classical physical methods. Furthermore, two different materials were combined in the same structure in the form of bilayers with a clear interface between the two individual layers. All this progress over single-crystal substrates was used to deposit functional oxides integrated on silicon at the end of this thesis

    Nematic Liquid Crystal Carbon Nanotube Composite Materials for Designing RF Switching Devices

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    Radio frequency microelectromechanical systems (RF MEMS) devices are microdevices used to switch or modify signals from the RF to millimeter wave (mmWave) frequency range. Liquid crystals (LCs) are widely used as electro-optic modulators for display devices. An electric field-induced electrical conductivity modulation of pure LC media is quite low which makes it difficult to use for RF MEMS switching applications. Currently, RF MEMS devices are characterized as an excellent option between solid-state and electromechanical RF switches to provide high isolation, low insertion loss, low power usage, excellent return loss, and large frequency band. However, commercial usage is low due to their lower switching speed, reliability, and repeatability. This research presents an electrical conductivity enhancement through the use of carbon nanotube (CNT) doping of LCs to realize a high-performance RF LC-CNT switching device. This thesis presents simulations of an RF switch using a coplanar waveguide (CPW) with a LC-CNT composite called 4-Cyano-4’-pentylbiphenyl multi-walled nanotube (5CB-MWNT) that is suitable for RF applications. The electrical conductivity modulation and RF switch performance of the 5CB-MWNT composite is determined using Finite Element Analysis (FEA). The simulations will present data on the coplanar waveguide’s s-parameters at the input and output ports S11 and S21 to measure return and insertion loss respectively, two key parameters for determining any RF switch’s performance. Furthermore, this thesis presents applications for improving tunable phased antenna arrays using the LC-CNT composite to allow for beam steering with high-gain and directivity to provide a broad 3D scannable coverage of an area. Tunable antennas are an important characteristic for 5G applications to achieve an optimal telecommunication system to prevent overcrowding of antennas and reduce overall system costs. This research investigates various device geometries with 5CB-MWNT to realize the best performing RF device for RF applications and 5G telecommunication systems. This research presents return and insertion loss data for three waveguide device configurations: CPW, coplanar waveguide grounded (CPWG), and finite ground coplanar waveguide grounded (FG-CPWG). The best results are shown using the CPW configuration. The return loss for the LC-CNT device showed a 5 dB improvement from -7.5 dB to -12.5 dB when using the LC-CNT signal line device. The insertion loss for this configuration showed a much more consistent 0 to -0.3 dB insertion loss value with much less noise when using the LC-CNT device compared to the -0.3 to -1 dB insertion loss value with heavy noise when using the Au signal line device. For the other two configurations the return loss and insertion loss value stayed the same indicating there is no loss in performance when using the LC-CNT switching mechanism. This is ideal due to the benefits that the LC-CNT switching mechanism provides like device reliability and increased switching speeds
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