RF-MEMS switch actuation pulse optimization using Taguchi's method

Copyright @ 2011 Springer-VerlagReliability and longevity comprise two of the most important concerns when designing micro-electro-mechanical-systems (MEMS) switches. Forcing the switch to perform close to its operating limits underlies a trade-off between response bandwidth and fatigue life due to the impact force of the cantilever touching its corresponding contact point. This paper presents for first time an actuation pulse optimization technique based on Taguchi’s optimization method to optimize the shape of the actuation pulse of an ohmic RF-MEMS switch in order to achieve better control and switching conditions. Simulation results show significant reduction in impact velocity (which results in less than 5 times impact force than nominal step pulse conditions) and settling time maintaining good switching speed for the pull down phase and almost elimination of the high bouncing phenomena during the release phase of the switch

Improving controllability in RF-MEMS switches using resistive damping

An efficient way to control the impact velocity in order to achieve soft landing and fewer bouncing phenomena is the resistive damping. This control method is also referred as charge drive and presented for first time by Castaner and Senturia [1]. Under charge control the Pull-in phenomenon of the Constant Voltage controlled electrostatic actuators does not exist and if the current drive is ideal, any position across the gap is stable. The main reason for this behavior is that the electrostatic force applied is always attractive and independent of the remaining gap of the actuator. Charge drive control incorporating constant current sources is mostly preferred to extend the travel range of electrostatic micro-actuators [2], [3], [4], [5]. Nevertheless there are very few references in the literature about charge drive control on RF MEMS. Recently published work based on numerical simulations for capacitive RF-MEMS, [6] and [7] present a learning algorithm in order to reduce fabrication variability using resistive damping for the pull-down phase. Nevertheless none of them present any details on how to implement resistive damping and any results of such kind of applications. This work presents in detail the entire procedure in calculating the bias resistance of an RFMEMS switch controlled under resistive damping

Resistive damping implementation as a method to improve controllability in stiff ohmic RF-MEMS switches

This paper presents in detail the entire procedure of calculating the bias resistance of an ohmic RF-MEMS switch, controlled under resistive damping (charge drive technique). In case of a very stiff device, like the North Eastern University switch, the actuation control under resistive damping is the only way to achieve controllability. Due to the short switching time as well as the high actuation voltage, it is not practical to apply a tailored control pulse (voltage drive control technique). Implementing a bias resistor of 33 MΩ in series with the voltage source, the impact velocity of the cantilever has been reduced 80 % (13.2 from 65.9 cm/s), eliminating bouncing and high initial impact force during the pull-down phase. However, this results in an affordable cost of switching time increase from 2.38 to 4.34 μs. During the release phase the amplitude of bouncing has also been reduced 34 % (174 from 255 nm), providing significant improvement in both switching operation phases of the switch. © 2013 Springer-Verlag Berlin Heidelberg

Novel Test Fixture for Characterizing MEMS Switch Microcontact Reliability and Performance

In microelectromechanical systems (MEMS) switches, the microcontact is crucial in determining reliability and performance. In the past, actual MEMS devices and atomic force microscopes (AFM)/scanning probe microscopes (SPM)/nanoindentation-based test fixtures have been used to collect relevant microcontact data. In this work, we designed a unique microcontact support structure for improved post-mortem analysis. The effects of contact closure timing on various switching conditions (e.g., cold-switching and hot-switching) was investigated with respect to the test signal. Mechanical contact closing time was found to be approximately 1 us for the contact force ranging from 10–900 μN. On the other hand, for the 1 V and 10 mA circuit condition, electrical contact closing time was about 0.2 ms. The test fixture will be used to characterize contact resistance and force performance and reliability associated with wide range of contact materials and geometries that will facilitate reliable, robust microswitch designs for future direct current (DC) and radio frequency (RF) applications

Reconfigurable Reflectarrays and Array Lenses for Dynamic Antenna Beam Control: A Review

Advances in reflectarrays and array lenses with electronic beam-forming capabilities are enabling a host of new possibilities for these high-performance, low-cost antenna architectures. This paper reviews enabling technologies and topologies of reconfigurable reflectarray and array lens designs, and surveys a range of experimental implementations and achievements that have been made in this area in recent years. The paper describes the fundamental design approaches employed in realizing reconfigurable designs, and explores advanced capabilities of these nascent architectures, such as multi-band operation, polarization manipulation, frequency agility, and amplification. Finally, the paper concludes by discussing future challenges and possibilities for these antennas.Comment: 16 pages, 12 figure

RF MEMS ohmic switches for matrix configurations

Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped–clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks

MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation

Triangular resonators re-shaped into Sierpinski geometry and U-shaped resonators were designed, linking them with single-pole-double-through (SPDT) RF MEMS switches to provide frequency tuning for potential applications in the K-Band. Prototypes of band-stop narrowband filters working around 20 GHz and 26 GHz, interesting for RADAR and satellite communications, were studied in a coplanar waveguide (CPW) configuration, and the tuning was obtained by switching between two paths of the devices loaded with different resonators. As a result, dual-band operation or fine-tuning could be obtained depending on the choice of the resonator, acting as a building block. The studied filters belong to the more general group of devices inspired by a metamaterial design

RF-MEMS switches for reconfigurable antennas

This thesis was submitted for the degree of Doctor of Philosophy and awarded by Brunel University.Reconfigurable antennas are attractive for many military and commercial applications where it is required to have a single antenna that can be dynamically reconfigured to transmit or receive on multiple frequency bands and patterns. RF-MEMS is a promising technology that has the potential to revolutionize RF and microwave system implementation for next generation telecommunication applications. Despite the efforts of top industrial and academic labs, commercialization of RFMEMS switches has lagged expectations. These problems are connected with switch design (high actuation voltage, low restoring force, low power handling), packaging (contamination layers) and actuation control (high impact force, wear, fatique). This Thesis focuses on the design and control of a novel ohmic RF-MEMS switch specified for reconfigurable antennas applications. This new switch design focuses on the failure mechanisms restriction, the simplicity in fabrication, the power handling and consumption, as well as controllability. Finally, significant attention has been paid in the switch’s electromagnetic characteristics. Efficient switch control implies increased reliability. Towards this target three novel control modes are presented. 1) Optimization of a tailored pulse under Taguchi’s statistical method, which produces promising results but is also sensitive to fabrication tolerances. 2) Quantification of resistive damping control mode, which produces better results only during the pull-down phase of the switch while it is possible to be implemented successfully in very stiff devices. 3) The “Hybrid” control mode, which includes both aforementioned techniques, offering outstanding switching control, as well as immunity to fabrication tolerances, allowing an ensemble of switches rendering an antenna reconfigurable, to be used. Another issue that has been addressed throughout this work is the design and optimization of a reconfigurable, in pattern and frequency, three element Yagi-Uda antenna. The optimization of the antenna’s dimensions has been accomplished through the implementation of a novel technique based on Taguchi’s method, capable of systematically searching wider areas, named as “Grid-Taguchi” method