Implementation of in Process Surface Metrology for R2R Flexible PV Barrier Films

Thin functional barrier layers of aluminum oxide (Al2O3) that are used particularly in photovoltaic (PV) modules to prevent the possibility of water vapor ingress should be applied over the entire PV surface without any defects. However, for barrier layer thicknesses within the sub-micrometer range (up to 50 nm) produced through the atomic layer deposition (ALD) method, it is common for defects to occur during the production process. To avoid defective barriers from being incorporated in the final PV unit, defects need to be detected during the barrier production process. In this paper, the implementation of in process inspection system capable of detecting surface defects such as pinholes, scratches, or particles down to a lateral size of 3 μm and a vertical resolution of 10 nm over a 500 mm barrier width is presented. The system has a built-in environmental vibration compensation capability, and can monitor ALD-coated films manufactured using roll-to-roll (R2R) techniques. Ultimately, with the aid of this in process measurement system, it should be possible to monitor the coating surface process of large-area substrates, and if necessary, carry out remedial work on the process parameters

In-situ defect detection systems for R2R flexible PV films

The atomic layer deposition technique (ALD) is used to apply a thin (40-100 nm thick) barrier coating of Al2O3 on polymer substrates for flexible PV cells, to minimise and control the degradation caused by water vapour ingress. However, defects appearing on the film surfaces during the Al2O3 ALD growth have been seen to be highly significant in deterioration of the PV module efficiency and lifespan [1]. In order to improve the process yield and product efficiency, it is desirable to develop an inspection system that can detect transparent barrier film defects in the production line during film processing. Off-line detection of defects in transparent PV barrier films is difficult and time consuming. Consequently, implementing an accurate in-situ defects inspection system in the production environment is even more challenging, since the requirements on positioning, fast measurement, long term stability and robustness against environmental disturbance are demanding. For in-situ R2R defects inspection systems the following conditions need to be satisfied by the inspection tools. Firstly the measurement must be fast and have no physical contact with the inspected film surface. Secondly the measurement system must be robust against the environmental disturbance inspection. Finally the system should have sub-micrometre lateral resolution and nanometre vertical resolution in order to be able to distinguish defects on the film surface. Optical interferometry techniques have the potentially to be used as a solution for such application. However they are extremely sensitive to environmental noise such as mechanical vibration, air turbulence and temperature drift. George [2] reported that a single shot interferometry system “FlexCam” developed by 4D Technology being used currently to detect defects for PV barrier films manufactured by R2R technology. It is robust against environmental disturbances; but it has a limited vertical range, which is restricted by the phase ambiguity of the phase shift interferometry. This vertical measurement range (a few hundreds nanometres) is far less than the normal vertical range of defects (a few micrometres up to a few tens micrometres). It is not possible to detect the majority of defects in the R2R flexible PV barrier films

An integrated opto-mechanical measurement system for in-process defect measurement on a roll-to-roll process

This paper reports on the recent work carried out to develop and implement a high precision on-line optical measurement system with the aim of providing defect detection and characterisation for ALD coated vapour barrier films produced by a roll-to-roll process. This proof-of-concept system is designed to detect and measure pre-existing defects on the film and define their size, location, form and density. The aim is to be able to detect defects in a thin film Al2O3 layer that are critical to vapour barrier performance, and eventually provide valuable process control information. Such an inspection system must be fast in order to evaluate large areas involved (500 mm width foil) at high magnifications. In addition the flexibility of the foil introduces challenges in terms of dealing with surface deviation away from an ideal plane and vibrations. Our solution is a wavelength scanning interferometer (WSI) combined with two kinematic stages, vertical (for auto-focus) and a traverse stage to provide full coverage of the foil. A porous air-bearing conveyor system is used to hold the foil at a fixed height and improve the flatness of the film relative to the measurement plane. This paper describes the principle and design of the inspection system

Implementation of wavelength scanning interferometry for R2R flexible PV barrier films

Roll to Roll manufacture of nano-scale thinf ilm layers faces the challenge of micro/nano-scale defects appearing in the films. Atomic Layer Deposition (ALD) coatings of aluminium oxide, Al2O3 are used as barrier layers for photovoltaic (PV) solar modules where the primary function of the barrier layer is to prevent the water vapour ingress to the PV cells. Barrier layer defects have been shown to have negative impact on the performance of the barrier layers. Poor barriers cause module degradation resulting in reduced PV efficiency and lifespan. In order to ensure the quality of manufacture of the barriers, defects should be detected during the barrier production process and the information used to optimise the production process. This paper introduces, as part of EU funded NanoMend project, a full solution for inspection of entire surface regions of Al2O3 barrier films across large area substrates. The solution principle is based on implementing an opto-mechanical in-process inspection system to measure the significant defects using a wavelength scanning interferometer (WSI) embedded within the film-rewinder stage and integrated with the substrate translation and kinematic stages. The opto-mechanical system allows full surface measurement over full substrate widths of approximately 0.5m. The system provides an auto-focus for the WSI with an accuracy and repeatability better than 6 µm at optimum optical alignment conditions. The system is combined with a porous air-bearing conveyor used to hold the film web at fixed height within the focal depth of WSI objective lens and with height variation of 3 µm is also presented as a case study to highlight the system capability

A computerised data handling procedure for defect detection and analysis for large area substrates manufactured by roll-to-roll process

The development of optical on-line/in-process surface inspection and characterisation systems for flexible roll to roll (R2R) thin film barriers used for photo-voltaic (PV) modules is a core research goal for the EU funded NanoMend project. Micro and nano scale defects in the ALD (atomic layer deposition) Al2O3 barrier coating produced by R2R techniques can affect the PV module efficiency and lifespan. The presence of defects has been shown to have a clear correlation with the water-vapour-transmission-rate (WVTR). Hence, in order to improve the PV cell performance and lifespan the barrier film layer must prevent water vapour ingress. One of the main challenges for the application of in process metrology is how to assess large and multiple measurement data sets obtained from an in process optical instrument. Measuring the surface topography over large area substrates (approximately 500 mm substrate width) with a limited field-of-view (FOV) of the optical instrument will produce hundreds/thousands of measurement files. Assessing each file individually to find and analyse defects manually is time consuming and impractical. This paper reports the basis of a computerised solution to assess these files by monitoring and extracting areal surface topography parameters. Comparing parameter values to an experimentally determined threshold value, obtained from extensive lab-based measurement of Al2O3 ALD coated films, can indicate the existence of the defects within a given FOV. This process can be repeated automatically for chosen parameters and the existence of defects can be indicated for the entire set of measurement files spontaneously without interaction from the inspector. A running defect log and defect statistics associated with the captured set of data files can be generated. This paper outlines the implementation of the auto-defect logging using advanced areal parameters, and its application in a proof of concept system at the Center for Process Innovation (UK) is discussed

In-line metrology of functional surfaces with a focus on defect assessment on large area Roll to Roll substrates

This paper reports on the recent work carried out as part of the initial stages of the EU funded NanoMend project. The project seeks to develop integrated process inspection, cleaning, repair for nano-scale thin films on large area substrates. Flexible photovoltaic (PV) films based on CIGS (Copper Indium Gallium Selenide CuInxGa(1-x)Se2) have been reported to have light energy conversion efficiencies as high as 19%. CIGS based multi-layer flexible devices are fabricated on polymer film by the repeated deposition, and patterning, of thin layer materials using roll-to-roll processes (R2R), where the whole film is approximately 3μm thick prior to final encapsulation. The resultant films are lightweight and easily adaptable to building integration. Current wide scale implementation however is hampered by long term degradation of efficiency due to water ingress to the CIGS modules causing electrical shorts and efficiency drops. The present work reports on the use of areal surface metrology to correlate defect morphology with water vapour transmission rate (WVTR) through the protective barrier coatings

Metrology and Characterisation of Defects in Thin-Film Barrier Layers Employed in Flexible Photovoltaic Modules

Flexible thin-film photovoltaic (PV) modules based on copper indium gallium selenide (CIGS) materials are one of the most recent developments in the renewable energy field, and the latest films have efficiencies at or beyond the level of Si-based rigid PV modules. Whilst these films offer significant advantages in terms of mass and the possibility of building-integrated photovoltaic (BIPV) applications, they are at present highly susceptible to long term environmental degradation as a result of water vapour transmission through the protective encapsulation layer to the active (absorber) layer. To maintain the PV module flexibility and to reduce or eliminate the water vapour permeability, the PV encapsulation includes a barrier layer of amorphous aluminium oxide (Al2O3) material of a few nanometres thickness deposited on a planarised polyethylene naphthalate (PEN) substrate. The highly conformal barrier layer of the Al2O3 is produced by atomic layer deposition (ALD) methods using roll-to-roll (R2R) technology. Nevertheless, water vapour permeation is still facilitated by the presence of micro and nano-scale defects generated during the deposition processes of the barrier material, which results in decreased cell efficiency and reduced unit longevity. The state of the art surface metrology technologies including: optical microscopy, white light scanning interferometry (WLSI), atomic force microscopy (AFM) and scanning electron microscopy (SEM) were extensively deployed in this project as offline surface characterisation methods to characterise the water vapour barrier layer defects, which are postulated to be directly responsible for the water vapour ingress. Areal surface texture parameters analysis based on wolf pruning, area pruning and segmentation analysis methods as defined in ISO 25178-2; allow the efficient separation of small insignificant defects from significant defects. The presence of both large and small defects is then correlated with the barrier films functionality as measured on typical sets of Al2O3 ALD films using a standard MOCON® (quantitative gas permeation) test. The investigation results of the initial analysis finishes by drawing conclusions based on the analysis of the water vapour transmission rate (WVTR), defects size, density and distribution, where it is confirmed that small numbers of large defects have more influence on the deterioration of the barrier films functionality than large numbers of small defects. This result was then used to provide the basis for developing a roll-to-roll in process metrology device for quality control of flexible PV barrier films. Furthermore, a theoretical model approach was developed in this thesis based on the water vapour diffusion theory to determine the cut- off level between large significant defects and small insignificant defects. The results of the model would seem to reveal that, in order to build up in process, non-contact optical defect detection system for R2R barrier films, the critical spatial resolution required for defect detection need not be less than 3 μm laterally and 3Sq nm (Sq= root mean square surface roughness deviation of non-defective sample area) per field of view (FOV) vertically. Any defect that has dimensions less than this appears to have a significantly lower effect on the PV barrier properties and functionality. In this study, the surface topography analysis results and the theoretical model approach outcomes, both provide the basis for developing a R2R in process metrology device for PV barrier films defect detection. Eventually, the work in this thesis reports on the deployment of new (novel) in-line interferometric optical sensors based on wavelength scanning interferometry (WSI) designed to measure and catalogue the PV barrier films defects where they are present. The sensors have built-in environmental vibration compensation and are being deployed on a demonstrator system at a R2R production facility in the UK

Implementation of line-scan dispersive interferometry for defect detection

Surface assurance is one of the main concerns for advanced manufacturing technologies such as Roll-to-Roll (R2R) technique. The undesired defects present on the barrier films make R2R products suffer from a low efficiency and short life span. In order to enhance the performance and the yield of the products, an inspection system enabling in-line metrology of functional surfaces in production lines is desirable to optimise the manufacturing processes. This paper reports an instantaneous line-scan dispersive interferometry which has sufficient resolutions and nano-scale measurement repeatability to detect defects on flexible PV films. Free from any mechanical scanning and obtaining a surface profile in a single shot allows this setup to minimise environmental effects and to be used on the shop floor. The captured spectral interferogram is analysed using a FFT based algorithm, and the process time can be accelerated through data parallelism using a graphics processing unit (GPU). The performance of the developed system was evaluated experimentally by measuring the polyethylene naphthalate (PEN) films provided by the Centre for Process Innovation (CPI). The experimental details and results are presented in this paper

Investigation of Line-Scan Dispersive Interferometry for In-Line Surface Metrology

Advanced manufacturing techniques enable ultra-precision surfaces to be fabricated with various complicated and large-area structures. For instance, the cost-effectiveness of Roll-to-Roll (R2R) manufacturing technology has been widely demonstrated in industries making high volume as well as large-area foil products and flexible electronics. Evaluation of these fine surfaces by an expensive trial-and-error approach is unadvisable due to the high scrap rate. Therefore quality control using in-line metrology of the functional surface plays an important role in the success of employing R2R technology by enabling a high product yield whilst guaranteeing high performance and a long lifespan of these multi-layer products. This thesis presents an environmentally robust line-scan dispersive interferometry (LSDI) technique that is suitable for applications in in-line surface inspection. Obtaining a surface profile in a single shot allows this interferometer to minimise the effect of external perturbations and environmental noise. Additionally, it eliminates the mechanical scanning and has an extended axial measurement range without the 2π phase ambiguity problem by dispersing the output of the spectrometer onto the camera. Benefiting from high-speed camera, general-purpose graphics processing unit and multi-core processor computing technology, the LSDI can achieve high dynamic measurement with a high signal-to-noise ratio and is effective for use on the shop floor. Two proof-of-concept prototypes aimed at different applications are implemented. The cylindrical lens based prototype has a large lateral range up to 6 mm and can be used for characterisation of additively manufactured surface texture, surface form and surface blemish. The second prototype using a 4X microscope objective with a diffraction limited lateral resolution (~ 4 µm) is aiming at characterisation of surface roughness, micro-scale defects, and other imperfections of the ultra-precision surfaces. System design, implementation, fringe analysis algorithms and system calibrations are presented in detail in this thesis. Their performances are evaluated experimentally by measuring several standard step heights as well as Al2O3 coated polyethylene naphthalate (PEN) films. The measurement results acquired using both prototypes and a commercial available instrument (Talysurf CCI 3000) align with each other acceptably. This shows that the developed metrology sensors may potentially be applied to production lines such as R2R surface inspection where only defects present on the surface are concerned in terms of quality assurance. Implementation of these prototypes offers an attractive solution to improve manufacturing processing and reliability for the products in ultra-highprecision engineering