Physics-Informed Optical Kernel Regression Using Complex-valued Neural Fields

Lithography is fundamental to integrated circuit fabrication, necessitating large computation overhead. The advancement of machine learning (ML)-based lithography models alleviates the trade-offs between manufacturing process expense and capability. However, all previous methods regard the lithography system as an image-to-image black box mapping, utilizing network parameters to learn by rote mappings from massive mask-to-aerial or mask-to-resist image pairs, resulting in poor generalization capability. In this paper, we propose a new ML-based paradigm disassembling the rigorous lithographic model into non-parametric mask operations and learned optical kernels containing determinant source, pupil, and lithography information. By optimizing complex-valued neural fields to perform optical kernel regression from coordinates, our method can accurately restore lithography system using a small-scale training dataset with fewer parameters, demonstrating superior generalization capability as well. Experiments show that our framework can use 31% of parameters while achieving 69$\times$ smaller mean squared error with 1.3$\times$ higher throughput than the state-of-the-art.Comment: Accepted by DAC2

MaskPlace: Fast Chip Placement via Reinforced Visual Representation Learning

Placement is an essential task in modern chip design, aiming at placing millions of circuit modules on a 2D chip canvas. Unlike the human-centric solution, which requires months of intense effort by hardware engineers to produce a layout to minimize delay and energy consumption, deep reinforcement learning has become an emerging autonomous tool. However, the learning-centric method is still in its early stage, impeded by a massive design space of size ten to the order of a few thousand. This work presents MaskPlace to automatically generate a valid chip layout design within a few hours, whose performance can be superior or comparable to recent advanced approaches. It has several appealing benefits that prior arts do not have. Firstly, MaskPlace recasts placement as a problem of learning pixel-level visual representation to comprehensively describe millions of modules on a chip, enabling placement in a high-resolution canvas and a large action space. It outperforms recent methods that represent a chip as a hypergraph. Secondly, it enables training the policy network by an intuitive reward function with dense reward, rather than a complicated reward function with sparse reward from previous methods. Thirdly, extensive experiments on many public benchmarks show that MaskPlace outperforms existing RL approaches in all key performance metrics, including wirelength, congestion, and density. For example, it achieves 60%-90% wirelength reduction and guarantees zero overlaps. We believe MaskPlace can improve AI-assisted chip layout design. The deliverables are released at https://laiyao1.github.io/maskplace

Improved Physical Design for Manufacturing Awareness and Advanced VLSI

Increasing challenges arise with each new semiconductor technology node, especially in advanced nodes, where the industry tries to extract every ounce of benefit as it approaches the limits of physics, through manufacturing-aware design technology co-optimization and design-based equivalent scaling. The increasing complexity of design and process technologies, and ever-more complex design rules, also become hurdles for academic researchers, separating academic researchers from the most up-to-date technical issues.This thesis presents innovative methodologies and optimizations to address the above challenges. There are three directions in this thesis: (i) manufacturing-aware design technology co-optimization; (ii) advanced node design-based equivalent scaling; and (iii) an open source academic detailed routing flow.To realize manufacturing-aware design technology co-optimization, this thesis presents two works: (i) a multi-row detailed placement optimization for neighbor diffusion effect mitigation between neighboring standard cells; and (ii) a post-routing optimization to generate 2D block mask layout for dummy segment removal in self-aligned multiple patterning.To achieve advanced node design-based equivalent scaling, this thesis presents two improved physical design methodologies: (i) a post-placement flop tray generation approach for clock power reduction; and (ii) a detailed placement approach to exploit inter-row M1 routing for congestion and wirelength reduction.To address the increasing gap between academia and industry, this thesis presents two works toward an open source academic detailed routing flow: (i) a complete, robust, scalable and design ruleaware dynamic programming-based pin access analysis framework; and (ii) TritonRoute – the open source detailed router that is capable of delivering DRC-clean detailed routing solutions in advanced nodes.This thesis concludes with a summary of its contributions and open directions for future research