162 research outputs found

    Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors

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    The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement

    Inductively Coupled CMOS Power Receiver For Embedded Microsensors

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    Inductively coupled power transfer can extend the lifetime of embedded microsensors that save costs, energy, and lives. To expand the microsensors' functionality, the transferred power needs to be maximized. Plus, the power receiver needs to handle wide coupling variations in real applications. Therefore, the objective of this research is to design a power receiver that outputs the highest power for the widest coupling range. This research proposes a switched resonant half-bridge power stage that adjusts both energy transfer frequency and duration so the output power is maximally high. A maximum power point (MPP) theory is also developed to predict the optimal settings of the power stage with 98.6% accuracy. Finally, this research addresses the system integration challenges such as synchronization and over-voltage protection. The fabricated self-synchronized prototype outputs up to 89% of the available power across 0.067%~7.9% coupling range. The output power (in percentage of available power) and coupling range are 1.3× and 13× higher than the comparable state of the arts.Ph.D

    Integrated sensors for process monitoring and health monitoring in microsystems

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    This thesis presents the development of integrated sensors for health monitoring in Microsystems, which is an emerging method for early diagnostics of status or “health” of electronic systems and devices under operation based on embedded tests. Thin film meander temperature sensors have been designed with a minimum footprint of 240 m × 250 m. A microsensor array has been used successfully for accurate temperature monitoring of laser assisted polymer bonding for MEMS packaging. Using a frame-shaped beam, the temperature at centre of bottom substrate was obtained to be ~50 ºC lower than that obtained using a top-hat beam. This is highly beneficial for packaging of temperature sensitive MEMS devices. Polymer based surface acoustic wave humidity sensors were designed and successfully fabricated on 128° cut lithium niobate substrates. Based on reflection signals, a sensitivity of 0.26 dB/RH% was achieved between 8.6 %RH and 90.6 %RH. Fabricated piezoresistive pressure sensors have also been hybrid integrated and electrically contacted using a wire bonding method. Integrated sensors based on both LiNbO3 and ZnO/Si substrates are proposed. Integrated sensors were successfully fabricated on a LiNbO3 substrate with a footprint of 13 mm × 12 mm, having multi monitoring functions for simultaneous temperature, measurement of humidity and pressure in the health monitoring applications

    Interface Circuits for Microsensor Integrated Systems

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    ca. 200 words; this text will present the book in all promotional forms (e.g. flyers). Please describe the book in straightforward and consumer-friendly terms. [Recent advances in sensing technologies, especially those for Microsensor Integrated Systems, have led to several new commercial applications. Among these, low voltage and low power circuit architectures have gained growing attention, being suitable for portable long battery life devices. The aim is to improve the performances of actual interface circuits and systems, both in terms of voltage mode and current mode, in order to overcome the potential problems due to technology scaling and different technology integrations. Related problems, especially those concerning parasitics, lead to a severe interface design attention, especially concerning the analog front-end and novel and smart architecture must be explored and tested, both at simulation and prototype level. Moreover, the growing demand for autonomous systems gets even harder the interface design due to the need of energy-aware cost-effective circuit interfaces integrating, where possible, energy harvesting solutions. The objective of this Special Issue is to explore the potential solutions to overcome actual limitations in sensor interface circuits and systems, especially those for low voltage and low power Microsensor Integrated Systems. The present Special Issue aims to present and highlight the advances and the latest novel and emergent results on this topic, showing best practices, implementations and applications. The Guest Editors invite to submit original research contributions dealing with sensor interfacing related to this specific topic. Additionally, application oriented and review papers are encouraged.

    Advanced instrumentation: Technology database enhancement, volume 4, appendix G

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    The purpose of this task was to add to the McDonnell Douglas Space Systems Company's Sensors Database, including providing additional information on the instruments and sensors applicable to physical/chemical Environmental Control and Life Support System (P/C ECLSS) or Closed Ecological Life Support System (CELSS) which were not previously included. The Sensors Database was reviewed in order to determine the types of data required, define the data categories, and develop an understanding of the data record structure. An assessment of the MDSSC Sensors Database identified limitations and problems in the database. Guidelines and solutions were developed to address these limitations and problems in order that the requirements of the task could be fulfilled

    High frequency acousto-electric microsensors for liquid analysis

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    Liquid sensors are required for a multitude of applications in the food and beverage sectors, in the pharmaceutical industry or environmental monitoring. The focus of this work is on the development of high frequency shear horizontal surface acoustic wave (SH-SAW) sensors for liquid media identification and characterisation. Among the various types of surface acoustic wave modes propagating in solids, the SH-SAWs were found to be the most suitable for operation in liquids. Dual delay line and resonator sensor configurations were designed and fabricated on lithium tantalate (LiTa03) substrates; the design and the subsequent fabrication procedures of the sensors are described in detail. Furthermore, the electrical characterization of the sensors was carried out with a network analyser, and a comparative analysis was performed between sensors with different configurations. The interdigital transducers, used as the interface between the electrical and acoustic domains, presented good reflection coefficients and had near perfect matched impedances and return loss figures up to 45 dB. The insertion loss of the sensors varied with the surface conditions while it was improved by using total or partial metallization of the surface or employing grating structures on the propagation path. The SH-SAW devices were exposed to basic taste solutions and all the sensor configurations tested were able to discriminate them well. Measurements were done in both standard wired set-ups and a semi-wireless set-up, thus proving the sensor's capability for remote operation. Further investigations regarding the electronic tongue applicability of the SH-SAW sensors were conducted on a two port resonator device. The resonator was tested with six basic taste solutions, with taste solutions with varying concentrations, with binary mixtures of taste solutions and proved successful in identifying all test samples. A multivariate analysis was performed on the resonator data, and confirmed that the sensor's responses are influenced by the physical properties of the tested solutions. The multiple linear models derived are statistically significant and can explain high percentage of the data variability, offering a simplified alternative to the complex analytical models of the SH-SAW sensors. Also, a voltage modulated sensor system was proposed for smart assaying of biomaterials and its operation principle is described. The preliminary tests carried out showed a significant voltage effect on carbon nanoparticles. The voltage modulated system is proposed as an analytical microsystem for the screening of bacterial cells. All sensors in this project had no bio-chemical selective layer making them nonspecific, yet they create robust, durable and low-cost systems

    Micro-Fabricated Hydrogen Sensors Operating at Elevated Temperatures

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    In this dissertation, three types of microfabricated solid-state sensors had been designed and developed on silicon wafers, aiming to detect hydrogen gas at elevated temperatures. Based on the material properties and sensing mechanisms, they were operated at 140°C, 500°C, and 300°C. The MOS-capacitor device working at 140°C utilized nickel instead of the widely-used expensive palladium, and the performance remained excellent. For very-high temperature sensing (500°C), the conductivity of the thermally oxidized TiO2 thin film based on the anodic aluminum oxide (AAO) substrate changed 25 times in response to 5 ppm H2 and the response transient times were just a few seconds. For medium-high temperatures (~300°C), very high sensitivity (over 100 times’ increment of current for H2 concentration at 10 ppm) was obtained through the reversible reduction of the Schottky barrier height between the Pt electrodes and the SnO2 nano-clusters. Fabrication approaches of these devices included standard silicon wafer processing, thin film deposition, and photolithography. Materials characterization methods, such as scanning electron microscopy (SEM), atomic force microscopy (AFM), surface profilometry, ellipsometry, and X-ray diffractometry (XRD), were involved in order to investigate the fabricated nano-sized structures. Selectivities of the sensors to gases other than H2 (CO and CH4) were also studied. The first chapter reviews and evaluates the detection methodologies and sensing materials in the current research area of H2 sensors and the devices presented this Ph.D. research were designed with regard to the evaluations

    Abstracts of Papers, 81st Annual Meeting of the Virginia Academy of Science, May 27-30, 2003, University of Virginia, Charlottesville, Virginia

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    Abstracts of papers that were presented at the 81st Annual Meeting of the Virginia Academy of Science, May 27-30, 2003

    Solid State Circuits Technologies

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    The evolution of solid-state circuit technology has a long history within a relatively short period of time. This technology has lead to the modern information society that connects us and tools, a large market, and many types of products and applications. The solid-state circuit technology continuously evolves via breakthroughs and improvements every year. This book is devoted to review and present novel approaches for some of the main issues involved in this exciting and vigorous technology. The book is composed of 22 chapters, written by authors coming from 30 different institutions located in 12 different countries throughout the Americas, Asia and Europe. Thus, reflecting the wide international contribution to the book. The broad range of subjects presented in the book offers a general overview of the main issues in modern solid-state circuit technology. Furthermore, the book offers an in depth analysis on specific subjects for specialists. We believe the book is of great scientific and educational value for many readers. I am profoundly indebted to the support provided by all of those involved in the work. First and foremost I would like to acknowledge and thank the authors who worked hard and generously agreed to share their results and knowledge. Second I would like to express my gratitude to the Intech team that invited me to edit the book and give me their full support and a fruitful experience while working together to combine this book

    CMOS compatible solidly mounted resonator for air quality monitoring

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    Air pollution has become a growing concern around the world. Human exposure to hazardous air pollutants is associated with a range of health problems and increased mortality. An estimated 40,000 early deaths per year are caused by the exposure to air pollutants in the UK alone, which cost over £20 billion annually to individuals and health services1. In this work, novel solidly mounted resonator (SMR) devices were developed for integration in a low-cost, portable air quality monitor for the real-time monitoring of particulate matter and volatile organic compounds (VOCs). Finite element models of the SMRs were developed to aid their design and simulate the response of the sensors to particles and exposure to VOCs. For particle sensing, a SMR based unit was developed, working in a dual mode configuration. The unit was characterised inside an environmental chamber, together with commercial reference instruments, to particles of known size and composition. A detection limit of 20 μg/m3 was found (below the safe exposure limit). To target fine particles (<2.5 μm), a virtual impactor was incorporated into the system. For VOC detection, the SMR devices were functionalised with polymer coatings to detect acetone and toluene vapours (most common VOCs in air). A polymer drop-coating system was developed to complete this aim (polymer film thicknesses <100nm). An automated VOC test station was developed to characterise the SMR based sensors to low ppm concentrations of the target vapours (<200 ppm). The SMR devices demonstrated a limit of detection of 5 ppm to toluene and 50 ppm of acetone (well below the safe exposure limits). A novel CMOS based SMR device, suitable for volume production and monolithic integration, was designed with an integrated microheater and CMOS acoustic mirror. The heater was included to vary the temperature of the sensing area (to enhance the sensitivity of the SMR to a particular VOC through temperature modulation or to clear particles off the surface). The fabricated device (1.9 GHz) exhibited good performance
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