Performance-driven control of nano-motion systems

The performance of high-precision mechatronic systems is subject to ever increasing demands regarding speed and accuracy. To meet these demands, new actuator drivers, sensor signal processing and control algorithms have to be derived. The state-of-the-art scientific developments in these research directions can significantly improve the performance of high-precision systems. However, translation of the scientific developments to usable technology is often non-trivial. To improve the performance of high-precision systems and to bridge the gap between science and technology, a performance-driven control approach has been developed. First, the main performance limiting factor (PLF) is identified. Then, a model-based compensation method is developed for the identified PLF. Experimental validation shows the performance improvement and reveals the next PLF to which the same procedure is applied. The compensation method can relate to the actuator driver, the sensor system or the control algorithm. In this thesis, the focus is on nano-motion systems that are driven by piezo actuators and/or use encoder sensors. Nano-motion systems are defined as the class of systems that require velocities ranging from nanometers per second to millimeters per second with a (sub)nanometer resolution. The main PLFs of such systems are the actuator driver, hysteresis, stick-slip effects, repetitive disturbances, coupling between degrees-of-freedom (DOFs), geometric nonlinearities and quantization errors. The developed approach is applied to three illustrative experimental cases that exhibit the above mentioned PLFs. The cases include a nano-motion stage driven by a walking piezo actuator, a metrological AFM and an encoder system. The contributions of this thesis relate to modeling, actuation driver development, control synthesis and encoder sensor signal processing. In particular, dynamic models are derived of the bimorph piezo legs of the walking piezo actuator and of the nano-motion stage with the walking piezo actuator containing the switching actuation principle, stick-slip effects and contact dynamics. Subsequently, a model-based optimization is performed to obtain optimal drive waveforms for a constant stage velocity. Both the walking piezo actuator and the AFM case exhibit repetitive disturbances with a non-constant period-time, for which dedicated repetitive control methods are developed. Furthermore, control algorithms have been developed to cope with the present coupling between and hysteresis in the different axes of the AFM. Finally, sensor signal processing algorithms have been developed to cope with the quantization effects and encoder imperfections in optical incremental encoders. The application of the performance-driven control approach to the different cases shows that the different identified PLFs can be successfully modeled and compensated for. The experiments show that the performance-driven control approach can largely improve the performance of nano-motion systems with piezo actuators and/or encoder sensors

DEVELOPMENT OF A NOVEL Z-AXIS PRECISION POSITIONING STAGE WITH MILLIMETER TRAVEL RANGE BASED ON A LINEAR PIEZOELECTRIC MOTOR

Piezoelectric-based positioners are incorporated into stereotaxic devices for microsurgery, scanning tunneling microscopes for the manipulation of atomic and molecular-scale structures, nanomanipulator systems for cell microinjection and machine tools for semiconductor-based manufacturing. Although several precision positioning systems have been developed for planar motion, most are not suitable to provide long travel range with large load capacity in vertical axis because of their weights, size, design and embedded actuators. This thesis develops a novel positioner which is being developed specifically for vertical axis motion based on a piezoworm arrangement in flexure frames. An improved estimation of the stiffness for Normally Clamped (NC) clamp is presented. Analytical calculations and finite element analysis are used to optimize the design of the lifting platform as well as the piezoworm actuator to provide maximum thrust force while maintaining a compact size. To make a stage frame more compact, the actuator is integrated into the stage body. The complementary clamps and the amplified piezoelectric actuators based extenders are designed such that no power is needed to maintain a fixed vertical position, holding the payload against the force of gravity. The design is extended to a piezoworm stage prototype and validated through several tests. Experiments on the prototype stage show that it is capable of a speed of 5.4 mm/s, a force capacity of 8 N and can travel over 16 mm

The Roles of Piezoelectric Ultrasonic Motors in Industry 4.0 Era: Opportunities & Challenges

Piezoelectric Ultrasonic motors (USM) are based on the principle of converse piezoelectric effect i.e., vibrations occur when an electrical field is applied to piezoelectric materials. USMs have been studied several decades for their advantages over traditional electromagnetic motors. Despite having many advantages, they have several challenges too. Recently many researchers have started focusing on Industry 4.0 or Fourth Industrial revolution phase of the industry which mostly emphasis on digitization & interconnection of the entities throughout the life cycle of the product in an industrial network to get the best possible output. Industry 4.0 utilizes various advanced tools for carrying out the nexus between the entities & bringing up them on digital platform. The studies of the role of USMs in Industry 4.0 scenario has never been done till now & this article fills that gap by analyzing the piezoelectric ultrasonic motors in depth & breadth in the background of Industry 4.0. This article delivers the novel working principle, illustrates examples for effective utilization of USMs, so that it can buttress the growth of Industry 4.0 Era & on the other hand it also analyses the key Industry 4.0 enabling technologies to improve the performance of the USMs

PKM mechatronic clamping adaptive device

This study proposes a novel adaptive fixturing device based on active clamping systems for smart micropositioning of thin-walled precision parts. The modular architecture and the structure flexibility make the system suitable for various industrial applications. The proposed device is realized as a Parallel Kinematic Machine (PKM), opportunely sensorized and controlled, able to perform automatic error-free workpiece clamping procedures, drastically reducing the overall fixturing set-up time. The paper describes the kinematics and dynamics of this mechatronic system. A first campaign of experimental trails has been carried out on the prototype, obtaining promising results

Desktop microfactory

Micro technology is continuously progressing towards smaller, smarter and reliable forms. Consequently, demand for such miniature and complex systems is arising rapidly in various fields such as industry, medicine, aerospace and automotive. Such fast development of micro technology is achieved thanks to improvements in micromanufacturing tools and techniques. Miniaturization of the machinery and manufacturing equipment is emerging to be an attractive idea that would eventually solve many of the issues existing in conventional micro-manufacturing. This work presents a modular and reconfigurable desktop microfactory for high precision assembly and machining of micro mechanical parts as proof of concept inspired by the downsizing trend of the production tools. The system is constructed based on primary functional and performance requirements such as miniature size, operation with sub-millimeter precision, modular and reconfigurable structure, parallel processing capability, ease of transportation and integration. Proposed miniature factory consists of downsized functional modules such as two parallel kinematic robots for manipulation and assembly, galvanometric laser beam scanning system for micromachining, high precision piezoelectric positioning stage, camera system for detection and inspection, and a rotational conveyor system. Each of the listed modules is designed and tested for fine precision tasks separately and results are presented. Design comprises development of mechanics, electronics and controller for the modules individually. Once stand-alone operation of each unit is achieved further assembly to a single microfactory system is considered. The overall mechanical structure of the proposed microfactory facilitates parallel processing, flexible rearrangement of the layout, and ease of assembling and disassembling capabilities. These important steps are taken to investigate possibilities of a microfactory concept for production of microsystems in near future

Wearable Sensors and Smart Devices to Monitor Rehabilitation Parameters and Sports Performance: An Overview

A quantitative evaluation of kinetic parameters, the joint’s range of motion, heart rate, and breathing rate, can be employed in sports performance tracking and rehabilitation monitoring following injuries or surgical operations. However, many of the current detection systems are expensive and designed for clinical use, requiring the presence of a physician and medical staff to assist users in the device’s positioning and measurements. The goal of wearable sensors is to overcome the limitations of current devices, enabling the acquisition of a user’s vital signs directly from the body in an accurate and non–invasive way. In sports activities, wearable sensors allow athletes to monitor performance and body movements objectively, going beyond the coach’s subjective evaluation limits. The main goal of this review paper is to provide a comprehensive overview of wearable technologies and sensing systems to detect and monitor the physiological parameters of patients during post–operative rehabilitation and athletes’ training, and to present evidence that supports the efficacy of this technology for healthcare applications. First, a classification of the human physiological parameters acquired from the human body by sensors attached to sensitive skin locations or worn as a part of garments is introduced, carrying important feedback on the user’s health status. Then, a detailed description of the electromechanical transduction mechanisms allows a comparison of the technologies used in wearable applications to monitor sports and rehabilitation activities. This paves the way for an analysis of wearable technologies, providing a comprehensive comparison of the current state of the art of available sensors and systems. Comparative and statistical analyses are provided to point out useful insights for defining the best technologies and solutions for monitoring body movements. Lastly, the presented review is compared with similar ones reported in the literature to highlight its strengths and novelties

A PRECISION INSTRUMENT FOR RESEARCH INTO NANOLITHOGRAPHIC TECHNIQUES USING FIELD-EMITTED ELECTRON BEAMS

Nanomanufacturing is an active research area in academia and industry due to the ever-growing demands for precision surface modifications of thin films or substrates with nanoscale features. Conventional lithographic techniques face many challenges as they approach their fundamental limits. Consequently, new nanomanufacturing tools, fabrication techniques, and precision instruments are being explored and developed to meet these challenges. It has been hypothesized that direct-write nanolithography might be achieved by using a field-emitted electron beam for nanomachining. This dissertation moves this research one step closer by developing a precision instrument that can enable the integration of direct-write nanolithography by a field-emitted electron beam with dimensional metrology by scanning tunneling microscopy. First, field emission from two prospective electron sources, a carbon nanotube field emitter and a sharp tungsten field emitter, is characterized at distances ranging from sub-micrometer to a few micrometers. Also, the design and construction of a low thermal drift piezoelectric linear motor is described for tip-sample approach. Experiments indicate that: the step size is highly repeatable with a standard deviation of less than 1.2 nm and the thermal stability is better than 40 nm/◦C. Finally, the design and construction of the instrument are presented. Experiments indicate that: the instrument is operating properly in scanning tunneling microscope mode with a resolution of less than 2 Å

A Health Monitoring System Based on Flexible Triboelectric Sensors for Intelligence Medical Internet of Things and its Applications in Virtual Reality

The Internet of Medical Things (IoMT) is a platform that combines Internet of Things (IoT) technology with medical applications, enabling the realization of precision medicine, intelligent healthcare, and telemedicine in the era of digitalization and intelligence. However, the IoMT faces various challenges, including sustainable power supply, human adaptability of sensors and the intelligence of sensors. In this study, we designed a robust and intelligent IoMT system through the synergistic integration of flexible wearable triboelectric sensors and deep learning-assisted data analytics. We embedded four triboelectric sensors into a wristband to detect and analyze limb movements in patients suffering from Parkinson's Disease (PD). By further integrating deep learning-assisted data analytics, we actualized an intelligent healthcare monitoring system for the surveillance and interaction of PD patients, which includes location/trajectory tracking, heart monitoring and identity recognition. This innovative approach enabled us to accurately capture and scrutinize the subtle movements and fine motor of PD patients, thus providing insightful feedback and comprehensive assessment of the patients conditions. This monitoring system is cost-effective, easily fabricated, highly sensitive, and intelligent, consequently underscores the immense potential of human body sensing technology in a Health 4.0 society

Improving the accuracy of walking piezo motors

Quantum Matter and Optic