Nanoscale precision of 3D polymerisation via polarisation control

A systematic analysis of polarization effects in a direct write femtosecond laser 3D lithography is presented. It is newly shown that coupling between linear polarization of the writing light electric field and temperature gradient can be used to fine-tune feature sizes in structuring of photoresists at a nanoscale. The vectorial Debye focusing is used to simulate polarization effects and a controlled variation up to 20% in the linewidth is shown experimentally for the identical axial extent of the polymerised features. The revealed mechanisms are relevant for a wide range of phenomena of light-matter interaction at tight focusing in laser-tweezers and in plasmonic or dielectric sub-wavelength focusing where strong light intensity and thermal gradients coexist.Comment: 15 pages, 3 figure

A fully integrated high-Q Whispering-Gallery Wedge Resonator

Microresonator devices which posses ultra-high quality factors are essential for fundamental investigations and applications. Microsphere and microtoroid resonators support remarkably high Q's at optical frequencies, while planarity constrains preclude their integration into functional lightwave circuits. Conventional semiconductor processing can also be used to realize ultra-high-Q's with planar wedge-resonators. Still, their full integration with side-coupled dielectric waveguides remains an issue. Here we show the full monolithic integration of a wedge-resonator/waveguide vertically-coupled system on a silicon chip. In this approach the cavity and the waveguide lay in different planes. This permits to realize the shallow-angle wedge while the waveguide remains intact, allowing therefore to engineer a coupling of arbitrary strength between these two. The precise size-control and the robustness against post-processing operation due to its monolithic integration makes this system a prominent platform for industrial-scale integration of ultra-high-Q devices into planar lightwave chips.Comment: 6 pages, 4 figure

Rapid and mask-less laser-processing technique for the fabrication of microstructures in polydimethylsiloxane

We report a rapid laser-based method for structuring polydimethylsiloxane (PDMS) on the micron-scale. This mask-less method uses a digital multi-mirror device as a spatial light modulator to produce a given spatial intensity pattern to create arbitrarily shaped structures via either ablation or multi-photon photo-polymerisation in a master substrate, which is subsequently used to cast the complementary patterns in PDMS. This patterned PDMS mould was then used for micro-contact printing of ink and biological molecules

Chiral microstructures (spirals) fabrication by holographic lithography

We present an optical interference model to create chiral microstructures (spirals) and its realization in photoresist using holographic lithography. The model is based on the interference of six equally-spaced circumpolar linear polarized side beams and a circular polarized central beam. The pitch and separation of the spirals can be varied by changing the angle between the side beams and the central beam. The realization of the model is carried out using the 325 nm line of a He-Cd laser and spirals of sub-micron size are fabricated in photoresist.Comment: 6 page

Efficient synthesis of Vitamin D3 in a 3D ultraviolet photochemical microreactor fabricated using an ultrafast laser

Large-scale, high-precision, and high-transparency microchannels hold great potential for developing high-performance continuous-flow photochemical reactions. We demonstrate ultrafast laser-enabled fabrication of 3D microchannel reactors in ultraviolet (UV) grade fused silica which exhibit high transparency under the illumination of UV light sources of wavelengths well below 300 nm with excellent mixing efficiency. With the fabricated glass microchannel reactors, we demonstrate continuous-flow UV photochemical synthesis of vitamin D3 with low power consumption of the UV light sources

Three-dimensional femtosecond laser nanolithography of crystals

Nanostructuring hard optical crystals has so far been exclusively feasible at their surface, as stress induced crack formation and propagation has rendered high precision volume processes ineffective. We show that the inner chemical etching reactivity of a crystal can be enhanced at the nanoscale by more than five orders of magnitude by means of direct laser writing. The process allows to produce cm-scale arbitrary three-dimensional nanostructures with 100 nm feature sizes inside large crystals in absence of brittle fracture. To showcase the unique potential of the technique, we fabricate photonic structures such as sub-wavelength diffraction gratings and nanostructured optical waveguides capable of sustaining sub-wavelength propagating modes inside yttrium aluminum garnet crystals. This technique could enable the transfer of concepts from nanophotonics to the fields of solid state lasers and crystal optics.Comment: Submitted Manuscript and Supplementary Informatio

FABRICATION OF MAGNETIC TWO-DIMENSIONAL AND THREE-DIMENSIONAL MICROSTRUCTURES FOR MICROFLUIDICS AND MICROROBOTICS APPLICATIONS

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods can only fabricate flat, layered geometries; the few that can fabricate real 3D microstructures are not cost efficient and cannot realize mass production. This dissertation explores two solutions to these microfabrication problems: first, a method for integrating magnetically responsive regions into microstructures using photolithography, and second, a method for creating three-dimensional freestanding microstructures using a modified micromolding technique. The first method is a facile method of producing inexpensive freestanding photopatternable polymer micromagnets composed NdFeB microparticles dispersed in SU-8 photoresist. The microfabrication process is capable of fabricating polymer micromagnets with 3 µm feature resolution and greater than 10:1 aspect ratio. This method was used to demonstrate the creation of freestanding microrobots with an encapsulated magnetic core. A magnetic control system was developed and the magnetic microrobots were moved along a desired path at an average speed of 1.7 mm/s in a fluid environment under the presence of external magnetic field. A microfabrication process using aligned mask micromolding and soft lithography was also developed for creating freestanding microstructures with true 3D geometry. Characterization of this method and resolution limits were demonstrated. The combination of these two microfabrication methods has great potential for integrating several material types into one microstructure for a variety of applications

Optically Micro-fabricated Linear and Freeform 3-D Extracellular Matrix Scaffolds for Tissue Engineering

This work was aimed at advancing multi-photon excited, freeform fabrication technology with nano-scale and sub-micron precision as an enabler for tissue engineers to investigate cellular response to a biomimetic, bio-active extracellular matrix. We demonstrated that sub-micron and micron scale Collagen and Fibronectin structures can be fabricated via multi-photon excited photochemistry using a modified Benzophenone dimer and Rose Bengal while maintaining the biomimetic ECM structures’ bioactivity. We confirmed that three-photon excitation produces significantly smaller features at comparable excitation wavelengths as a consideration to better approach focal adhesion size. Bioactivity of MPE cross-linked FN and Collagens I and II was established via immunofluorescence and fibroblast adhesion. Additionally, the relative rates of degradation in these cross-linked matrices are consistent with the known activities of these enzymes. Morphology measurements of fibroblasts grown on these proteins include log(Area), Perimeter, Area/Perimeter2 were considered as proxies for cell response. Fibroblast perimeters are statistically different when associated with the Collagen I microenvironment. Among fibroblasts grown on MPE structures of Collagen I, Fibronectin, BSA and the BSA Monolayer, the stress fiber distributions on Collagen I (all fiber lengths) are highly significantly different (p \u3c 1x10-4) than the distribution of stress fibers of cells on BSA Lines. This suggests contact guidance only for cells on BSA Lines but yet a combination of contact guidance and chemical signaling (RGD) with cells on Collagen I Lines. This supports additional overall orientation findings based on fibroblasts’ fitted ellipse major axis direction for Collagens I, II and Fibronectin. Stress fiber distribution on BSA Monolayer differed significantly from those on BSA structures (p = 0.01). This underscores the effects of pure contact guidance alone provided by the BSA fibers compared to the combined contact guidance and ECM cues provided by the FN, and collagen structures. A method similar to rapid prototyping or three-dimensional printing was accomplished to resolve cellular response at the submicron level by fabricating biomimetic, bioactive extracellular matrices in a freeform three-dimensional (3D) manner. To the best of our knowledge, simultaneous 3D spatial and chemical control of collagen scaffold synthesis at the micrometer and sub-micrometer size scales has not been fully demonstrated