Heterogeneous 2.5D integration on through silicon interposer

© 2015 AIP Publishing LLC. Driven by the need to reduce the power consumption of mobile devices, and servers/data centers, and yet continue to deliver improved performance and experience by the end consumer of digital data, the semiconductor industry is looking for new technologies for manufacturing integrated circuits (ICs). In this quest, power consumed in transferring data over copper interconnects is a sizeable portion that needs to be addressed now and continuing over the next few decades. 2.5D Through-Si-Interposer (TSI) is a strong candidate to deliver improved performance while consuming lower power than in previous generations of servers/data centers and mobile devices. These low-power/high-performance advantages are realized through achievement of high interconnect densities on the TSI (higher than ever seen on Printed Circuit Boards (PCBs) or organic substrates), and enabling heterogeneous integration on the TSI platform where individual ICs are assembled at close proximity

The Study of Ultra-thin Diffusion Barrier in Copper Interconnect System

Ph.DDOCTOR OF PHILOSOPH

Copper / low-k technological platform for the fabrication of high quality factor above-IC passive devices

Modern communication devices demand challenging specifications in terms of miniaturization, performance, power consumption and cost. Every new generation of radio frequency integrated circuits (RF-ICs) offer better functionality at reduced size, power consumption and cost per device and per integrated function. Passive devices (resistors, inductors, capacitors, antennas and transmission lines) represent an important part of the cost and size of RF circuits. These components have not evolved at the same level of the transistor devices, especially because their performance is strongly degenerated when they scale down in size. The low resistivity silicon used to build the transistors also imposes prohibitive levels of RF losses to these passive devices. Radio frequency microelectromechanical systems (RF MEMS) are enabling technologies capable to bring significant improvement in the electrical performances and expressive size and cost reduction of these functions, with unparallel introduction of new functionalities, unimaginable to attain when using bulky, externally connected discrete components. High quality factor (Q) inductors are amongst ones of the most needed components in RF circuits and at the same time ones that are most affected by thin metallization and substrate related losses, demanding considerable research effort. This thesis presents a contribution toward the development of thick metal fabrication technologies, covering also the design, modeling and characterization of high quality factor and high self-resonant frequency (SRF) RF MEMS passive devices, with a special emphasis on spiral inductors. A new approach using damascene-like interconnect fabrication steps associated to low κ dielectrics (polyimide), highly-conductive thick copper electroplating, chemical mechanical polishing (CMP) and tailored substrate properties delivered quality factors in excess of 40 and self resonant frequencies in excess of 10 GHz, performances in the current state-of-the-art for integrated spiral inductors built on top of silicon wafers. Furthermore, the developed process steps are compatible with back-end processing used to fabricate modern IC interconnects and have a low thermal budget (< 250 °C), what makes it a good choice to build above-IC passives without degenerating the performance of passivated RF-CMOS circuits. Deep reactive ion etching (DRIE) of quartz substrates was also studied for the fabrication of spiral inductors, offering excellent RF performances (Q exceeding 40 and SRF exceeding 7 GHz). A new doubly-functional quartz packaging concept for RF MEMS devices was developed. This technique process both sides of the packaging wafer: the top is used to embed high quality factor copper inductors while the bottom is thermo-mechanically bonded to another RF MEMS wafer, offering a semi-hermetic SU-8 epoxy-based seal. The bonding process was optimized for high yield, to be compatible with SF6-plasma-released MEMS and to present low level of RF losses. Band pass filters for the GSM (1.8 GHz) and WLAN (5.2 GHz) standards were fabricated and characterized by RF measurements and full wave electromagnetic simulations. Although further development is need in order to predict the frequency response accurately, insertion losses as low as 1.2 dB were demonstrated, levels that cannot be usually attained using on-chip passives. Systematic analysis, RF measurements, electromagnetic simulations and equivalent circuit extraction were used to model the behavior of the fabricated devices and establish a methodology to deliver optimum performances for a given technological profile and specified performance targets (quality factor, inductance and frequency bandwidth). A simple yet accurate physics-based analytical model for spiral inductors was developed and proved to be accurate in terms of loss estimation for thick metal layers. This model is capable to accurately describe the frequency-dependent behavior of the device below its first resonant frequency over a large device design space. The model was validated by both measurements and full wave electromagnetic simulations and is well suited to perform numeric optimization of designs. The proposed models were also systematized in a Matlab® toolbox

Improving Phase Change Memory (PCM) and Spin-Torque-Transfer Magnetic-RAM (STT-MRAM) as Next-Generation Memories: A Circuit Perspective

In the memory hierarchy of computer systems, the traditional semiconductor memories Static RAM (SRAM) and Dynamic RAM (DRAM) have already served for several decades as cache and main memory. With technology scaling, they face increasingly intractable challenges like power, density, reliability and scalability. As a result, they become less appealing in the multi/many-core era with ever increasing size and memory-intensity of working sets. Recently, there is an increasing interest in using emerging non-volatile memory technologies in replacement of SRAM and DRAM, due to their advantages like non-volatility, high device density, near-zero cell leakage and resilience to soft errors. Among several new memory technologies, Phase Change Memory (PCM) and Spin-Torque-Transfer Magnetic-RAM (STT-MRAM) are most promising candidates in building main memory and cache, respectively. However, both of them possess unique limitations that preventing them from being effectively adopted. In this dissertation, I present my circuit design work on tackling the limitations of PCM and STT-MRAM. At bit level, both PCM and STT-MRAM suffer from excessive write energy, and PCM has very limited write endurance. For PCM, I implement Differential Write to remove large number of unnecessary bit-writes that do not alter the stored data. It is then extended to STT-MRAM as Early Write Termination, with specific optimizations to eliminate the overhead of pre-write read. At array level, PCM enjoys high density but could not provide competitive throughput due to its long write latency and limited number of read/write circuits. I propose a Pseudo-Multi-Port Bank design to exploit intra-bank parallelism by recycling and reusing shared peripheral circuits between accesses in a time-multiplexed manner. On the other hand, although STT-MRAM features satisfactory throughput, its conventional array architecture is constrained on density and scalability by the pitch of the per-column bitline pair. I propose a Common-Source-Line Array architecture which uses a shared source-line along the row, essentially leaving only one bitline per column. For these techniques, I provide circuit level analyses as well as architecture/system level and/or process/device level discussions. In addition, relevant background and work are thoroughly surveyed and potential future research topics are discussed, offering insights and prospects of these next-generation memories

Nanowires for 3d silicon interconnection – low temperature compliant nanowire-polymer film for z-axis interconnect

Semiconductor chip packaging has evolved from single chip packaging to 3D heterogeneous system integration using multichip stacking in a single module. One of the key challenges in 3D integration is the high density interconnects that need to be formed between the chips with through-silicon-vias (TSVs) and inter-chip interconnects. Anisotropic Conductive Film (ACF) technology is one of the low-temperature, fine-pitch interconnect method, which has been considered as a potential replacement for solder interconnects in line with continuous scaling of the interconnects in the IC industry. However, the conventional ACF materials are facing challenges to accommodate the reduced pad and pitch size due to the micro-size particles and the particle agglomeration issue. A new interconnect material - Nanowire Anisotropic Conductive Film (NW-ACF), composed of high density copper nanowires of ~ 200 nm diameter and 10-30 µm length that are vertically distributed in a polymeric template, is developed in this work to tackle the constrains of the conventional ACFs and serves as an inter-chip interconnect solution for potential three-dimensional (3D) applications

Electrical recommendations and formulas for metal fill in radio-frequency integrated circuits

With increasing transistor operating frequencies, interconnects and passive devices are becoming performance limiters in integrated circuit (IC) designs. To combat this, the interconnect layers above the active silicon are trending toward low-κ dielectrics and Cu metallization. The use of these new materials has popularized chemical mechanical polishing (CMP) to planarize the several interconnect layers. Unfortunately, the mechanical trade-offs of CMP require metal pattern density uniformity and additional dummy metal shapes fill in regions of low density. These metal fills act as parasitics that increase the capacitances in interconnects and passive devices – hindering their performance. This work analyzes and optimizes the parasitic capacitive impact of rectangular metal fills on key passive components. Our systematic analysis of fills below a metal-insulator-metal (MIM) capacitor reveals an optimal design: large, square fills with lengths roughly 40% of MIM capacitors plate length. We fabricated such a MIM capacitor in a 250nm process showing a reduction in the substrate capacitance by half (compared to default tiling). Fill’s impact on interconnects, such as transmission lines, is also investigated. A detailed study of schemes that use grounded fills as shielding between interconnects informs an optimal grounding strategy. The strategy provides maximal isolation while minimizing capacitive loading. In fact, compared to no fills the addition of our metal fill shield increases loading by 58% while providing 58dB more isolation between example interconnects fabricated in a 130nm process. The capacitive impact of adding metal fills is found to be more significant as process dimensions shrink. In a 65nm process the inter-level dielectric constant is 3.5, but the addition of 50% density fills causes the effective dielectric constant to be 5.5. A semi-empirical, closed-form formula is developed to calculate this effective dielectric constant. The formula is accurate to within <1% for a wide range of metal fill densities, sizes, aspect ratios, and process dimensions. This is a significant improvement over state-of-the-art formulas which are found to be accurate to within ~10%. Our high accuracy is maintained when applied to multiple layers with and without staggering. Moreover, we successfully apply the formula to calculating ground/substrate capacitances of MIM capacitors, microstrip transmission lines, and a spiral inductor. This may speed up the calculation by hundredfold or even thousandfold. Results are compared to fabricated MIM capacitors and microstrips. Calculations and measurements match to within <5% for the capacitors and <2% for the microstrips

Topical Workshop on Electronics for Particle Physics

The purpose of the workshop was to present results and original concepts for electronics research and development relevant to particle physics experiments as well as accelerator and beam instrumentation at future facilities; to review the status of electronics for the LHC experiments; to identify and encourage common efforts for the development of electronics; and to promote information exchange and collaboration in the relevant engineering and physics communities

Radio Communications

In the last decades the restless evolution of information and communication technologies (ICT) brought to a deep transformation of our habits. The growth of the Internet and the advances in hardware and software implementations modified our way to communicate and to share information. In this book, an overview of the major issues faced today by researchers in the field of radio communications is given through 35 high quality chapters written by specialists working in universities and research centers all over the world. Various aspects will be deeply discussed: channel modeling, beamforming, multiple antennas, cooperative networks, opportunistic scheduling, advanced admission control, handover management, systems performance assessment, routing issues in mobility conditions, localization, web security. Advanced techniques for the radio resource management will be discussed both in single and multiple radio technologies; either in infrastructure, mesh or ad hoc networks