Micro-manufacturing : research, technology outcomes and development issues

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in Micro-manufacturing is also in Non-MEMS-based manufacturing. Research and technological development (RTD) in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid-processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing

A versatile and reconfigurable microassembly workstation

In this paper, a versatile and reconfigurable microassembly workstation designed and realized as a research tool for investigation of the problems in microassembly and micromanipulation processes and recent developments on mechanical and control structure of the system with respect to the previous workstation are presented. These developments include: (i) addition of a manipulator system to realize more complicated assembly and manipulation tasks, (ii) addition of extra DOF for the vision system and sample holder stages in order to make the system more versatile (iii) a new optical microscope as the vision system in order to visualize the microworld and determine the position and orientation of micro components to be assembled or manipulated, (iv) a modular control system hardware which allows handling more DOF. In addition several experiments using the workstation are presented in different modes of operation like tele-operated, semiautomated and fully automated by means of visual based schemes

Modeling of multifunctional porous tissue scaffolds with continuous deposition path plan

A novel modeling technique for porous tissue scaffolds with targeting the functionally gradient variational porosity with continuous material deposition planning has been proposed. To vary the porosity of the designed scaffold functionally, medial axis transformation is used. The medial axis of each layers of the scaffold is calculated and used as an internal feature. The medial axis is then used connected to the outer contour using an optimum matching. The desired pore size and hence the porosity have been achieved by discretizing the sub-regions along its peripheral direction based on the pore size while meeting the tissue scaffold design constraints. This would ensure the truly porous nature of the structure in every direction as well as controllable porosity with interconnected pores. Thus the desired controlled variational porosity along the scaffold architecture has been achieved with the combination of two geometrically oriented consecutive layers. A continuous, interconnected and optimized tool-path has been generated for successive layers for additive-manufacturing or solid free form fabrication process. The proposed methodology has been computationally implemented with illustrative examples. Furthermore, the designed example scaffolds with the desired pore size and porosity has been fabricated with an extrusion based bio-fabrication process

Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Process planning for thick-film mask projection micro stereolithography

Mask Projection micro Stereolithography (MPuSLA) is an additive manufacturing process used to build physical components out of a photopolymer resin. Existing MPuSLA technology cut the CAD model of part into slices by horizontal planes and the slices are stored as bitmaps. A layer corresponding to the shape of each bitmap gets cured. This layer is coated with a fresh layer of resin by lowering the Z-stage inside a vat holding the resin and the next layer is cured on top of it. In our Thick-film MPuSLA(TfMPuSLA) system, incident radiation, patterned by a dynamic mask, passes through a fixed transparent substrate to cure photopolymer resin. The existing MPuSLA fabrication models can work only for controlling the lateral dimension, without any control over the thickness of the cured part. The proposed process plan controls both the lateral dimensions and the thickness of profile of the cured part. In this thesis, a novel process planning for TfMPuSLA method is developed, to fabricate films on fixed flat substrate. The process of curing a part using this system is analytically modeled as the column cure model. It is different from the conventional process - layer cure model. Column means that a CAD model of part is discretized into vertical columns instead of being sliced into horizontal layers, and all columns get cured simultaneously till the desired heights. The process planning system is modularized into geometrical, chemical, optical, mathematical and physical modules and validated by curing test parts on our system. The thesis formulates a feasible process planning method, providing a strong basis for continued investigation of MPuSLA technology in microfabrication, such as micro lens fabrication.M.S.Committee Chair: Rosen, David W.; Committee Member: Das, Suman; Committee Member: Grover, Martha A

Laser-driven micro-transfer printing for MEMS/NEMS integration

Heterogeneous materials integration, motivated by material transfer processes, has evolved to address the technology gap between the conventional micro-fabrication processes and multi-layer functional device integration. In its basic embodiment, micro-transfer printing is used to deterministically transfer and micro-assemble prefabricated microstructures/devices, referred to as “ink,” from donor substrates to receiving substrates using a viscoelastic elastomer stamp, usually made out of polydimethylsiloxane (PDMS). Thin-film release is, in general, difficult to achieve at the micro-scale (surface effects dominate). However, it becomes dependent on the receiving substrate’s properties and preparation. Laser Micro-Transfer Printing (LMTP) is a laser-driven version of the micro-transfer printing process that enables non-contact release of the microstructure by inducing a mismatch thermal strain at the ink-stamp interface; making the transfer printing process independent from the properties or preparation of the receiving substrate. In this work, extensive studies are conducted to characterize, model, predict, and improve the capabilities of the LMTP process in developing a robust non-contact pattern transfer process. Using micro-fabricated square silicon inks and varying the lateral dimensions and thickness of the ink, the laser pulse duration required to drive the delamination, referred to as “delamination time,” is experimentally observed using high-speed camera recordings of the delamination process for different laser beam powers. The power absorbed by the ink is measured to estimate the total energy stored in the ink-stamp system and available to initiate and propagate the delamination crack at the interface. These experiments are used as inputs for an opto-thermo-mechanical model to understand how the laser energy is converted to thermally-induced stresses at the ink-stamp interface to release the inks. The modeling approach is based on first developing an analytical optical absorption model, based on Beer-Lambert law, under the assumption that optical absorption during the LMTP process is decoupled from thermo-mechanical physics. The optical absorption model is used to estimate the heating rate of the ink-stamp system during the LMTP process that, in turn, is used as an input to the coupled thermo-mechanical Finite Element Analysis (FEA) model. Fracture mechanics quantities such as the Energy Release Rate (ERR) and the Stress Intensity Factors (SIFs) are estimated using the model. Then, the thermal stresses at the crack tip, evaluated by the SIFs, are decomposed into two components based on originating causes: CTE mismatch between the ink and the stamp, and thermal gradient within the PDMS stamp. Both the delamination time from the high-speed camera experiments and thermo-mechanical FEA model predictions are used to understand and improve the process’s performance under different printing conditions. Several studies are conducted to understand the effect of other process parameters such as the dimensions and materials of the stamp, the ink-stamp alignment, and the transferred silicon ink shape on the process performance and mechanism. With an objective of reducing the delamination time, the delamination energy, and the temperature of the ink-stamp interface during printing, different patterned stamp designs (cavity, preloading, and thin-walls) have been proposed. Cavity, preloading, and thin-wall stamps are designed to generate thermally-induced air pressure at the ink-stamp interface, to store strain energy at the interface, and to generate thermally-induced air pressure at the preloaded interface, respectively. Cohesive Zone Modeling (CZM) based models are developed to estimate the equilibrium solution of the collapsed patterned stamp after the ink pick-up process, and to evaluate the patterned stamps’ performance during the LMTP process. The patterned stamps show significant improvements in delamination times and delamination energies (up to 35%) and acceptable improvement of the interface temperature at the delamination point (up to 16%) for given printing conditions

Dynamic Resolution Control in a Laser Projection Based Stereolithography System

In a typical Additive Manufacturing system, it is critical to make a trade-off between the resolution and build area for applications in which varied dimensional sizes, feature sizes, and accuracies are desired. The lack of the capability in adjusting resolution dynamically during building processes limits the use of AM in fabricating complex structures with big layer areas and small features. In this paper, a novel AM system with dynamic resolution control by integrating a laser projection in vat photopolymerization process is presented. Theoretical models and parameter characterizations are presented for the developed AM system. Accordingly, the process planning and mask image planning approaches for fabricating models with varied dimensional sizes and feature sizes have been developed. Multiple test cases based on various types of structures have been performed.Mechanical Engineerin

Creating movable interfaces by micro-powder injection moulding

This paper presents a novel in situ technique to produce articulated components with high-precision, micro-scale movable interfaces by micro-powder injection moulding (μPIM). The presented process route is based on the use of micro-scale sacrificial layer between the movable subcomponents which is eliminated during the debinding step, creating a dimensionally-controlled, micro-scale mobile interface. The fabrication technique combines the advantages of micro-powder overmoulding, catalytic debinding and sintering. The demonstrated example was a finger bone prosthesis joint consisting of two sub-components with an interface between components of 200 μm in size. The geometries of the sub-components were designed such that they are inseparable throughout the process whilst allowing them to move relative to each other after the debinding stage. The components produced showed the feasibility of the process route to produce readily-assembled meso-, and potentially micro-, scale articulated system

Development of a 3D printer using scanning projection stereolithography

We have developed a system for the rapid fabrication of low cost 3D devices and systems in the laboratory with micro-scale features yet cm-scale objects. Our system is inspired by maskless lithography, where a digital micromirror device (DMD) is used to project patterns with resolution up to 10 µm onto a layer of photoresist. Large area objects can be fabricated by stitching projected images over a 5cm2 area. The addition of a z-stage allows multiple layers to be stacked to create 3D objects, removing the need for any developing or etching steps but at the same time leading to true 3D devices which are robust, configurable and scalable. We demonstrate the applications of the system by printing a range of micro-scale objects as well as a fully functioning microfluidic droplet device and test its integrity by pumping dye through the channels