16,659 research outputs found

    A Comparative Study Between a Micromechanical Cantilever Resonator and MEMS-based Passives for Band-pass Filtering Application

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    Over the past few years, significant growth has been observed in using MEMS based passive components in the RF microelectronics domain, especially in transceiver components. This is due to some excellent properties of the MEMS devices like low loss, excellent isolation etc. in the microwave frequency domain where the on-chip passives normally tend to become leakier and degrades the transceiver performance. This paper presents a comparative analysis between MEMS-resonator based and MEMS-passives based band-pass filter configurations for RF applications, along with their design, simulation, fabrication and characterization. The filters were designed to have a center frequency of 455 kHz, meant for use as the intermediate frequency (IF) filter in superheterodyne receivers. The filter structures have been fabricated in PolyMUMPs process, a three-polysilicon layer surface micromachining process.Comment: 6 pages, 15 figure

    Thermoelastic Damping in Micro- and Nano-Mechanical Systems

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    The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electro-mechanical systems (MEMS and NEMS). The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener's well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.Comment: 10 pages. Submitted to Phys. Rev.

    Fabrication and mechanical testing of glass fiber entangled sandwich beams: A comparison with honeycomb and foam sandwich beams

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    The aim of this paper is the fabrication and mechanical testing of entangled sandwich beam specimens and the comparison of their results with standard sandwich specimens with honeycomb and foam as core materials. The entangled sandwich specimens have glass fiber cores and glass woven fabric as skin materials. The tested glass fiber entangled sandwich beams possess low compressive and shear modulus as compared to honeycomb and foam sandwich beams of the same specifications. Although the entangled sandwich beams are heavier than the honeycomb and foam sandwich beams, the vibration tests show that the entangled sandwich beams possess higher damping ratios and low vibratory levels as compared to honeycomb and foam sandwich beams, making them suitable for vibro-acoustic applications where structural strength is of secondary importance e.g., internal paneling of a helicopter

    Electrically tunable collective response in a coupled micromechanical array

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    We employ optical diffraction to study the mechanical properties of a grating array of suspended doubly clamped beams made of Au. The device allows application of electrostatic coupling between the beams that gives rise to formation of a band of normal modes of vibration (phonons). We parametrically excite these collective modes and study the response by measuring the diffraction signal. The results indicate that nonlinear effects strongly affect the dynamics of the system. Further optimization will allow employing similar systems for real-time mechanical spectrum analysis of electrical waveforms

    A micro electromagnetic generator for vibration energy harvesting

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    Vibration energy harvesting is receiving a considerable amount of interest as a means for powering wireless sensor nodes. This paper presents a small (component volume 0.1 cm3, practical volume 0.15 cm3) electromagnetic generator utilizing discrete components and optimized for a low ambient vibration level based upon real application data. The generator uses four magnets arranged on an etched cantilever with a wound coil located within the moving magnetic field. Magnet size and coil properties were optimized, with the final device producing 46 ”W in a resistive load of 4 k? from just 0.59 m s-2 acceleration levels at its resonant frequency of 52 Hz. A voltage of 428 mVrms was obtained from the generator with a 2300 turn coil which has proved sufficient for subsequent rectification and voltage step-up circuitry. The generator delivers 30% of the power supplied from the environment to useful electrical power in the load. This generator compares very favourably with other demonstrated examples in the literature, both in terms of normalized power density and efficiency

    Design of wideband vibration-based electromagnetic generator by means of dual-resonator

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    This paper describes the design of a wideband electromagnetic energy harvester that utilizes a novel dual-resonator method to improve the operational frequency range of the vibration-based generator. The device consists of two separate resonator systems (coil and magnet), which each comply with their respective resonance frequencies. This is because both resonators are designed in such a way that both magnet and coil components will oscillate at an additive phase angle, and hence create greater relative motion between the two dominating resonance frequencies, which realizes the wideband generator. Each resonator system consists of a distinctive cantilever beam, one attached with four magnets and steel keepers, the other attached with a copper coil and stainless steel holder as the free end mass. Both cantilevers are clamped and fitted to a common base that is subjected to a vibration source. Basic analytical models are derived and a numerical model is implemented in MATLAB-Simulink. Electromagnetic, structural modal and static mechanical analysis for the design of the prototype are completed using ANSYS finite element tools. For a 0.8 m s−2 acceleration, the open-loop voltage obtained from the experiment shows a good correlation with those from the simulation. Peak induced voltage is measured to be 259.5Vrms as compared to 240.9Vrms from the simulator at 21.3 Hz, which implies an error range of 7.7%. The results also indicate that there is a maximum of 58.22% improvement in the induced voltage within the intermediate region which occurs at the intersection point between the output response plots of two single resonator generators
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