MEMS-enabled silicon photonic integrated devices and circuits

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process

Multi-level and multi-objective design optimisation of a MEMS bandpass filter

Microelectromechanical system (MEMS) design is often complex, containing multiple disciplines but also conflicting objectives. Designers are often faced with the problem of balancing what objectives to focus upon and how to incorporate modeling and simulation tools across multiple levels of abstraction in the design optimization process. In particular due to the computational expense of some of these simulation methods there are restrictions on how much optimization can occur. In this paper we aim to demonstrate the application of multi-objective and multi-level design optimisation strategies to a MEMS bandpass filter. This provides for designers the ability to evolve solutions that can match multiple objectives. In order to address the problem of a computationally expensive design process a novel multi-level evaluation strategy is developed. In addition a new approach for bandpass filter modeling and optimization is presented based up the electrical equivalent circuit method. In order to demonstrate this approach a comparison is made to previous attempts to design similar bandpass filters. Results are comparable in design but at a significant reduction in functional evaluations, needing only 10,000 functional evaluations in comparison to 2.6 million with the previous work

Modelling, simulation and optimisation of a piezoelectric energy harvester

The power generation efficiency of piezoelectric energy harvesters is dependent on the coupling of their resonant frequency with that of the source vibration. The mechanical design of the energy harvester plays an important role in defining the resonant frequency characteristics of the system and therefore in order to maximize power density it is important for a designer to be able to model, simulate and optimise designs to match new target applications. This paper investigates a strategy for the application of soft computing techniques from the field of evolutionary computation towards the design optimisation of piezoelectric energy harvesters that exhibit the targeted resonant frequency response chosen by the designer. The advantages of such evolutionary techniques are their ability to overcome challenges such as multi-modal and discontinuous search spaces which afflict more traditional gradient-based methods. A single case study is demonstrated in this paper, with the coupling of a multi-objective evolutionary algorithm NSGA-II to a multiphysics simulator COMSOL. Experimental results show successful implementation of the schema with all 5 experimental tests producing optimal piezoelectric energy harvester designs that matched the desired frequency response of 250 Hz

High-Power Microwave/ Radio-Frequency Components, Circuits, and Subsystems for Next-Generation Wireless Radio Front-Ends

As the wireless communication systems evolve toward the future generation, intelligence will be the main signature/trend, well known as the concepts of cognitive and software-defined radios which offer ultimate data transmission speed, spectrum access, and user capacity. During this evolution, the human society may experience another round of `information revolution\u27. However, one of the major bottlenecks of this promotion lies in hardware realization, since all the aforementioned intelligent systems are required to cover a broad frequency range to support multiple communication bands and dissimilar standards. As the essential part of the hardware, power amplifiers (PAs) capable of operating over a wide bandwidth have been identified as the key enabling technology. This dissertation focuses on novel methodologies for designing and realizing broadband high-power PAs, their integration with high-quality-factor (high-Q) tunable filters, and relevant investigations on the reliabilities of these tunable devices. It can be basically divided into three major parts: 1.Broadband High-Efficiency Power Amplifiers. Obtaining high PA efficiency over a wide bandwidth is very challenging, because of the difficulty of performing broadband multi-harmonic matching. However, high efficiency is the critical feature for high-performance PAs due to the ever-increasing demands for environmental friendliness, energy saving, and longer battery life. In this research, novel design methodologies of broad-band highly efficient PAs are proposed, including the first-ever mode-transferring PA theory, novel matching network topology, and wideband reconfigurable PA architecture. These techniques significantly advance the state-of-the-art in terms of bandwidth and efficiency. 2.Co-Design of PAs and High-Q Tunable Filters. When implementing the intelligent communication systems, the conventional approach based on independent RF design philosophy suffers from many inherent defects, since no global optimization is achieved leading to degraded overall performance. An attractive method to solve these difficulties is to co-design critical modules of the transceiver chain. This dissertation presents the first-ever co-design of PAs and tunable filters, in which the redundant inter-module matching is entirely eliminated, leading to minimized size & cost and maximized overall performance. The saved hardware resources can be further transferred to enhance system functionalities. Moreover, we also demonstrate that co-design of PAs and filters can lead to more functionalities/benefits for the wireless systems, e.g. efficient and linear amplification of dual-carrier (or multi-carrier) signals. 3.High-Power/Non-Linear Study on Tunable Devices. High-power limitation/power handling is an everlasting theme of tunable devices, as it determines the operational life and is the threshold for actual industrial applications. Under high-power operation, the high RF voltage can lead to failures like tuners\u27 mechanical deflections and gas discharge in the small air spacing of the cavity. These two mechanisms are studied independently with their instantaneous and long-term effects on the device performance. In addition, an anti-biased topology of electrostatic RF MEMS varactors and tunable filters is proposed and experimentally validated for reducing the non-linear effect induced by bias-noise. These investigations will enlighten the designers on how to avoid and/or minimize the non-ideal effects, eventually leading to longer life cycle and performance sustainability of the tunable devices

Development and experimental analysis of a micromachined Resonant Gyrocope

This thesis is concerned with the development and experimental analysis of a resonant gyroscope. Initially, this involved the development of a fabrication process suitable for the construction of metallic microstructures, employing a combination of nickel electroforming and sacrificial layer techniques to realise free-standing and self-supporting mechanical elements. This was undertaken and achieved. Simple beam elements of typically 2.7mm x 1mm x 40µm dimensions have been constructed and subject to analysis using laser doppler interferometry. This analysis tool was used to implement a fill modal analysis in order to experimentally derive dynamic parameters. The characteristic resonance frequencies of these cantilevers have been measured, with 3.14kHz, 23.79kHz, 37.94kHz and 71.22kHz being the typical frequencies of the first four resonant modes. Q-factors of 912, 532, 1490 and 752 have been measured for these modes respectively at 0.01mbar ambient pressure. Additionally the mode shapes of each resonance was derived experimentally and found to be in excellent agreement with finite element predictions. A 4mm nickel ring gyroscope structure has been constructed and analysed using both optical analysis tools and electrical techniques. Using laser doppler interferometry the first four out-of-plane modes of the ring structure were found to be typically 9.893 kHz, 11.349 kHz, 11.418 kHz and 13.904 kHz with respective Q-factors of 1151, 1659, 1573 and 1407 at 0.01 mbar ambient pressure. Although electrical measurements were found to be obscured through cross coupling between drive and detection circuitry, the in-plane operational modes of the gyroscope were sucessfully determined. The Cos2Ө and Sin2Ө operational modes were measured at 36.141 kHz and 36.346 kHz, highlighting a frequency split of 205kHz. Again all experimentally derived modal parameters were in good agreement with finite element predictions. Furthermore, using the analysis model, the angular resolution of the gyroscope has been predicted to be approximately 4.75º/s

Thin Film Encapsulation of Radio Frequency (RF) Microelectromechanical Systems (MEMS) Switches

Microelectromechanical systems (MEMS) radio frequency (RF) switches have been shown to have excellent electrical performance over a wide range of frequencies. However, cost-effective packaging techniques for MEMS switches do not currently exist. This thesis involves the design of RF-optimized encapsulations consisting of dielectric and metal layers, and the creation of a novel thin film encapsulation process to fabricate the encapsulations. The RF performance of several encapsulation designs are evaluated with an analytical model, full wave electromagnetic simulation, and laboratory testing. Performance degradation due to parasitic and reflection losses due to the package is considered, and RF feed-throughs of the transmission line into and out of the package are designed and assessed. Ten different encapsulation designs were created and their RF performance was characterized in terms of insertion loss, return loss, and isolation. A switch without an encapsulation and a switch with a dielectric encapsulation were fabricated and tested by the Air Force Research Laboratory (AFRL), and the test data was used to verify the data from analytical modeling and electromagnetic simulation performed in this work. All results were used to design an optimized encapsulation. An RF MEMS switch with this encapsulation was shown to have an overall insertion loss of less than -0.15 dB at 20 GHz compared to an unencapsulated switch insertion loss of about -0.1 dB. The isolation of the switch was slightly improved with the encapsulation. The fabrication process proposed to manufacture these encapsulations uses a low temperature solder as the metal encapsulation layer. As the final step in the fabrication, the solder is brought to melting temperature and reflowed over the etch holes to form a hermetic encapsulation

Monolithic sensor integration in CMOS technologies

© 2023 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.Besides being mainstream for mixed-signal electronics, CMOS technology can be used to integrate micro-electromechanical system (MEMS) on a single die, taking advantage of the structures and materials available in feature sizes around 180 nm. In this article, we demonstrate that the CMOS back-end-of-line (BEOL) layers can be postprocessed and be opportunistically used to create several kinds of MEMS sensors exhibiting good or even excellent performance, such as accelerometers, pressure sensors, and magnetometers. Despite the limitations of the available mechanical and material properties in CMOS technology, due to monolithic integration, these are compensated by the significant reduction of parasitics and system size. Furthermore, this work opens the path to create monolithic integrated multisensor (and even actuator) chips, including data fusion and intelligent processing.This work was supported in part by Baolab Microsystems; in part by the Spanish Ministry of Science, Innovation and Universities (MCIN); in part by the State Research Agency (AEI); in part by the European Social Fund (ESF) under Project RTI2018-099766-B-I00; in part by MCIN/AEI/10.13039/501100011033 under Grant PID2021-123535OB-I00; and in part by ERDF, “A way of making Europe.” The associate editor coordinating the review of this article and approving it for publication was Prof. Jean-Michel Redoute.Peer ReviewedPostprint (author's final draft

Electronically reconfigurable wideband microwave filters

Many systems require multi function capability in the filter aspects of systems; the method currently used is filter banks which take up a lot of board space. It is thought that reconfigurable filters hold the key to replacing filter banks in order to save board space and thus potentially increasing functionality of the systems. The aim of this research is to develop electronically reconfigurable microwave filters for future communication systems. The project investigates some key design issues of reconfigurable filters. Circuits were modelled and full-wave electromagnetic simulations were performed for the investigation. Experimental work was carried out to demonstrate advanced reconfigurable microwave devices. The components used in each concept investigated were pin diodes due to their superior performance in wideband and high frequency applications. Firstly a single coupled line concept was looked at for bandwidth reconfigurability. This concept was then further developed for industrial applications by simply cascading these sections to obtain a high selective filter. A design method was developed for any number of cascades both with and without an impedance transformer; the use of LCP was used to increase flexibility due to its desirable characteristics. The most desirable outcome would be filter to simultaneously control bandwidth and frequency. In order to tackle this issue the coupled line concept was adapted to incorporate frequency tunability, along with a design method being presented. Furthermore, a cascaded highpass/ lowpass filter was also explored for this concept for added flexibility in the design of a filter capable of control of both bandwidth and center frequency