Device modelling for bendable piezoelectric FET-based touch sensing system

Flexible electronics is rapidly evolving towards devices and circuits to enable numerous new applications. The high-performance, in terms of response speed, uniformity and reliability, remains a sticking point. The potential solutions for high-performance related challenges bring us back to the timetested silicon based electronics. However, the changes in the response of silicon based devices due to bending related stresses is a concern, especially because there are no suitable models to predict this behavior. This also makes the circuit design a difficult task. This paper reports advances in this direction, through our research on bendable Piezoelectric Oxide Semiconductor Field Effect Transistor (POSFET) based touch sensors. The analytical model of POSFET, complimented with Verilog-A model, is presented to describe the device behavior under normal force in planar and stressed conditions. Further, dynamic readout circuit compensation of POSFET devices have been analyzed and compared with similar arrangement to reduce the piezoresistive effect under tensile and compressive stresses. This approach introduces a first step towards the systematic modeling of stress induced changes in device response. This systematic study will help realize high-performance bendable microsystems with integrated sensors and readout circuitry on ultra-thin chips (UTCs) needed in various applications, in particular, the electronic skin (e-skin)

Effects of temperature on the impedance of piezoelectric actuators used for SHM

— FEM modeling of piezoelectric patches used as actuators and sensors for SHM applications. — Test/analysis correlation of temperature effects in piezoelectric materials and glue — Numerical methods associated with the prediction of electric transfers.Projet AIRCELLE (EPICE/CORALIE

Influence of microphone housing on the directional response of piezoelectric mems microphones inspired by Ormia ochracea

The influence of custom microphone housings on the acoustic directionality and frequency response of a multiband bio-inspired MEMS microphone is presented. The 3.2 mm by 1.7 mm piezoelectric MEMS microphone, fabricated by a cost-effective multi-user process, has four frequency bands of operation below 10 kHz, with a desired first-order directionality for all four bands. 7×7×2.5 mm3 3-D-printed bespoke housings with varying acoustic access to the backside of the microphone membrane are investigated through simulation and experiment with respect to their influence on the directionality and frequency response to sound stimulus. Results show a clear link between directionality and acoustic access to the back cavity of the microphone. Furthermore, there was a change in direction of the first-order directionality with reduced height in this back cavity acoustic access. The required configuration for creating an identical directionality for all four frequency bands is investigated along with the influence of reducing the symmetry of the acoustic back cavity access. This paper highlights the overall requirement of considering housing geometries and their influence on acoustic behavior for bio-inspired directional microphones

Piezo-electromechanical smart materials with distributed arrays of piezoelectric transducers: Current and upcoming applications

This review paper intends to gather and organize a series of works which discuss the possibility of exploiting the mechanical properties of distributed arrays of piezoelectric transducers. The concept can be described as follows: on every structural member one can uniformly distribute an array of piezoelectric transducers whose electric terminals are to be connected to a suitably optimized electric waveguide. If the aim of such a modification is identified to be the suppression of mechanical vibrations then the optimal electric waveguide is identified to be the 'electric analog' of the considered structural member. The obtained electromechanical systems were called PEM (PiezoElectroMechanical) structures. The authors especially focus on the role played by Lagrange methods in the design of these analog circuits and in the study of PEM structures and we suggest some possible research developments in the conception of new devices, in their study and in their technological application. Other potential uses of PEMs, such as Structural Health Monitoring and Energy Harvesting, are described as well. PEM structures can be regarded as a particular kind of smart materials, i.e. materials especially designed and engineered to show a specific andwell-defined response to external excitations: for this reason, the authors try to find connection between PEM beams and plates and some micromorphic materials whose properties as carriers of waves have been studied recently. Finally, this paper aims to establish some links among some concepts which are used in different cultural groups, as smart structure, metamaterial and functional structural modifications, showing how appropriate would be to avoid the use of different names for similar concepts. © 2015 - IOS Press and the authors

Ultra-thin IDE Pulse Wave Sensor

The monitoring of vital signs is used to determine human health status. Healthcare monitoring devices are usually attached to the human skin to obtain information about the human body. However, the main inconvenience of using conventional electronic devices is the mechanical mismatch between the devices and the skin. This issue can lead to measurement errors, and patient comfort can be affected negatively when these devices are used continuously. Therefore, it is needed to develop skin-conformal electronic devices to overcome these drawbacks. This thesis explores the fabrication process of ultrathin interdigitated pulse wave sensors based on the piezoelectric effect. The aim of this research is to demonstrate that printed electronics technologies are an excellent alternative to fabricate low-cost skin-conformal sensors. First, this thesis explores the theoretical background of piezoelectricity, flexible and ultrathin piezoelectric pressure sensors, and printed electronics technologies. Then, the fabrication process is analyzed. The sensor is fabricated onto a Parylene-C substrate using the piezoelectric polymer P(VDF-TrF) and the conductive polymer PEDOT:PSS. Preliminary experiments are done to determine substrate wettability and to characterize the electrical properties of the conductive ink. A substrate surface treatment is used to modify the wetting properties of the substrate. The effect of the surface treatment exposure time is evaluated by measuring the width of printed lines. The experiment results are used to evaluate the sensor structure printing process. IDE structure is fabricated by inkjet printing, and the piezoelectric layer is screen printed on top of the electrodes. Electrical properties and piezoelectric sensitivity of the final samples are characterized. The results of this research show that the ink and substrate properties have an impact on the performance of the printed structures. The surface energy of the substrate is modified to improve its wettability. Thus, UV/O₃ surface treatment can be used to make Parylene-C hydro-philic. Furthermore, the IDE structure can be fabricated by inkjet printing technology. However, the coffeering effect is observed in narrow PEDOT:PSS inkjet printed lines (i.e. IDE fingers). This may have an impact on the conductivity of the lines due to the non-uniform distribution of the material. On the other hand, the validation of the piezoelectric sensitivity characterization suggests that the poling process has to be improved to guarantee the operation of the device as a piezoelectric sensor. The results of this research validate that ultrathin sensors can be fabricated using printed electronics technologies. The overall thickness of the sensors is below 6 µm. In conclusion, further research has to be done to activate properly the piezoelectric properties of the P(VDF-TrFE) material in this sensor configuration

Flexible Strain Detection Using Surface Acoustic Waves: Fabrication and Tests

Over the last couple of decades, smart transducers based on piezoelectric materials have been used as sensors in a wide range of structural health monitoring applications. Among them, a Surface Acoustic Wave sensor (SAW) offers an overwhelming advantage over other commercial sensing technologies due to its passive, small size, fast response time, cost-effectiveness, and wireless capabilities. Development of SAW sensors allows investigation of their potential not only for measuring less-time dependent parameters, such as pressure and temperature, but also dynamic parameters like mechanical strains. The objective of this study is to develop a passive flexible SAW sensor with optimized piezoelectric properties that can detect and measure mechanical strains occurred in aerospace structures. This research consists of two phases. First, a flexible thin SAW substrate fabrication using hot-press made of polyvinylidene fluoride (PVDF) as a polymer matrix, with lead zirconate titanate (PZT), calcium copper titanate (CCTO), and carbon nanotubes (CNTs) as micro and nanofillers’ structural, thermal and electrical properties are investigated. Piezoelectric property measurements are carried out for different filler combinations to optimize the suitable materials, examining flexibility and favorable characteristics. Electromechanical properties are enhanced through a noncontact corona poling technique, resulting in effective electrical coupling. Second, the two-port interdigital transducers (IDTs) deposition made of conductive paste onto the fabricated substrate through additive manufacturing is studied. Design parameters of SAW IDTs are optimized using a second-order transmission matrix approach. An RF input signal excites IDTs and generates Rayleigh waves that propagate through the delay line. By analyzing the changes in wave characteristics, such as frequency shift and phase response, the developed passive strain sensor can measure mechanical strains

Using the Nonlinear Duffing Effect of Piezoelectric Micro-Oscillators for Wide-Range Pressure Sensing

This paper investigates the resonant behaviour of silicon-based micro-oscillators with a length of 3600 µm, a width of 1800 µm and a thickness of 10 µm over a wide range of ambient gas (N2 ) pressures, extending over six orders of magnitude from 10−3 mbar to 900 mbar. The oscillators are actuated piezoelectrically by a thin-film aluminium-nitride (AlN) layer, with the cantilever coverage area being varied from 33% up to 100%. The central focus is on nonlinear Duffing effects, occurring at higher oscillation amplitudes. A theoretical background is provided. All relevant parameters describing a Duffing oscillator, such as stiffness parameters for each coverage size as well as for different bending modes and more complex modes, are extracted from the experimental data. The so-called 2nd roof-tile-shaped mode showed the highest stiffness value of −97.3·107 m−2 s −2 . Thus, it was chosen as being optimal for extended range pressure measurements. Interestingly, both a spring softening effect and a spring hardening effect were observed in this mode, depending on the percentage of the AlN coverage area. The Duffing-effect-induced frequency shift was found to be optimal for obtaining the highest pressure sensitivity, while the size of the hysteresis loop is also a very useful parameter because of the possibility of eliminating the temperature influences and long-term drift effects of the resonance frequency. An reasonable application-specific compromise between the sensitivity and the measurement range can be selected by adjusting the excitation voltage, offering much flexibility. This novel approach turns out to be very promising for compact, cost-effective, wide-range pressure measurements in the vacuum range