Single Substrate Electromagnetic Actuator

A microvalve which utilizes a low temperature ( <300° C.) fabrication process on a single substrate. The valve uses buckling and an electromagnetic actuator to provide a relatively large closing force and lower power consumption. A buckling technique of the membrane is used to provide two stable positions for the membrane, and to reduce the power consumption and the overall size of the microvalve. The use of a permanent magnet is an alternative to the buckled membrane, or it can be used in combination with the buckled membrane, or two sets of micro-coils can be used in order to open and close the valve, providing the capability for the valve to operate under normally opened or normally closed conditions. Magnetic analysis using ANSYS 5.7 shows that the addition of Orthonol between the coils increases the electromagnetic force by more than 1.5 times. At a flow rate of 1 mL/m, the pressure drop is < 100 Pa. The maximum pressure tested was 57 kPa and the time to open or close the valve in air is under 100 ms. This results in an estimated power consumption of 0.1 mW.Georgia Tech Research Corp

Bioengineered Textiles and Nonwovens – the convergence of bio-miniaturisation and electroactive conductive polymers for assistive healthcare, portable power and design-led wearable technology

Today, there is an opportunity to bring together creative design activities to exploit the responsive and adaptive ‘smart’ materials that are a result of rapid development in electro, photo active polymers or OFEDs (organic thin film electronic devices), bio-responsive hydrogels, integrated into MEMS/NEMS devices and systems respectively. Some of these integrated systems are summarised in this paper, highlighting their use to create enhanced functionality in textiles, fabrics and non-woven large area thin films. By understanding the characteristics and properties of OFEDs and bio polymers and how they can be transformed into implementable physical forms, innovative products and services can be developed, with wide implications. The paper outlines some of these opportunities and applications, in particular, an ambient living platform, dealing with human centred needs, of people at work, people at home and people at play. The innovative design affords the accelerated development of intelligent materials (interactive, responsive and adaptive) for a new product & service design landscape, encompassing assistive healthcare (smart bandages and digital theranostics), ambient living, renewable energy (organic PV and solar textiles), interactive consumer products, interactive personal & beauty care (e-Scent) and a more intelligent built environment

Dual-side and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates

A method for fabricating planar implantable microelectrode arrays was demonstrated using a process that relied on ultra-thin silicon substrates, which ranged in thickness from 25 to 50 µm. The challenge of handling these fragile materials was met via a temporary substrate support mechanism. In order to compensate for putative electrical shielding of extracellular neuronal fields, separately addressable electrode arrays were defined on each side of the silicon device. Deep reactive ion etching was employed to create sharp implantable shafts with lengths of up to 5 mm. The devices were flip-chip bonded onto printed circuit boards (PCBs) by means of an anisotropic conductive adhesive film. This scalable assembly technique enabled three-dimensional (3D) integration through formation of stacks of multiple silicon and PCB layers. Simulations and measurements of microelectrode noise appear to suggest that low impedance surfaces, which could be formed by electrodeposition of gold or other materials, are required to ensure an optimal signal-to-noise ratio as well a low level of interchannel crosstalk

Wafer-Level Parylene Packaging With Integrated RF Electronics for Wireless Retinal Prostheses

This paper presents an embedded chip integration technology that incorporates silicon housings and flexible Parylene-based microelectromechanical systems (MEMS) devices. Accelerated-lifetime soak testing is performed in saline at elevated temperatures to study the packaging performance of Parylene C thin films. Experimental results show that the silicon chip under test is well protected by Parylene, and the lifetime of Parylenecoated metal at body temperature (37°C) is more than 60 years, indicating that Parylene C is an excellent structural and packaging material for biomedical applications. To demonstrate the proposed packaging technology, a flexible MEMS radio-frequency (RF) coil has been integrated with an RF identification (RFID) circuit die. The coil has an inductance of 16 μH with two layers of metal completely encapsulated in Parylene C, which is microfabricated using a Parylene–metal–Parylene thin-film technology. The chip is a commercially available read-only RFID chip with a typical operating frequency of 125 kHz. The functionality of the embedded chip has been tested using an RFID reader module in both air and saline, demonstrating successful power and data transmission through the MEMS coil

IC-integrated flexible shear-stress sensor skin

This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 /spl mu/m thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with on-skin sensor bias, signal-conditioning, and multiplexing circuitry. We further demonstrated the application of the sensor skin by packaging it on a semicylindrical aluminum block and testing it in a subsonic wind tunnel. In our experiment, the sensor skin has successfully identified both the leading-edge flow separation and stagnation points with the on-skin circuitry. The integration of IC with MEMS sensor skin has significantly simplified implementation procedures and improved system reliability

Healthy aims: developing new medical implants and diagnostic equipment

Healthy Aims is a €23-million, four-year project, funded under the EU’s Information Society Technology Sixth Framework program to develop intelligent medical implants and diagnostic systems (www.healthyaims.org). The project has 25 partners from 10 countries, including commercial, clinical, and research groups. This consortium represents a combination of disciplines to design and fabricate new medical devices and components as well as to test them in laboratories and subsequent clinical trials. The project focuses on medical implants for nerve stimulation and diagnostic equipment based on straingauge technology

Experimental design with integrated temperature sensors in MEMS: an example of application for rarefied gases

This paper was presented at the 3rd Micro and Nano Flows Conference (MNF2011), which was held at the Makedonia Palace Hotel, Thessaloniki in Greece. The conference was organised by Brunel University and supported by the Italian Union of Thermofluiddynamics, Aristotle University of Thessaloniki, University of Thessaly, IPEM, the Process Intensification Network, the Institution of Mechanical Engineers, the Heat Transfer Society, HEXAG - the Heat Exchange Action Group, and the Energy Institute.This paper presents a new MEMS experimental device with integrated temperature sensors. Conventional silicon planar techniques for the fabrication of microelectronic sensors have been used to realize a particular layout, which does not limit the material of the microstructures it can be used with. The study of rarefied gases has been chosen as case study for the validation of the local measuring system. In this work the attention will be focused on the description of the sensor functioning principles and on the presentation of the preliminary results obtained during the calibration procedures. The tests showed promising results for a future development of the sensor design.The European Community’s Seventh Framework Program (FP7/2007-20013) under grant agreement no 215504

Towards an on-chip power supply: Integration of micro energy harvesting and storage techniques for wireless sensor networks

The lifetime of a power supply in a sensor node of a wireless sensor network is the decisive factor in the longevity of the system. Traditional Li-ion batteries cannot fulfill the demands of sensor networks that require a long operational duration. Thus, we require a solution that produces its own electricity from its surrounding and stores it for future utility. Moreover, as the sensor node architecture is developed on complimentary metal-oxide-semiconductor technology (CMOS), the manufacture of the power supply must be compatible with it. In this thesis, we shall describe the components of an on-chip lifetime power supply that can harvest the vibrational mechanical energy through piezoelectric microcantilevers and store it in a reduced graphene oxide (rGO) based microsupercapacitor, and that is fabricated through CMOS compatible techniques. Our piezoelectric microcantilevers confirm the feasibility of fabricating micro electro- mechanical-systems (MEMS) size two-degree-of-freedom systems which can solve the major issue of small bandwidth of piezoelectric micro-energy harvesters. These devices use a cut-out trapezoidal cantilever beam to enhance the stress on the cantilever’s free end while reducing the gap remarkably between its first two eigenfrequencies in 400 - 500 Hz and 1 - 2 kHz range. The energy from the M-shaped harvesters will be stored in rGO based microsupercapacitors. These microsupercapacitors are manufactured through a fully CMOS compatible, reproducible, and reliable micromachining processes. Furthermore, we have also demonstrated an improvement in their electrochemical performance and yield of fabrication through surface roughening from iron nanoparticles. We have also examined the possibility of integrating these devices into a power management unit to fully realize a lifetime power supply for wireless sensor networks