Semiconductor Gas Sensors: Materials, Technology, Design, and Application

This paper presents an overview of semiconductor materials used in gas sensors, their technology, design, and application. Semiconductor materials include metal oxides, conducting polymers, carbon nanotubes, and 2D materials. Metal oxides are most often the first choice due to their ease of fabrication, low cost, high sensitivity, and stability. Some of their disadvantages are low selectivity and high operating temperature. Conducting polymers have the advantage of a low operating temperature and can detect many organic vapors. They are flexible but affected by humidity. Carbon nanotubes are chemically and mechanically stable and are sensitive towards NO and NH3, but need dopants or modifications to sense other gases. Graphene, transition metal chalcogenides, boron nitride, transition metal carbides/nitrides, metal organic frameworks, and metal oxide nanosheets as 2D materials represent gas-sensing materials of the future, especially in medical devices, such as breath sensing. This overview covers the most used semiconducting materials in gas sensing, their synthesis methods and morphology, especially oxide nanostructures, heterostructures, and 2D materials, as well as sensor technology and design, application in advance electronic circuits and systems, and research challenges from the perspective of emerging technologies. © 2020 by the authors. Licensee MDPI, Basel, Switzerland

Application of Smart Solid State Sensor Technology in Aerospace Applications

Aerospace applications require a range of chemical sensing technologies to monitor conditions in both space vehicles and aircraft operations. One example is the monitoring of oxygen. For example, monitoring of ambient oxygen (O2) levels is critical to ensuring the health, safety, and performance of humans living and working in space. Oxygen sensors can also be incorporated in detection systems to determine if hazardous leaks are occurring in space propulsion systems and storage facilities. In aeronautic applications, O2 detection has been investigated for fuel tank monitoring. However, as noted elsewhere, O2 is not the only species of interest in aerospace applications with a wide range of species of interest being relevant to understand an environmental or vehicle condition. These include combustion products such as CO, HF, HCN, and HCl, which are related to both the presence of a fire and monitoring of post-fire clean-up operations. This paper discusses the development of an electrochemical cell platform based on a polymer electrolyte, NAFION, and a three-electrode configuration. The approach has been to mature this basic platform for a range of applications and to test this system, combined with "Lick and Stick" electronics, for its viability to monitor an environment related to astronaut crew health and safety applications with an understanding that a broad range of applications can be addressed with a core technology

Intelligent Chemical Sensor Systems for In-space Safety Applications

Future in-space and lunar operations will require significantly improved monitoring and Integrated System Health Management (ISHM) throughout the mission. In particular, the monitoring of chemical species is an important component of an overall monitoring system for space vehicles and operations. For example, in leak monitoring of propulsion systems during launch, inspace, and on lunar surfaces, detection of low concentrations of hydrogen and other fuels is important to avoid explosive conditions that could harm personnel and damage the vehicle. Dependable vehicle operation also depends on the timely and accurate measurement of these leaks. Thus, the development of a sensor array to determine the concentration of fuels such as hydrogen, hydrocarbons, or hydrazine as well as oxygen is necessary. Work has been on-going to develop an integrated smart leak detection system based on miniaturized sensors to detect hydrogen, hydrocarbons, or hydrazine, and oxygen. The approach is to implement Microelectromechanical Systems (MEMS) based sensors incorporated with signal conditioning electronics, power, data storage, and telemetry enabling intelligent systems. The final sensor system will be self-contained with a surface area comparable to a postage stamp. This paper discusses the development of this "Lick and Stick" leak detection system and it s application to In-Space Transportation and other Exploration applications

Metal Oxide Gas Sensors by Nanostructures

Recently, metal oxide gas sensors by nanostructures have stirred interest and have found their way in many applications due to their high sensitivity, material design compliance and high safety properties. Gas performance tests of n-type ZnO, Al-doped ZnO and ZnO/MWCNT structures toward different type gases from our previous studies have been reported. It is indicated that nanoparticle formations on the film surfaces, grain sizes, gas types and operating temperatures have a severe effect on the chemisorption/physisorption process. Low concentration detection, determination of grain size limit values and reducing operating temperature to room temperature are already obstacles on long-life sensitivity and long-term stability characters. Doping is an effective way to increase gas sensitivity with atomic surface arrangement and active gas adsorption sites, which are generated by doping atoms. However, C-based material/MO nanostructures are preferred than doped MO films with their working even at room temperature. Up to now, a lot of methods to improve the gas sensitivity has been proposed. With the help of the development of surface modification methods such as different types of doping and MO-C composite, sensitivity, which is the most important parameter of sensor performance, can also be stable as well as increasing later on

Aerospace Sensor Systems: From Sensor Development To Vehicle Application

This paper presents an overview of years of sensor system development and application for aerospace systems. The emphasis of this work is on developing advanced capabilities for measurement and control of aeropropulsion and crew vehicle systems as well as monitoring the safety of those systems. Specific areas of work include chemical species sensors, thin film thermocouples and strain gages, heat flux gages, fuel gages, SiC based electronic devices and sensors, space qualified electronics, and MicroElectroMechanical Systems (MEMS) as well as integrated and multifunctional sensor systems. Each sensor type has its own technical challenges related to integration and reliability in a given application. The general approach has been to develop base sensor technology using microfabrication techniques, integrate sensors with "smart" hardware and software, and demonstrate those systems in a range of aerospace applications. Descriptions of the sensor elements, their integration into sensors systems, and examples of sensor system applications will be discussed. Finally, suggestions related to the future of sensor technology will be given. It is concluded that smart micro/nano sensor technology can revolutionize aerospace applications, but significant challenges exist in maturing the technology and demonstrating its value in real-life applications

Thermal characterisation of miniature hotplates used in gas sensing technology

The reliability of micro-electronic devices depends on the device operating temperature and therefore self-heating can have an adverse effect on the performance and reliability of these devices. Hence, thermal measurement is crucial including accurate maximum operating temperature measurements to ensure optimum reliability and good electrical performance. In the research presented in this thesis, the high temperature thermal characterisation of novel micro-electro-mechanical systems (MEMS) infra-red (IR) emitter chips for use in gas sensing technology for stable long-term operation were studied, using both IR and a novel thermo-incandescence microscopy. The IR emitters were fabricated using complementary-metal-oxide semiconductor (CMOS) based processing technology and consisted of a miniature micro-heater, fabricated using tungsten metallisation. There is a commercial drive to include MEMS micro-heaters in portable electronic applications including gas sensors and miniaturised IR spectrometers where low power consumption is required. IR thermal microscopy was used to thermally characterise these miniature MEMS micro-heaters to temperatures approaching 700 °C. The research work has also enabled further development of novel thermal measurement techniques, using carbon microparticle infra-red sensors (MPIRS) with the IR thermal microscopy. These microparticle sensors, for the first time, have been used to make more accurate high temperature (approaching 700 °C) spot measurements on the IR transparent semiconductor membrane of the micro-heater. To substantially extend the temperature measurement range of the IR thermal microscope, and to obtain the thermal profiles at elevated temperatures (> 700 °C), a novel thermal measurement approach has been developed by calibrating emitted incandescence radiation in the optical region as a function of temperature. The calibration was carried out using the known melting point (MP) of metal microparticles. The method has been utilised to obtain the high temperature thermo-optical characterisation of the MEMS micro-heaters to temperatures in excess of 1200 °C. The measured temperature results using thermo-incandescence microscopy were compared with calculated electrical temperature results. The results indicated the thermo-incandescence measurements are in reasonable agreement (± 3.5 %) with the electrical temperature approach. Thus, the measurement technique using optical incandescent radiation extends the range of conventional IR microscopy and shows a great potential for making very high temperature spot measurements on electronic devices. The high power (> 500mW) electrical characterisation of the MEMS micro-heaters were also analysed to assess the reliability. The electrical performance results on the MEMS micro-heaters indicated failures at temperatures greater than 1300 °C and Scanning Electron Microscope (SEM) was used to analyse the failure modes

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Department of Electrical EngineeringA Sensor system is advanced along sensor technologies are developed. The performance improvement of sensor system can be expected by using the internet of things (IoT) communication technology and artificial neural network (ANN) for data processing and computation. Sensors or systems exchanged the data through this wireless connectivity, and various systems and applications are possible to implement by utilizing the advanced technologies. And the collected data is computed using by the ANN and the efficiency of system can be also improved. Gas monitoring system is widely need from the daily life to hazardous workplace. Harmful gas can cause a respiratory disease and some gas include cancer-causing component. Even though it may cause dangerous situation due to explosion. There are various kinds of hazardous gas and its characteristics that effect on human body are different each gas. The optimal design of gas monitoring system is necessary due to each gas has different criteria such as the permissible concentration and exposure time. Therefore, in this thesis, conventional sensor system configuration, operation, and limitation are described and gas monitoring system with wireless connectivity and neural network is proposed to improve the overall efficiency. As I already mentioned above, dangerous concentration and permissible exposure time are different depending on gas types. During the gas monitoring, gas concentration is lower than a permissible level in most of case. Thus, the gas monitoring is enough with low resolution for saving the power consumption in this situation. When detecting the gas, the high-resolution is required for the accurate concentration detecting. If the gas type is varied in the above situation, the amount of calculation increases exponentially. Therefore, in the conventional systems, target specifications are decided by the highest requirement in the whole situation, and it occurs increasing the cost and complexity of readout integrated circuit (ROIC) and system. In order to optimize the specification, the ANN and adaptive ROIC are utilized to compute the complex situation and huge data processing. Thus, gas monitoring system with learning-based algorithm is proposed to improve its efficiency. In order to optimize the operation depending on situation, dual-mode ROIC that monitoring mode and precision mode is implemented. If the present gas concentration is decided to safe, monitoring mode is operated with minimal detecting accuracy for saving the power consumption. The precision mode is switched when the high-resolution or hazardous situation are detected. The additional calibration circuits are necessary for the high-resolution implementation, and it has more power consumption and design complexity. A high-resolution Analog-to-digital converter (ADC) is kind of challenges to design with efficiency way. Therefore, in order to reduce the effective resolution of ADC and power consumption, zooming correlated double sampling (CDS) circuit and prediction successive approximation register (SAR) ADC are proposed for performance optimization into precision mode. A Microelectromechanical systems (MEMS) based gas sensor has high-integration and high sensitivity, but the calibration is needed to improve its low selectivity. Conventionally, principle component analysis (PCA) is used to classify the gas types, but this method has lower accuracy in some case and hard to verify in real-time. Alternatively, ANN is powerful algorithm to accurate sensing through collecting the data and training procedure and it can be verified the gas type and concentration in real-time. ROIC was fabricated in complementary metal-oxide-semiconductor (CMOS) 180-nm process and then the efficiency of the system with adaptive ROIC and ANN algorithm was experimentally verified into gas monitoring system prototype. Also, Bluetooth supports wireless connectivity to PC and mobile and pattern recognition and prediction code for SAR ADC is performed in MATLAB. Real-time gas information is monitored by Android-based application in smartphone. The dual-mode operation, optimization of performance and prediction code are adjusted with microcontroller unit (MCU). Monitoring mode is improved by x2.6 of figure-of-merits (FoM) that compared with previous resistive interface.clos

Chemicapacitors as a versatile platform for miniature gas and vapor sensors

Recent years have seen the rapid growth in the need for sensors throughout all areas of society including environmental sensing, health-care, public safety and manufacturing quality control. To meet this diverse need, sensors have to evolve from specialized and bespoke systems to miniaturized, low-power, low-cost (almost disposable) ubiquitous platforms. A technology that has been developed which gives a route to meet these challenges is the chemicapacitor sensor. To date the commercialization of these sensors has largely been restricted to humidity sensing, but in this review we examine the progress over recent years to expand this sensing technology to a wide range of gases and vapors. From sensors interrogated with laboratory instrumentation, chemicapacitor sensors have evolved into miniaturized units integrated with low power readout electronics that can selectively detect target molecules to ppm and sub-ppm levels within vapor mixtures

Doctor of Philosophy

dissertationExplosives and drugs cause problems in society when used inappropriately. It is highly desired to detect these chemicals in a quick and reliable way with low cost. Vapor detection of explosives and drugs has been proven to be one of the most effective, practical, and noninvasive methods. Among all the methods developed so far, highly sensitive carbon nanotube-based (CNT-based) chemiresistive sensors remain promising. In this dissertation, we explored and developed three CNT-based sensors for the explosive and drug detection. In this dissertation, we proposed that the dominant mechanism of our oligomer-coated CNT-based sensors is due to the swelling of the oligomers. Based on this swelling mechanism, we have designed three oligomers or polymers functionalized CNT-based sensors for the detection of nitro-explosives, alkanes (related with ammonium nitrate/fuel oil), and amines (related with methamphetamine), respectively. Beyond the high sensitivity to the target analytes, the selectivity of the sensors was largely enhanced by the careful selection of oligomers and polymers. The three oligomers and polymers under investigation can enhance the interaction between the sensor and the analyte, and facilitate the dispersion of CNTs in a solution. For the detection of nitro-explosives, we chose an oligomer that had been successfully demonstrated as a fluorescence-based nitro-explosive sensing materials. For the detection of alkanes and amines, we introduced the alkane side chains and carboxylic acid functional groups in the polymer. This dissertation demonstrated three examples of oligomer or polymer functionalization CNT-based sensors for the detection of explosives and drugs. Meanwhile, the dominant mechanism of the sensors was proposed. This research paved ways for developing chemical vapor sensors with better sensitivity and selectivity in the future

Air Force Institute of Technology Research Report 2009

This report summarizes the research activities of the Air Force Institute of Technology’s Graduate School of Engineering and Management. It describes research interests and faculty expertise; lists student theses/dissertations; identifies research sponsors and contributions; and outlines the procedures for contacting the school. Included in the report are: faculty publications, conference presentations, consultations, and funded research projects. Research was conducted in the areas of Aeronautical and Astronautical Engineering, Electrical Engineering and Electro-Optics, Computer Engineering and Computer Science, Systems and Engineering Management, Operational Sciences, Mathematics, Statistics and Engineering Physics