Design, Characterization And Compact Modeling Of Novel Silicon Controlled Rectifier (scr)-based Devices For Electrostatic Discha

Electrostatic Discharge (ESD), an event of a sudden transfer of electrons between two bodies at different potentials, happens commonly throughout nature. When such even occurs on integrated circuits (ICs), ICs will be damaged and failures result. As the evolution of semiconductor technologies, increasing usage of automated equipments and the emerging of more and more complex circuit applications, ICs are more sensitive to ESD strikes. Main ESD events occurring in semiconductor industry have been standardized as human body model (HBM), machine model (MM), charged device model (CDM) and international electrotechnical commission model (IEC) for control, monitor and test. In additional to the environmental control of ESD events during manufacturing, shipping and assembly, incorporating on-chip ESD protection circuits inside ICs is another effective solution to reduce the ESD-induced damage. This dissertation presents design, characterization, integration and compact modeling of novel silicon controlled rectifier (SCR)-based devices for on-chip ESD protection. The SCR-based device with a snapback characteristic has long been used to form a VSS-based protection scheme for on-chip ESD protection over a broad rang of technologies because of its low on-resistance, high failure current and the best area efficiency. The ESD design window of the snapback device is defined by the maximum power supply voltage as the low edge and the minimum internal circuitry breakdown voltage as the high edge. The downscaling of semiconductor technology keeps on squeezing the design window of on-chip ESD protection. For the submicron process and below, the turn-on voltage and sustain voltage of ESD protection cell should be lower than 10 V and higher than 5 V, respectively, to avoid core circuit damages and latch-up issue. This presents a big challenge to device/circuit engineers. Meanwhile, the high voltage technologies push the design window to another tough range whose sustain voltage, 45 V for instance, is hard for most snapback ESD devices to reach. Based on the in-depth elaborating on the principle of SCR-based devices, this dissertation first presents a novel unassisted, low trigger- and high holding-voltage SCR (uSCR) which can fit into the aforesaid ESD design window without involving any extra assistant circuitry to realize an area-efficient on-chip ESD protection for low voltage applications. The on-chip integration case is studied to verify the protection effectiveness of the design. Subsequently, this dissertation illustrate the development of a new high holding current SCR (HHC-SCR) device for high voltage ESD protection with increasing the sustain current, not the sustain voltage, of the SCR device to the latchup-immune level to avoid sacrificing the ESD protection robustness of the device. The ESD protection cells have been designed either by using technology computer aided design (TCAD) tools or through trial-and-error iterations, which is cost- or time-consuming or both. Also, the interaction of ESD protection cells and core circuits need to be identified and minimized at pre-silicon stage. It is highly desired to design and evaluate the ESD protection cell using simulation program with integrated circuit emphasis (SPICE)-like circuit simulation by employing compact models in circuit simulators. And the compact model also need to predict the response of ESD protection cells to very fast transient ESD events such as CDM event since it is a major ESD failure mode. The compact model for SCR-based device is not widely available. This dissertation develops a macromodeling approach to build a comprehensive SCR compact model for CDM ESD simulation of complete I/O circuit. This modeling approach offers simplicity, wide availability and compatibility with most commercial simulators by taking advantage of using the advanced BJT model, Vertical Bipolar Inter-Company (VBIC) model. SPICE Gummel-Poon (SGP) model has served the ICs industry well for over 20 years while it is not sufficiently accurate when using SGP model to build a compact model for ESD protection SCR. This dissertation seeks to compare the difference of SCR compact model built by using VBIC and conventional SGP in order to point out the important features of VBIC model for building an accurate and easy-CAD implement SCR model and explain why from device physics and model theory perspectives

New layout scheme to improve ESD robustness

Abstract -Silicidation used in CMOS processes has been reported to result in substantial degradation on ESD robustness of CMOS devices. In this work, a new ballasting layout scheme for fully-silicided I/O buffer is proposed to enhance its ESD robustness. Experimental results from real IC products have confirmed that the new ballasting layout scheme can successfully increase HBM ESD robustness of fully-silicided I/O buffers from 1.5kV to 7kV without using the additional silicide-blocking mask

Electrostatic Discharge

As we enter the nanoelectronics era, electrostatic discharge (ESD) phenomena is an important issue for everything from micro-electronics to nanostructures. This book provides insight into the operation and design of micro-gaps and nanogenerators with chapters on low capacitance ESD design in advanced technologies, electrical breakdown in micro-gaps, nanogenerators from ESD, and theoretical prediction and optimization of triboelectric nanogenerators. The information contained herein will prove useful for for engineers and scientists that have an interest in ESD physics and design

Electrostatic discharge protection circuit for high-speed mixed-signal circuits

ESD, the discharge of electrostatically generated charges into an IC, is one of the most important reliability problems for ultra-scaled devices. This electrostatic charge can generate voltages of up to tens of kilovolts. These very high voltages can generate very high electric fields and currents across semiconductor devices, which may result in dielectric damage or melting of semiconductors and contacts. It has been reported that up to 70% of IC failures are caused by ESD. Therefore, it’s necessary to design a protection circuit for each pin that discharges the ESD energy to the ground. As the devices are continuously scaling down, while ESD energy remains the same, they become more vulnerable to ESD stress. This higher susceptibility to ESD damage is due to thinner gate oxides and shallower junctions. Furthermore, higher operating frequency of the scaled technologies enforces lower parasitic capacitance of the ESD protection circuits. As a result, increasing the robustness of the ESD protection circuits with minimum additional parasitic capacitance is the main challenge in state of the art CMOS processes. Providing a complete ESD immunity for any circuit involves the design of proper protection circuits for I/O pins in addition to an ESD clamp between power supply pins. In this research both of these aspects are investigated and optimized solutions for them are reported. As Silicon Controlled Rectifier (SCR) has the highest ESD protection level per unit area, ESD protection for I/O pins is provided by optimizing the first breakdown voltage and latch-up immunity of SCR family devices. The triggering voltage of SCR is reduced by a new implementation of gate-substrate triggering technique. Furthermore, a new device based on SCR with internal darlington pair is introduced that can provide ESD protection with very small parasitic capacitance. Besides reducing triggering voltage, latch-up immunity of SCR devices is improved using two novel techniques to increase the holding voltage and the holding current. ESD protection between power rails is provided with transient clamps in which the triggering circuit keeps the clamp “on” during the ESD event. In this research, two new clamps are reported that enhance the triggering circuit of the clamp. The first method uses a CMOS thyristor element to provide enough delay time while the second method uses a flip flop to latch the clamp into “on” state at the ESD event. Moreover, the stability of transient clamps is analyzed and it’s been shown that the two proposed clamps have the highest stability compared to other state of the art ESD clamps. Finally, in order to investigate the impact of ESD protection circuits on high speed applications a current mode logic (CML) driver is designed in 0.13μm CMOS technology. The protection for this driver is provided using both MOS-based and SCR-based protection methods. Measurement results show that, compared to MOS-based protection, SCR-based protection has less impact on the driver performance due to its lower parasitic capacitance

Design, Characterization and Analysis of Component Level Electrostatic Discharge (ESD) Protection Solutions

Electrostatic Discharges (ESD) is a significant hazard to electronic components and systems. Based on a specific process technology, a given circuit application requires a customized ESD consideration that meets all the requirements such as the core circuit\u27s operating condition, maximum accepted leakage current, breakdown conditions for the process and overall device sizes. In every several years, there will be a new process technology becomes mature, and most of those new technology requires custom design of effective ESD protection solution. And usually the design window will shrinks due to the evolving of the technology becomes smaller and smaller. The ESD related failure is a major IC reliability concern and results in a loss of millions dollars each year in the semiconductor industry. To emulate the real word stress condition, several ESD stress models and test methods have been developed. The basic ESD models are Human Body model (HBM), Machine Mode (MM), and Charge Device Model (CDM). For the system-level ESD robustness, it is defined by different standards and specifications than component-level ESD requirements. International Electrotechnical Commission (IEC) 61000-4-2 has been used for the product and the Human Metal Model (HMM) has been used for the system at the wafer level. Increasingly stringent design specifications are forcing original equipment manufacturers (OEMs) to minimize the number of off-chip components. This is the case in emerging multifunction mobile, industrial, automotive and healthcare applications. It requires a high level of ESD robustness and the integrated circuit (IC) level, while finding ways to streamline the ESD characterization during early development cycle. To enable predicting the ESD performance of IC\u27s pins that are directly exposed to a system-level stress condition, a new the human metal model (HMM) test model has been introduced. In this work, a new testing methodology for product-level HMM characterization is introduced. This testing framework allows for consistently identifying ESD-induced failures in a product, substantially simplifying the testing process, and significantly reducing the product evaluation time during development cycle. It helps eliminates the potential inaccuracy provided by the conventional characterization methodology. For verification purposes, this method has been applied to detect the failures of two different products. Addition to the exploration of new characterization methodology that provides better accuracy, we also have looked into the protection devices itself. ICs for emerging high performance precision data acquisition and transceivers in industrial, automotive and wireless infrastructure applications require effective and ESD protection solutions. These circuits, with relatively high operating voltages at the Input/Output (I/O) pins, are increasingly being designed in low voltage Complementary Metal-Oxide-Semiconductor (CMOS) technologies to meet the requirements of low cost and large scale integration. A new dual-polarity SCR optimized for high bidirectional blocking voltages, high trigger current and low capacitance is realized in a sub 3-V, 180-nm CMOS process. This ESD device is designed for a specific application where the operating voltage at the I/O is larger than that of the core circuit. For instance, protecting high voltage swing I/Os in CMOS data acquisition system (DAS) applications. In this reference application, an array of thin film resistors voltage divider is directly connected to the interface pin, reducing the maximum voltage that is obtained at the core device input down to ± 1-5 V. Its ESD characteristics, including the trigger voltage and failure current, are compared against those of a typical CMOS-based SCR. Then, we have looked into the ESD protection designs into more advanced technology, the 28-nm CMOS. An ESD protection design builds on the multiple discharge-paths ESD cell concept and focuses the attention on the detailed design, optimization and realization of the in-situ ESD protection cell for IO pins with variable operation voltages. By introducing different device configurations fabricated in a 28-nm CMOS process, a greater flexibility in the design options and design trade-offs can be obtained in the proposed topology, thus achieving a higher integration and smaller cell size definition for multi-voltage compatibility interface ESD protection applications. This device is optimized for low capacitance and synthesized with the circuit IO components for in-situ ESD protection in communication interface applications developed in a 28-nm, high-k, and metal-gate CMOS technology. ESD devices have been used in different types of applications and also at different environment conditions, such as high temperature. At the last section of this research work, we have performed an investigation of several different ESD devices\u27 performance under various temperature conditions. And it has been shown that the variations of the device structure can results different ESD performance, and some devices can be used at the high temperature and some cannot. And this investigation also brings up a potential threat to the current ESD protection devices that they might be very vulnerable to the latch-up issue at the higher temperature range

CDM Robust & Low Noise ESD protection circuits

In spite of significant progress during last couple of decades, ESD still affects production yields, manufacturing costs, product quality, product reliability and profitability. The objective of an ESD protection circuit is to create a harmless shunting path for the static electricity before it damages the sensitive electronic circuits. As the devices are scaling down, while ESD energy remains the same, VLSIs are becoming more vulnerable to ESD stress. This higher susceptibility to ESD damage is due to thinner gate oxides and shallower junctions. Furthermore, higher operating frequency of the scaled technologies enforces lower parasitic capacitance of the ESD protection circuits. Hence, increasing the robustness of the ESD protection circuits with minimum additional parasitic capacitance is the main challenge in state of the art CMOS processes. Furthermore with scaling, the integration of analog blocks such as ADC, PLL’s, DLL’s, oscillator etc. on digital chips has provided cheap system on chip (SOC) solutions. However, when analog and digital chip are combined into single mixed-signal chip, on-chip noise coupling from the digital to the analog circuitry through ESD protection circuits becomes a big concern. Thus, increasing supply noise isolation while ensuring the ESD protection robustness is also a big challenge. In this thesis, several ESD protection circuits and devices have been proposed to address the critical issues like increased leakage current, slower turn-on time of devices, increased susceptibility to power supply isolation etc. The proposed ESD protection circuits/devices have been classified into two categories: Pad based ESD protection in which the ESD protection circuits are placed in the I/O pads, and Rail based ESD in which ESD protection circuit is placed between power supplies. In our research, both these aspects have been investigated. The Silicon Controlled Rectifier (SCR) based devices have been used for Pad ESD protection as they have highest ESD protection level per unit area. Two novel devices Darlington based SCR (DSCR) and NMOS Darlington based SCR (NMOS-DSCR) having faster turn-on time, lower first breakdown voltage and low capacitance have been proposed. The transient clamps have been investigated and optimized for Rail based ESD protection. In this research, we have addressed the issue of leakage current in transient clamps. A methodology has been purposed to reduce the leakage current by more than 200,000 times without having major impact on the ESD performance. Also, the issue of noise coupling from digital supply to analog supply through the ESD protection circuits has been addressed. A new transient clamp has been proposed to increase the power supply noise isolation. Finally, a new methodology of placement of analog circuit with respect to transient clamp has been proposed to further increase the power supply noise isolation

Development of the readout electronics for the high luminosity upgrade of the CMS outer strip tracker

The High-luminosity upgrade of the LHC will deliver the dramatic increase in luminosity required for precision measurements and to probe Beyond the Standard Model theories. At the same time, it will present unprecedented challenges in terms of pileup and radiation degradation. The CMS experiment is set for an extensive upgrade campaign, which includes the replacement of the current Tracker with another all-silicon detector with improved performance and reduced mass. One of the most ambitious aspects of the future Tracker will be the ability to identify high transverse momentum track candidates at every bunch crossing and with very low latency, in order to include tracking information at the L1 hardware trigger stage, a critical and effective step to achieve triggers with high purity and low threshold. This thesis presents the development and the testing of the CMS Binary Chip 2 (CBC2), a prototype Application Specific Integrated Circuit (ASIC) for the binary front-end readout of silicon strip detectors modules in the Outer Tracker, which also integrates the logic necessary to identify high transverse momentum candidates by correlating hits from two silicon strip detectors, separated by a few millimetres. The design exploits the relation between the transverse momentum and the curvature in the trajectory of charged particles subject to the large magnetic field of CMS. The logic which follows the analogue amplification and binary conversion rejects clusters wider than a programmable maximum number of adjacent strips, compensates for the geometrical offset in the alignment of the module, and correlates the hits between the two sensor layers. Data are stored in a memory buffer before being transferred to an additional buffer stage and being serially read-out upon receipt of a Level 1 trigger. The CBC2 has been subject to extensive testing since its production in January 2013: this work reports the results of electrical characterization, of the total ionizing dose irradiation tests, and the performance of a prototype module instrumented with CBC2 in realistic conditions in a beam test. The latter is the first experimental demonstration of the Pt-selection principle central to the future of CMS. Several total-ionizing-dose tests highlighted no functional issue, but observed significant excess static current for doses <1 Mrad. The source of the excess was traced to static leakage current in the memory pipeline, and is believed to be a consequence of the high instantaneous dose delivered by the x-ray setup. Nevertheless, a new SRAM layout aimed at removing the leakage path was proposed for the CBC3. The results of single event upset testing of the chip are also reported, two of the three distinct memory circuits used in the chip were proven to meet the expected robustness, while the third will be replaced in the next iteration of the chip. Finally, the next version of the ASIC is presented, highlighting the additional features of the final prototype, such as half-strip resolution, additional trigger logic functionality, longer trigger latency and higher rate, and fully synchronous stub readout.Open Acces