Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Development of novel micropneumatic grippers for biomanipulation

Microbjects with dimensions from 1 μm to 1 mm have been developed recently for different aspects and purposes. Consequently, the development of handling and manipulation tools to fulfil this need is urgently required. Micromanipulation techniques could be generally categorized according to their actuation method such as electrostatic, thermal, shape memory alloy, piezoelectric, magnetic, and fluidic actuation. Each of which has its advantage and disadvantage. The fluidic actuation has been overlooked in MEMS despite its satisfactory output in the micro-scale. This thesis presents different families of pneumatically driven, low cost, compatible with biological environment, scalable, and controllable microgrippers. The first family demonstrated a polymeric microgripper that was laser cut and actuated pneumatically. It was tested to manipulate microparticles down to 200 microns. To overcome the assembly challenges that arise in this family, the second family was proposed. The second family was a micro-cantilever based microgripper, where the device was assembled layer by layer to form a 3D structure. The microcantilevers were fabricated using photo-etching technique, and demonstrated the applicability to manipulate micro-particles down to 200 microns using automated pick-and-place procedure. In addition, this family was used as a tactile-detector as well. Due to the angular gripping scheme followed by the above mentioned families, gripping smaller objects becomes a challenging task. A third family following a parallel gripping scheme was proposed allowing the gripping of smaller objects to be visible. It comprises a compliant structure microgripper actuated pneumatically and fabricated using picosecond laser technology, and demonstrated the capability of gripping microobject as small as 100 μm microbeads. An FEA modelling was employed to validate the experimental and analytical results, and excellent matching was achieved

Workshop on "Control issues in the micro / nano - world".

International audienceDuring the last decade, the need of systems with micro/nanometers accuracy and fast dynamics has been growing rapidly. Such systems occur in applications including 1) micromanipulation of biological cells, 2) micrassembly of MEMS/MOEMS, 3) micro/nanosensors for environmental monitoring, 4) nanometer resolution imaging and metrology (AFM and SEM). The scale and requirement of such systems present a number of challenges to the control system design that will be addressed in this workshop. Working in the micro/nano-world involves displacements from nanometers to tens of microns. Because of this precision requirement, environmental conditions such as temperature, humidity, vibration, could generate noise and disturbance that are in the same range as the displacements of interest. The so-called smart materials, e.g., piezoceramics, magnetostrictive, shape memory, electroactive polymer, have been used for actuation or sensing in the micro/nano-world. They allow high resolution positioning as compared to hinges based systems. However, these materials exhibit hysteresis nonlinearity, and in the case of piezoelectric materials, drifts (called creep) in response to constant inputs In the case of oscillating micro/nano-structures (cantilever, tube), these nonlinearities and vibrations strongly decrease their performances. Many MEMS and NEMS applications involve gripping, feeding, or sorting, operations, where sensor feedback is necessary for their execution. Sensors that are readily available, e.g., interferometer, triangulation laser, and machine vision, are bulky and expensive. Sensors that are compact in size and convenient for packaging, e.g., strain gage, piezoceramic charge sensor, etc., have limited performance or robustness. To account for these difficulties, new control oriented techniques are emerging, such as[d the combination of two or more ‘packageable' sensors , the use of feedforward control technique which does not require sensors, and the use of robust controllers which account the sensor characteristics. The aim of this workshop is to provide a forum for specialists to present and overview the different approaches of control system design for the micro/nano-world and to initiate collaborations and joint projects

Objekt-Manipulation und Steuerung der Greifkraft durch Verwendung von Taktilen Sensoren

This dissertation describes a new type of tactile sensor and an improved version of the dynamic tactile sensing approach that can provide a regularly updated and accurate estimate of minimum applied forces for use in the control of gripper manipulation. The pre-slip sensing algorithm is proposed and implemented into two-finger robot gripper. An algorithm that can discriminate between types of contact surface and recognize objects at the contact stage is also proposed. A technique for recognizing objects using tactile sensor arrays, and a method based on the quadric surface parameter for classifying grasped objects is described. Tactile arrays can recognize surface types on contact, making it possible for a tactile system to recognize translation, rotation, and scaling of an object independently.Diese Dissertation beschreibt eine neue Art von taktilen Sensoren und einen verbesserten Ansatz zur dynamischen Erfassung von taktilen daten, der in regelmäßigen Zeitabständen eine genaue Bewertung der minimalen Greifkraft liefert, die zur Steuerung des Greifers nötig ist. Ein Berechnungsverfahren zur Voraussage des Schlupfs, das in einen Zwei-Finger-Greifarm eines Roboters eingebaut wurde, wird vorgestellt. Auch ein Algorithmus zur Unterscheidung von verschiedenen Oberflächenarten und zur Erkennung von Objektformen bei der Berührung wird vorgestellt. Ein Verfahren zur Objekterkennung mit Hilfe einer Matrix aus taktilen Sensoren und eine Methode zur Klassifikation ergriffener Objekte, basierend auf den Daten einer rechteckigen Oberfläche, werden beschrieben. Mit Hilfe dieser Matrix können unter schiedliche Arten von Oberflächen bei Berührung erkannt werden, was es für das Tastsystem möglich macht, Verschiebung, Drehung und Größe eines Objektes unabhängig voneinander zu erkennen

Ground Robotic Hand Applications for the Space Program study (GRASP)

This document reports on a NASA-STDP effort to address research interests of the NASA Kennedy Space Center (KSC) through a study entitled, Ground Robotic-Hand Applications for the Space Program (GRASP). The primary objective of the GRASP study was to identify beneficial applications of specialized end-effectors and robotic hand devices for automating any ground operations which are performed at the Kennedy Space Center. Thus, operations for expendable vehicles, the Space Shuttle and its components, and all payloads were included in the study. Typical benefits of automating operations, or augmenting human operators performing physical tasks, include: reduced costs; enhanced safety and reliability; and reduced processing turnaround time

Design, Actuation, and Functionalization of Untethered Soft Magnetic Robots with Life-Like Motions: A Review

Soft robots have demonstrated superior flexibility and functionality than conventional rigid robots. These versatile devices can respond to a wide range of external stimuli (including light, magnetic field, heat, electric field, etc.), and can perform sophisticated tasks. Notably, soft magnetic robots exhibit unparalleled advantages among numerous soft robots (such as untethered control, rapid response, and high safety), and have made remarkable progress in small-scale manipulation tasks and biomedical applications. Despite the promising potential, soft magnetic robots are still in their infancy and require significant advancements in terms of fabrication, design principles, and functional development to be viable for real-world applications. Recent progress shows that bionics can serve as an effective tool for developing soft robots. In light of this, the review is presented with two main goals: (i) exploring how innovative bioinspired strategies can revolutionize the design and actuation of soft magnetic robots to realize various life-like motions; (ii) examining how these bionic systems could benefit practical applications in small-scale solid/liquid manipulation and therapeutic/diagnostic-related biomedical fields

3D MEMS Microassembly

Due to the potential uses and advantages of 3D microelectromechanical systems (MEMS), research has been ongoing to advance the field. The intention of my reasearch is to explore different gripper designs and their interaction with corresponding components to establish a 3D microassembly system. In order to meet these goals, two grippers were designed using different mechanisms for grasping. At the same time, corresponding parts capable of being constructed into a 3D microstructure were designed to interact with the grippers. The microcomponents were fabricated using PolyMUMPS, a part of the Multi-User MEMS Processes (MUMPS), and experimentation was conducted with the goal of constructing a 3D microstructure. The results were partially successful in that both grippers were able to pick up corresonponding parts and bring them out of plane in order to make them stand up. However, a final 3D microstructure was unfortunately not achieved due to time constraints. This will be left to future researchers who continue the project. On the equpiment side a microassembly system was fully integrated using cameras for vision and motors with micro-resolution for movement. A computer program was used to control each part of the system. The cameras provided feedback from various views, allowing the operator to observe what was happening to the microcomponents. The grippers were attached to one of the motors and manipulated to pick up the parts. The final overall system proved sufficient for microassembly, but had some areas that could be improved upon

Soft Robotic Grippers

Advances in soft robotics, materials science, and stretchable electronics have enabled rapid progress in soft grippers. Here, a critical overview of soft robotic grippers is presented, covering different material sets, physical principles, and device architectures. Soft gripping can be categorized into three technologies, enabling grasping by: a) actuation, b) controlled stiffness, and c) controlled adhesion. A comprehensive review of each type is presented. Compared to rigid grippers, end-effectors fabricated from flexible and soft components can often grasp or manipulate a larger variety of objects. Such grippers are an example of morphological computation, where control complexity is greatly reduced by material softness and mechanical compliance. Advanced materials and soft components, in particular silicone elastomers, shape memory materials, and active polymers and gels, are increasingly investigated for the design of lighter, simpler, and more universal grippers, using the inherent functionality of the materials. Embedding stretchable distributed sensors in or on soft grippers greatly enhances the ways in which the grippers interact with objects. Challenges for soft grippers include miniaturization, robustness, speed, integration of sensing, and control. Improved materials, processing methods, and sensing play an important role in future research

A novel approach to micro-telemanipulation with soft slave robots: integrated design of a non-overshooting series elastic actuator

Micro mechanical devices are becoming ubiquitous as they find increas- ing uses in applications such as micro-fabrication, micro-surgery and micro- probing. Use of micro-electromechanical systems not only offer compactness and precision, but also increases the efficiency of processes. Whenever me- chanical devices are used to interact with the environment, accurate control of the forces arising at the interaction surfaces arise as an important chal- lenge. In this work, we propose using a series elastic actuation (SEA) for micro- manipulation. Since an SEA is an integrated mechatronic device, the me- chanical design and controller synthesis are handled in parallel to achieve the best overall performance. The mechanical design of the μSEA is handled in two steps: type selection and dimensional synthesis. In the type selection step, a compliant, half pantograph mechanism is chosen as the underlying kinematic structure of the coupling element. For optimal dimensioning, the bandwidth of the system, the disturbance response and the force resolution are considered to achieve good control performance with high reliability. These objectives are achieved by optimizing the manipulability and the stiffness of the mechanism along with a robustness constraint. In parallel with the mechanical design, a force controller is synthesized. The controller has a cascaded structure: an inner loop for position control and an outer loop for force control. Since excess force application can be detrimental during manipulation of fragile objects; the position controller of the inner loop is designed to be a non-overshooting controller which guar- antees the force response of the system always stay lower than the reference value. This self-standing μSEA system is embedded into a 3-channel scaled tele- operation architecture so that an operator can perform micro-telemanipulation. Constant scaling between the master and the slave is implemented and the teleoperator controllers preserve the non-overshooting nature of the μSEA. Finally, the designed μSEA based micro-telemanipulation system is im- plemented and characterized