A Patterned Single Layer Graphene Resistance Temperature Sensor

Micro-fabricated single-layer graphenes (SLGs) on a silicon dioxide (SiO2)/Si substrate, a silicon nitride (SiN) membrane, and a suspended architecture are presented for their use as temperature sensors. These graphene temperature sensors act as resistance temperature detectors, showing a quadratic dependence of resistance on the temperature in a range between 283 K and 303 K. The observed resistance change of the graphene temperature sensors are explained by the temperature dependent electron mobility relationship (~T−4) and electron-phonon scattering. By analyzing the transient response of the SLG temperature sensors on different substrates, it is found that the graphene sensor on the SiN membrane shows the highest sensitivity due to low thermal mass, while the sensor on SiO2/Si reveals the lowest one. Also, the graphene on the SiN membrane reveals not only the fastest response, but also better mechanical stability compared to the suspended graphene sensor. Therefore, the presented results show that the temperature sensors based on SLG with an extremely low thermal mass can be used in various applications requiring high sensitivity and fast operation

Heterogeneous integration of graphene and Si CMOS for gas sensing applications

Detecting presence of gas molecules is of prominent importance for controlling chemical processes, safety systems, and industrial and medical applications. Despite enormous progress in this field over past few decades on developing and improving various types of gas sensors, sensors with higher sensitivity, selectivity, lower sensing limit, and lower cost that can perform at room temperature are highly sought-after. Discovery of graphene and its succeeding progress in nanotechnology has paved the way to design ultra-sensitive gas sensors that can detect individual gas molecules while operating at room temperature. Graphene is a promising candidate for gas sensing applications due to its unique transport properties, exceptionally high surface-to-volume ratio, and low electrical noise. In this dissertation, a graphene gas sensor fully integrated with silicon CMOS platform is presented, and its performance for detecting NO₂ and NH₃ gas molecules is investigated. This integration helps benefit the high gas sensitivity of graphene at room temperature as well as the compact size, robustness, low cost, and advantages of standard industrial scale production of CMOS technology. Recent progress in large scale growth of CVD graphene paves the path toward commercialization of graphene-based CMOS sensors to provide highly sensitive low-cost sensors for industrial applications. To best of our knowledge, this work is the first integration of mono-layer graphene and silicon CMOS. Also, this is the first implementation of graphene integrated gas sensor. Heterogeneous integration of monolayer graphene and silicon CMOS can introduce a platform to exploit the unique electronic properties of monolayer graphene for gas sensing applications and also take a step further toward commercialization of ultrasensitive monolithic graphene-based gas sensors. Furthermore, we were able to enhance sensitivity of CVD graphene to NH₃ by almost an order of magnitude. We experimentally showed that sensitivity of graphene to NH₃ can be enhanced by 7 folds compared to as-fabricated graphene by introducing NO₂ molecules as dopants. We observed this enhancement for graphene sensors microfabricated on SiO₂/Si substrate, as well as our integrated graphene-CMOS sensors. This finding not only increases current understanding on adsorption mechanisms of molecules to graphene, but also takes another step toward commercialization of graphene sensors.Electrical and Computer Engineerin

Advances in test and measurement of the interface adhesion and bond strengths in coating-substrate systems, emphasising blister and bulk techniques

In this paper, recent advances in the minimum-destructive testing of the adhesion of coating-substrate systems are reviewed, focusing on key techniques such as micro- and nano-scale levels of indentation, scratching, laser-induced wave shock, as well as the blister and buckle approach. Along with adhesion failure tests, the latest and most extensive applications of the adhesion test methods in nano-, micro- and bulk-coating technology and the associated techniques to determine the minimum damage defects left on the coatings are discussed and their use reviewed

A Review on Mechanics and Mechanical Properties of 2D Materials - Graphene and Beyond

Since the first successful synthesis of graphene just over a decade ago, a variety of two-dimensional (2D) materials (e.g., transition metal-dichalcogenides, hexagonal boron-nitride, etc.) have been discovered. Among the many unique and attractive properties of 2D materials, mechanical properties play important roles in manufacturing, integration and performance for their potential applications. Mechanics is indispensable in the study of mechanical properties, both experimentally and theoretically. The coupling between the mechanical and other physical properties (thermal, electronic, optical) is also of great interest in exploring novel applications, where mechanics has to be combined with condensed matter physics to establish a scalable theoretical framework. Moreover, mechanical interactions between 2D materials and various substrate materials are essential for integrated device applications of 2D materials, for which the mechanics of interfaces (adhesion and friction) has to be developed for the 2D materials. Here we review recent theoretical and experimental works related to mechanics and mechanical properties of 2D materials. While graphene is the most studied 2D material to date, we expect continual growth of interest in the mechanics of other 2D materials beyond graphene

Fabrication and measurement of graphene devices

Graphene, an allotrope of carbon, has been prepared by mechanical exfoliation and Chemical Vapour Deposition. The graphene so produced has been micro manipulated using polymer membranes and optical microscopy and so placed on silicon wafer. In addition, individual graphene fragments were micro manipulated and placed on pre-prepared hexagonal boron nitride flakes to aid in the fabrication of devices for testing. Graphene devices were prepared by sequential lithography, metalisation and plasma treatment to make field effect multi terminal Hall bar test pieces. The Hall bar geometry test pieces were examined at a variety of magnetic field strengths between 11 Tesla and zero magnetic field. By careful control of the gate voltage, temperature the I-V characteristics of the Hall bar test pieces were measured. Analysis of the I-V characteristics as a function of gate voltage and magnetic field strength was undertaken to determine the location of Dirac cones. Simple analysis of resistance change with gate voltage and magnetic field strength resulted in identification of the first parts of the Hofstadter energy spectrum. To help fabricate multilayer mesas of graphene and hexagonal boron nitride a micromanipulator workstation and simple UV microscope were constructed

Diagnostic and Therapeutic MEMS (Micro-Electro-Mechanical Systems) Devices for the Identification and Treatment of Human Disease

abstract: Early detection and treatment of disease is paramount for improving human health and wellness. Micro-scale devices promote new opportunities for the rapid, cost-effective, and accurate identification of altered biological states indicative of disease early-onset; these devices function at a scale more sensitive to numerous biological processes. The application of Micro-Electro-Mechanical Systems (MEMS) in biomedical settings has recently emerged and flourished over course of the last two decades, requiring a deep understanding of material biocompatibility, biosensing sensitively/selectively, biological constraints for artificial tissue/organ replacement, and the regulations in place to ensure device safety. Capitalizing on the inherent physical differences between cancerous and healthy cells, our ultra-thin silicone membrane enables earlier identification of bladder cancer—with a 70% recurrence rate. Building on this breakthrough, we have devised an array to multiplex this sample-analysis in real-time as well as expanding beyond bladder cancer. The introduction of new materials—with novel properties—to augment current and create innovative medical implants requires the careful analysis of material impact on cellular toxicity, mutagenicity, reactivity, and stability. Finally, the achievement of replacing defective biological systems with implanted artificial equivalents that must function within the same biological constraints, have consistent reliability, and ultimately show the promise of improving human health as demonstrated by our hydrogel check valve. The ongoing proliferation, expanding prevalence, and persistent improvement in MEMS devices through greater sensitivity, specificity, and integration with biological processes will undoubtedly bolster medical science with novel MEMS-based diagnostics and therapeutics.Dissertation/ThesisDoctoral Dissertation Electrical Engineering 201

Multilayer Thin Films

This book, "Multilayer Thin Films-Versatile Applications for Materials Engineering", includes thirteen chapters related to the preparations, characterizations, and applications in the modern research of materials engineering. The evaluation of nanomaterials in the form of different shapes, sizes, and volumes needed for utilization in different kinds of gadgets and devices. Since the recently developed two-dimensional carbon materials are proving to be immensely important for new configurations in the miniature scale in the modern technology, it is imperative to innovate various atomic and molecular arrangements for the modifications of structural properties. Of late, graphene and graphene-related derivatives have been proven as the most versatile two-dimensional nanomaterials with superb mechanical, electrical, electronic, optical, and magnetic properties. To understand the in-depth technology, an effort has been made to explain the basics of nano dimensional materials. The importance of nano particles in various aspects of nano technology is clearly indicated. There is more than one chapter describing the use of nanomaterials as sensors. In this volume, an effort has been made to clarify the use of such materials from non-conductor to highly conducting species. It is expected that this book will be useful to the postgraduate and research students as this is a multidisciplinary subject

Functionalized epitaxial graphene as versatile platform for air quality sensors

The work presented in this thesis focuses on epitaxial graphene on SiC as a platform for air quality sensors. Several approaches have been tested and evaluated to increase the sensitivity, selectivity, speed of response and stability of the sensors. The graphene surfaces have been functionalized, for example, with different metal oxide nanoparticles and nanolayers using hollow-cathode sputtering and pulsed laser deposition. The modified surfaces were investigated to-wards topography, integrity and chemical composition with characterization methods such as atomic force microscopy and Raman spectroscopy. Interaction energies between several analytes and nanoparticle-graphene-combinations were calculated by density functional theory to find the optimal material for specific target gases, and to verify the usefulness of this approach. The impact of environmental influences such as operating temperature, relative humidity and UV irradiation on sensing properties was investigated as well. To further enhance sensor performances, the first-order time-derivative of the sensor’s resistance was introduced to speed up sensor response and a temperature cycled operation mode was investigated towards selectivity. Applying these methods in laboratory conditions, sensors with a quantitative readout of single ppb benzene and formaldehyde were developed. These results show promise to fill the existing gap of low-cost but highly sensitive and fast gas sensors for air quality monitoring.Financial support by the Swedish Foundation for Strategic Research (SSF) through the grants GMT14-0077 and RMA15-024