Overview of sensors suitable for active flow control methods

Hlavným cieľom tejto bakalárskej práce bolo vytvorenie prehľadu vyvíjaných a už aplikovaných senzorov pre účely aktívneho riadenia prúdov. Senzory musia splňovať niektoré podmienky, preto výber senzorov bol naviazaný na reálnych výsledkoch testovacích programov, popis ktorých tvorí prvú časť tejto bakalárskej práce. Opis technológie a princíp fungovania senzorov je popísaný v druhej časti tejto práce.The main purpose of this bachelor thesis was to create the overview of the sensors developed for the future active flow control applications and overview the sensors already used in the active flow control applications. The sensors have to fulfil several requirements, so selection for the overview was based on the real flight test programs results, which were described in the first part of the thesis. The sensors technology description and operation principles were included in the second part of the thesis

Multi-axis MEMS force sensor for measuring friction components involved in dexterous micromanipulation: Design and optimization.

International audienceAt the nanoscale and for particular applications such as dexterous micro-manipulation, two Degrees of Freedom nanotribometers are no longer adequate for studying and characterizing the contacts. This paper deals with the specifications and working principle of a new multi-axis friction sensor designed for nanotribological testing applied to this purpose in order to extract each contribution independently (ie, sliding, rolling and spin motion). It is composed ofa central platform with a fixed ball and surrounded by a compliant table. Its sensing ability is based on piezoresistivity: four sets of piezoresistors are symmetrically distributed at the root of four central beams. Finite Elements Method simulations are performed to find the optimal dimensions of the sensor. As results, this sensor could measure independently normal and friction forces in the range of 1 mN and 100 μN, respectively and the three rotation components. Estimated crosstalk is lower than 1 % with a good sensitivity

Cupula-Inspired Hyaluronic Acid-Based Hydrogel Encapsulation to Form Biomimetic MEMS Flow Sensors

Blind cavefishes are known to detect objects through hydrodynamic vision enabled by arrays of biological flow sensors called neuromasts. This work demonstrates the development of a MEMS artificial neuromast sensor that features a 3D polymer hair cell that extends into the ambient flow. The hair cell is monolithically fabricated at the center of a 2 µm thick silicon membrane that is photo-patterned with a full-bridge bias circuit. Ambient flow variations exert a drag force on the hair cell, which causes a displacement of the sensing membrane. This in turn leads to the resistance imbalance in the bridge circuit generating a voltage output. Inspired by the biological neuromast, a biomimetic synthetic hydrogel cupula is incorporated on the hair cell. The morphology, swelling behavior, porosity and mechanical properties of the hyaluronic acid hydrogel are characterized through rheology and nanoindentation techniques. The sensitivity enhancement in the sensor output due to the material and mechanical contributions of the micro-porous hydrogel cupula is investigated through experiments.Singapore. National Research Foundation (Campus for Research Excellence and Technological Enterprise programme

Sensorized Tools for Haptic Force Feedback in Computer Assisted Surgery

Structural engineerin

Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature

Continued demands for better control of the operating conditions of structures and processes have led to the need for better means of measuring temperature (T), pressure (P), and relative humidity (RH). One way to satisfy this need is to use MEMS technology to develop a sensor that will contain, in a single package, capabilities to simultaneously measure T, P, and RH of its environment. Because of the advantages of MEMS technology, which include small size, low power, very high precision, and low cost, it was selected for use in this thesis. Although MEMS sensors that individually measure T, P, and RH exist, there are no sensors that combine all three measurements in a single package. In this thesis, a piezoresistive pressure sensor and capacitive humidity sensor were developed to operate in the range, of 0 to 2 atm and 0% to 100%, respectively. Finally, a polysilicon resistor temperature sensor, which can work in the range of -50ºC to 150ºC, was analyzed. Multimeasurement capability will make this sensor particularly applicable for point-wise mapping of environmental conditions for advanced process control. In this thesis, the development of sensors for such an integrated device is outlined. Selected results, based on the use of analytical, computational, and experimental solutions (ACES) methodology, particularly suited for the development of MEMS sensors, are presented for the pressure, relative humidity, and temperature sensors