A COMPREHENSIVE OVERVIEW OF RECENT DEVELOPMENTS IN RF-MEMS TECHNOLOGY-BASED HIGH-PERFORMANCE PASSIVE COMPONENTS FOR APPLICATIONS IN THE 5G AND FUTURE TELECOMMUNICATIONS SCENARIOS

The goal of this work is to provide an overview about the current development of radio-frequency microelectromechanical systems technology, with special attention towards those passive components bearing significant application potential in the currently developing 5G paradigm. Due to the required capabilities of such communication standard in terms of high data rates, extended allocated spectrum, use of massive MIMO (Multiple-Input-Multiple-Output) systems, beam steering and beam forming, the focus will be on devices like switches, phase shifters, attenuators, filters, and their packaging/integration. For each of the previous topics, several valuable contributions appeared in the last decade, underlining the improvements produced in the state of the art and the chance for RF-MEMS technology to play a prominent role in the actual implementation of the 5G infrastructure

Development of tunable and miniature microwave filters for modern wireless communications

Due to the increasing demand for new wireless services and applications, the high level of integration and the coexistence of multi-standard (MS) or multi-band operations into a single device are becoming defining trends in designing microwave filters. This has driven considerable technological advances in reconfigurable/tunable and miniaturized filters. More specifically, reconfigurable/tunable filters that tune to different frequency bands instead of classical filter banks have great potential to significantly reduce the system size and complexity; while reducing the filter size becomes essential to achieve the highest degree of integration density in compact and portable wireless devices. In the light of this scenario, the objective of this dissertation is to develop the new design technologies, concepts and filtering configurations for tunable microstrip filters and compact passive microwave filters. To this aim, this dissertation is divided into two main parts. The first part (Part I) focuses on the designs of novel varactor-tuned microstrip filters with advanced performances. In this aspect, new topologies for realizing tunable lowpass and highpass filters are firstly developed. State-of-the-art performances, including wide tuning range, high selectivity with multiple transmission zeros, low insertion loss and compact size for all the tuning states are obtained in both of these filters. Secondly, two novel classes of tunable bandpass filters are presented. One of them is designed based on varactor-loaded parallel-coupled microstrip lines (PCML) and short-circuited stubs, which allows the lower passband edge together with two transmission zeros located around the lower passband skirt to be reconfigured separately. While the other tunable bandpass filter is constructed by the combination of tunable bandpass and lowpass filters, featuring both centre frequency and bandwidth tunabilities, as well as high selectivity with abundant transmission zeros. Furthermore, a new concept of tunable lossy filter is demonstrated, which attempts to achieve an equivalent high-Q tunable performance by using low-Q resonators. This concept makes the presented tunable combline filter interesting for some frequency-agile applications in which the low in-band loss variation and high selectivity are much desired while the absolute insertion loss can be a tradeoff. The second part (Part II) is devoted to the design of miniaturized passive microwave filters with improved characteristics. For this, the concept of artificial right-handed and left-handed transmission lines are applied to the signal interference filtering topology, which results in a compact circuit size and good out-of-band performance. In particular, for a further size reduction, such filter is implemented in the forms of multilayered structure by using liquid crystal polymer (LCP) technology. Additionally, another two types of miniaturized bandpass filters using stepped impedance resonators are demonstrated, which are implemented based on different fabrication processes (i.e. LCP bonded multilayer PCB technology and a standard planar PCB technology). Among their main features, the compact size, wide passband, broad stopband with multiple transmission zeros and circuit simplicity are highlighted. For all the proposed design techniques and filtering structures, exhaustive theoretical analyses are done, and design equations and guide rules are provided. Furthermore, all the proposed schemes and/or ideas have been experimentally validated through the design, implementation and measurement of different filters. The fabrication processes of multilayer technology utilized: liquid crystal polymer (LCP) technology and liquid crystal polymer (LCP) bonded multilayer printed circuit board (PCB) technology, are also demonstrated for reference. All of the results achieved in this dissertation make the proposed filters very attractive for their use in modern wireless communication systems

Development of turnable and miniature microwave filters for modern wireless communication

Due to the increasing demand for new wireless services and applications, the high level of integration and the coexistence of multi-standard (MS) or multi-band operations into a single device are becoming defining trends in designing microwave filters. This has driven considerable technological advances in reconfigurable/tunable and miniaturized filters. More specifically, reconfigurable/tunable filters that tune to different frequency bands instead of classical filter banks have great potential to significantly reduce the system size and complexity; while reducing the filter size becomes essential to achieve the highest degree of integration density in compact and portable wireless devices. In the light of this scenario, the objective of this dissertation is to develop the new design technologies, concepts and filtering configurations for tunable microstrip filters and compact passive microwave filters. To this aim, this dissertation is divided into two main parts. The first part (Part I) focuses on the designs of novel varactor-tuned microstrip filters with advanced performances. In this aspect, new topologies for realizing tunable lowpass and highpass filters are firstly developed. State-of-the-art performances, including wide tuning range, high selectivity with multiple transmission zeros, low insertion loss and compact size for all the tuning states are obtained in both of these filters. Secondly, two novel classes of tunable bandpass filters are presented. One of them is designed based on varactor-loaded parallel-coupled microstrip lines (PCML) and short-circuited stubs, which allows the lower passband edge together with two transmission zeros located around the lower passband skirt to be reconfigured separately. While the other tunable bandpass filter is iii constructed by the combination of tunable bandpass and lowpass filters, featuring both centre frequency and bandwidth tunabilities, as well as high selectivity with abundant transmission zeros. Furthermore, a new concept of tunable lossy filter is demonstrated, which attempts to achieve an equivalent high-Q tunable performance by using low-Q resonators. This concept makes the presented tunable combline filter interesting for some frequency-agile applications in which the low in-band loss variation and high selectivity are much desired while the absolute insertion loss can be a tradeoff. The second part (Part II) is devoted to the design of miniaturized passive microwave filters with improved characteristics. For this, the concept of artificial right-handed and left-handed transmission lines are applied to the signal interference filtering topology, which results in a compact circuit size and good out-of-band performance. In particular, for a further size reduction, such filter is implemented in the forms of multilayered structure by using liquid crystal polymer (LCP) technology. Additionally, another two types of miniaturized bandpass filters using stepped impedance resonators are demonstrated, which are implemented based on different fabrication processes (i.e. LCP bonded multilayer PCB technology and a standard planar PCB technology). Among their main features, the compact size, wide passband, broad stopband with multiple transmission zeros and circuit simplicity are highlighted. For all the proposed design techniques and filtering structures, exhaustive theoretical analyses are done, and design equations and guide rules are provided. Furthermore, all the proposed schemes and/or ideas have been experimentally validated through the design, implementation and measurement of different filters. The fabrication processes of multilayer technology utilized: liquid crystal polymer (LCP) technology and liquid crystal polymer (LCP) bonded multilayer printed circuit board (PCB) technology, are also demonstrated for reference. All of the results achieved in this dissertation make the proposed filters very attractive for their use in modern wireless communication systems.MultiWaves Project (PIRSES-GA-2010-247532) of the Seventh Framework Programme (FP7), European Commission

Electronically reconfigurable wideband microwave filters

Many systems require multi function capability in the filter aspects of systems; the method currently used is filter banks which take up a lot of board space. It is thought that reconfigurable filters hold the key to replacing filter banks in order to save board space and thus potentially increasing functionality of the systems. The aim of this research is to develop electronically reconfigurable microwave filters for future communication systems. The project investigates some key design issues of reconfigurable filters. Circuits were modelled and full-wave electromagnetic simulations were performed for the investigation. Experimental work was carried out to demonstrate advanced reconfigurable microwave devices. The components used in each concept investigated were pin diodes due to their superior performance in wideband and high frequency applications. Firstly a single coupled line concept was looked at for bandwidth reconfigurability. This concept was then further developed for industrial applications by simply cascading these sections to obtain a high selective filter. A design method was developed for any number of cascades both with and without an impedance transformer; the use of LCP was used to increase flexibility due to its desirable characteristics. The most desirable outcome would be filter to simultaneously control bandwidth and frequency. In order to tackle this issue the coupled line concept was adapted to incorporate frequency tunability, along with a design method being presented. Furthermore, a cascaded highpass/ lowpass filter was also explored for this concept for added flexibility in the design of a filter capable of control of both bandwidth and center frequency

Automatic Tuning of Silicon Photonics Millimeter-Wave Transceivers Building Blocks

Today, continuously growing wireless traffic have guided the progress in the wireless communication systems. Now, evolution towards next generation (5G) wireless communication systems are actively researched to accommodate expanding future data traffic. As one of the most promising candidates, integrating photonic devices in to the existing wireless system is considered to improve the performance of the systems. Emerging silicon photonic integrated circuits lead this integration more practically, and open new possibilities to the future communication systems. In this dissertation, the development of the electrical wireless communication systems are briefly explained. Also, development of the microwave photonics and silicon photonics are described to understand the possibility of the hybrid SiP integrated wireless communication systems. A limitation of the current electrical wireless systems are addressed, and hybrid integrated mm-wave silicon photonic receiver, and silicon photonic beamforming transmitter are proposed and analyzed in system level. In the proposed mm-wave silicon photonic receiver has 4th order pole-zero silicon photonic filter in the system. Photonic devices are vulnerable to the process and temperature variations. It requires manual calibration, which is expensive, time consuming, and prone to human errors. Therefore, precise automatic calibration solution with modified silicon photonic filter structure is proposed and demonstrated. This dissertation demonstrates fully automatic tuning of silicon photonic all-pass filter (APF)-based pole/zero filters using a monitor-based tuning method that calibrates the initial response by controlling each pole and zero individually via micro-heaters. The proposed tuning approach calibrates severely degraded initial responses to the designed elliptic filter shapes and allows for automatic bandwidth and center frequency reconfiguration of these filters. This algorithm is demonstrated on 2nd- and 4th-order filters fabricated in a standard silicon photonics foundry process. After the initial calibration, only 300ms is required to reconfigure a filter to a different center frequency. Thermal crosstalk between the micro-heaters is investigated, with substrate thinning demonstrated to suppress this effect and reduce filter calibration to less than half of the original thick substrate times. This fully automatic tuning approach opens the possibility of employing silicon photonic filters in real communication systems. Also, in the proposed beamforming transmitter, true-time delay ring resonator based 1x4 beamforming network is imbedded. A proposed monitor-based tuning method compensates fabrication variations and thermal crosstalk by controlling micro-heaters individually using electrical monitors. The proposed tuning approach successfully demonstrated calibration of OBFN from severely degraded initial responses to well-defined group delay response required for the targeted radiating angle with a range of 60◦ (-30◦ to 30◦ ) in a linear beamforming antenna array. This algorithm is demonstrated on OBFN fabricated in a standard silicon photonics foundry process. The calibrated OBFN operates at 30GHz and provide 2GHz bandwidth. This fully automatic tuning approach opens the possibility of employing silicon OBFN in real wideband mm-wave wireless communication systems by providing robust operating solutions. All the proposed photonic circuits are implemented using the standard silicon photonic technologies, and resulted in several publications in IEEE/OSA Journals and Conferences

MIT/PCM-based RF Switches for Tunable Filter Application

Tunable filters are promising for reducing the size of communication systems by replacing switch filter bank, also they are gaining more attention for satellite applications which will need to change the frequency bands. One of the main requirements for tunable filters is to maintain low passband insertion loss and high stopband rejection over the tuning range. The key to achieving this goal is using high quality factor (high-Q) resonators such as three-dimensional (3D) structure resonators (dielectric resonators, coaxial resonators, waveguide resonators, etc.). For high-Q tunable filters, not only do the resonators need to have high unloaded Q, the tuning elements also need to have low loss. Over the past years, various tuning techniques have been employed to realize tunable filters, including solid-state tuning, mechanical tuning, piezoelectric tuning, magnetic tuning, and MEMS tuning. All of these techniques have both advantages and drawbacks in terms of insertion loss, DC power consumption, tuning speed, non-linearity, and reliability. The objective of the research presented in this thesis is to investigate the feasibility of using metal-insulating transition (MIT) material and phase-change material (PCM) to realize high-Q tunable/ reconfigurable filters for base station in communication and satellite applications. Fabrication methods of MIT material VO2 (Vanadium Dioxide) and PCM GeTe (Germanium Telluride) are first investigated to obtain optimal MIT/PCM materials with high resistivity ratio between different states. RF switches based on both VO2 and GeTe integrated with micro-heaters are then developed. VO2-based variable attenuators are realized at both X-band and Ka-band. A switch capacitor bank is also designed and fabricated, integrating GeTe RF switches and MIM (metal-insulator-metal) capacitors in a six-layer microfabrication process. A novel structure for wideband dielectric substrate-based filters is developed. The cavity of the filter is separated into two thin dielectric substrates (DSs), a metal frame for holding the dielectric substrates, and two metal covers. The filter is compact in size and ideal for integration with antennas because of its relatively thin profile. Since it uses separated DSs attached to the two sides of the metal frame, the input/output probe can be placed at the middle of the cavity, leading to a significant increase in the input/output coupling compared to conventional dielectric resonator filters. Additionally, the filter structure lends itself to realizing relatively large values of inter-resonator coupling. A five-pole Chebyshev filter with a fractional bandwidth of 9.6%, a four-pole filter having two transmission zeros with a fractional bandwidth of 9%, and a three-pole filter with a fractional bandwidth of 13% are designed, fabricated and tested. The filter structure promises to be useful in sub-6 GHz 5G base station applications that require the use of low-cost, miniature, high-Q wideband filters with a thin profile. Furthermore, a novel tuning structure with multiple strip lines is developed in this work. The tuning structure is designed to employ RF switches to tune 3D filters, eliminating the need to use variable capacitor loading, which is known to degrade the filter’s loaded Q over the tuning range. Two- and three-pole filters with combline configuration are designed, fabricated and measured with wire bonding, MEMS switches, and VO2 switches. With wire bonding, all of the tuning states demonstrate measured Q higher than 2000, whereas with the fabricated VO2 switches, the measured Q was lower. The test data confirm however the tunability and feasibility of using the proposed tuning scheme to realize a reasonable high-Q tunable filters that maintain Q values over the tuning range. A DS-loaded three-pole tunable filter is designed, fabricated, and measured. The results show the potential of realizing a tunable dielectric filter with a low loss VO2-based switch

Synthesis, design, and fabrication techniques for reconfigurable microwave and millimeter-wave filters

As wireless communication becomes increasingly ubiquitous, the need for radio receivers which can dynamically adjust to their operating environment grows more urgent. In order to realize reconfigurable receivers, tunable RF front-end components are needed. This dissertation focuses on the theory, design, and implementation of reconfigurable microwave and millimeter-wave filters for use in such receivers. First, a theoretical framework is developed for absorptive bandstop filters, a new class of bandstop filters which overcomes some of the limitations of traditional tunable bandstop filters caused by the use of lossy tunable resonators. This theory is used in conjunction with silicon-micromachining fabrication technology to realize the first ever tunable bandstop filter at W-Band frequencies, as well as a state-of-the-art Ka-band tunable bandstop filter. The problem of bandwidth variation in tunable filters is then addressed. Widely-tunable filters often suffer from variations in bandwidth, excluding them from many applications which require constant bandwidth. A new method for reducing the bandwidth variation of filters using low-loss evanescent-mode cavity resonators is presented, and this technique is used to realize up to 90% reduction of bandwidth variation in octave-tunable bandstop filters. Lastly, a new differential coupling structure for evanescent-mode cavity resonators is developed, enabling the design of fully-balanced and balanced-to-unbalanced (balun) filters. An octave-tunable 3-pole bandpass balun filter using this coupling structure is presented. The balun filter has excellent amplitude and phase balance, resulting in common-mode rejection of greater than 40 dB across its octave tuning range

Synthesis, design, and fabrication techniques for reconfigurable microwave and millimeter-wave filters

As wireless communication becomes increasingly ubiquitous, the need for radio receivers which can dynamically adjust to their operating environment grows more urgent. In order to realize reconfigurable receivers, tunable RF front-end components are needed. This dissertation focuses on the theory, design, and implementation of reconfigurable microwave and millimeter-wave filters for use in such receivers. First, a theoretical framework is developed for absorptive bandstop filters, a new class of bandstop filters which overcomes some of the limitations of traditional tunable bandstop filters caused by the use of lossy tunable resonators. This theory is used in conjunction with silicon-micromachining fabrication technology to realize the first ever tunable bandstop filter at W-Band frequencies, as well as a state-of-the-art Ka-band tunable bandstop filter. The problem of bandwidth variation in tunable filters is then addressed. Widely-tunable filters often suffer from variations in bandwidth, excluding them from many applications which require constant bandwidth. A new method for reducing the bandwidth variation of filters using low-loss evanescent-mode cavity resonators is presented, and this technique is used to realize up to 90% reduction of bandwidth variation in octave-tunable bandstop filters. Lastly, a new differential coupling structure for evanescent-mode cavity resonators is developed, enabling the design of fully-balanced and balanced-to-unbalanced (balun) filters. An octave-tunable 3-pole bandpass balun filter using this coupling structure is presented. The balun filter has excellent amplitude and phase balance, resulting in common-mode rejection of greater than 40 dB across its octave tuning range

Development of Tunable RF Integrated Passive Devices

Radio frequency (RF) lumped elements are crucial building blocks for designing any type of passives circuits for RF front-end applications in mobile devices. In particular, high-quality (Q) factor lumped elements are desirable for improving both insertion loss and noise performance. Integrated passive devices (IPD) technology is a platform that can provide miniature inductors, and capacitors with high- Q values that are unattainable with traditional CMOS technologies. Over the past several years, IPD technology has been used to implement devices such as filters, couplers and impedance-matching networks for a wide range of system-in-package applications. However, most of the IPD circuits do not yet have any tunable/reconfigurable functions for use in frequency agile applications. The objective of this research is to develop tunable integrated passive devices (IPDs) using barium strontium titanate (BST) and micro-electrical-mechanical-systems (MEMS) technologies. Another objective is to develop a fabrication process for monolithic integration of MEMS switches and IPD devices. A 4-mask IPD glass/alumina-based fabrication process is developed at the University of Waterloo for the first time. Details of the modeling and characterization of high-Q lumped elements, L and C, are investigated. The RF performance of these elements is compared with that of similar designs fabricated in a commercial IPD foundry. To highlight the benefits of the IPD process, lumped element bandpass filters are designed, fabricated, and tested. BST varactors are integrated with IPD circuits to demonstrate a highly miniaturized tunable impedance matching network featuring a wide impedance coverage from 2-3 GHz and an insertion loss of approximately 1 dB. The network promises to be useful in a broad range of wireless applications. A high performance tunable IPD/BST bandstop filter with a wideband balun as a multichip module is also proposed. Reconfigurable IPD/BST bandpass filters with tunable transmission zeros are presented and investigated experimentally for operation under high power levels. Intermodulation test results are presented for the integrated IPD/BST devices. Making use of the fact that the IPD fabrication process is amenable to the realization of MEMS devices, the IPD process originally developed for realizing passive circuits is further expanded to accommodate monolithic integration of MEMS switches with IPD circuits. Contact-type MEMS switches are developed, fabricated and tested. Also, a monolithically integrated IPD/MEMS 3-bit high resolution true-time delay network and high-Q switched-capacitor bank are fabricated and tested to demonstrate the benefits of integrating MEMS technology with the IPD technology