Flexible micro-assembly system equiped with an automated tool changer.

International audienceThis paper deals with the design, fabrication and experimental validation of several modules of a micro-assembly system. On one hand, a microgripper is integrated in a four degrees of freedom system. On the other hand, a tool changer is designed. It enables to exchange automatically the tip part of the microgripper and then dedicated tools can be used to achieve specific tasks. The principle of this tool changer relies on a thermal glue whose phase (liquid or solid) is controlled by heat generators. This system is based on the modeling of thermal phenomena in the tools during a cycle of tool exchange. A compliant system is added to limit micromanipulation forces applied during assembly tasks like insertions. Finally, the successful assembly of several microcomponents is detailed, highlighting the capabilities and benefits of the whole system

Dynamic modelling for a submerged freeze microgripper using thermal networks.

International audienceThe growing interest for micromanipulation systems requires efficient, reliable and flexible handling strategies. Recent studies have demonstrated that performing manipulations and assembly in liquid surroundings is more advantageous than in dry conditions, especially when objects are under 100 μm in size. The thermally actuated ice microgripper proposed and analysed in this paper is designed to operate in a completely submerged manner in an aqueous medium. The handling principle which benefits from adhesive properties of ice, its thermal control principle based on Peltier effect, some features of the prototype, and the first micromanipulation tests are summarized. This paper is focused on the modelling of the thermal microhandling system using electrical analogy. The submerged microgripper is split into different subsystems which are studied in order to identify their thermal network. Then they are interconnected to build the whole thermal network of the submerged microgripper. This model is validated by comparison with experimental measurements. Controlling the temperatures involved in our device will be the purpose of further works

A microgripper for single cell manipulation

This thesis presents the development of an electrothermally actuated microgripper for the manipulation of cells and other biological particles. The microgripper has been fabricated using a combination of surface and bulk micromachining techniques in a three mask process. All of the fabrication details have been chosen to enable a tri-layer, polymer (SU8) - metal (Au) - polymer (SU8), membrane to be released from the substrate stress free and without the need for sacrificial layers. An actuator design, which completely eliminates the parasitic resistance of the cold arm, is presented. When compared to standard U-shaped actuators, it improves the thermal efficiency threefold. This enables larger displacements at lower voltages and temperatures. The microgripper is demonstrated in three different configurations: normally open mode, normally closed mode, and normally open/closed mode. It has-been modelled using two coupled analytical models - electrothermal and thermomechanical - which have been custom developed for this application. Unlike previously reported models, the electrothermal model presented here includes the heat exchange between hot and cold arms of the actuators that are separated by a small air gap. A detailed electrothermomechanical characterisation of selected devices has permitted the validation of the models (also performed using finite element analysis) and the assessment of device performance. The device testing includes electrical, deflection, and temperature measurements using infrared (IR) thermography, its use in polymeric actuators reported here for the first time. Successful manipulation experiments have been conducted in both air and liquid environments. Manipulation of live cells (mice oocytes) in a standard biomanipulation station has validated the microgripper as a complementary and unique tool for the single cell experiments that are to be conducted by future generations of biologists in the areas of human reproduction and stem cell research

Positioning accuracy characterization of assembled microscale components for micro-optical benches

International audienceThis paper deals with the measurement of microscale components' positioning accuracies used in the assembly of Micro-Optical Benches (MOB). The concept of MOB is presented to explain how to build optical MEMS based on out-of-plane micro-assembly of microcomponents. The micro-assembly platform is then presented and used to successfully assemble MOB. This micro-assembly platform includes a laser sensor that enables the measure of the microcomponent's position after its assembly. The measurement set-up and procedure is displayed and applied on several micro-assembly sets. The measurement system provides results with a maximum deviation less than +/- 0.005°. Based on this measurement system and micro-assembly procedure, the article shows that it is possible to obtain a positioning errors down to 0.009°. These results clearly state that micro-assembly is a possible way to manufacture complex, heterogeneous and 3D optical MEMS with very good optical performances

The static and dynamic response of SU-8 electrothermal microgrippers of varying thickness

This work presents an investigation into the effect on dynamic response of SU-8 microgrippers due to varying thickness, and subsequent validation via COMSOL Multiphysics simulations and thermal camera profiling during actuation. The tweezer-like microgrippers can easily manipulate, with a high degree of control, cells and particles with diameters as small as 10 μm, without using an impractical operating voltage or generating excessive heat. However, in order to fully exploit the versatility of the devices, their response characteristics must be fully understood as material and/or dimension parameters change. Therefore an investigation took place to determine the effects of device thickness on functionality of the device, including the drive current required to actuate the gripper and the speed of actuation. Furthermore, an infrared camera was used to characterise the thermal response of the device. Finally, a simulation of the temperature profile and deflection dimension has been developed in order to verify the findings and further investigate and predict the effects of design variations

Mechanical and control-oriented design of a monolithic piezoelectric microgripper using a new topological optimisation method.

International audienceThis paper presents a new method developed for the optimal design of piezoactive compliant micromechanisms. It is based on a flexible building block method, called FlexIn, which uses an evolutionary approach, to optimize a truss-like planar structure made of passive and active building blocks, made of piezoelectric material. An electromechanical approach, based on a mixed finite element formulation, is used to establish the model of the active piezoelectric blocks. From the first design step, in addition to conventional mechanical criteria, innovative control-based metrics can be considered in the optimization procedure to fit the open-loop frequency response of the synthetized mechanisms. In particular, these criteria have been drawn here to optimize modal controllability and observability of the system, which is particularly interesting when considering control of flexible structures. Then, a planar monolithic compliant micro-actuator has been synthetized using FlexIn and prototyped. Finally, simulations and experimental tests of the FlexIn optimally synthetized device demonstrate the interests of the proposed optimization method for the design of micro-actuators, microrobots, and more generally for adaptronic structures

Active force control for Robotic Micro-Assembly : Application to guiding tasks.

International audienceThis paper presents an analytical model and experimental results from a study of guiding tasks in microassembly. This work is focused on the use of two fingers for gripping microparts. The stability of the grasp when the contact appears is investigated and strategies during the guiding task are discussed. The contact side detection and the contact force estimation are studied. The incremental control in static mode is then investigated for controlling the guiding task. Experimental setups are proposed and some experimental results are presented

A submerged freeze microgripper for micromanipulations.

International audienceEfficient, reliable and flexible handling is still very challenging in micromanipulation and micro-assembly. In this paper, we propose an original thermally actuated gripper based on the use of ice to manipulate submerged artificial micro-objects sized under 100 µm. Manipulating in liquid surroundings can indeed be more interesting than in dry conditions. A comparative analysis on the impact of dry and liquid media on surface forces, contact forces and hydrodynamic forces shortly given first shows it. Concerning the use of ice for micromanipulation, cryogenic grippers are a flexible solution. Nevertheless, as they currently work in air, water must be provided by an external device and capillary force occurs during the release. Our submerged freeze microgripper takes advantages of the aqueous surroundings for the handling process as explained. Ther thermal principle, based on the Peltier effect, the characteristics of the microgripper prototype and the first micromanipulation tests are also presented

Overview of out of plane MEMS assembly techniques.

International audienceThis paper deals with a synthesis of the activities of the French FEMTO-ST institute in the field of robotic microassembly. It deals with the tridimensional assembly of objects whose typical size is from 10 microns to 400 microns. We are especially focusing on the automation of micro-assembly based on several principles. Closed loop control based on microvision has been studied and applied on the fully automatic assembly of several 400 microns objects. Force control has been also analyzed and is proposed for optical Microsystems assembly. At least, open loop trajectories of 40 microns objects with a throughput of 1800 unit per hour have been achieved. Scientific and technological aspects and industrial relevance will be presented

Precise motion control of a piezoelectric microgripper for microspectrometer assembly.

International audienceThe Fourier Transform (FTIR) microspectrometer discussed in this paper is an example of a complex Micro-Opto-Electro-Mechanical System (MOEMS) configured as an optical bench on a chip. It is an important benchmark application for microtechnology due to increased demands for the use of miniature wavelength detection instruments in bio, nano and material science. This device can be manufactured using automated microassembly and precision alignment of hybrid silicon and glass components, and in particular, of a micro-beamsplitter cube along 3 rotational degrees of freedom. In this paper, a piezoelectric microgripper with four degrees of freedom was attached to a precision robot in ordre to enhance its dexterity and align the beamsplitter to arcsecond angular tolerance. The modeling and control of the microgripper and the alignment algorithm utilizing a novel spot-Jacobian servoing technique are discussed. Experimental results obtained during joint on-going work in Texas and in France are presented demonstrating the advantage of using the microgripper for optical alignment of the microspectrometer