Development of a XYZ scanner for home-made atomic force microscope based on FPAA control

Atomic force microscopy (AFM) is one of the useful tools in the fields of nanoscale measurement and manipulation. High speed scanning is one of the crucial requirements for live cell imaging and soft matter characterization. The scanning speed is limited by the bandwidth of the AFM’s detection and actuation components. Generally, the bandwidth of a traditional scanner is too low to conduct the live cell imaging. This paper presents a simple and integrated compact home-made AFM for high speed imaging. To improve the bandwidth of the scanner, a parallel kinematics mechanism driven by piezoelectric actuators (PZTs) is proposed for the fast positioning in the X, Y and Z directions. The mechanical design optimization, modeling and analysis, and experimental testing have been conducted to validate the performance of the proposed scanner. A number of experimental results showed that the developed scanner has the capability for broad bandwidth with low coupling errors in the actuation directions. A hybrid control strategy including feedforward and feedback loops has been designed to significantly improve the dynamic tracking performance of the scanner and a field programmable analog array (FPAA) system is utilized to implement the control algorithm for excellent and stable tracking capability. Further, a number of high speed measurements have been conducted to verify the performance of the developed AFM

DEVELOPMENT OF A VERSATILE HIGH SPEED NANOMETER LEVEL SCANNING MULTI-PROBE MICROSCOPE

The motivation for development of a multi-probe scanning microscope, presented in this dissertation, is to provide a versatile measurement tool mainly targeted for biological studies, especially on the mechanical and structural properties of an intracellular system. This instrument provides a real-time, three-dimensional (3D) scanning capability. It is capable of operating on feedback from multiple probes, and has an interface for confocal photo-detection of fluorescence-based and single molecule imaging sensitivity. The instrument platform is called a Scanning Multi-Probe Microscope (SMPM) and enables 45 microm by 45 microm by 10 microm navigation of specimen with simultaneous optical and mechanical probing with each probe location being adjustable for collocation or for probing with known probe separations. The 3D positioning stage where the specimen locates was designed to have nanometer resolution and repeatability at 10 Hz scan speed with either open loop or closed loop operating modes. The fine motion of the stage is comprises three orthogonal flexures driven by piezoelectric actuators via a lever linkage. The flexures design is able to scan in larger range especially in z axis and serial connection of the stages helps to minimize the coupling between x, y and z axes. Closed-loop control was realized by the capacitance gauges attached to a rectangular block mounted to the underside of the fine stage upon which the specimen is mounted. The stage's performance was studied theoretically and verified by experimental test. In a step response test and using a simple proportional and integral (PI) controller, standard deviations of 1.9 nm 1.8 nm and 0.41 nm in the x, y and z axes were observed after settling times of 5 ms and 20 ms for the x and y axes. Scanning and imaging of biological specimen and artifact grating are presented to demonstrate the system operation. For faster, short range scanning, novel ultra-fast fiber scanning system was integrated into the xyz fine stage to achieve a super precision dual scanning system. The initial design enables nanometer positioning resolution and runs at 100 Hz scan speed. Both scanning systems are capable of characterization using dimensional metrology tools. Additionally, because the high-bandwidth, ultra-fast scanning system operates through a novel optical attenuating lever, it is physically separate from the longer range scanner and thereby does not introduce additional positioning noise. The dual scanner provides a fine scanning mechanism at relatively low speed and large imaging area using the xyz stage, and focus on a smaller area of interested in a high speed by the ultra-fast scanner easily. Such functionality is beneficial for researchers to study intracellular dynamic motion which requires high speed imaging. Finally, two high end displacement sensor systems, a knife edge sensor and fiber interferometer, were demonstrated as sensing solutions for potential feedback tools to boost the precision and resolution performance of the SMPM

Modeling and Control of MEMS-based Multi-layered Prestressed Piezoelectric Cantilever Beam

Piezoelectric materials are the preferred smart materials for sensing and actuation in the form of micro and nano-engineering structures like beams and plates. Cantilever beams play a significant role as key components in atomic force microscopy and bio and chemical sensors. Adding an active layer such as lead zirconate titanate (PZT) thin-film to form smart cantilever beams with sensing and actuation capabilities is highly desirable to facilitate miniaturization, enhance performance and functionali- ties such as enabling on-chip high-speed parallel AFM. During the micro-fabrication process, residual stresses develop in the different layers of the cantilever beam, causes initial deflection. The residual stress in the different layers of the cantilever beam and the application of voltage to the PZT thin-film affects their dynamics. This the- sis investigates the dynamic behaviour and develops a control technique and a novel charge readout circuit to improve the performance of a micro-fabricated multi-layer prestressed piezoelectric cantilever beam as an actuator and a deflection sensor. Firstly, the fabrication process of a unimorph PZT cantilever beam is explained. A low thermal budget Ultra-high vacuum e-beam evaporated polysilicon thin-film (UHVEEpoly) process is used for the fabrication of multi-layered PZT cantilever beam in d31 mode. The sharp peaks at resonant frequencies in the frequency response of the PZT cantilever beam show very little damping and a large settling time of the cantilever beam. Secondly, the dynamic behaviour of the prestressed PZT cantilever beam is in- vestigated subjected to change in driving voltage. Experimental investigations show a shift in resonant frequencies of a PZT cantilever beam. However, there is no reported mathematical model that predicts the shift in resonance frequencies of a multi-layered prestressed piezoelectric cantilever beam subjected to a change in driving voltage. This work developed a mathematical model with experimental val- idation to estimate the shift in resonance frequencies of such cantilever beams with the change in the driving voltage. A very good agreement between the model predic- tions and experimental measurements for the frequency response of the cantilever beam at different driving voltages has been obtained. A novel linear formulation has been developed to predict the shift in resonance frequencies of the PZT can- i tilever beam for a wide range of driving voltages. The formulation shows that the shift in resonance frequencies of a multi-layered prestressed piezoelectric cantilever beam per unit of applied voltage is dependent on geometric parameters and material properties. Thirdly, a robust resonant controller has been designed and implemented to re- duce the settling time of a highly vibrating PZT cantilever beam. The controller design is based on a mixed negative-imaginary, passivity, and a small-gain approach. The motivation to design a resonant controller using the above-mentioned analyti- cal framework is its bandpass nature and the use of velocity feedback, as the charge collected from a vibrating PZT cantilever beam gives the velocity information of the beam. The proposed controller design results in finite gain stability for a pos- itive feedback interconnection between two stable linear systems with a large gain and phase margin. Experimental results demonstrate that the designed resonant controller is able to effectively damp the first resonant mode of a cantilever, signifi- cantly reducing settling time from 528 ms to 32 ms. The robustness of the designed resonant controller is tested against changes in the cantilever beam dynamics due to residual stress variation and or stress variation due to driving voltage. Finally, to facilitate the miniaturization of on-chip sensors and parallel high- speed AFM, a single layer of a PZT thin-film in a cantilever beam is used as a deflection sensor and an actuator instead of bulky optical deflection sensors. A novel charge readout circuit is designed for deflection sensing by capturing the electrical charge generated due to the vibration of the PZT beam. The signal-to-noise ratio and sensitivity analysis of the readout circuit shows similar results compared to the commercially available optical deflection sensors. Our work highlights very important aspects in the dynamic behaviour and perfor- mance of a multi-layered prestressed piezoelectric cantilever beam. The agreement between the proposed theoretical formulation and experimental investigations in modeling, control design, and a novel readout circuit will provide the platform for further the development and miniaturization of microcantilever-based technologies, including on-chip parallel HS-AFM

Development and testing of a XYZ scanner for atomic force microscope

Atomic force microscopy (AFM) is a widely used tool in nano measurement and manipulation techniques. However, a traditional AFM system suffers from the limitation of slow scanning rate, due to the low dynamic performance of piezoelectric positioners. As an important part of AFM system, scanner will have a significant impact the result of the scanning imaging and operation. It is well know that high-speed operation of an AFM are increasingly required, and it is also a challenge for the researchers. In this paper, we proposed a parallel kinematic high-speed piezoelectric actuator (PZT) XYZ scanner. The design is aimed at achieving high resonance frequencies and low cross-coupling. The developed stage consists of a parallel kinematic XY stage and a Z stage. The Z stage is mounted on the central moving platform of the XY stage. To achieve the design objective, several parallel leaf flexure hinge mechanisms, arranging symmetrically around the central moving platform of the XY stage, are utilized to provide large stiffness and reduce cross-coupling. For the Z stage, a symmetrical leaf flexure parallelogram mechanism is adopted to achieve high resonance frequencies and decoupling. Then, finite element analysis (FEA) is utilized to validate the characteristics of the XYZ scanner. Finally, extensive experiments are conducted, demonstrating feasibility of the proposed scanner

Review Article: Active scanning probes: a versatile toolkit for fast imaging and emerging nanofabrication

With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task, such as the feature aspect ratio, required range, or acceptable probe-sample interaction forces. In this paper, the authors discuss these requirements and the research directions that provide the highest potential in meeting them. The authors elaborate on the efforts toward the downsizing of self-sensed and self-actuated probes as well as on upscaling by active cantilever arrays. The authors present the fabrication process of active probes along with the tip customizations carried out targeting specific application fields. As promising application in scope of nanofabrication, field emission scanning probe lithography is introduced. The authors further discuss their control and design approach. Here, microactuators, e.g., multilayer microcantilevers, and macroactuators, e.g., flexure scanners, are combined in order to simultaneously meet both the range and speed requirements of a new generation of scanning probe microscopes

Robust Repetitive Controller for Fast AFM Imaging

Currently, Atomic Force Microscopy (AFM) is the most preferred Scanning Probe Microscopy (SPM) method due to its numerous advantages. However, increasing the scanning speed and reducing the interaction forces between the probe's tip and the sample surface are still the two main challenges in AFM. To meet these challenges, we take advantage of the fact that the lateral movements performed during an AFM scan is a repetitive motion and propose a Repetitive Controller (RC) for the z-axis movements of the piezo-scanner. The RC utilizes the profile of the previous scan line while scanning the current line to achieve a better scan performance. The results of the scanning experiments performed with our AFM set-up show that the proposed RC significantly outperforms a conventional PI controller that is typically used for the same task. The scan error and the average tapping forces are reduced by 66% and 58%, respectively when the scan speed is increased by 7-fold

Lights out! Nano-scale topography imaging of sample surface in opaque liquid environments with coated active cantilever probes

Atomic force microscopy is a powerful topography imaging method used widely in nanoscale metrology and manipulation. A conventional Atomic Force Microscope (AFM) utilizes an optical lever system typically composed of a laser source, lenses and a four quadrant photodetector to amplify and measure the deflection of the cantilever probe. This optical method for deflection sensing limits the capability of AFM to obtaining images in transparent environments only. In addition, tapping mode imaging in liquid environments with transparent sample chamber can be difficult for laser-probe alignment due to multiple different refraction indices of materials. Spurious structure resonance can be excited from piezo actuator excitation. Photothermal actuation resolves the resonance confusion but makes optical setup more complicated. In this paper, we present the design and fabrication method of coated active scanning probes with piezoresistive deflection sensing, thermomechanical actuation and thin photoresist polymer surface coating. The newly developed probes are capable of conducting topography imaging in opaque liquids without the need of an optical system. The selected coating can withstand harsh chemical environments with high acidity (e.g., 35% sulfuric acid). The probes are operated in various opaque liquid environments with a custom designed AFM system to demonstrate the imaging performance. The development of coated active probes opens up possibilities for observing samples in their native environments

A novel actuator-internal micro/nano positioning stage with an arch-shape bridge type amplifier

This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine actuation part in dual-stage system. To compensate the positioning error of coarse stage and achieve a large motion stroke, a symmetrical structure with an arch-shape bridge type amplifier based on single notch circular flexure hinges is proposed and utilized in the positioning stage. Due to the compound bridge arm configuration and compact flexure hinge structure, the amplification mechanism can realize high lateral stiffness and compact structure simultaneously, which is of great importance to protect PZT actuators. The amplification mechanism is integrated into the decoupling mechanism to improve compactness, and to produce decoupled motion in X- and Y- axes. An analytical model is established to explore the static and dynamic characteristics, and the geometric parameters are optimized. The performance of the positioning stage is evaluated through finite element analysis (FEA) and experimental test. The results indicate that the stage can implement 2-DOF decoupled motion with a travel range of 55.4×53.2 μm2, and the motion resolution is 8 nm. The stage can be used in probe tip-based micro/nano scratching