Microsensors Based on MEMS Technology

Sensors play an important role in most of the common activities that occur in our daily lives. They are the building blocks of or microelectromechanical systems (MEMS). This combination of micromechanical structures, sensing elements, and signal conditioning is the beginning of a new era in sensor technology. Sensing systems incorporated with dedicated signal processing functions are called intelligent sensors or smart sensors. The present decade of new millennium will be the decade of smart systems or MEMS. The rapid rise of silicon MEMS recently was due to major advances in silicon microfabrication technology, especially surface micromachining, deep-reactive ion etching, and CMOS-integrated MEMS. In this paper, an overview of the currently available MEMS sensors, materials for sensors and their processing technologies, together with integraticm of sensors and electronics is presented

Cupula-Inspired Hyaluronic Acid-Based Hydrogel Encapsulation to Form Biomimetic MEMS Flow Sensors

Blind cavefishes are known to detect objects through hydrodynamic vision enabled by arrays of biological flow sensors called neuromasts. This work demonstrates the development of a MEMS artificial neuromast sensor that features a 3D polymer hair cell that extends into the ambient flow. The hair cell is monolithically fabricated at the center of a 2 µm thick silicon membrane that is photo-patterned with a full-bridge bias circuit. Ambient flow variations exert a drag force on the hair cell, which causes a displacement of the sensing membrane. This in turn leads to the resistance imbalance in the bridge circuit generating a voltage output. Inspired by the biological neuromast, a biomimetic synthetic hydrogel cupula is incorporated on the hair cell. The morphology, swelling behavior, porosity and mechanical properties of the hyaluronic acid hydrogel are characterized through rheology and nanoindentation techniques. The sensitivity enhancement in the sensor output due to the material and mechanical contributions of the micro-porous hydrogel cupula is investigated through experiments.Singapore. National Research Foundation (Campus for Research Excellence and Technological Enterprise programme

Doctor of Philosophy

dissertationNew hydrogel-based micropressure sensor arrays for use in the fields of chemical sensing, physiological monitoring, and medical diagnostics are developed and demonstrated. This sensor technology provides reliable, linear, and accurate measurements of hydrogel swelling pressures, a function of ambient chemical concentrations. For the first time, perforations were implemented into the pressure sensors piezoresistive diaphragms, used to simultaneously increase sensor sensitivity and permit diffusion of analytes into the hydrogel cavity. It was shown through analytical and numerical (finite element) methods that pore shape, location, and size can be used to modify the diaphragm mechanics and concentrate stress within the piezoresistors, thus improving electrical output (sensitivity). An optimized pore pattern was chosen based on these numerical calculations. Fabrication was performed using a 14-step semiconductor fabrication process implementing a combination of potassium hydroxide (KOH) and deep reactive ion etching (DRIE) to create perforations. The sensor arrays (2×2) measure approximately 3 × 5 mm2 and used to measure full scale pressures of 50, 25, and 5 kPa, respectively. These specifications were defined by the various swelling pressures of ionic strength, pH and glucose specific hydrogels that were targeted in this work. Initial characterization of the sensor arrays was performed using a custom built bulge testing apparatus that simultaneously measured deflection (optical profilometry), pressure, and electrical output. The new perforated diaphragm sensors were found to be fully functional with sensitivities ranging from 23 to 252 μV/V-kPa with full scale output (FSO) ranging from 5 to 80 mV. To demonstrate proof of concept, hydrogels sensitive to changes in ionic strength were synthesized using hydroxypropyl-methacrylate (HPMA), N,N-dimethylaminoethyl-methacrylate (DMA) and a tetra-ethyleneglycol-dimethacrylate (TEGDMA) crosslinker. This hydrogel quickly and reversibly swells when placed environments of physiological buffer solutions (PBS) with ionic strengths ranging from 0.025 to 0.15 M. Chemical testing showed sensors with perforated diaphragms have higher sensitivity than those with solid diaphragms, and sensitivities ranging from 53.3±6.5 to 271.47±27.53 mV/V-M, depending on diaphragm size. Additionally, recent experiments show sensors utilizing Ultra Violet (UV) polymerized glucose sensitive hydrogels respond reversibly to physiologically relevant glucose concentrations from 0 to 20 mM

Single Substrate Electromagnetic Actuator

A microvalve which utilizes a low temperature ( <300° C.) fabrication process on a single substrate. The valve uses buckling and an electromagnetic actuator to provide a relatively large closing force and lower power consumption. A buckling technique of the membrane is used to provide two stable positions for the membrane, and to reduce the power consumption and the overall size of the microvalve. The use of a permanent magnet is an alternative to the buckled membrane, or it can be used in combination with the buckled membrane, or two sets of micro-coils can be used in order to open and close the valve, providing the capability for the valve to operate under normally opened or normally closed conditions. Magnetic analysis using ANSYS 5.7 shows that the addition of Orthonol between the coils increases the electromagnetic force by more than 1.5 times. At a flow rate of 1 mL/m, the pressure drop is < 100 Pa. The maximum pressure tested was 57 kPa and the time to open or close the valve in air is under 100 ms. This results in an estimated power consumption of 0.1 mW.Georgia Tech Research Corp

Overview of sensors suitable for active flow control methods

Hlavným cieľom tejto bakalárskej práce bolo vytvorenie prehľadu vyvíjaných a už aplikovaných senzorov pre účely aktívneho riadenia prúdov. Senzory musia splňovať niektoré podmienky, preto výber senzorov bol naviazaný na reálnych výsledkoch testovacích programov, popis ktorých tvorí prvú časť tejto bakalárskej práce. Opis technológie a princíp fungovania senzorov je popísaný v druhej časti tejto práce.The main purpose of this bachelor thesis was to create the overview of the sensors developed for the future active flow control applications and overview the sensors already used in the active flow control applications. The sensors have to fulfil several requirements, so selection for the overview was based on the real flight test programs results, which were described in the first part of the thesis. The sensors technology description and operation principles were included in the second part of the thesis

Advanced micro and nano fabrications for engineering applications

This document is a compilation of my selected research publications in micro and nano fabrications. The papers are largely arranged in chronological order to show the development of research interests. The research works are grouped into three sections. Section one consists of 34 research papers on micro fabrication in various materials. The research was motivated by the development of a finger nail sized micro engine as explained in Papers 1 and 2. Section two of the document includes some research activities and achievements on nanocomposite materials embedded in metallic and ceramic matrices. Section 3 includes the papers to reflect the research in developing nanostructure fabrication processes. The research contained in this DSc submission shows a continuous exploration and development of novel micro/nano fabrication processes. Although the submission covers research activities spanning 15 years, from 2000 to 2015, many of the research results represent the top technology of the time. They have contributed to the ever progressing manufacturing capability of the world. The research has encompassed both theoretical and experimental studies, contributing to the understanding of the processes and materials involved

A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip

A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature

Non-silicon Microfabricated Nanostructured Chemical Sensors For Electric Nose Application

A systematic investigation has been performed for Electric Nose , a system that can identify gas samples and detect their concentrations by combining sensor array and data processing technologies. Non-silicon based microfabricatition has been developed for micro-electro-mechanical-system (MEMS) based gas sensors. Novel sensors have been designed, fabricated and tested. Nanocrystalline semiconductor metal oxide (SMO) materials include SnO2, WO3 and In2O3 have been studied for gas sensing applications. Different doping material such as copper, silver, platinum and indium are studied in order to achieve better selectivity for different targeting toxic gases including hydrogen, carbon monoxide, hydrogen sulfide etc. Fundamental issues like sensitivity, selectivity, stability, temperature influence, humidity influence, thermal characterization, drifting problem etc. of SMO gas sensors have been intensively investigated. A novel approach to improve temperature stability of SMO (including tin oxide) gas sensors by applying a temperature feedback control circuit has been developed. The feedback temperature controller that is compatible with MEMS sensor fabrication has been invented and applied to gas sensor array system. Significant improvement of stability has been achieved compared to SMO gas sensors without temperature compensation under the same ambient conditions. Single walled carbon nanotube (SWNT) has been studied to improve SnO2 gas sensing property in terms of sensitivity, response time and recovery time. Three times of better sensitivity has been achieved experimentally. The feasibility of using TSK Fuzzy neural network algorithm for Electric Nose has been exploited during the research. A training process of using TSK Fuzzy neural network with input/output pairs from individual gas sensor cell has been developed. This will make electric nose smart enough to measure gas concentrations in a gas mixture. The model has been proven valid by gas experimental results conducted