66 research outputs found

    Modeling and Control of Piezoactive Micro and Nano Systems

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    Piezoelectrically-driven (piezoactive) systems such as nanopositioning platforms, scanning probe microscopes, and nanomechanical cantilever probes are advantageous devices enabling molecular-level imaging, manipulation, and characterization in disciplines ranging from materials science to physics and biology. Such emerging applications require precise modeling, control and manipulation of objects, components and subsystems ranging in sizes from few nanometers to micrometers. This dissertation presents a comprehensive modeling and control framework for piezoactive micro and nano systems utilized in various applications. The development of a precise memory-based hysteresis model for feedforward tracking as well as a Lyapunov-based robust-adaptive controller for feedback tracking control of nanopositioning stages are presented first. Although hysteresis is the most degrading factor in feedforward control, it can be effectively compensated through a robust feedback control design. Moreover, an adaptive controller can enhance the performance of closed-loop system that suffers from parametric uncertainties at high-frequency operations. Comparisons with the widely-used PID controller demonstrate the effectiveness of the proposed controller in tracking of high-frequency trajectories. The proposed controller is then implemented in a laser-free Atomic Force Microscopy (AFM) setup for high-speed and low-cost imaging of surfaces with micrometer and nanometer scale variations. It is demonstrated that the developed AFM is able to produce high-quality images at scanning frequencies up to 30 Hz, where a PID controller is unable to present acceptable results. To improve the control performance of piezoactive nanopositioning stages in tracking of time-varying trajectories with frequent stepped discontinuities, which is a common problem in SPM systems, a supervisory switching controller is designed and integrated with the proposed robust adaptive controller. The controller switches between two control modes, one mode tuned for stepped trajectory tracking and the other one tuned for continuous trajectory tracking. Switching conditions and compatibility conditions of the control inputs in switching instances are derived and analyzed. Experimental implementation of the proposed switching controller indicates significant improvements of control performance in tracking of time-varying discontinuous trajectories for which single-mode controllers yield undesirable results. Distributed-parameters modeling and control of rod-type solid-state actuators are then studied to enable accurate tracking control of piezoactive positioning systems in a wide frequency range including several resonant frequencies of system. Using the extended Hamilton\u27s principle, system partial differential equation of motion and its boundary conditions are derived. Standard vibration analysis techniques are utilized to formulate the truncated finite-mode state-space representation of the system. A new state-space controller is then proposed for asymptotic output tracking control of system. Integration of an optimal state-observer and a Lyapunov-based robust controller are presented and discussed to improve the practicability of the proposed framework. Simulation results demonstrate that distributed-parameters modeling and control is inevitable if ultra-high bandwidth tracking is desired. The last part of the dissertation, discusses new developments in modeling and system identification of piezoelectrically-driven Active Probes as advantageous nanomechanical cantilevers in various applications including tapping mode AFM and biomass sensors. Due to the discontinuous cross-section of Active Probes, a general framework is developed and presented for multiple-mode vibration analysis of system. Application in the precise pico-gram scale mass detection is then presented using frequency-shift method. This approach can benefit the characterization of DNA solutions or other biological species for medical applications

    Modeling and Control of Piezoelectric Actuators

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    Piezoelectric actuators (PEAs) utilize the inverse piezoelectric effect to generate fine displacement with a resolution down to sub-nanometers and as such, they have been widely used in various micro- and nanopositioning applications. However, the modeling and control of PEAs have proven to be challenging tasks. The main difficulties lie in the existence of various nonlinear or difficult-to-model effects in PEAs, such as hysteresis, creep, and distributive vibration dynamics. Such effects can seriously degrade the PEA tracking control performances or even lead to instability. This raises a great need to model and control PEAs for improved performance. This research is aimed at developing novel models for PEAs and on this basis, developing model-based control schemes for the PEA tracking control taking into account the aforementioned nonlinear effects. In the first part of this research, a model of a PEA for the effects of hysteresis, creep, and vibration dynamics was developed. Notably, the widely-used Preisach hysteresis model cannot represent the one-sided hysteresis of PEAs. To overcome this shortcoming, a rate-independent hysteresis model based on a novel hysteresis operator modified from the Preisach hysteresis operator was developed, which was then integrated with the models of creep and vibration dynamics to form a comprehensive model for PEAs. For its validation, experiments were carried out on a commercially-available PEA and the results obtained agreed with those from model simulations. By taking into account the linear dynamics and hysteretic behavior of the PEA as well as the presliding friction between the moveable platform and the end-effector, a model of the piezoelectric-driven stick-slip (PDSS) actuator was also developed in the first part of the research. The effectiveness of the developed model was illustrated by the experiments on the PDSS actuator prototyped in the author's lab. In the second part of the research, control schemes were developed based on the aforementioned PEA models for tracking control of PEAs. Firstly, a novel PID-based sliding mode (PIDSM) controller was developed. The rational behind the use of a sliding mode (SM) control is that the SM control can effectively suppress the effects of matched uncertainties, while the PEA hysteresis, creep, and external load can be represented by a lumped matched uncertainty based on the developed model. To solve the chattering and steady-state problems, associated with the ideal SM control and the SM control with boundary layer (SMCBL), the novel PIDSM control developed in the present study replaces the switching control term in the ideal SM control schemes with a PID regulator. Experiments were carried out on a commercially-available PEA and the results obtained illustrate the effectiveness of the PIDSM controller, and its superiorities over other schemes of PID control, ideal SM control, and the SMCBL in terms of steady state error elimination, chattering suppression, and tracking error suppression. Secondly, a PIDSM observer was also developed based on the model of PEAs to provide the PIDSM controller with state estimates of the PEA. And the PIDSM controller and the PIDSM observer were combined to form an integrated control scheme (PIDSM observer-controller or PIDSMOC) for PEAs. The effectiveness of the PIDSM observer and the PIDSMOC were also validated experimentally. The superiority of the PIDSMOC over the PIDSM controller with σ-β filter control scheme was also analyzed and demonstrated experimentally. The significance of this research lies in the development of novel models for PEAs and PDSS actuators, which can be of great help in the design and control of such actuators. Also, the development of the PIDSM controller, the PIDSM observer, and their integrated form, i.e., PIDSMOC, enables the improved performance of tracking control of PEAs with the presence of various nonlinear or difficult-to-model effects

    Modeling and tracking control of a novel XYθz stage

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    A XYθz stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator. Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage

    Dynamics and Control of Flexure-based Large Range Nanopositioning Systems.

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    The objective of this thesis is to demonstrate desktop-size and cost-effective flexure-based multi-axis nanopositioning capability over a motion range of several millimeters per axis. Increasing the motion range will overcome one of the main drawbacks of existing nanopositioning systems, thereby significantly improving the coverage area in nanometrology and nanomanufacturing applications. A single-axis nanopositioning system, comprising a symmetric double parallelogram flexure bearing and a traditional-architecture moving magnet actuator, is designed, fabricated, and tested. A figure of merit for the actuator is derived and shown to directly impact the system-level trade-offs in terms of range, resolution, bandwidth, and temperature rise. While linear feedback controllers provide good positioning performance for point-to-point commands, the tracking error for dynamic commands prove to be inadequate due to the nonlinearities in the actuator and its driver. To overcome this, an iterative learning controller is implemented in conjunction with linear feedback to reduce the periodic component of the tracking error by more than two orders of magnitude. Experimental results demonstrate 10 nm RMS tracking error over 8 mm motion range in response to a 2 Hz bandlimited triangular command. For the XY nanopositioning system, a lumped-parameter model of an existing XY flexure bearing is developed in order to understand the unexplained variation observed in the transfer function zeros over the operating range of motion. It is shown that the kinematic coupling, due to geometric nonlinearities in the beam mechanics, and small dimensional asymmetry, due to manufacturing tolerances, may conspire to produce complex-conjugate nonminimum phase zeros at certain operating points in the system's workspace. This phenomenon significantly restricts the overall performance of the feedback control system. After intentional use of large asymmetry is employed to overcome this problem, independent feedback and iterative learning controllers are implemented along each axis. Experimental results demonstrate 20 nm RMS radial tracking error while traversing a 2 mm diameter circle at 2 Hz.PHDMechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/107086/1/parmar_1.pd

    Nanopositionnement 3D à base de mesure à courant tunnel et piezo-actionnement

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    The objective of this thesis was to elaborate high performance control strategies and their real-time validation on a tunneling current-based 3D nanopositioning system developed in GIPSA-lab. The thesis lies in the domain of micro-/nano mechatronic systems (MEMS) focused on applications of fast and precise positioning and scanning tunneling microscopy (STM). More precisely, the aim is to position the metallic tunneling tip (like in STM) over the metallic surface using piezoelectric actuators in X, Y and Z directions and actuated micro-cantilever (like in Atomic Force Microscope AFM), electrostatically driven in Z direction, with high precision, over possibly high bandwidth. However, the presence of different adverse effects appearing at such small scale (e.g. measurement noise, nonlinearities of different nature, cross-couplings, vibrations) strongly affect the overall performance of the 3D system. Therefore a high performance control is needed. To that end, a novel 3D model of the system has been developed and appropriate control methods for such a system have been elaborated. First the focus is on horizontal X and Y directions. The nonlinear hysteresis and creep effects exhibited by piezoelectric actuators have been compensated and a comparison between different compensation methods is provided. Modern SISO and MIMO robust control methods are next used to reduce high frequency effects of piezo vibration and cross-couplings between X and Y axes. Next, the horizontal motion is combined with the vertical one (Z axis) with tunneling current and micro-cantilever control. Illustrative experimental results for 3D nanopositioning of tunneling tip, as well as simulation results for surface topography reconstruction and multi-mode cantilever positioning, are finally given.L'objectif de la thèse est l'élaboration de lois de commande de haute performance et leur validation en temps réel sur une plateforme expérimentale 3D de nano-positionnement à base de courant à effet tunnel, développée au laboratoire GIPSA-lab. Elle s'inscrit donc dans le cadre des systèmes micro-/nano-mécatronique (MEMS), et de la commande. Plus précisément, le principal enjeu considéré est de positionner la pointe métallique à effet tunnel (comme en microscopie à effet tunnel STM) contre la surface métallique en utilisant des actionneurs piézoélectriques en X, Y et Z et un micro-levier (comme en microscopie à force atomique AFM) actionné électrostatiquement en Z avec une grande précision et une bande passante élevée. Cependant, la présence de différents effets indésirables apparaissant à cette petite échelle (comme le bruit de mesure, des non-linéarités de natures différentes, les couplages, les vibrations) affectent fortement la performance globale du système 3D. En conséquence, une commande de haute performance est nécessaire. Pour cela, un nouveau modèle 3D du système a été développé et des méthodes de contrôle appropriées pour un tel système ont été élaborées. Tout d'abord l'accent est mis sur de positionnement selon les axes X et Y. Les effets d'hystérésis et de fluage non linéaires présents dans les actionneurs piézoélectriques ont été compensés et une comparaison entre les différentes méthodes de compensation est effectuée. Des techniques modernes de commande robuste SISO et MIMO sont ensuite utilisées pour réduire les effets des vibrations piézoélectriques et des couplages entre les axes X et Y. Le mouvement horizontal est alors combiné avec le mouvement vertical (Axe Z) et une commande du courant tunnel et du micro-levier. Des résultats expérimentaux illustrent le nano positionnement 3D de la pointe, et des résultats de simulation pour la reconstruction de la topographie de la surface ainsi que le positionnement du micro-levier à base d'un modèle multi-modes

    Discrete Modeling and Sliding Mode Control of Piezoelectric Actuators

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    With the ability to generate fine displacements with a resolution down to sub-nanometers, piezoelectric actuators (PEAs) have found wide applications in various nano-positioning systems. However, existence of various effects in PEAs, such as hysteresis and creep, as well as dynamics can seriously degrade the PEA performance or even lead to instability. This raises a great need to model and control PEAs for improved performance, which have drawn remarkable attention in the literature. Sliding mode control (SMC) shows its potential to the control of PEA, by which the hysteresis and other nonlinear effects can be regard as disturbance to the dynamic model and thus rejected or compensated by its switching control. To implement SMC in digital computers, this research is aimed at developing novel discrete models and discrete SMC (DSMC)-based control schemes for PEAs, along with their experimental validation. The first part of this thesis concerns with the modeling and control of one-degree of freedom (DOF) PEA, which can be treated as a single-input-single-output (SISO) system. Specifically, a novel discrete model based on the concept of auto-regressive moving average (ARMA) was developed for the PEA hysteresis; and to compensate for the PEA hysteresis and improve its dynamics, an output tracking integrated discrete proportional-integral-derivative-based SMC (PID-SMC) was developed. On this basis, by making use of the availability of PEA hysteresis models, two control schemes, named “the discrete inversion feedforward based PID-SMC” and “the discrete disturbance observer (DOB)-based PID-SMC”, were further developed. To illustrate the effectiveness of the developed models and control schemes, experiments were designed and conducted on a commercially available one-DOF PEA, as compared with the existing ones. The second part of the thesis presents the extension of the developed modeling and control methods to multi-DOF PEAs. Given the fact that details with regard to the PEA internal configurations is not typically provided by the manufacturer, a state space model based on the black box system identification was developed for the three-DOF PEA. The developed model was then integrated in the output tracking based discrete PID-SMC, with its effectiveness verified through the experiments on a commercially available three-DOF PEA. The superiority of the proposed control method over the conventional PID controller was also experimentally investigated and demonstrated. Finally, by integrating with a DOB in the discrete PID-based SMC, a novel control scheme is resulted to compensate for the nonlinearities of the three-DOF PEA. To verify its effectiveness, the discrete DOB based PID-SMC was applied in the control experiments and compared with the existing SMC. The significance of this research lies in the development of the discrete models and PID-based SMC for PEAs, which is of great help to improve their performance. The successful application of the proposed method in the control of multi-DOF PEA allows the application of SMC to the control of complicated multi-inputs-multi-outputs (MIMO) systems without details regarding the internal configuration. Also, integration of the inversion based feedforward control and the DOB in the SMC design has been proven effective for the tracking control of PEAs

    Mechatronics Methods for Mitigating Undesirable Effects of Pre-motion Friction in Nanopositioning Stages with Mechanical Bearings

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    Nanopositioning (NP) stages are used to for precise positioning in a wide range of nanotech processes, ranging from substrate patterning to micro additive manufacturing. They are often used for point-to-point (P2P) motions, where the stage is commanded to travel to and settle within a pre-specified window of the target position, and for tracking motions, where the stage is commanded to follow a reference trajectory. The settling time, in-position stability and tracking accuracy of NP stages directly affects productivity and quality of the associated processes or manufactured products. NP stages can be constructed using flexure, fluidic, magnetic or mechanical bearings (i.e., sliding and, especially, rolling-element bearings). Of these choices, mechanical bearings are the most cost-effective, and are currently the only commercially viable option for a growing number of NP applications that must be performed in high vacuum environments. However, mechanical-bearing-guided NP stages experience nonlinear pre-motion (i.e., pre-sliding/pre-rolling) friction which adversely affects their precision and speed. Control-based compensation methods, commonly used to address this problem, often suffer from poor robustness and limited practicality due to the complexity and extreme variability of friction dynamics at the micro scale. Therefore, this dissertation proposes three novel mechatronics methods, featuring a combination of mechanical design and control strategy, as more effective and robust solutions to mitigate the undesirable effects of pre-motion friction. The first approach is vibration assisted nanopositioning (VAN), which utilizes high frequency vibration (i.e., dither) to mitigate the low speed (slow settling) of mechanical-bearing-guided NP stages during P2P motions. VAN allows the use of dither to mitigate pre-motion friction while maintaining nanometer-level positioning precision. P2P positioning experiments on an in-house built VAN stage demonstrates up to 66% reductions in the settling time, compared to a conventional mechanical bearing NP stage. A major shortcoming of VAN is that it increases the cost of NP stages. To address this limitation, a friction isolator (FI) is proposed as a simple and more cost-effective method for mitigating pre-motion friction. The idea of FI is to connect the mechanical bearing to the NP stage using a joint that is very compliant in the motion direction, thus effectively isolating the stage from bearing friction. P2P positioning tests on a NP stage equipped with FI prototypes demonstrate up to 84% reductions in the settling time. The introduction of FI also enables accurate and robust reductions of motion errors during circular tracking tests, using feedforward compensation with a simple friction model. One pitfall of FI is that it causes increased error of the stage during in position. Therefore, a semi-active isolator (SAI) is proposed to mitigate the slow settling problem using the FI, while maintaining the benefits of friction on in-position stability. The proposed SAI, which connects the bearing and NP stage, is equipped with solenoids to switch its stiffness from low, during settling, to high once the stage gets into position. P2P experiments demonstrate up to 81% improvements in the settling time without sacrificing in-position stability. The proposed mechatronics methods are compared and FI stands out as a result of its simplicity, cost-effectiveness and robust performance. Therefore, the influence of design parameters on the effectiveness of FI are investigated to provide design guidelines. It is recommended that the FI should be designed with the smallest stiffness in the motion direction, while satisfying other requirements such as in-position stability and off-axis rigidity.PHDMechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/155296/1/terrydx_1.pd

    High Bandwidth Control of Precision Motion Instrumentation

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    This article presents a high-bandwidth control design suitable for precision motion instrumentation. Iterative learning control (ILC), a feedforward technique that uses previous iterations of the desired trajectory, is used to leverage the repetition that occurs in many tasks, such as raster scanning in microscopy. Two ILC designs are presented. The first design uses the motion system dynamic model to maximize bandwidth. The second design uses a time-varying bandwidth that is particularly useful for nonsmooth trajectories such as raster scanning. Both designs are applied to a multiaxis piezoelectric-actuated flexure system and evaluated on a nonsmooth trajectory. The ILC designs demonstrate significant bandwidth and precision improvements over the feedback controller, and the ability to achieve precision motion control at frequencies higher than multiple system resonances
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