A review of data mining applications in semiconductor manufacturing

The authors acknowledge Fundacao para a Ciencia e a Tecnologia (FCT-MCTES) for its financial support via the project UIDB/00667/2020 (UNIDEMI).For decades, industrial companies have been collecting and storing high amounts of data with the aim of better controlling and managing their processes. However, this vast amount of information and hidden knowledge implicit in all of this data could be utilized more efficiently. With the help of data mining techniques unknown relationships can be systematically discovered. The production of semiconductors is a highly complex process, which entails several subprocesses that employ a diverse array of equipment. The size of the semiconductors signifies a high number of units can be produced, which require huge amounts of data in order to be able to control and improve the semiconductor manufacturing process. Therefore, in this paper a structured review is made through a sample of 137 papers of the published articles in the scientific community regarding data mining applications in semiconductor manufacturing. A detailed bibliometric analysis is also made. All data mining applications are classified in function of the application area. The results are then analyzed and conclusions are drawn.publishersversionpublishe

Discovering correlated parameters in Semiconductor Manufacturing processes: a Data Mining approach

International audienceData mining tools are nowadays becoming more and more popular in the semiconductor manufacturing industry, and especially in yield-oriented enhancement techniques. This is because conventional approaches fail to extract hidden relationships between numerous complex process control parameters. In order to highlight correlations between such parameters, we propose in this paper a complete knowledge discovery in databases (KDD) model. The mining heart of the model uses a new method derived from association rules programming, and is based on two concepts: decision correlation rules and contingency vectors. The first concept results from a cross fertilization between correlation and decision rules. It enables relevant links to be highlighted between sets of values of a relation and the values of sets of targets belonging to the same relation. Decision correlation rules are built on the twofold basis of the chi-squared measure and of the support of the extracted values. Due to the very nature of the problem, levelwise algorithms only allow extraction of results with long execution times and huge memory occupation. To offset these two problems, we propose an algorithm based both on the lectic order and contingency vectors, an alternate representation of contingency tables. This algorithm is the basis of our KDD model software, called MineCor. An overall presentation of its other functions, of some significant experimental results, and of associated performances are provided and discussed

A decentralized predictive maintenance system based on data mining concepts

In the last years we have assisted to several and deep changes in industrial manufacturing. Induced by the need of increasing efficiency, bigger flexibility, better quality and lower costs, it became more complex [1]. Enterprises had had the need to cope with market expectations, incorporating in their production philosophies new paradigms such as JIT- Just in time, MTOMake to order, Mass Customization, agile manufacturing or Lean Manufacturing, that allow them to satisfy markets with a big diversity of products and also big quantities, becoming therefore more competitive. All this complexity has caused big pressure under enterprises maintenance systems. Maintenance mission is to make equipment and facilities available when requested. Maintenance function, seen as a non value aggregator one, became more and more requested to contribute to cost reduction, based on bigger and consistent equipment reliability. This perspective is stressed when enterprises existing equipment has an advanced service life. It is expected a profusion of breakdowns at those scenarios and consequently a smaller usability of equipment driving to less productivity. From an economic perspective, maintenance function is seen to the enterprise as a cost [2]. In fact, experience shows that a major percentage of the overall costs of the business concerns with maintenance [3]. Considering this perspective, decreasing costs with equipment operationalization will increase maintenance productivity and consequently overall productivity [4]

The Irrelevant Values Problem of Decision Tree for Improving a Glass Sputtering Process

[[abstract]]In this paper, we use decision tree to establish a yield improvement model for glass sputtering process; however, the tree may have irrelevant values problem. In other words, when the tree is represented by a set of rules, not only comprehensibility of the resultant rules will be detracted but also critical factors of the manufacturing process cannot be effectively identified. From the performance issue and practical issue, we have to remove irrelevant conditions from the rules; otherwise, a domain expert is needed to review the decision tree. In this paper, we use a very simple example to demonstrate this point of view. Moreover, to identify and remove irrelevant conditions from the rules, we also revise Chiang's previous algorithm such that the modified algorithm can deal not only discrete data but also quantitative data.[[notice]]補正完畢[[incitationindex]]EI[[booktype]]紙

Data mining in manufacturing: a review based on the kind of knowledge

In modern manufacturing environments, vast amounts of data are collected in database management systems and data warehouses from all involved areas, including product and process design, assembly, materials planning, quality control, scheduling, maintenance, fault detection etc. Data mining has emerged as an important tool for knowledge acquisition from the manufacturing databases. This paper reviews the literature dealing with knowledge discovery and data mining applications in the broad domain of manufacturing with a special emphasis on the type of functions to be performed on the data. The major data mining functions to be performed include characterization and description, association, classification, prediction, clustering and evolution analysis. The papers reviewed have therefore been categorized in these five categories. It has been shown that there is a rapid growth in the application of data mining in the context of manufacturing processes and enterprises in the last 3 years. This review reveals the progressive applications and existing gaps identified in the context of data mining in manufacturing. A novel text mining approach has also been used on the abstracts and keywords of 150 papers to identify the research gaps and find the linkages between knowledge area, knowledge type and the applied data mining tools and techniques

Adaptive Data Mining Approach for Pcb Defect Detection and Classification

Objective: To develop a model for PCB defect detection and classification with the help of soft computing technique. Methodology: To improve the performance of the prediction and classification we propose a hybrid approach for feature reduction and classification. The proposed approach is divided into three main stages: (i) data pre-processing (ii) feature selection and reduction and (iii) Classification. In this approach, pre-processing, feature selection and reduction is carried out by measuring of confidence with the adaptive genetic algorithm. Prediction and classification is carried out by using neural network classifier. A genetic algorithm is used for data preprocessing to achieve the feature reduction and confidence measurement. Findings: The system is implemented using MatLab 2013b. The resulting analysis shows that the proposed approach is capable of detecting and classifying defects in PCB board

Business Intelligence in Industry 4.0: State of the art and research opportunities

Data collection and analysis have been at the core of business intelligence (BI) for many years, but traditional BI must be adapted for the large volume of data coming from Industry 4.0 (I4.0) technologies. They generate large amounts of data that need to be processed and used in decision-making to generate value for the companies. Value generation of I4.0 through data analysis and integration into strategic and operational activities is still a new research topic. This study uses a systematic literature review with two objectives in mind: understanding value creation through BI in the context of I4.0 and identifying the main research contributions and gaps. Results show most studies focus on real-time applications and integration of voluminous and unstructured data. For business research, more is needed on business model transformation, methodologies to manage the technological implementation, and frameworks to guide human resources training

AI/ML Algorithms and Applications in VLSI Design and Technology

An evident challenge ahead for the integrated circuit (IC) industry in the nanometer regime is the investigation and development of methods that can reduce the design complexity ensuing from growing process variations and curtail the turnaround time of chip manufacturing. Conventional methodologies employed for such tasks are largely manual; thus, time-consuming and resource-intensive. In contrast, the unique learning strategies of artificial intelligence (AI) provide numerous exciting automated approaches for handling complex and data-intensive tasks in very-large-scale integration (VLSI) design and testing. Employing AI and machine learning (ML) algorithms in VLSI design and manufacturing reduces the time and effort for understanding and processing the data within and across different abstraction levels via automated learning algorithms. It, in turn, improves the IC yield and reduces the manufacturing turnaround time. This paper thoroughly reviews the AI/ML automated approaches introduced in the past towards VLSI design and manufacturing. Moreover, we discuss the scope of AI/ML applications in the future at various abstraction levels to revolutionize the field of VLSI design, aiming for high-speed, highly intelligent, and efficient implementations