MEMS micromirrors for imaging applications

Strathclyde theses - ask staff. Thesis no. : T13478Optical MEMS (microelectromechanical systems) are widely used in various applications. In this thesis, the design, simulation and characterisation of two optical MEMS devices for imaging applications, a varifocal micromirror and a 2D scanning micromirror, are introduced. Both devices have been fabricated using the commercial Silicon-on-Insulator multi-users MEMS processes (SOIMUMPs), in the 10 m thick Silicon-on-Insulator (SOI) wafer. Optical MEMS device with variable focal length is a critical component for imaging system miniaturisation. In this thesis, a thermally-actuated varifocal micromirror (VFM) with 1-mm-diameter aperture is introduced. The electrothermal actuation through Joule heating of the micromirror suspensions and the optothermal actuation using incident laser power absorption have been demonstrated as well as finite element method (FEM) simulation comparisons. Especially, the optical aberrations produced by this VFM have been statistically quantified to be negligible throughout the actuation range. A compact imaging system incorporating this VFM has been demonstrated with high quality imaging results. MEMS 2D scanners, or scanning micromirrors, are another type of optical MEMS which have been widely investigated for applications such as biomedical microscope imaging, projection, retinal display and optical switches for telecommunication network, etc. For large and fast scanning motions, the actuation scheme to scan a micromirror in two axes, the structural connections and arrangement are fundamental. The microscanner introduced utilises two types of actuators, electrothermal actuators and electrostatic comb-drives, to scan a 1.2-mm-diameter gold coated silicon micromirror in two orthogonal axes. With assistance of FEM software, CoventorWare, the structure optimisation of actuators and flexure connections are presented. The maximum optical scan angles in two axes by each type of actuator individually and by actuating the two at the same time have been characterised experimentally. By programming actuation signals, the microscanner has achieved a rectangular scan pattern with 7° 10° angular-scan-field at a line-scan rate of around 1656 Hz.Optical MEMS (microelectromechanical systems) are widely used in various applications. In this thesis, the design, simulation and characterisation of two optical MEMS devices for imaging applications, a varifocal micromirror and a 2D scanning micromirror, are introduced. Both devices have been fabricated using the commercial Silicon-on-Insulator multi-users MEMS processes (SOIMUMPs), in the 10 m thick Silicon-on-Insulator (SOI) wafer. Optical MEMS device with variable focal length is a critical component for imaging system miniaturisation. In this thesis, a thermally-actuated varifocal micromirror (VFM) with 1-mm-diameter aperture is introduced. The electrothermal actuation through Joule heating of the micromirror suspensions and the optothermal actuation using incident laser power absorption have been demonstrated as well as finite element method (FEM) simulation comparisons. Especially, the optical aberrations produced by this VFM have been statistically quantified to be negligible throughout the actuation range. A compact imaging system incorporating this VFM has been demonstrated with high quality imaging results. MEMS 2D scanners, or scanning micromirrors, are another type of optical MEMS which have been widely investigated for applications such as biomedical microscope imaging, projection, retinal display and optical switches for telecommunication network, etc. For large and fast scanning motions, the actuation scheme to scan a micromirror in two axes, the structural connections and arrangement are fundamental. The microscanner introduced utilises two types of actuators, electrothermal actuators and electrostatic comb-drives, to scan a 1.2-mm-diameter gold coated silicon micromirror in two orthogonal axes. With assistance of FEM software, CoventorWare, the structure optimisation of actuators and flexure connections are presented. The maximum optical scan angles in two axes by each type of actuator individually and by actuating the two at the same time have been characterised experimentally. By programming actuation signals, the microscanner has achieved a rectangular scan pattern with 7° 10° angular-scan-field at a line-scan rate of around 1656 Hz

Piezoelectric and Magnetoelastic Strain in the Transduction and Frequency Control of Nanomechanical Resonators

Stress and strain play a central role in semiconductors, and are strongly manifested at the nanometer-scale regime. Piezoelectricity and magnetostriction produce internal strains that are anisotropic and addressable via a remote electric or magnetic field. These properties could greatly benefit the nascent field of nanoelectromechanical systems (NEMS), which promises to impact a variety of sensor and actuator applications. The piezoelectric semiconductor GaAs is used as a platform for probing novel implementations of resonant nanomechanical actuation and frequency control. GaAs/AlGaAs heterostructures can be grown epitaxially, are easily amenable to suspended nanostructure fabrication, have a modest piezoelectric coefficient roughly twice that of quartz, and if appropriately doped with manganese, can form dilute magnetic compounds. In ordinary piezoelectric transducers there is a clear distinction between the metal electrodes and piezoelectric insulator. But this distinction is blurred in semiconductors. An integrated piezoelectric actuation mechanism is demonstrated in a series of suspended anisotype GaAs junctions, notably pin diodes. A dc bias was found to alter the resonance amplitude and frequency in such devices. The results are in good agreement with a model of strain based actuation encompassing the diode’s voltage-dependent carrier depletion width and impedance. A bandstructure engineering approach is employed to control the actuation efficiency by appropriately designing the doping level and thickness of the GaAs structure. Actuation and frequency are also sensitively dependent on the device’s crystallographic orientation. This combined tuning behavior represents a novel type of depletion-mediated electromechanical coupling in piezoelectric semiconductor nanostructures. All devices are actuated piezoelectrically, whereas three techniques are demonstrated for sensing: optical interferometry, piezoresistance and piezoelectricity. Finally, a nanoelectromechanical GaMnAs resonator is used to obtain the first measurement of magnetostriction in a dilute magnetic semiconductor. Resonance frequency shifts induced by field-dependent magnetoelastic stress are used to simultaneously map the magnetostriction and magnetic anisotropy constants over a wide range of temperatures. Owing to the central role of carriers in controlling ferromagnetic interactions in this material, the results appear to provide insight into a unique form of magnetoelastic behavior mediated by holes

NASA Tech Briefs, April 2010

Topics covered include: Active and Passive Hybrid Sensor; Quick-Response Thermal Actuator for Use as a Heat Switch; System for Hydrogen Sensing; Method for Detecting Perlite Compaction in Large Cryogenic Tanks; Using Thin-Film Thermometers as Heaters in Thermal Control Applications; Directional Spherical Cherenkov Detector; AlGaN Ultraviolet Detectors for Dual-Band UV Detection; K-Band Traveling-Wave Tube Amplifier; Simplified Load-Following Control for a Fuel Cell System; Modified Phase-meter for a Heterodyne Laser Interferometer; Loosely Coupled GPS-Aided Inertial Navigation System for Range Safety; Sideband-Separating, Millimeter-Wave Heterodyne Receiver; Coaxial Propellant Injectors With Faceplate Annulus Control; Adaptable Diffraction Gratings With Wavefront Transformation; Optimizing a Laser Process for Making Carbon Nanotubes; Thermogravimetric Analysis of Single-Wall Carbon Nanotubes; Robotic Arm Comprising Two Bending Segments; Magnetostrictive Brake; Low-Friction, Low-Profile, High-Moment Two-Axis Joint; Foil Gas Thrust Bearings for High-Speed Turbomachinery; Miniature Multi-Axis Mechanism for Hand Controllers; Digitally Enhanced Heterodyne Interferometry; Focusing Light Beams To Improve Atomic-Vapor Optical Buffers; Landmark Detection in Orbital Images Using Salience Histograms; Efficient Bit-to-Symbol Likelihood Mappings; Capacity Maximizing Constellations; Natural-Language Parser for PBEM; Policy Process Editor for P(sup 3)BM Software; A Quality System Database; Trajectory Optimization: OTIS 4; and Computer Software Configuration Item-Specific Flight Software Image Transfer Script Generator

Optical Fiber Interferometric Sensors

The contributions presented in this book series portray the advances of the research in the field of interferometric photonic technology and its novel applications. The wide scope explored by the range of different contributions intends to provide a synopsis of the current research trends and the state of the art in this field, covering recent technological improvements, new production methodologies and emerging applications, for researchers coming from different fields of science and industry. The manuscripts published in the Special issue, and re-printed in this book series, report on topics that range from interferometric sensors for thickness and dynamic displacement measurement, up to pulse wave and spirometry applications

Recent advances in biomedical photonic sensors: a focus on optical-fibre-based sensing

In this invited review, we provide an overview of the recent advances in biomedical pho tonic sensors within the last five years. This review is focused on works using optical-fibre technology, employing diverse optical fibres, sensing techniques, and configurations applied in several medical fields. We identified technical innovations and advancements with increased implementations of optical-fibre sensors, multiparameter sensors, and control systems in real applications. Examples of outstanding optical-fibre sensor performances for physical and biochemical parameters are covered, including diverse sensing strategies and fibre-optical probes for integration into medical instruments such as catheters, needles, or endoscopes.This work was supported by Ministerio de Ciencia e Innovación and Agencia Estatal de Investigación (PID2019-107270RB-C21/AEI/10.13039/501100011033), and TeDFeS Project (RTC-2017- 6321-1) co-funded by European FEDER funds. M.O. and J.F.A. received funding from Ministerio de Ciencia, Innovación y Universidades of Spain under Juan de la Cierva-Formación and Juan de la Cierva-Incorporación grants, respectively. P.R-V. received funding from Ministerio de Educación, Cultura y Deporte of Spain under PhD grant FPU2018/02797

Dynamic motion detection techniques for micromechanical devices and their application in long-term testing

Ph.DDOCTOR OF PHILOSOPH

The study of weak ferromagnetism by andreev reflection spin spectroscopy and development of bimorph electro-thermal actuators

It is well accepted that spin polarization of materials has a major role in spintronics to improve the efficiency of spintronic devices. Point contact Andreev reflection (PCAR) spectroscopy, one of the most popular and reliable techniques, was used to obtain the conductance and by analyzing them by modified BTK model, spin polarizations of various materials, generally with low ferromagnetism, were extracted in order to understand the transport properties of spin polarized current and find the relation of spin polarization with other parameters such as saturation magnetization or the Curie temperature so that better spintronic materials can be identified and developed. We investigated how the spin polarization of itinerant ferromagnet MnSi changes as it undergoes magnetic phase transition from helical to conical to induced ferromagnetic. Also, unconventional conductance with enhanced Andreev reflection with amplitude more than two, and conductance oscillations outside superconducting gap indicate the signature of triplet superconductivity in Nb/MnSi contacts made by e-beam lithography and sputtering. Another system studied was Pd1-xNix which is an example of the strong ferromagnetic susceptibility enhancement of nearly ferromagnetic Pd by Ni impurities. The transport spin polarizations of Pd1-xNix with different Ni concentrations were measured and their correlation with saturation magnetization was studied. PCAR was applied to a superconducting sample: Co doped BaFe2As2 which revealed the presence of pseudogap in this material. Studies by SQUID, PCAR and neutron scattering, Pt thin films were found ferromagnetic which was supported by the first principle calculation indicating that its source is the surface roughness of the films, and the surface magnetization is more or less independent of the film thickness. MnBi of stable phase and high Curie temperature showed high perpendicular anisotropy and high transport spin polarization (P) which was found to be due to disparity in Fermi velocity in electron split bands. Their P is proportional to saturation magnetization, and this material is a potential candidate for spin injection to semiconductors. Room temperature ferromagnetism and finite low temperature spin polarization was observed in dilute magnetic semiconductor: undoped and Cr doped InN thin films so that it is another potential material for spintronic devices. Unlike predicted spin torque in FM/NM hybrid structure, freestanding Si3N4 microstructures with coating of Au or Ag or Ni showed torsion while passing dc current. The quadratic dependence of the torsion angles with the dc current were measured and such effect was accounted for the Joule heating of the metal coating and the residual strain of Si3N4 structures. Such electro-thermal actuators could find applications in MEMS technology

Electrostatic MEMS Actuators using Gray-scale Technology

The majority of fabrication techniques used in micro-electro-mechanical systems (MEMS) are planar technologies, which severely limits the structures available during device design. In contrast, the emerging gray-scale technology is an attractive option for batch fabricating 3-D structures in silicon using a single lithography and etching step. While gray-scale technology is extremely versatile, limited research has been done regarding the integration of this technology with other MEMS processes and devices. This work begins with the development of a fundamental empirical model for predicting and designing complex 3-D photoresist structures using a pixilated gray-scale technique. A characterization of the subsequent transfer of such 3-D structures into silicon using deep reactive ion etching (DRIE) is also provided. Two advanced gray-scale techniques are then introduced: First, a double exposure technique was developed to exponentially increase the number of available gray-levels; improving the vertical resolution in photoresist. Second, a design method dubbed compensated aspect ratio dependent etching (CARDE) was created to anticipate feature dependent etch rates observed during gray-scale pattern transfer using deep reactive ion etching (DRIE). The developed gray-scale techniques were used to integrate variable-height components into the actuation mechanism of electrostatic MEMS devices for the first time. In static comb-drives, devices with 3-D comb-fingers were able to demonstrate >34% improvement in displacement resolution by tailoring their force-engagement characteristics. Lower driving voltages were achieved by reducing suspension heights to decrease spring constants (from 7.7N/m to 2.3N/m) without effecting comb-drive force. Variable-height comb-fingers also enabled the development of compact, voltage-controlled electrostatic springs for tuning MEMS resonators. Devices in the low-kHz range demonstrated resonant frequency tuning >17.1% and electrostatic spring constants up to 1.19 N/m (@70V). This experience of integrating 3-D structures within electrostatic actuators culminated in the development of a novel 2-axis optical fiber alignment system using 3-D actuators. Coupled in-plane motion of electrostatic actuators with integrated 3-D wedges was used to deflect an optical fiber both horizontally and vertically. Devices demonstrated switching speeds <1ms, actuation ranges >35μm (in both directions), and alignment resolution <1.25μm. Auto-alignment to fixed indium-phosphide waveguides with <1.6μm resolution in <10 seconds was achieved by optimizing search algorithms

Manufacturing Metrology

Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation

NASA patent abstracts bibliography: A continuing bibliography. Section 1: Abstracts (supplement 39)

Abstracts are provided for 154 patents and patent applications entered into the NASA scientific and technical information systems during the period Jan. 1991 through Jun. 1991. Each entry consists of a citation, an abstract, and in most cases, a key illustration selected from the patent or patent application