Synthesis Technique of Thickness-Customizable Multilayered Frequency Selective Surface for Plasma-Based Electromagnetic Structures

This dissertation provides a synthesis technique for the design of thickness-customizable high-order (N ≥ 2) bandpass frequency selective surface (FSS) and its application in realizing versatile multi-layered FSS and absorbers. Admittance inverters layers are used to synthesize the transfer response of the filter given desired characteristics such as filter type, center frequency, and bandwidth. These inverter layers are essentially electromagnetic coupling interlayers that can be adjusted to customize the thickness of multilayered FSS without degrading the desired filter performance. A generalized equivalent circuit model is used to provide physical insights of the proposed design. This synthesis technique is adopted to deliver a versatile implementation capability of high-order FSS filters using various dielectric spacers with arbitrary thicknesses. Such technique enables the realization of spatial filters with variable size, while maintaining the desired filter response. To highlight the significance of the proposed synthesis technique, its concept is applied to two practical problems including the design of compact switchable FSS and adaptive/tunable microwave absorbers as it may allow simpler integration of active components that require specific physical dimensions. In the first practical problem, the feasibility of deploying plasma switchable compact spatial filter in harsh electromagnetic radiation environments is investigated. The proposed FSS integrates contained plasma (plasma-shells) as active tuning elements. These ceramic, gas-encapsulating shells are ideal for high-power microwave and electromagnetic pulse protection because they are rugged, hermetic, operable at extreme temperatures, and insensitive to ionizing radiation. A 2D periodic second-order switchable spatial filter is implemented. It is composed of electrically small Jerusalem cross structures embedded with discrete plasma shells strategically located to effectively switch the transfer function of the filter. This technique is used to realize compact low profile second order band pass spatial filter operating at S-band. It also has the ability to switch its transfer function within 20 to 100 ns while enabling in-band shielding protection for aerospace or terrestrial electromagnetic systems subjected to high power microwave energy (HPME) and high electromagnetic pulse (HEMP) in harsh space environment. Experimental results are shown to be in good agreement with simulation results. The second practical problem is addressed by deploying a large-scale adaptable compressed Jaumann absorber for harsh and dynamic electromagnetic environments. The multilayered conductor-backed absorbers are realized by integrating ceramic gas-encapsulating shells and a closely coupled resonant layer that also serves as a biasing electrode to sustain the plasma. These active frequency selective absorbers are analyzed using a transmission line approach to provide the working principle and its frequency tuning capability. By varying the voltage of the sustainer, the plasma can be modeled as a lossy, variable, frequency-power-dependent inductor, providing a dynamic tuning response of the absorption spectral band. To study the power handling capability of the tunable absorber, dielectric and air breakdowns within the device are numerically emulated using electromagnetic simulation by quantifying the maximum field enhancement factor (MFEF). Furthermore, a comprehensive thermal analysis using a simulation method that couples electromagnetics and heat transfer is performed for the absorber under high power continuous microwave excitations. The maximum power level handling capability of the microwave absorber has been numerically predicted and validated experimentally

Quasi-coherent thermal emitter based on refractory plasmonic materials

The thermal emission of refractory plasmonic metamaterial - a titanium nitride 1D grating - is studied at high operating temperature (540 {\deg}C). By choosing a refractory material, we fabricate thermal gratings with high brightness that are emitting mid-infrared radiation centered around 3 $\mu$m. We demonstrate experimentally that the thermal excitation of plasmon-polariton on the surface of the grating produces a well-collimated beam with a spatial coherence length of 32{\lambda} (angular divergence of 1.8{\deg}) which is quasi-monochromatic with a full width at half maximum of 70 nm. These experimental results show good agreement with a numerical model based on a two-dimensional full-wave analysis in frequency domain.Comment: 10 pages, 5 figure

산소 플라즈마 애싱 공정을 이용한 응력 구배 MEMS 외팔보가 있는 Ka밴드 대역 가변형 메타물질 흡수체

학위논문(박사) -- 서울대학교대학원 : 공과대학 전기·정보공학부, 2022. 8. 김용권.This dissertation proposes and realizes the first Ka-band frequency tunable metamaterial absorber with stress-induced MEMS cantilever with oxygen plasma ashing process. To employ a MEMS-driven actuator for LC resonance frequency tuning method in the GHz regime, the split-ring resonator (SRR) structure of the metamaterial unit cell is designed to have a sub-mm scale cantilever as a capacitor element of the unit cell. To enlarge capacitance change, the MEMS cantilever is released with a large out-of-plane deflection by the plasma ashing process. This MEMS cantilever with stress gradient is arranged at four parts of a symmetrical SRR unit cell, and the two cells compose the absorber sample as an array structure. The overall cantilevers of the absorber actuate from the initial bent upward state to pulled down state when the electrostatic voltage is applied. The decrease of deflection reduces the gap between cantilevers and bottom electrodes to increase capacitance for frequency tuning to lower frequency. To verify and improve the uniformity of the mechanical behavior of the absorber, this research proposes and demonstrates 3 different design types of releasing on stress-induced cantilevers. First, the array design of 12 cantilevers with 400 μm in length and 50 μm widths is modified from a cantilever with 400 μm in length and 800 μm widths. To overcome the limitation on the mechanical behavior of cantilever arrays due to their nonuniformity, further modification on etching hole rearrangement is reflected in the 2nd type of rectangular cantilever. The space length of etch hole varies depending on the position from the open end of cantilevers. This incremental space length between 8 μm etch holes from the open end enables sequential releasing of cantilevers during photoresist oxygen plasma ashing. The cyclic process was performed in the ashing process to lower the distribution of fabrication results. Finally, the last design to have a semicircle shape with incremental space length between etching holes to improve the uniformity of the cantilever to prevent such drawbacks of a wrinkled profile which the previous design shows. Also, our last design is driven by a digital drive creating 5 different reconfiguration states. With full-wave simulations, the performance of the proposed absorber demonstrates experimentally in each of 5 different reconfiguration states. The initially measured deflection of the cantilever beam is 51.8 μm on average. At the initial state, the resonant frequency and the absorptivity are 32.95 GHz and 80.95%. When all the cantilevers are pulled down, the frequency shifts a total of 4.08 GHz from the initial state showing a tuning ratio of 12.29 %. The error between the measured value and the simulation value came within 0.39 GHz in all five states. This dissertation demonstrated the potential of MEMS as a tuning method for Ka-band absorbers.이 논문은 산소 플라즈마 애싱 공정을 사용하여 응력구배 MEMS 외팔보를 사용한 최초의 Ka 대역 주파수 가변 메타물질 흡수체를 제안하고 검증하였다. GHz 영역에서 LC 공진 주파수 가변 방식에 MEMS 액추에이터를 구동하기 위해 메타물질 단위 셀인 분할링공진기 구조는 mm 스케의 외팔보를 정전용량의 요소를 갖도록 설계하였다. 정전용량 변화를 최대화하기 위해 MEMS 외팔보는 플라즈마 애싱 공정에 의해 수직 방향으로 큰 편향차를 갖도록 설계하였다. 응력구배 MEMS 외팔보는 대칭의 분할링 공진기 구조의 단위 셀 4곳에 배열되고 두 셀은 배열구조로 설계되었다. 이 때, 풀인 전압 이상의 높은 전압을 인가 시 외팔보는 바닥전극에 붙게 되어 정전용량을 키우고 LC 공진 주파수를 낮춘다. 흡수체의 기계적 거동에 대한 균일성을 개선하기 위해 총 3가지 다른 모양의 외팔보를 설계하였다. 먼저 길이 400μm, 너비 50μm인 외팔보를 12개의 배열상태로 설계하여 컴퓨터 시뮬레이션과 측정값을 확인하였다. 첫 번째 흡수체의 플라즈마 애싱 공정을 통한 외팔보 구현 공정의 결과, 96개의 외팔보의 평균 값은 41.5 μm이고 표준 편차는 15.4 μm였다. 첫 번째 흡수체의 경우 제작 외팔보의 산포가 상당히 큼에도 불구하고, 15 V까지 아날로그 튜닝을 하여, 초기 상태의 28 GHz의 공진주파수에서 25.5 GHz의 공진주파수 변화하여 총 2.5 GHz의 주파수 가변범위를 도달하였다. 반사계수는 초기 -5.68 dB에서 -33.60 dB까지 변화하였고, 투과 계수의 경우 -40에서 -60 dB를 유지하였다. 흡수율 계산 결과, 각 공진 주파수에서의 흡수율은 0 V일 때 72.9%에서 계속 증가하며 15 V일때 99.9%의 흡수율을 도달하였다. 그럼에도 불구하고, 외팔보 어레이 갖는 넓은 편향값 산포가 컴퓨터 시뮬레이션과의 괴리가 있어 개선된 설계를 다시 시도하였다. 앞선 설계의 단점을 극복하기 위해 점진적으로 증가하는 패턴의 식각 구멍을 외팔보에 적용하였다. 이 두 번째 구조 또한 제작, 컴퓨터 계산 및 실험 검증하였다. 이러한 식각 구멍 패턴은 외팔보를 산소 플라즈마 애싱 공정으로 구현 시, 제작 균일성을 크게 증가시킨다. 나아가 플라즈마 애싱 공정 또한 시간을 분할하여 제작함으로써 균일도를 크게 증가시킨다. 또한 두번째 설계부터는 응력 구배로 인한 큰 편향을 갖는 외팔보가 갖는 비평형 구동 방식의 해석 어려움에 따라 전압을 개별적으로 인가하며 on/off 형태의 디지털 구동방식으로만 구동하게끔 시스템 구동방식을 변경하였다. 2개의 메타물질 단위 구조에 4개의 전극을 분리하여 총 5개의 구조적으로 다른 상태를 구현하였다. 모든 외팔보가 위로 휘어진 상태에서 전극에 전압을 순차적으로 인가하여 2개씩 바닥에 붙게 하여 최종적으로 모든 외팔보가 바닥에 붙게 하였다. 두 번째 흡수체의 경우, 외팔보 구현이 크게 개선됨에도 불구하고 초기 32.24 GHz의 공진 주파수 값에서 2.14 GHz만 변화하여 최종 30.10 GHz의 공진주파수 측정 결과를 보였다. 흡수율의 경우에도 초기 83.59%에서 최종 90.75%의 결과를 보였지만 컴퓨터 계산과 많은 차이를 보였다. 최종적으로 앞선 2개의 설계를 보완한, 최종 진화한 형태인, 반원형 응력 구배 외팔보를 갖는 흡수체를 설계, 제작, 및 실험 검증하였다. 특히, 외팔보가 갖는 불안정한 기계적 거동을 단순화하여 디지털 구동을 하게끔 흡수체를 설계하였다. 식각 패턴의 거리를 2 μm씩 늘리며 반원 형태의 외곽으로부터 설계한 결과 재현성과 균일성이 매우 크게 개선되었다. 특히 반원 형태의 외팔보의 경우 최고점 편향 높이가 항상 반원 중간에서 구현되기 때문에 반원형 외팔보 간의 모양이 균일하게 유지된다. 제작된 18개 흡수체 샘플에서 144개의 외팔보를 측정한 결과 평균 편향 높이의 평균 값이 51.8 μm였으며 표준 편차는 3.1μm였다. 4개의 전극에서 기반한 5개 상태의 서로 다른 구조에 따른 반사 계수와 투과 계수를 도파관 측정으로 실험 값을 얻었다. 상용 유한요소법 컴퓨터 계산과 비교 검증하였다. 초기 상태에서 공진 주파수는 32.95 GHz였고, 모든 외팔보가 풀인 전압 인가로 인해 바닥 전극에 붙으면 하면 주파수 28.87 GHz가 되어 총 4.08GHz 이동하여 12.29%의 주파수 가변율을 갖는다. 측정값과 유한요소 시뮬레이션 값의 오차는 5개 상태 모두에서 0.39GHz 이내였다. 흡수율의 경우 각 상태에서 80.95 %, 88.17 %, 86.29 %, 99.21 %, and 86.51% 값을 보였다. 이 논문은 Ka-대역 흡수체의 튜닝 방법으로서 MEMS의 가능성을 보여주었다.CHAPTER 1. Introduction 1 1.1 Background 1 1.1.1 Advent of metamaterial 1 1.1.2 Application of metamaterial 2 1.1.3 Physics of metamaterial 3 1.1.4 Meta-atom 10 1.1.5 Electromagnetic absorber to metamaterial absorber 14 1.1.6 Reconfigurable metamaterial 17 1.1.7 MEMS reconfigurable metamaterial 21 1.1.8 Tunable metamaterial absorber 24 1.1.9 MEMS reconfigurable metamaterial absorber 27 1.1.10 Tunable metamaterial absorber for Ka-band 29 1.2 Originality and contribution 32 1.3 Document structure 33 CHAPTER 2. Stress-induced sub-mm scale cantilever 34 2.1 Initial design 34 2.2 Cantilever arrays with stress gradient 37 2.2.1 Preliminary experiment 37 2.2.2 Design 38 2.2.2 Fabrication results 39 2.3 Rectangular shape sub-mm scale cantilever with incremental etch hole spacing 40 2.3.1 Preliminary experiment 40 2.3.2 Design 42 2.4 Semicircular sub-mm scale cantilever with incremental etch hole 49 2.4.1 Design of semicircular sub-mm scale cantilever with incremental etch hole 49 2.4.2 Fabrication 52 CHAPTER 3. The 1st design of MEMS tunable metamaterial absorber with cantilever arrays for continuous tuning 57 3.1 General overview 57 3.2 Design 59 3.2.1 Split ring resonator and simulation 61 3.2.2 Capacitance of cantilever with stress gradient 64 3.2.3 Electrostatic driving of cantilever 67 3.2.4 Stress analysis & PR ashing 69 3.3 Fabrication 71 3.3.1 Fabrication process 71 3.3.2 Fabrication results 74 3.4 Simulation 77 3.5 Experiment 81 3.5.1 Experiment setup 81 3.5.2 Experiment results 84 3.6 Summary 86 CHAPTER 4. The 2nd design of MEMS tunable metamaterial absorber with rectangular shape sub-mm scale stress-induced cantilever with an incremental etch hole spacing for digital driving 87 4.1 General overview 87 4.2 Design 90 4.3 Fabrication 93 4.4 Simulation 98 4.5 Experiment 100 4.6 Summary 102 CHAPTER 5. The 3rd design of MEMS tunable metamaterial absorber with semicircular sub-mm scale stress-induced cantilever with an incremental etch hole spacing for digital driving 103 5.1 General overview 103 5.2 Design 107 5.2.1 Electromagnetic properties 107 5.2.2 Design parameter 109 5.3 Fabrication 112 5.4 Simulation 119 5.4.1 Simulation setup 119 5.4.2 Simulation results 122 5.5 Experiment 126 5.5.1 Experiment setup 126 5.5.2 Preliminary experiment 130 5.5.2 Experiment results 133 5.6 Further Analysis 137 5.6.1 The waveguide simulation 137 5.6.2 The periodic metamaterial unit cell simulation 141 5.6.3 Analysis on the surface current 148 5.7 Summary 152 5.7.1 Summary of the 1st, 2nd, and 3rd design 152 5.7.2 Comparison with MEMS tunable metamaterial absorber 155 5.7.3 Comparison with Ka-band tunable metamaterial absorber 157 CHAPTER 6. Conclusion 159 Bibliography 161 초록 (국문) 180박

Investigation of passive atmospheric sounding using millimeter and submillimeter wavelength channels

Activities within the period from July 1, 1992 through December 31, 1992 by Georgia Tech researchers in millimeter and submillimeter wavelength tropospheric remote sensing have been centered around the calibration of the Millimeter-wave Imaging Radiometer (MIR), preliminary flight data analysis, and preparation for TOGA/COARE. The MIR instrument is a joint project between NASA/GSFC and Georgia Tech. In the current configuration, the MIR has channels at 90, 150, 183(+/-1,3,7), and 220 GHz. Provisions for three additional channels at 325(+/-1,3) and 8 GHz have been made, and a 325-GHz receiver is currently being built by the ZAX Millimeter Wave Corporation for use in the MIR. Past Georgia Tech contributions to the MIR and its related scientific uses have included basic system design studies, performance analyses, and circuit and radiometric load design, in-flight software, and post-flight data display software. The combination of the above millimeter wave and submillimeter wave channels aboard a single well-calibrated instrument will provide unique radiometric data for radiative transfer and cloud and water vapor retrieval studies. A paper by the PI discussing the potential benefits of passive millimeter and submillimeter wave observations for cloud, water vapor and precipitation measurements has recently been published, and is included as an appendix

High Power Microwave Operational Exposure Detection using Thermoacoustic Wave Generation in Lossy Dielectric Polymers

A feasibility analysis for the use of microwave-induced thermoacoustic (TA) wave generation in lossy dielectric media to detect pulsed high power microwave directed energy weapons in force health protection applications was conducted based on a series of empirical and computational investigations. A potential target volume material, carbon-loaded polytetrafluoroethylene, was identified for further study based on anticipated complex dielectric properties, with laboratory measurements of select electromagnetic (EM), thermal, and elastic material properties of relevance to the TA effect conducted to determine parameter values. A planar geometry TA-based signal chain model using thin film piezoelectric sensors was developed for both finite element method based numerical simulation and in-beam response testing, with TA signal output evaluated in the time and frequency domain using both approaches. Based on empirically-derived complex permittivity values, a single-term Cole-Cole dielectric relaxation model approximation was developed over the 2-110 GHz microwave frequency region to permit a more general evaluation of EM coupling efficiency of the material. Modeling and simulation of the idealized signal chain allowed the analysis of TA waveform dependency on microwave beam parameters not otherwise accessible during in-beam response testing. High frequency TA signal data was suitably fit to a pulse width sensitivity impulse response function model for the target geometry and found to be in good agreement for personnel exposure applications

NASA patent abstracts bibliography: A continuing bibliography. Section 1: Abstracts (supplement 07)

This bibliography is issued in two sections: Section 1 - Abstracts, and Section 2 - Indexes. This issue of the Abstract Section cites 158 patents and applications for patent introduced into the NASA scientific and technical information system during the period of January 1975 through June 1975. Each entry in the Abstract Section consists of a citation, an abstract, and, in most cases, a key illustration selected from the patent or application for patent. This issue of the Index Section contains entries for 2830 patent and application for patent citations covering the period May 1969 through June 1975. The index section contains five indexes -- subject, inventor, source, number and accession number

Fourth Aircraft Interior Noise Workshop

The fourth in a series of NASA/SAE Interior Noise Workshops was held on May 19 and 20, 1992. The theme of the workshop was new technology and applications for aircraft noise with emphasis on source noise prediction; cabin noise prediction; cabin noise control, including active and passive methods; and cabin interior noise procedures. This report is a compilation of the presentations made at the meeting which addressed the above issues

A review of gear housing dynamics and acoustics literature

A review of the available literature on gear housing vibration and noise reduction is presented. Analytical and experimental methodologies used for bearing dynamics, housing vibration and noise, mounts and suspensions, and the overall geared and housing system are discussed. Typical design guidelines as outlined by various investigators are given