Design, control and error analysis of a fast tool positioning system for ultra-precision machining of freeform surfaces

This thesis was previously held under moratorium from 03/12/19 to 03/12/21Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis.Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis

Control of an over-actuated nanopositioning system by means of control allocation

This Master’s Thesis is devoted to the analysis and design of a control structure for the nanopositioning system LAU based on the dynamic control allocation technique. The objective is to control the vertical displacement with nanometer precision under a control effort distribution criterion among the actuator set. In this case, the pneumatic actuator is used as a passive gravity compensator while the voice coil motor generates the transient forces. The analysis of the system characteristics allows defining the design criterion for the control allocation. In this direction, the proposed dynamic control allocation stage considers a frequency distribution of the control effort. The lower frequency components are assigned to the pneumatic actuator while the higher frequencies are handled by the voice coil drive. The significant actuator dynamics are compensated through a Kalman filter approach. The position controller is based on a feedback linearization framework with a disturbance observer for enhanced robustness. The experimental validation demonstrates the feasibility of the proposed technique.Diese Masterarbeit widmet sich der Analyse und dem Entwurf einer Regelungsstruktur für das Nanopositioniersystem LAU. Dabei werden Methoden untersucht, welche das notwendige Stellsignal auf zwei Aktoren aufteilen. Ziel ist es, die vertikale Verschiebung des LAU mit Nanometerpräzision zu regeln. In diesem Fall wird der pneumatische Aktor als passiver Schwerkraftkompensator verwendet, während die elktromagnetische Tauchspule die transienten Kräfte erzeugt. Die Analyse der Eigenschaften des LAUSystems ermöglicht die Definition der Entwurfskriterien zur Aufteilung der Stellgröße. In dieser Richtung berücksichtigt die vorgeschlagene dynamische Methode eine Aufteilung der Stellgröße bezüglich der Frequenzanteile. Die niederfrequenten Komponenten werden dem pneumatischen Aktor zugeordnet. Dem elektromagnetische Aktor werden die verbliebenen hochfrequenten Anteile zugeordnet. Die signifikanten Effekte der Aktordynamik in Bezug auf die Bewegungsdynamik werden durch einen Kalman- Filteransatz kompensiert. Nichtlineare Streckenanteile werden basierend auf dem Modell und einem Störbeobachter kompensiert, sodass der verbleibende Anteil des Positionsreglers mit linearen Methoden entworfen werden kann. Die experimentelle Validierung zeigt die Effektivität des untersuchten Konzeptes.Tesi

Tip- and laser-based 3D nanofabrication in extended macroscopic working areas

The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional technologies. This effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable: custom design and solutions for specific applications will dominate future development (Fritze in: Panning EM, Liddle JA (eds) Novel patterning technologies. International society for optics and photonics. SPIE, Bellingham, 2021. https://doi.org/10.1117/12.2593229). For this reason, new aspects arise for future lithography, which is why enormous effort has been directed to the development of alternative fabrication technologies. Yet, the technologies emerging from this process, which are promising for coping with the current resolution and accuracy challenges, are only demonstrated as a proof-of-concept on a lab scale of several square micrometers. Such scale is not adequate for the requirements of modern lithography; therefore, there is the need for new and alternative cross-scale solutions to further advance the possibilities of unconventional nanotechnologies. Similar challenges arise because of the technical progress in various other fields, realizing new and unique functionalities based on nanoscale effects, e.g., in nanophotonics, quantum computing, energy harvesting, and life sciences. Experimental platforms for basic research in the field of scale-spanning nanomeasuring and nanofabrication are necessary for these tasks, which are available at the Technische Universität Ilmenau in the form of nanopositioning and nanomeasuring (NPM) machines. With this equipment, the limits of technical structurability are explored for high-performance tip-based and laser-based processes for enabling real 3D nanofabrication with the highest precision in an adequate working range of several thousand cubic millimeters

Observer based dynamic control model for bilaterally controlled MU-lapa robot: Surgical tool force limiting

During laparoscopic surgeries, primary surgical tool insertion is the demanding and strenuous task. As the surgeon is unaware of the type of the tissue and associated parameters to conduct the insertion, therefore, to ease the procedure, the movement of the surgical tool needs to be controlled. It’s the operational capabilities that are to be manipulated to perform a smooth surgery even from a distant location. In this study, a robot system is being introduced for laparoscopic primary surgical tool insertion. It will incorporate a novel observer based dynamic control along with robot assisted bilateral control. Moreover, a virtual spring damper force lock system is introduced through which the slave system will notify the master regarding the target achieved and excessive force. The validation of the proposed control system is experimented with bilaterally controlled MU-LapaRobot. The experiment is comprising 3 cases of bilateral control criteria which are non-contact motion, contact motion, and limit force locking. The results defined the same value for contact and non-contact motion by 0.3N. The results depicted a force error of 3.6% and a position error of 5.8% which validated the proposed algorithm

Advances in Spacecraft Systems and Orbit Determination

"Advances in Spacecraft Systems and Orbit Determinations", discusses the development of new technologies and the limitations of the present technology, used for interplanetary missions. Various experts have contributed to develop the bridge between present limitations and technology growth to overcome the limitations. Key features of this book inform us about the orbit determination techniques based on a smooth research based on astrophysics. The book also provides a detailed overview on Spacecraft Systems including reliability of low-cost AOCS, sliding mode controlling and a new view on attitude controller design based on sliding mode, with thrusters. It also provides a technological roadmap for HVAC optimization. The book also gives an excellent overview of resolving the difficulties for interplanetary missions with the comparison of present technologies and new advancements. Overall, this will be very much interesting book to explore the roadmap of technological growth in spacecraft systems

Measurements, Models, Systems and Design

531 s.

Global identification of electrical and mechanical parameters in PMSM drive based on dynamic self-learning PSO

A global parameter estimation method for a PMSM drive system is proposed, where the electrical parameters, mechanical parameters and voltage-source-inverter (VSI) nonlinearity are regarded as a whole and parameter estimation is formulated as a single parameter optimization model. A dynamic learning estimator is proposed for tracking the electrical parameters, mechanical parameters and VSI of PMSM drive by using dynamic self learning particle swarm optimization (DSLPSO). In DSLPSO, a novel movement modification equation with dynamic exemplar learning strategy is designed to ensure its diversity and achieve a reasonable tradeoff between the exploitation and exploration during the search process. Moreover, a nonlinear multi-scale based interactive learning operator is introduced for accelerating the convergence speed of the Pbest particles; meanwhile a dynamic opposition-based learning (OBL) strategy is designed to facilitate the gBest particle to explore a potentially better region. The proposed algorithm is applied to parameter estimation for a PMSM drive system. The results show that the proposed method has better performance in tracking the variation of electrical parameters, and estimating the immeasurable mechanical parameters and the VSI disturbance voltage simultaneously

Antidisturbance Vibration Suppression of the Aerial Refueling Hose during the Coupling Process

In autonomous aerial refueling (AAR), the vibration of the flexible refueling hose caused by the receiver aircraft’s excessive closure speed should be suppressed once it appears. This paper proposed an active control strategy based on the permanent magnet synchronous motor (PMSM) angular control for the timely and accurate vibration suppression of the flexible refueling hose. A nonsingular fast terminal sliding-mode (NFTSM) control scheme with adaptive extended state observer (AESO) is proposed for PMSM take-up system under multiple disturbances. The states and the “total disturbance” of the PMSM system are firstly reconstituted using the AESO under the uncertainties and measurement noise. Then, a faster sliding variable with tracking error exponential term is proposed together with a special designed reaching law to enhance the global convergence speed and precision of the controller. The proposed control scheme provides a more comprehensive solution to rapidly suppress the flexible refueling hose vibration in AAR. Compared to other methods, the scheme can suppress the flexible hose vibration more fleetly and accurately even when the system is exposed to multiple disturbances and measurement noise. Simulation results show that the proposed scheme is competitive in accuracy, global rapidity, and robustness

Animated virtual agents to cue user attention: comparison of static and dynamic deictic cues on gaze and touch responses

This paper describes an experiment developed to study the performance of virtual agent animated cues within digital interfaces. Increasingly, agents are used in virtual environments as part of the branding process and to guide user interaction. However, the level of agent detail required to establish and enhance efficient allocation of attention remains unclear. Although complex agent motion is now possible, it is costly to implement and so should only be routinely implemented if a clear benefit can be shown. Pevious methods of assessing the effect of gaze-cueing as a solution to scene complexity have relied principally on two-dimensional static scenes and manual peripheral inputs. Two experiments were run to address the question of agent cues on human-computer interfaces. Both experiments measured the efficiency of agent cues analyzing participant responses either by gaze or by touch respectively. In the first experiment, an eye-movement recorder was used to directly assess the immediate overt allocation of attention by capturing the participant’s eyefixations following presentation of a cueing stimulus. We found that a fully animated agent could speed up user interaction with the interface. When user attention was directed using a fully animated agent cue, users responded 35% faster when compared with stepped 2-image agent cues, and 42% faster when compared with a static 1-image cue. The second experiment recorded participant responses on a touch screen using same agent cues. Analysis of touch inputs confirmed the results of gaze-experiment, where fully animated agent made shortest time response with a slight decrease on the time difference comparisons. Responses to fully animated agent were 17% and 20% faster when compared with 2-image and 1-image cue severally. These results inform techniques aimed at engaging users’ attention in complex scenes such as computer games and digital transactions within public or social interaction contexts by demonstrating the benefits of dynamic gaze and head cueing directly on the users’ eye movements and touch responses