INTEGRATED SINGLE-PHOTON SENSING AND PROCESSING PLATFORM IN STANDARD CMOS

Practical implementation of large SPAD-based sensor arrays in the standard CMOS process has been fraught with challenges due to the many performance trade-offs existing at both the device and the system level [1]. At the device level the performance challenge stems from the suboptimal optical characteristics associated with the standard CMOS fabrication process. The challenge at the system level is the development of monolithic readout architecture capable of supporting the large volume of dynamic traffic, associated with multiple single-photon pixels, without limiting the dynamic range and throughput of the sensor. Due to trade-offs in both functionality and performance, no general solution currently exists for an integrated single-photon sensor in standard CMOS single photon sensing and multi-photon resolution. The research described herein is directed towards the development of a versatile high performance integrated SPAD sensor in the standard CMOS process. Towards this purpose a SPAD device with elongated junction geometry and a perimeter field gate that features a large detection area and a highly reduced dark noise has been presented and characterized. Additionally, a novel front-end system for optimizing the dynamic range and after-pulsing noise of the pixel has been developed. The pixel is also equipped with an output interface with an adjustable pulse width response. In order to further enhance the effective dynamic range of the pixel a theoretical model for accurate dead time related loss compensation has been developed and verified. This thesis also introduces a new paradigm for electrical generation and encoding of the SPAD array response that supports fully digital operation at the pixel level while enabling dynamic discrete time amplitude encoding of the array response. Thus offering a first ever system solution to simultaneously exploit both the dynamic nature and the digital profile of the SPAD response. The array interface, comprising of multiple digital inputs capacitively coupled onto a shared quasi-floating sense node, in conjunction with the integrated digital decoding and readout electronics represents the first ever solid state single-photon sensor capable of both photon counting and photon number resolution. The viability of the readout architecture is demonstrated through simulations and preliminary proof of concept measurements

Compact CMOS active quenching/recharge circuit for SPAD arrays

Avalanche diodes operating in Geiger mode are able to detect single photon events. They can be employed to photon counting and time-of-flight estimation. In order to ensure proper operation of these devices, the avalanche current must be rapidly quenched, and, later on, the initial equilibrium must be restored. In this paper, we present an active quenching/recharge circuit specially designed to be integrated in the form of an array of single-photon avalanche diode (SPAD) detectors. Active quenching and recharge provide benefits like an accurately controllable pulse width and afterpulsing reduction. In addition, this circuit yields one of the lowest reported area occupations and power consumptions. The quenching mechanism employed is based on a positive feedback loop that accelerates quenching right after sensing the avalanche current. We have employed a current starved inverter for the regulation of the hold-off time, which is more compact than other reported controllable delay implementations. This circuit has been fabricated in a standard 0.18 μm complementary metal-oxide-semiconductor (CMOS) technology. The SPAD has a quasi-circular shape of 12 μm diameter active area. The fill factor is about 11%. The measured time resolution of the detector is 187 ps. The photon-detection efficiency (PDE) at 540 nm wavelength is about 5% at an excess voltage of 900 mV. The break-down voltage is 10.3 V. A dark count rate of 19 kHz is measured at room temperature. Worst case post-layout simulations show a 117 ps quenching and 280 ps restoring times. The dead time can be accurately tuned from 5 to 500 ns. The pulse-width jitter is below 1.8 ns when dead time is set to 40 ns.Ministerio de Economía y Competitividad TEC2012-38921-C02, IPT-2011-1625-430000, IPC-20111009 CDTIJunta de Andalucía TIC 2338-2013Office of Naval Research (USA) N00014141035

A CMOS 8×8 SPAD array for Time-of-Flight measurement and light-spot statistics

The design and simulation of a CMOS 8 × 8 single photon avalanche diode (SPAD) array is presented. The chip has been fabricated in a 0.18μm standard CMOS technology and implements a double functionality: measuring the Time-of-Flight with the help of a pulsed light source; or computing focal-plane statistics in biomedical imaging applications based on a concentrated light-spot. The incorporation of on-chip processing simplifies the interfacing of the array with the host system. The pixel pitch is 32μm, while the diameter of the quasi-circular active area of the SPADs is 12μm. The 113μm 2 active area is surrounded by a T-well guard ring. The resulting breakdown voltage is 10V with a maximum excess voltage of 1.8V. The pixel incorporates a novel active quenching/reset circuit. The array has been designed to operate with a laser pulsed at 20Mhz. The overall time resolution is 115ps. Focal-plane statistics are obtained in digital format. The maximum throughput of the digital output buffers is 200Mbps.Ministerio de Economía y Competitividad IPT-2011-1625- 430000, IPC-20111009Office of Naval Research (USA) N00014111031

Imaging Probe for Charged Particle Detection

Single Photon Avalanche Diodes (SPADs) are semiconductor devices that detect individual photons. However, they can also experience dark count rate (DCR), generating avalanche current even when no photons are present, which limits their ability to detect low-level signals. SPADs characterization is important to gain insight into their behavior and improve their performance for various applications. This thesis discusses the development of a portable detection probe that uses the APIX2LF chip, which contains arrays of SPADs that were produced using a 150 nm standard CMOS process. A prototype board, that includes a battery, front-end electronics, and a microcontroller acting as the interface between the sensor and the PC was developed and tested using a beta-emitting source. Additionally, custom firmware was designed for the microcontroller and an automatic data acquisition framework was developed for the characterization of the DCR of six APIX2LF chips at different bias voltages and temperatures.This thesis discusses the development of a portable detection probe that uses the APIX2LF chip, which contains arrays of SPADs that were produced using a 150 nm standard CMOS process. A prototype board, that includes a battery, front-end electronics, and a microcontroller acting as the interface between the sensor and the PC was developed and tested using a beta-emitting source. Additionally, custom firmware was designed for the microcontroller and an automatic data acquisition framework was developed for the characterization of the DCR of six APIX2LF chips at different bias voltages and temperatures

Time-to-digital converters and histogram builders in SPAD arrays for pulsed-LiDAR

Light Detection and Ranging (LiDAR) is a 3D imaging technique widely used in many applications such as augmented reality, automotive, machine vision, spacecraft navigation and landing. Pulsed-LiDAR is one of the most diffused LiDAR techniques which relies on the measurement of the round-trip travel time of an optical pulse back-scattered from a distant target. Besides the light source and the detector, Time-to-Digital Converters (TDCs) are fundamental components in pulsed-LiDAR systems, since they allow to measure the back-scattered photon arrival times and their performance directly impact on LiDAR system requirements (i.e., range, precision, and measurements rate). In this work, we present a review of recent TDC architectures suitable to be integrated in SPAD-based CMOS arrays and a review of data processing solutions to derive the TOF information. Furthermore, main TDC parameters and processing techniques are described and analyzed considering pulsed-LiDAR requirements

A Wireless, Battery-Powered Probe Based on a Dual-Tier CMOS SPAD Array for Charged Particle Sensing

A compact probe for charged particle imaging, with potential applications in source activity mapping and radio-guided surgery was designed and tested. The development of this technology holds significant implications for medical imaging, offering healthcare professionals accurate and efficient tools for diagnoses and treatments. To fulfill the portability requirements of these applications, the probe was designed for battery operation and wireless communication with a PC. The core sensor is a dual-layer CMOS SPAD detector, fabricated using 150 nm technology, which uses overlapping cells to produce a coincidence signal and reduce the dark count rate (DCR). The sensor is managed and interfaced with a microcontroller, and custom firmware was developed to facilitate communication with the sensor. The performance of the probe was evaluated by characterizing the on-board SPAD detector in terms of the DCR, and the results were consistent with the characterization measurements taken on the same chip samples using a purposely developed benchtop setup