공정변이를 고려한 3차원 집적 회로 설계 및 패키징 기법

학위논문 (박사)-- 서울대학교 대학원 : 전기·컴퓨터공학부, 2014. 2. 김태환.As CMOS scaling down, The control of variation in chip performance (i.e. speed and power) becomes highly important to improve the chip yield. The increased variation of chip performance demands additional design efforts such as the increase of guard-band or longer design turnaround time (TAT), which cause degradation of both chip performance and economic profit. Meanwhile, through-silicon via (TSV) based 3D technology has been regarded as the promising solution for long interconnect wire and huge die size problem. Since a 3D IC is manufactured by stacking multiple dies which are fabricated in different wafers, integration of the dies that have far different process characteristic can enlarge the difference of device performance on different dies within a single chip. In this dissertation, we analyze the effect of on-package (within-chip) variation on 3D IC and presents effective methods to mitigate the onpackage variation. First, a parametric yield improvement method is presented to resolve the mismatches of dies having different process characteristic. Comprehensive 3D integration algorithms considering post-silicon tuning technique is developed for the multi-layered 3D IC. Then, we show that a careful clock edge embedding in 3D clock tree can greatly reduce the impact of on-package variation on 3D clock skew and propose a two-step solution for the problem of on-package variation-aware layer embedding in 3D clock tree synthesis. In summary, this dissertation presents effective 3D integration method and 3D clock tree synthesis algorithm for process-variation tolerant 3D IC designs.Abstract i Contents ii List of Figures iv List of Tables vii 1 Introduction 1 1.1 Process Variation in 3D ICs . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 Contributions of This Dissertation . . . . . . . . . . . . . . . . . . . 6 2 Post-silicon Tuning Aware Die/WaferMatching Algorithms for Enhancing Parametric Yield of 3D IC Design 7 2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 2.2 Preliminaries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 2.3 The Die-to-Die Matching Problem and Proposed Algorithm Considering Body Biasing . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 2.3.1 Motivation and Problem Definition . . . . . . . . . . . . . . 13 2.3.2 The Proposed Die-to-Die Matching Algorithm . . . . . . . . 15 2.4 TheWafer-to-Wafer Matching Problem and Proposed Algorithm Considering Body Biasing . . . . . . . . . . . . . . . . . . . . . . . . . . 18 2.4.1 Problem Definition and The Proposed Wafer-to-Wafer Matching Algorithm . . . . . . . . . . . . . . . . . . . . . . . . . . 18 2.5 Experimental Results . . . . . . . . . . . . . . . . . . . . . . . . . . 20 2.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 3 Edge Layer Embedding Algorithm for Mitigating On-Package Variation in 3D Clock Tree Synthesis 32 3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 3.2 Problem Definitions and Motivation . . . . . . . . . . . . . . . . . . 35 3.3 The Proposed Algorithm for On-Package Variation Aware Edge Embedding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 3.3.1 Algorithm for Maximizing Layer Sharing of Edges . . . . . . 39 3.3.2 Refinement: Partial Edge Embedding on Layers . . . . . . . . 47 3.3.3 Clock Tree Routing and Buffer Insertion . . . . . . . . . . . . 49 3.4 Experimental Results . . . . . . . . . . . . . . . . . . . . . . . . . . 52 3.5 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57 4 Conclusion 64 4.1 Chapter 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64 4.2 Chapter 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 Abstract in Korean 72Docto

Modeling of thermally induced skew variations in clock distribution network

Clock distribution network is sensitive to large thermal gradients on the die as the performance of both clock buffers and interconnects are affected by temperature. A robust clock network design relies on the accurate analysis of clock skew subject to temperature variations. In this work, we address the problem of thermally induced clock skew modeling in nanometer CMOS technologies. The complex thermal behavior of both buffers and interconnects are taken into account. In addition, our characterization of the temperature effect on buffers and interconnects provides valuable insight to designers about the potential impact of thermal variations on clock networks. The use of industrial standard data format in the interface allows our tool to be easily integrated into existing design flow

Physical Design Methodologies for Low Power and Reliable 3D ICs

As the semiconductor industry struggles to maintain its momentum down the path following the Moore's Law, three dimensional integrated circuit (3D IC) technology has emerged as a promising solution to achieve higher integration density, better performance, and lower power consumption. However, despite its significant improvement in electrical performance, 3D IC presents several serious physical design challenges. In this dissertation, we investigate physical design methodologies for 3D ICs with primary focus on two areas: low power 3D clock tree design, and reliability degradation modeling and management. Clock trees are essential parts for digital system which dissipate a large amount of power due to high capacitive loads. The majority of existing 3D clock tree designs focus on minimizing the total wire length, which produces sub-optimal results for power optimization. In this dissertation, we formulate a 3D clock tree design flow which directly optimizes for clock power. Besides, we also investigate the design methodology for clock gating a 3D clock tree, which uses shutdown gates to selectively turn off unnecessary clock activities. Different from the common assumption in 2D ICs that shutdown gates are cheap thus can be applied at every clock node, shutdown gates in 3D ICs introduce additional control TSVs, which compete with clock TSVs for placement resources. We explore the design methodologies to produce the optimal allocation and placement for clock and control TSVs so that the clock power is minimized. We show that the proposed synthesis flow saves significant clock power while accounting for available TSV placement area. Vertical integration also brings new reliability challenges including TSV's electromigration (EM) and several other reliability loss mechanisms caused by TSV-induced stress. These reliability loss models involve complex inter-dependencies between electrical and thermal conditions, which have not been investigated in the past. In this dissertation we set up an electrical/thermal/reliability co-simulation framework to capture the transient of reliability loss in 3D ICs. We further derive and validate an analytical reliability objective function that can be integrated into the 3D placement design flow. The reliability aware placement scheme enables co-design and co-optimization of both the electrical and reliability property, thus improves both the circuit's performance and its lifetime. Our electrical/reliability co-design scheme avoids unnecessary design cycles or application of ad-hoc fixes that lead to sub-optimal performance. Vertical integration also enables stacking DRAM on top of CPU, providing high bandwidth and short latency. However, non-uniform voltage fluctuation and local thermal hotspot in CPU layers are coupled into DRAM layers, causing a non-uniform bit-cell leakage (thereby bit flip) distribution. We propose a performance-power-resilience simulation framework to capture DRAM soft error in 3D multi-core CPU systems. In addition, a dynamic resilience management (DRM) scheme is investigated, which adaptively tunes CPU's operating points to adjust DRAM's voltage noise and thermal condition during runtime. The DRM uses dynamic frequency scaling to achieve a resilience borrow-in strategy, which effectively enhances DRAM's resilience without sacrificing performance. The proposed physical design methodologies should act as important building blocks for 3D ICs and push 3D ICs toward mainstream acceptance in the near future