Modeling of CMOS devices and circuits on flexible ultrathin chips

The field of flexible electronics is rapidly evolving. The ultrathin chips are being used to address the high-performance requirements of many applications. However, simulation and prediction of changes in response of device/circuit due to bending induced stress remains a challenge as of lack of suitable compact models. This makes circuit designing for bendable electronics a difficult task. This paper presents advances in this direction, through compressive and tensile stress studies on transistors and simple circuits such as inverters with different channel lengths and orientations of transistors on ultrathin chips. Different designs of devices and circuits in a standard CMOS 0.18-μm technology were fabricated in two separated chips. The two fabricated chips were thinned down to 20 μm using standard dicing-before-grinding technique steps followed by post-CMOS processing to obtain sufficient bendability (20-mm bending radius, or 0.05% nominal strain). Electrical characterization was performed by packaging the thinned chip on a flexible substrate. Experimental results show change of carrier mobilities in respective transistors, and switching threshold voltage of the inverters during different bending conditions (maximum percentage change of 2% for compressive and 4% for tensile stress). To simulate these changes, a compact model, which is a combination of mathematical equations and extracted parameters from BSIM4, has been developed in Verilog-A and compiled into Cadence Virtuoso environment. The proposed model predicts the mobility variations and threshold voltage in compressive and tensile bending stress conditions and orientations, and shows an agreement with the experimental measurements (1% for compressive and 0.6% for tensile stress mismatch)

A novel active gate driver for improving SiC MOSFET switching trajectory

The trend in power electronic applications is to reach higher power density and higher efficiency. Currently, the wide band-gap devices such as silicon carbide MOSFET (SiC MOSFET) are of great interest because they can work at higher switching frequency with low losses. The increase of the switching speed in power devices leads to high power density systems. However, this can generate problems such as overshoots, oscillations, additional losses, and electromagnetic interference (EMI). In this paper, a novel active gate driver (AGD) for improving the SiC MOSFET switching trajectory with high performance is presented. The AGD is an open-loop control system and its principle is based on gate energy decrease with a gate resistance increment during the Miller plateau effect on gate-source voltage. The proposed AGD has been designed and validated through experimental tests for high-frequency operation. Moreover, an EMI discussion and a performance analysis were realized for the AGD. The results show that the AGD can reduce the overshoots, oscillations, and losses without compromising the EMI. In addition, the AGD can control the turn-on and turn-off transitions separately, and it is suitable for working with asymmetrical supplies required by SiC MOSFETs.Postprint (author's final draft

Simulation study of scaling design, performance characterization, statistical variability and reliability of decananometer MOSFETs

This thesis describes a comprehensive, simulation based scaling study – including device design, performance characterization, and the impact of statistical variability – on deca-nanometer bulk MOSFETs. After careful calibration of fabrication processes and electrical characteristics for n- and p-MOSFETs with 35 nm physical gate length, 1 nm EOT and stress engineering, the simulated devices closely match the performance of contemporary 45 nm CMOS technologies. Scaling to 25 nm, 18 nm and 13 nm gate length n and p devices follows generalized scaling rules, augmented by physically realistic constraints and the introduction of high-k/metal-gate stacks. The scaled devices attain the performance stipulated by the ITRS. Device a.c. performance is analyzed, at device and circuit level. Extrinsic parasitics become critical to nano-CMOS device performance. The thesis describes device capacitance components, analyzes the CMOS inverter, and obtains new insights into the inverter propagation delay in nano-CMOS. The projection of a.c. performance of scaled devices is obtained. The statistical variability of electrical characteristics, due to intrinsic parameter fluctuation sources, in contemporary and scaled decananometer MOSFETs is systematically investigated for the first time. The statistical variability sources: random discrete dopants, gate line edge roughness and poly-silicon granularity are simulated, in combination, in an ensemble of microscopically different devices. An increasing trend in the standard deviation of the threshold voltage as a function of scaling is observed. The introduction of high-k/metal gates improves electrostatic integrity and slows this trend. Statistical evaluations of variability in Ion and Ioff as a function of scaling are also performed. For the first time, the impact of strain on statistical variability is studied. Gate line edge roughness results in areas of local channel shortening, accompanied by locally increased strain, both effects increasing the local current. Variations are observed in both the drive current, and in the drive current enhancement normally expected from the application of strain. In addition, the effects of shallow trench isolation (STI) on MOSFET performance and on its statistical variability are investigated for the first time. The inverse-narrow-width effect of STI enhances the current density adjacent to it. This leads to a local enhancement of the influence of junction shapes adjacent to the STI. There is also a statistical impact on the threshold voltage due to random STI induced traps at the silicon/oxide interface

Reliability analysis of planar and symmetrical & asymmetrical trench discrete SiC Power MOSFETs

Silicon Carbide MOSFETs are shown in research to outperform Silicon counterparts on many performance metrics, including switching rates and power losses. To further improve their performance, trench and double-trench structures have recently been developed. To replace conventional planar SiC MOSFETs, besides the performance parameters which are mostly stated in datasheets, reliability studies under stress are also needed. This thesis presents a comprehensive comparison between 3rd generation trench SiC power MOSFETs, namely symmetrical double-trench and asymmetrical trench with planar SiC power MOSFETs on four aspects of: switching slew rates (dI/dt & dV/dt), crosstalk characteristics, bias temperature instability and power cycling stability.First, the dynamic performance in both 1st quadrant and 3rd quadrant has been eval- uated on the differences in stress by dI/dt & dV/dt and resultant losses. This is key in understanding many other reliability criterions, i.e. severity of crosstalk induced switchings. In the 1st quadrant, the source current and drain-source voltage switching rates at both turn-ON and turn-OFF are measured under a range of test conditions. Both the symmetrical and asymmetrical trench MOSFETs have up to 2 times faster voltage and current slew rates compared with the planar one. They also indicate only slight changes in switching rate with junction temperature. In the 3rd quadrant, the reverse recovery peak current and total reverse recovery charge are measured with respect to junction temper- ature and load current level. Both the symmetrical and asymmetrical trench MOSFETs have less than half of the reverse recovery charge of that of the planar SiC MOSFET.In the evaluation of crosstalk characteristics, peak shoot-through current and induced gate voltage at crosstalk are measured with respect to junction temperature and external gate resistance. With particularly large external gate resistances connected to intentionally induce parasitic turn-ON, the symmetrical double-trench MOSFET is shown to be more prone to crosstalk with 23 A peak shoot-through current measured while it is only 10 A for asymmetrical trench and 4 A for planar MOSFET under similar test conditions. As the temperature increase, the peak shoot-through current drops for the symmetrical double-trench, while constant for the asymmetrical trench and rising for the planar device.Threshold voltage drift is also measured to reflect the degradation happened with bias temperature instability at various junction temperatures, stressing voltages and time periods. Under low-magnitude gate stress (within the range of datasheets) in both positive and negative bias cases, there is more threshold drift observed on the two trench MOSFETs at all junction temperatures than the planar MOSFET. When the stress magnitude is raised, there is less threshold drift observed on the two trench MOSFETs.To evaluate the ruggedness in continuous switchings, the devices are placed under repetitive turn-ON events. The thermal performance under such operation are compared. The asymmetrical trench MOSFET experiences the highest case temperature rise while the least is observed for the planar MOSFET. With an external heatsink equipped to achieve more efficient cooling, the repetitive turn-ON test transforms into the conventional power cycling. In this condition, both the symmetrical and asymmetrical trench MOSFETs fail earlier than the degraded (but not failed) planar MOSFET

Defect Induced Aging and Breakdown in High-k Dielectrics

abstract: High-k dielectrics have been employed in the metal-oxide semiconductor field effect transistors (MOSFETs) since 45 nm technology node. In this MOSFET industry, Moore’s law projects the feature size of MOSFET scales half within every 18 months. Such scaling down theory has not only led to the physical limit of manufacturing but also raised the reliability issues in MOSFETs. After the incorporation of HfO2 based high-k dielectrics, the stacked oxides based gate insulator is facing rather challenging reliability issues due to the vulnerable HfO2 layer, ultra-thin interfacial SiO2 layer, and even messy interface between SiO2 and HfO2. Bias temperature instabilities (BTI), hot channel electrons injections (HCI), stress-induced leakage current (SILC), and time dependent dielectric breakdown (TDDB) are the four most prominent reliability challenges impacting the lifetime of the chips under use. In order to fully understand the origins that could potentially challenge the reliability of the MOSFETs the defects induced aging and breakdown of the high-k dielectrics have been profoundly investigated here. BTI aging has been investigated to be related to charging effects from the bulk oxide traps and generations of Si-H bonds related interface traps. CVS and RVS induced dielectric breakdown studies have been performed and investigated. The breakdown process is regarded to be related to oxygen vacancies generations triggered by hot hole injections from anode. Post breakdown conduction study in the RRAM devices have shown irreversible characteristics of the dielectrics, although the resistance could be switched into high resistance state.Dissertation/ThesisDoctoral Dissertation Electrical Engineering 201

Analytical modeling of switching energy of silicon carbide Schottky diodes as functions of dIDS/dt and temperature

SiC Schottky Barrier diodes (SiC SBD) are known to oscillate/ring in the output terminal when used as free-wheeling diodes in voltage-source converters. This ringing is due to RLC resonance among the diode capacitance, parasitic resistance, and circuit stray inductance. In this paper, a model has been developed for calculating the switching energy of SiC diodes as a function of the switching rate (dIDS/dt of the commutating SiC MOSFET) and temperature. It is shown that the damping of the oscillations increases with decreasing temperature and decreasing dIDS/dt. This in turn determines the switching energy of the diode, which initially decreases with decreasing dIDS/dt and subsequently increases with decreasing dIDS/dt thereby indicating an optimal dIDS/dt for minimum switching energy. The total switching energy of the diode can be subdivided into three phases namely the current switching phase, the voltage switching phase, and the ringing phase. Although the switching energy in the current switching phase decreases with increasing switching rate, the switching energy of the voltage and ringing phase increases with the switching rate. The model developed characterizes the dependence of diode's switching energy on temperature and dIDS/dt, hence, can be used to predict the behavior of the SiC SBD

Characterization of the Evolution of IC Emissions after Accelerated Aging

9 pagesInternational audienceWith the evolving technological development of integrated circuits (ICs), ensuring electromagnetic compatibility (EMC) is becoming a serious challenge for electronic circuit and system manufacturers. Although electronic components must pass a set of EMC tests to ensure safe operations, the evolution over time of EMC is not characterized and cannot be accurately forecast. This paper presents an original study about the consequences of the aging of circuits on electromagnetic emission. Different types of standard applicative and accelerated-life tests are applied on a mixed power circuit dedicated to automotive applications. Its conducted emission is measured before and after these tests showing variations in EMC performances. Comparisons between each type of aging procedure show that the emission level of the circuit under test is affected differently