Recent Advances in Printed Capacitive Sensors

In this review paper, we summarize the latest advances in the field of capacitive sensors fabricated by printing techniques. We first explain the main technologies used in printed electronics, pointing out their features and uses, and discuss their advantages and drawbacks. Then, we review the main types of capacitive sensors manufactured with different materials and techniques from physical to chemical detection, detailing the main substrates and additives utilized, as well as the measured ranges. The paper concludes with a short notice on status and perspectives in the field.H2020-MSCA-IF-2017-794885-SELFSEN

Soft Tactile Sensors for Mechanical Imaging

Tactile sensing aims to electronically capture physical attributes of an object via mechanical contact. It proves indispensable to many engineering tasks and systems, in areas ranging from manufacturing to medicine and autonomous robotics. Biological skin, which is highly compliant, is able to perform sensing under challenging and highly variable conditions with levels of performance that far exceed what is possible with conventional tactile sensors, which are normally fabricated with non-conforming materials. The development of stretchable, skin-like tactile sensors has, as a result, remained a longstanding goal of engineering. However, to date, artificial tactile sensors that might mimic both the mechanical and multimodal tactile sensory capabilities of biological skin remain far from realization, due to the challenges of fabricating spatially dense, mechanically robust, and compliant sensors in elastic media. Inspired by these demands, this dissertation addresses many aspects of the challenging problem of engineering skin-like electronic sensors. In the first part of the thesis, new methods for the design and fabrication of thin, highly deformable, high resolution tactile sensors are presented. The approach is based on a novel configuration of arrays of microfluidic channels embedded in thin elastomer membranes. To form electrodes, these channels are filled with a metal alloy, eutectic Gallium Indium, that remains liquid at room temperature. Using capacitance sensing techniques, this approach achieves sensing resolutions of 1 mm$^{-1}$. To fabricate these devices, an efficient and robust soft lithography method is introduced, based on a single step cast. An analytical model for the performance of these devices is derived from electrostatic theory and continuum mechanics, and is demonstrated to yield excellent agreement with measured performance. This part of the investigation identified fundamental limitations, in the form of nonmonotonic behavior at low strains, that is demonstrated to generically affect solid cast soft capacitive sensors. The next part of the thesis is an investigation of new methods for designing soft tactile sensors based on multi-layer heterogeneous 3D structures that combine active layers, containing embedded liquid metal electrodes, with passive and mechanically tunable layers, containing air cavities and micropillar geometric supports. In tandem with analytical and computational modeling, these methods are demonstrated to facilitate greater control over mechanical and electronic performance. A new soft lithography fabrication method is also presented, based on the casting, alignment, and fusion of multiple functional layers in a soft polymer substrate. Measurements indicate that the resulting devices achieve excellent performance specifications, and avoid the limiting nonmonotonic behavior identified in the first part of the thesis. In order to demonstrate the practical utility of the devices, we used them to perform dynamic two-dimensional tactile imaging under distributed indentation loads. The results reflect the excellent static and dynamic performance of these devices. The final part of the thesis investigates the utility of the tactile sensing methods pursued here for imaging lumps embedded in simulated tissue. In order to facilitate real-time sensing, an electronic system for fast, array based measurement of small, sub-picofarad (pF) capacitance levels was developed. Using this system, we demonstrated that it is possible to accurately capture strain images depicting small lumps embedded in simulated tissue with either an electronic imaging system or a sensor worn on the finger, supporting the viability of wearable sensors for tactile imaging in medicine. In conclusion, this dissertation confronts many of the most vexing problems arising in the pursuit of skin-like electronic sensors, including fundamental operating principles, structural and functional electronic design, mechanical and electronic modeling, fabrication, and applications to biomedical imaging. The thesis also contributes knowledge needed to enable applications of tactile sensing in medicine, an area that has served as a key source of motivation for this work, and aims to facilitate other applications in areas such as manufacturing, robotics, and consumer electronics.Ph.D., Electrical Engineering -- Drexel University, 201

Wearable sensors for respiration monitoring: a review

This paper provides an overview of flexible and wearable respiration sensors with emphasis on their significance in healthcare applications. The paper classifies these sensors based on their operating frequency distinguishing between high-frequency sensors, which operate above 10 MHz, and low-frequency sensors, which operate below this level. The operating principles of breathing sensors as well as the materials and fabrication techniques employed in their design are addressed. The existing research highlights the need for robust and flexible materials to enable the development of reliable and comfortable sensors. Finally, the paper presents potential research directions and proposes research challenges in the field of flexible and wearable respiration sensors. By identifying emerging trends and gaps in knowledge, this review can encourage further advancements and innovation in the rapidly evolving domain of flexible and wearable sensors.This work was supported by the Spanish Government (MICINN) under Projects TED2021-131209B-I00 and PID2021-124288OB-I00.Peer ReviewedPostprint (published version

Design, characterization and validation of integrated bioelectronics for cellular studies: from inkjet-printed sensors to organic actuators

Mención Internacional en el título de doctorAdvances in bioinspired and biomimetic electronics have enabled coupling engineering devices to biological systems with unprecedented integration levels. Major efforts, however, have been devoted to interface malleable electronic devices externally to the organs and tissues. A promising alternative is embedding electronics into living tissues/organs or, turning the concept inside out, lading electronic devices with soft living matters which may accomplish remote monitoring and control of tissue’s functions from within. This endeavor may unleash the ability to engineer “living electronics” for regenerative medicine and biomedical applications. In this context, it remains a challenge to insert electronic devices efficiently with living cells in a way that there are minimal adverse reactions in the biological host while the electronics maintaining the engineered functionalities. In addition, investigating in real-time and with minimal invasion the long-term responses of biological systems that are brought in contact with such bioelectronic devices is desirable. In this work we introduce the development (design, fabrication and characterization) and validation of sensors and actuators mechanically soft and compliant to cells able to properly operate embedded into a cell culture environment, specifically of a cell line of human epithelial keratinocytes. For the development of the sensors we propose moving from conventional microtechnology approaches to techniques compatible with bioprinting in a way to support the eventual fabrication of tissues and electronic sensors in a single hybrid plataform simultaneously. For the actuators we explore the use of electroactive, organic, printing-compatible polymers to induce cellular responses as a drug-free alternative to the classic chemical route in a way to gain eventual control of biological behaviors electronically. In particular, the presented work introduces inkjet-printed interdigitated electrodes to monitor label-freely and non-invasively cellular migration, proliferation and cell-sensor adhesions of epidermal cells (HaCaT cells) using impedance spectroscopy and the effects of (dynamic) mechanical stimulation on proliferation, migration and morphology of keratinocytes by varying the magnitude, frequency and duration of mechanical stimuli exploiting the developed biocompatible actuator. The results of this thesis contribute to the envision of three-dimensional laboratory-growth tissues with built-in electronics, paving exciting avenues towards the idea of living smart cyborg-skin substitutes.En los útimos años los avances en el desarrollo de dispositivos electrónicos diseñados imitando las propiedades de sistemas vivos han logrado acoplar sistemas electrónicos y órganos/tejidos biológicos con un nivel de integración sin precedentes. Convencionalmente, la forma en que estos sistemas bioelectrónicos son integrados con órganos o tejidos ha sido a través del contacto superficial entre ambos sistemas, es decir acoplando la electrónica externamente al tejido. Lamentablemente estas aproximaciones no contemplan escenarios donde ha habido una pérdida o daño del tejido con el cual interactuar, como es el caso de daños en la piel debido a quemaduras, úlceras u otras lesiones genéticas o producidas. Una alternativa prometedora para ingeniería de tejidos y medicina regenerativa, y en particular para implantes de piel, es embeber la electrónica dentro del tejido, o presentado de otra manera, cargar el sistema electrónico con células vivas y tejidos fabricados por ingeniería de tejidos como parte innata del propio dispositivo. Este concepto permitiría no solo una monitorización remota y un control basado en señalizaciones eléctricas (sin químicos) de tejidos biológicos fabricados mediante técnicas de bioingeniería desde dentro del propio tejido, sino también la fabricación de una “electrónica viva”, biológica y eléctricamente funcional. En este contexto, es un desafío insertar de manera eficiente dispositivos electrónicos con células vivas sin desencadenar reacciones adversas en el sistema biológico receptor ni en el sistema electrónico diseñado. Además, es deseable monitorizar en tiempo real y de manera mínimamente invasiva las respuestas de dichos sistemas biológicos que se han añadido a tales dispositivos bioelectrónicos. En este trabajo presentamos el desarrollo (diseño, fabricación y caracterización) y validación de sensores y actuadores mecánicamente suaves y compatibles con células capaces de funcionar correctamente dentro de un entorno de cultivo celular, específicamente de una línea celular de células epiteliales humanas. Para el desarrollo de los sensores hemos propuesto utilizar técnicas compatibles con la bioimpresión, alejándonos de la micro fabricación tradicionalmente usada para la manufactura de sensores electrónicos, con el objetivo a largo plazo de promover la fabricación de los tejidos y los sensores electrónicos simultáneamente en un mismo sistema de impresión híbrido. Para el desarrollo de los actuadores hemos explorado el uso de polímeros electroactivos y compatibles con impresión y hemos investigado el efecto de estímulos mecánicos dinámicos en respuestas celulares con el objetivo a largo plazo de autoinducir comportamientos biológicos controlados de forma electrónica. En concreto, este trabajo presenta sensores basados en electrodos interdigitados impresos por inyección de tinta para monitorear la migración celular, proliferación y adhesiones célula-sustrato de una línea celular de células epiteliales humanas (HaCaT) en tiempo real y de manera no invasiva mediante espectroscopía de impedancia. Por otro lado, este trabajo presenta actuadores biocompatibles basados en el polímero piezoeléctrico fluoruro de poli vinilideno y ha investigado los efectos de estimular mecánicamente células epiteliales en relación con la proliferación, migración y morfología celular mediante variaciones dinámicas de la magnitud, frecuencia y duración de estímulos mecánicos explotando el actuador biocompatible propuesto. Ambos sistemas presentados como resultado de esta tesis doctoral contribuyen al desarrollo de tejidos 3D con electrónica incorporada, promoviendo una investigación hacia la fabricación de sustitutos equivalentes de piel mitad orgánica mitad electrónica como tejidos funcionales biónicos inteligentes.The main works presented in this thesis have been conducted in the facilities of the Universidad Carlos III de Madrid with support from the program Formación del Profesorado Universitario FPU015/06208 granted by Spanish Ministry of Education, Culture and Sports. Some of the work has been also developed in the facilities of the Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration (IZM) and University of Applied Sciences (HTW) in Berlin, under the supervision of Prof. Dr. Ing. H-D. Ngo during a research visit funded by the Mobility Fellows Program by the Spanish Ministry of Education, Culture, and Sports. This work has been developed in the framework of the projects BIOPIELTEC-CM (P2018/BAA-4480), funded by Comunidad de Madrid, and PARAQUA (TEC2017-86271-R) funded by Ministerio de Ciencia e Innovación.Programa de Doctorado en Ingeniería Eléctrica, Electrónica y Automática por la Universidad Carlos III de MadridPresidente: José Antonio García Souto.- Secretario: Carlos Elvira Pujalte.- Vocal: María Dimak

Ultra conformable and multimodal tactile sensors based on organic field-effect transistors

Cognitive psychology is the branch of psychology related to all the processes by which sensory input is transformed, processed and used. Academic and industrial research has always invested time and resources to develop devices capable to simulate the behavior of the organs where the perceptions are located. In recent years, in fact, there have been numerous discoveries related to new materials, and new devices, capable of reproducing, in a reliable manner, the sensory behavior of humans. Particular interest in scientific research has been aimed at understanding and reproducing of man's tactile sensations. It is known that, through the receptors of the skin, it is possible to detect sensations such as pain, changes in pressure and/or temperature. The development of tactile sensor technology had a significant increase in the last years of 1970s, thanks to the important surveys of Stojiljkovic, Harmon and Lumelsky who presented the firsts prototype of sensors for artificial skin applications, and summarized the main characteristics and requirements of tactile sensors. Recently, organic electronics has been deeply investigated as technology for the fabrication of tactile sensors using biocompatible materials, which can be deposited and processed on ultra flexible and ultra conformable substrates. In general, the most attractive property of these materials is mainly related to their high mechanical flexibility, which is mandatory for artificial skin applications. The main object of this PhD research activity was the development and optimization of an innovative technology for the realization of physical sensors able to detect pressure and temperature variations, which can be applied in the field of biomedical engineering and biorobotics. By exploiting the particular characteristics of the employed materials, such as mechanical flexibility, the proposed sensors are very suitable to be integrated with flexible structures (for example plastics) as a pressure and temperature sensor, and therefore, ideal for the realization of an artificial skin like. In Chapter 1, the basics of humans somatosensory system will be introduced: after a brief description of tactile thermoreceptors, mechanoreceptors and nociceptors, a definition of electronic skin and its characteristics will be provided. In Chapter 2, a wide analysis of the state of the art will be reported. Several and different examples of tactile sensor (in inorganic and organic technology) will be presented, underlining advantages and disadvantages for each approach. In Chapter 3, the firsts experimental results, obtained in the first part of my PhD program, will be presented. All the steps of the fabrication process of the devices will be described, as well as the measurement setup used for the electrical characterization of the sensors. In Chapter 4, the sensor structure optimization will be presented. It will be demonstrated how the presented devices are able to sense simultaneously thermal and mechanical stimuli. Moreover, it will be demonstrated that, thanks to an alternative and innovative fabrication process, the sensors can be transferred directly on skin, thus proving the suitability of the proposed sensor architecture for tactile applications

Ultra-Stretchable Interconnects for High-Density Stretchable Electronics

The exciting field of stretchable electronics (SE) promises numerous novel applications, particularly in-body and medical diagnostics devices. However, future advanced SE miniature devices will require high-density, extremely stretchable interconnects with micron-scale footprints, which calls for proven standardized (complementary metal-oxide semiconductor (CMOS)-type) process recipes using bulk integrated circuit (IC) microfabrication tools and fine-pitch photolithography patterning. Here, we address this combined challenge of microfabrication with extreme stretchability for high-density SE devices by introducing CMOS-enabled, free-standing, miniaturized interconnect structures that fully exploit their 3D kinematic freedom through an interplay of buckling, torsion, and bending to maximize stretchability. Integration with standard CMOS-type batch processing is assured by utilizing the Flex-to-Rigid (F2R) post-processing technology to make the back-end-of-line interconnect structures free-standing, thus enabling the routine microfabrication of highly-stretchable interconnects. The performance and reproducibility of these free-standing structures is promising: an elastic stretch beyond 2000% and ultimate (plastic) stretch beyond 3000%, with 10 million cycles at 1000% stretch with <1% resistance change. This generic technology provides a new route to exciting highly-stretchable miniature devices.Comment: 13 pages, 5 figure, journal publicatio

Piezoresistive Pressure Sensor for application in e-skin devices

(ENG) In recent years, the advancement of science and technology tends to evolve towards the exploitation of electronic skin (e-skin) and functional prosthetic devices, enabling innovating applications in various fields such as biomedical systems, sports health-monitoring and healthcare. Owing to their significant role in health monitoring, pressure sensors come as essential components in the development of artificial systems that can mimic the impressive human skin. The development of such sensors comprises the search for flexible and stretchable materials suitable for implementation in robust devices that enable the integration of multiple sensingfunctionalities. To quantitatively monitor pressure, these sensors use transduction methods based on piezoresistivity, capacity, piezoelectricity, and triboelectricity. In this work, piezoresistive devices were chosen over others due to their ease in structure design and readout mechanism. The mechanism of such piezoresistive pressure sensor relies on the transduction of a pressure change into a change in resistance that, in this case derives from variations in the contact area. In the approach presented in this work, a semi-sphere microstructuring patterning made by laser engraving on hard-poly(dimethylsiloxane) (h-PDMS) was introduced. h-PDMS works as a mold from which standard-poly(dimethylsiloxane) (s- PDMS) microstructured membranes with approximately 200 μm thickness are peeled off. Carbonink, working as active material, was deposited on top of the microstructured s-PDMS membranes. The fabrication of such pressure sensors based on organic membranes combines advantages such as the production in a low-cost and fast way, device flexibility, and tunability of the sensor’s design. Moreover, sensitivities of 2.4 × 10-1 kPa-1 were reached for the sensors developed.(PT) Nos últimos anos, o avanço da ciência e da tecnologia tende a evoluir para a exploração da pele eletrónica (e-skin) e próteses funcionais, possibilitando aplicações inovadoras em vários campos, nomeadamente sistemas biomédicos, saúde desportiva, e monitorização da saúde. Devido ao seu papel significativo na monitorização da saúde, os sensores de pressão são componentes essenciais no desenvolvimento de sistemas artificiais que conseguem imitar a impressionante pele humana. O desenvolvimento destes sensores requer a procura por materiais flexíveis e extensíveis adequados para implementação em dispositivos robustos que permitam a integração de múltiplas funcionalidades de detecção. Para monitorizar a pressão, estes sensores usam métodos de transdução baseados em piezoresistividade, capacidade, piezoelectricidade e triboeletricidade. Neste trabalho, dispositivos piezoresistivos foram escolhidos em detrimento dos outros devido à sua fácil implementação e mecanismo de leitura. Este mecanismo consiste na transdução de uma diferença de pressão numa diferença de resistência que, neste caso, deriva de variações na área de contato. Na nova abordagem apresentada neste trabalho, introduziu-se um método de microestruturação de semi-esferas baseado na gravação a laser em poli(dimetilsiloxano)-duro (h-PDMS). O h- PDMS funciona como um molde a partir do qual se retiram membranas microestruturadas de poli(dimetilsiloxano)-standard (s-PDMS) com aproximadamente 200 μm de espessura. O material ativo em cima do domínio microestruturado é tinta de carbono. A fabricação destes sensores de pressão com base em membranas orgânicas combina vantagens como a produção de forma rápida, fabricação de baixo custo, flexibilidade do dispositivo e flexibilidade na mudança do design do sensor. Para além disso, para estes sensores foram conseguidas sensibilidades de 2.4 × 10-1 kPa-1

New generation of interactive platforms based on novel printed smart materials

Programa doutoral em Engenharia Eletrónica e de Computadores (área de Instrumentação e Microssistemas Eletrónicos)The last decade was marked by the computer-paradigm changing with other digital devices suddenly becoming available to the general public, such as tablets and smartphones. A shift in perspective from computer to materials as the centerpiece of digital interaction is leading to a diversification of interaction contexts, objects and applications, recurring to intuitive commands and dynamic content that can proportionate more interesting and satisfying experiences. In parallel, polymer-based sensors and actuators, and their integration in different substrates or devices is an area of increasing scientific and technological interest, which current state of the art starts to permit the use of smart sensors and actuators embodied within the objects seamlessly. Electronics is no longer a rigid board with plenty of chips. New technological advances and perspectives now turned into printed electronics in polymers, textiles or paper. We are assisting to the actual scaling down of computational power into everyday use objects, a fusion of the computer with the material. Interactivity is being transposed to objects erstwhile inanimate. In this work, strain and deformation sensors and actuators were developed recurring to functional polymer composites with metallic and carbonaceous nanoparticles (NPs) inks, leading to capacitive, piezoresistive and piezoelectric effects, envisioning the creation of tangible user interfaces (TUIs). Based on smart polymer substrates such as polyvinylidene fluoride (PVDF) or polyethylene terephthalate (PET), among others, prototypes were prepared using piezoelectric and dielectric technologies. Piezoresistive prototypes were prepared with resistive inks and restive functional polymers. Materials were printed by screen printing, inkjet printing and doctor blade coating. Finally, a case study of the integration of the different materials and technologies developed is presented in a book-form factor.A última década foi marcada por uma alteração do paradigma de computador pelo súbito aparecimento dos tablets e smartphones para o público geral. A alteração de perspetiva do computador para os materiais como parte central de interação digital levou a uma diversificação dos contextos de interação, objetos e aplicações, recorrendo a comandos intuitivos e conteúdos dinâmicos capazes de tornarem a experiência mais interessante e satisfatória. Em simultâneo, sensores e atuadores de base polimérica, e a sua integração em diferentes substratos ou dispositivos é uma área de crescente interesse científico e tecnológico, e o atual estado da arte começa a permitir o uso de sensores e atuadores inteligentes perfeitamente integrados nos objetos. Eletrónica já não é sinónimo de placas rígidas cheias de componentes. Novas perspetivas e avanços tecnológicos transformaram-se em eletrónica impressa em polímeros, têxteis ou papel. Neste momento estamos a assistir à redução da computação a objetos do dia a dia, uma fusão do computador com a matéria. A interatividade está a ser transposta para objetos outrora inanimados. Neste trabalho foram desenvolvidos atuadores e sensores e de pressão e de deformação com recurso a compostos poliméricos funcionais com tintas com nanopartículas (NPs) metálicas ou de base carbónica, recorrendo aos efeitos capacitivo, piezoresistivo e piezoelétrico, com vista à criação de interfaces de usuário tangíveis (TUIs). Usando substratos poliméricos inteligentes tais como fluoreto de polivinilideno (PVDF) ou politereftalato de etileno (PET), entre outos, foi possível a preparação de protótipos de tecnologia piezoelétrica ou dielétrica. Os protótipos de tecnologia piezoresistiva foram feitos com tintas resistivas e polímeros funcionais resistivos. Os materiais foram impressos por serigrafia, jato de tinta, impressão por aerossol e revestimento de lâmina doctor blade. Para terminar, é apresentado um caso de estudo da integração dos diferentes materiais e tecnologias desenvolvidos sob o formato de um livro.This project was supported by FCT – Fundação para a Ciência e a Tecnologia, within the doctorate grant with reference SFRH/BD/110622/2015, by POCH – Programa Operacional Capital Humano, and by EU – European Union