Incorporating nanomaterials with MEMS devices.

This dissertation demonstrates an elegant method, known as \u27micro-origami\u27 or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar lithography. Folding allows creating complex, robust, three-dimensional shapes from two-dimensional material simply by choosing folds in the right order and orientation, small disturbances of the initial shape may also be used to produce different final shapes. These are referred to as pop-up structures in this work. The scope of this work presented the deposition of colloidal gold nanoparticles (GNPs) into conformal thin films using a microstenciling technique. Results illustrated that the gold nanoparticle deposition process can easily be integrated into current MEMS microfabrication processes. Thin films of GNPs deposited onto the surfaces of siliconbased bistable MEMS and test devices were shown to have a significant effect on the heating up of microstructures that cause them to fold. The dissertation consists of four chapters, covering details of fabrication methods, theoretical simulations, experimental work, and existing and potential applications. Chapter II illustrates how control of the folding order can generate complex three-dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multiaxis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process. Chapter III depicts the fabrication process of different types of bistable structures. It describes the principle of functioning of such structures, and simulations using CoventorWare are used to support the concept. We talk over about advantages and disadvantages of bistable structures, and discuss possible applications. Chapter IV describes fabrication procedure of nanoparticle-MEMS hybrid device. We introduce a convenient synthesis of GNPs with precisely controlled optical absorption in the NIR region by a single step reaction ofHAuCl4 and Na2S203. We take a look at different techniques to pattern gold nanoparticles on the surface of MEMS structures, and also provide a study of their thermal properties under near IR stimulation. We demonstrate the first approach of laser-driven bistable MEMS actuators for bioapplications. Finally, in Conclusion discuss the contributions of this dissertation, existent limitations and plans of the future work

The Effect of a Passivation Layer on the Anelastic Response of Gold Thin Films

The anelastic response in 500nm Au films has been studied through stress relaxation measurements using gas pressure bulge testing under iso-strain conditions. Samples were subjected to various processing techniques before testing to determine if these parameters affected steady state behavior of films. Stress relaxation experiments consisted of a rapid pressure ramp from zero strain to an applied strain of 0.1% and held for 3 hours. A series of such tests were conducted on each sample, one per day, to allow for any viscoelastic stress recovery. Stress relaxation consisted of two components: a fully recoverable viscoelastic component and a non-recoverable plastic (creep) component. The non-recoverable component decreased to zero after a series of three hour iso-strain tests, until a steady state was reached with purely a viscoelastic component remaining. By varying surface conditions on the film (passivation layer presence, titanium adhesive layers, SiNx substrate layers), it was concluded that at these temperatures and testing conditions result in a dislocation based mechanism for deformation rather than a surface and grain boundary diffusion based mechanism seen in other work. Dislocation double-kink nucleation is proposed as a possible mechanism for relaxation

A micromachined zipping variable capacitor

Micro-electro-mechanical systems (MEMS) have become ubiquitous in recent years and are found in a wide range of consumer products. At present, MEMS technology for radio-frequency (RF) applications is maturing steadily, and significant improvements have been demonstrated over solid-state components. A wide range of RF MEMS varactors have been fabricated in the last fifteen years. Despite demonstrating tuning ranges and quality factors that far surpass solid-state varactors, certain challenges remain. Firstly, it is difficult to scale up capacitance values while preserving a small device footprint. Secondly, many highly-tunable MEMS varactors include complex designs or process flows. In this dissertation, a new micromachined zipping variable capacitor suitable for application at 0.1 to 5 GHz is reported. The varactor features a tapered cantilever that zips incrementally onto a dielectric surface when actuated electrostatically by a pulldown electrode. Shaping the cantilever using a width function allows stable actuation and continuous capacitance tuning. Compared to existing MEMS varactors, this device has a simple design that can be implemented using a straightforward process flow. In addition, the zipping varactor is particularly suited for incorporating a highpermittivity dielectric, allowing the capacitance values and tuning range to be scaled up. This is important for portable consumer electronics where a small device footprint is attractive. Three different modelling approaches have been developed for zipping varactor design. A repeatable fabrication process has also been developed for varactors with a silicon dioxide dielectric. In proof-of-concept devices, the highest continuous tuning range is 400% (24 to 121 fF) and the measured quality factors are 123 and 69 (0.1 and 0.7 pF capacitance, respectively) at 2 GHz. The varactors have a compact design and fit within an area of 500 by 100 μm

A micromachined zipping variable capacitor

Micro-electro-mechanical systems (MEMS) have become ubiquitous in recent years and are found in a wide range of consumer products. At present, MEMS technology for radio-frequency (RF) applications is maturing steadily, and significant improvements have been demonstrated over solid-state components.A wide range of RF MEMS varactors have been fabricated in the last fifteen years. Despite demonstrating tuning ranges and quality factors that far surpass solid-state varactors, certain challenges remain. Firstly, it is difficult to scale up capacitance values while preserving a small device footprint. Secondly, many highly-tunable MEMS varactors include complex designs or process flows.In this dissertation, a new micromachined zipping variable capacitor suitable for application at 0.1 to 5 GHz is reported. The varactor features a tapered cantilever that zips incrementally onto a dielectric surface when actuated electrostatically by a pulldown electrode. Shaping the cantilever using a width function allows stable actuation and continuous capacitance tuning. Compared to existing MEMS varactors, this device has a simple design that can be implemented using a straightforward process flow. In addition, the zipping varactor is particularly suited for incorporating a highpermittivity dielectric, allowing the capacitance values and tuning range to be scaled up. This is important for portable consumer electronics where a small device footprint is attractive.Three different modelling approaches have been developed for zipping varactor design. A repeatable fabrication process has also been developed for varactors with a silicon dioxide dielectric. In proof-of-concept devices, the highest continuous tuning range is 400% (24 to 121 fF) and the measured quality factors are 123 and 69 (0.1 and 0.7 pF capacitance, respectively) at 2 GHz. The varactors have a compact design and fit within an area of 500 by 100 µm

Design for reliability applied to RF-MEMS devices and circuits issued from different TRL environments

Ces travaux de thèse visent à aborder la fiabilité des composants RF-MEMS (commutateurs en particulier) pendant la phase de conception en utilisant différents approches de procédés de fabrication. Ça veut dire que l'intérêt est focalisé en comment éliminer ou diminuer pendant la conception les effets des mécanismes de défaillance plus importants au lieu d'étudier la physique des mécanismes. La détection des différents mécanismes de défaillance est analysée en utilisant les performances RF du dispositif et le développement d'un circuit équivalent. Cette nouvelle approche permet à l'utilisateur final savoir comment les performances vont évoluer pendant le cycle de vie. La classification des procédés de fabrication a été faite en utilisant le Technology Readiness Level du procédé qui évalue le niveau de maturité de la technologie. L'analyse de différentes approches de R&D est décrite en mettant l'accent sur les différences entre les niveaux dans la classification TRL. Cette thèse montre quelle est la stratégie optimale pour aborder la fiabilité en démarrant avec un procédé très flexible (LAAS-CNRS comme exemple de baisse TRL), en continuant avec une approche composant (CEA-Leti comme moyenne TRL) et en finissant avec un procédé standard co-intégré CMOS-MEMS (IHP comme haute TRL) dont les modifications sont impossibles.This thesis is intended to deal with reliability of RF-MEMS devices (switches, in particular) from a designer point of view using different fabrication process approaches. This means that the focus will be on how to eliminate or alleviate at the design stage the effects of the most relevant failure mechanisms in each case rather than studying the underlying physics of failure. The detection of the different failure mechanisms are investigated using the RF performance of the device and the developed equivalent circuits. This novel approach allows the end-user to infer the evolution of the device performance versus time going one step further in the Design for Reliability in RF-MEMS. The division of the fabrication process has been done using the Technology Readiness Level of the process. It assesses the maturity of the technology prior to incorporating it into a system or subsystem. An analysis of the different R&D approaches will be presented by highlighting the differences between the different levels in the TRL classification. This thesis pretend to show how reliability can be improved regarding the approach of the fabrication process starting from a very flexible one (LAAS-CNRS as example of low-TRL) passing through a component approach (CEA-Leti as example of medium-TRL) and finishing with a standard co-integrated CMOS-MEMS process (IHP example of high TRL)

A micromachined zipping variable capacitor

Micro-electro-mechanical systems (MEMS) have become ubiquitous in recent years and are found in a wide range of consumer products. At present, MEMS technology for radio-frequency (RF) applications is maturing steadily, and significant improvements have been demonstrated over solid-state components. A wide range of RF MEMS varactors have been fabricated in the last fifteen years. Despite demonstrating tuning ranges and quality factors that far surpass solid-state varactors, certain challenges remain. Firstly, it is difficult to scale up capacitance values while preserving a small device footprint. Secondly, many highly-tunable MEMS varactors include complex designs or process flows. In this dissertation, a new micromachined zipping variable capacitor suitable for application at 0.1 to 5 GHz is reported. The varactor features a tapered cantilever that zips incrementally onto a dielectric surface when actuated electrostatically by a pulldown electrode. Shaping the cantilever using a width function allows stable actuation and continuous capacitance tuning. Compared to existing MEMS varactors, this device has a simple design that can be implemented using a straightforward process flow. In addition, the zipping varactor is particularly suited for incorporating a highpermittivity dielectric, allowing the capacitance values and tuning range to be scaled up. This is important for portable consumer electronics where a small device footprint is attractive. Three different modelling approaches have been developed for zipping varactor design. A repeatable fabrication process has also been developed for varactors with a silicon dioxide dielectric. In proof-of-concept devices, the highest continuous tuning range is 400% (24 to 121 fF) and the measured quality factors are 123 and 69 (0.1 and 0.7 pF capacitance, respectively) at 2 GHz. The varactors have a compact design and fit within an area of 500 by 100 μm.EThOS - Electronic Theses Online ServiceGBUnited Kingdo

Mechanics study and application of micro-engineered smart surface

Naturally existing functional surfaces with micro-structure arose competing interests due to their potential application in engineering filed such as wetting control, optical control, micro-fluidic, tissue scaffolds, marine engineering, oil field, etc al. A patterned surface with stimuli responsive properties attracts considerable interest for its importance in advanced engineering, partly due to its reversibility, easy design and control, good compatibility and responsive behaviour to external stimuli. In this work, we have investigated various surface instabilities that enable a convenient strategy of micro-engineered structure impart reversible patterned feature to an elastic surface. We focus on the classic bi-layer system contains a stiff layer on a soft substrate that produces parallel harmonic wrinkles at uniaxial compression and ultimately develop into deep creases and fold. By introducing the microscale planar Bravais lattice holes, we guided these instabilities into various patterns to achieve an anisotropic manipulation of single liquid droplet by initialize localized surface morphologies. The Finite Element Analysis provided the fundamental theory on the surface instabilities evolution and development. The finding demonstrates considerable control over the threshold of a surface elastic instability and bi-axial switching of droplet shape that relevant to many novel applications including wearable electronic devices, bio-medical systems, micro-fluidics and optical devices

Tunable Terahertz Metamaterials with Germanium Telluride Components

Terahertz (THz) technology is an emerging field with many exciting applications. THz waves can be used to locate explosives and illicit drugs in security applications, or DNA and other molecule resonances in medical applications. THz frequencies represent the next level of modern, high-speed computing, but they also can be used for covert battlefield communications links. Metamaterials are an integral part of THz technology because they can be used to create exotic material properties—permittivities and permeabilities—in a part of the frequency spectrum that is otherwise rather empty and passive. This work aims to acquire a fuller understanding of THz metamaterials in terms of background and theory, and then use this understanding to create a few novel, actively tunable structures using the phase-change material germanium telluride

Versatile High Performance Photomechanical Actuators Based on Two-dimensional Nanomaterials

The ability to convert photons into mechanical motion is of significant importance for many energy conversion and reconfigurable technologies. Establishing an optical-mechanical interface has been attempted since 1881; nevertheless, only few materials exist that can convert photons of different wavelengths into mechanical motion that is large enough for practical import. Recently, various nanomaterials including nanoparticles, nanowires, carbon nanotubes, and graphene have been used as photo-thermal agents in different polymer systems and triggered using near infrared (NIR) light for photo-thermal actuation. In general, most photomechanical actuators based on sp bonded carbon namely nanotube and graphene are triggered mainly using near infra-red light and they do not exhibit wavelength selectivity. Layered transition metal dichalcogenides (TMDs) provide intriguing opportunities to develop low cost, light and wavelength tunable stimuli responsive systems that are not possible with their conventional macroscopic counterparts. Compared to graphene, which is just a layer of carbon atoms and has no bandgap, TMDs are stacks of triple layers with transition metal layer between two chalcogen layers and they also possess an intrinsic bandgap. While the atoms within the layers are chemically bonded using covalent bonds, the triple layers can be mechanically/chemically exfoliated due to weak van der Waals bonding between the layers. Due to the large optical absorption in these materials, they are already being exploited for photocatalytic, photoluminescence, photo-transistors, and solar cell applications. The large breaking strength together with large band gap and strong light- matter interaction in these materials have resulted in plethora of investigation on electronic, optical and magnetic properties of such layered ultra-thin semiconductors. This dissertation will go in depth in the synthesis, characterization, development, and application of two- dimensional (2D) nanomaterials, with an emphasis on TMDs and molybdenum disulfide (MoS2), when used as photo-thermal agents in photoactuation technologies. It will present a new class of photo-thermal actuators based on TMDs and hyperelastic elastomers with large opto-mechanical energy conversion, and investigate the layer-dependent optoelectronics and light-matter interaction in these nanomaterials and nanocomposites. Different attributes of semiconductive nanoparticles will be studied through different applications, and the possibility of globally/locally engineering the bandgap of such nanomaterials, along with its consequent effect on optomechanical properties of photo thermal actuators will be investigated. Using liquid phase exfoliation in deionized water, inks based on 2D- materials will be developed, and inkjet printing of 2D materials will be utilized as an efficient method for fast fabrication of functional devices based on nanomaterials, such as paper-graphene-based photo actuators. The scalability, simplicity, biocompatibility, and fast fabrication characteristics of the inkjet printing of 2D materials along with its applicability to a variety of substrates such as plastics and papers can potentially be implemented to fabricate high-performance devices with countless applications in soft robotics, wearable technologies, flexible electronics and optoelectronics, bio- sensing, photovoltaics, artificial skins/muscles, transparent displays and photo-detectors