Developing ultrasensitive and CMOS compatible ISFETs in the BEOL of industrial UTBB FDSOI transistors

Le marché des capteurs a récemment connu une croissance spectaculaire alimentée par l'application remarquable de capteurs dans l'électronique de consommation, l'industrie de l'automatisation, les appareils portables, le secteur automobile et l'internet des objets de plus en plus adopté. La technologie avancée des complementary metal oxide semiconductor (CMOS), les technologies de nano et de micro-fabrication et les plateformes de synthèse de matériaux innovantes sont également des moteurs du développement incroyable de l'industrie des capteurs. Ces progrès ont permis la réalisation de capteurs dotés de nombreuses caractéristiques telles que la précision accrue, les dimensions miniaturisées, l’intégrabilité, la production de masse, le coût très réduit et le temps de réponse rapide. Les ion-sensitive field-effect transistors (ISFETs) sont des capteurs à l'état solide (bio) chimiques, destinés à la détection des ions H+ (pH), Na+ et K+. Malgré cela, la commercialisation des ISFETs est encore à ses balbutiements, après près de cinq décennies de recherche et développement. Cela est dû principalement à la sensibilité limitée, à la controverse sur l'utilisation de l'électrode de référence pour le fonctionnement des ISFETs et à des problèmes de stabilité. Dans cette thèse, les ISFETs ultrasensibles et compatibles CMOS sont intégrés dans le BEOL des transistors UTBB FDSOI standard. Un circuit diviseur capacitif est utilisé pour polariser la grille d’avant afin d'assurer des performances stables du capteur. En exploitant la fonction d’amplification intrinsèque fournie par les transistors UTBB FDSOI, nous avons présenté des ISFET ultra sensibles. L'amplification découle du fort couplage électrostatique entre la grille avant et la grille arrière du FDSOI et des capacités asymétriques des deux grilles. Un changement de tension au niveau de la grille avant apparaît sur la grille arrière sous la forme d'un décalage amplifié de la tension. L'amplification, représentée par le facteur de couplage (γ), est égale au rapport de la capacité de l'oxyde de grille et de la capacité de le buried oxide (BOX). Par conséquent, en fonctionnalisant la détection du pH sur la grille avant pour les dispositifs FDSOI, la modification du potentiel de surface sur la grille avant est détectée par la grille arrière et amplifiée du facteur de couplage (γ), donnant lieu à un capteur chimique à l'état solide à sensibilité ultra-élevée. L'intégration de la fonctionnalité de détection a été réalisée en back end of line (BEOL), ce qui offre les avantages d'une fiabilité et d'une durée de vie accrues du capteur, d'une compatibilité avec le processus CMOS standard et d'une possibilité d'intégration d'un circuit diviseur capacitif. Le fonctionnement des MOSFETs, sans une polarisation appropriée de la grille avant, les rend vulnérables aux effets de grilles flottantes indésirables. Le circuit diviseur capacitif résout ce problème en polarisant la grille avant tout enmaintenant la fonctionnalité de détection sur la même grille par un couplage capacitif au métal commun du BEOL. Par conséquent, le potentiel au niveau du métal BEOL est une somme pondérée du potentiel de surface au niveau de la grille de détection et de la polarisation appliquée au niveau de la grille de contrôle. Le capteur proposé est modélisé et simulé à l'aide de TCAD-Sentaurus. Un modèle mathématique complet a été développé. Il fournit la réponse du capteur en fonction du pH de la solution (entrée du capteur) et des paramètres de conception du circuit diviseur capacitif et du transistor UTBB FDSOI. Dans ce cas, des résultats cohérents ont été obtenus des travaux de modélisation et de simulation, avec une sensibilité attendue de 780 mV / pH correspondant à un film de détection ayant une réponse de Nernst. La modélisation et la simulation du capteur proposé ont également été validées par une fabrication et une caractérisation du capteur de pH à grille étendue avec validation de son concept. Ces capteurs ont été développés par un traitement séparé du composant de détection de pH, qui est connecté électriquement au transistor uniquement lors de la caractérisation du capteur. Ceci permet une réalisation plus rapide et plus simple du capteur sans avoir besoin de masques et de motifs par lithographie. Les capteurs à grille étendue ont présenté une sensibilité de 475 mV/pH, ce qui est supérieur aux ISFET de faible puissance de l'état de l’art. Enfin, l’intégration de la fonctionnalité de détection directement dans le BEOL des dispositifs FDSOI UTBB a été poursuivie. Une sensibilité expérimentale de 730 mV/pH a été obtenue, ce qui confirme le modèle mathématique et la réponse simulée. Cette valeur est 12 fois supérieure à la limite de Nernst et supérieure aux capteurs de l'état de l’art. Les capteurs sont également évalués pour la stabilité, la résolution, l'hystérésis et la dérive dans lesquels d'excellentes performances sont démontrées. Une nouvelle architecture de détection du pH est également démontrée avec succès, dans laquelle la détection est fonctionnalisée au niveau de la diode de protection de la grille plutôt que de la grille avant des dispositifs UTBB FDSOI. La commutation de courant abrupte, aussi basse que 9 mV/decade, pourrait potentiellement augmenter la sensibilité de polarisation fixée à 6,6 decade/pH. Nous avons démontré expérimentalement une sensibilité de 1,25 decade/pH supérieure à la sensibilité reportée à l’état de l’art.Abstract: The sensor market has recently seen a dramatic growth fueled by the remarkable application of sensors in the consumer electronics, automation industry, wearable devices, the automotive sector, and in the increasingly adopted internet of things (IoT). The advanced complementary metal oxide semiconductor (CMOS) technology, the nano and micro fabrication technologies, and the innovative material synthesis platforms are also driving forces for the incredible development of the sensor industry. These technological advancements have enabled realization of sensors with characteristic features of increased accuracy, miniaturized dimension, integrability, volume production, highly reduced cost, and fast response time. Ion-sensitive field-effect transistors (ISFETs) are solid state (bio)chemical sensors, for pH (H+), Na+, K+ ion detection, that are equipped with the promise of the highly aspired features of CMOS devices. Despite this, the commercialization of ISFETs is still at the stage of infancy after nearly five decades of research and development. This is due mainly to the limited sensitivity, the controversy over the use of the reference electrode for ISFET operation, and because of stability issues. In this thesis, ultrasensitive and CMOS compatible ISFETs are integrated in the back end of line (BEOL) of standard UTBB FDSOI transistors. A capacitive divider circuit is employed for biasing the front gate for stable performance of the sensor. Exploiting the intrinsic amplification feature provided by UTBB FDSOI transistors, we demonstrated ultrahigh sensitive ISFETs. The amplification arises from the strong electrostatic coupling between the front gate and the back gate of the FDSOI, and the asymmetric capacitances of the two gates. A change in voltage at the front gate appears at the back gate as an amplified shift in voltage. The amplification, referred to as the coupling factor (γ), is equal to the ratio of the gate oxide capacitance and the buried oxide (BOX) capacitance. Therefore, functionalizing the pH sensing at the front gate of FDSOI devices, the change in surface potential at the front gate is detected at the back gate amplified by the coupling factor (γ), giving rise to an ultrahigh-sensitive solid state chemical sensor. Integration of the sensing functionality was made in the BEOL which gives the benefits of increased reliability and life time of the sensor, compatibility with the standard CMOS process, and possibility for embedding a capacitive divider circuit. Operation of the MOSFETs without a proper front gate bias makes them vulnerable for undesired floating body effects. The capacitive divider circuit addresses these issues by biasing the front gate simultaneously with the sensing functionality at the same gate through capacitive coupling to a common BEOL metal. Therefore, the potential at the BEOL metal would be a weighted sum of the surface potential at the sensing gate and the applied bias at the control gate. The proposed sensor is modeled and simulated using TCAD-Sentaurus. A complete mathematical model is developed which provides the output of the sensor as a function of the solution pH (input to the sensor), and the design parameters of the capacitive divider circuit and the UTBB FDSOI transistor. In that case, consistent results have been obtained from the modeling and simulation works, with an expected sensitivity of 780 mV/pH corresponding to a sensing film having Nernst response. The modeling and simulation of the proposed sensor was further validated by a proof of concept extended gate pH sensor fabrication and characterization. These sensors were developed by a separated processing of just the pH sensing component, which is electrically connected to the transistor only during characterization of the sensor. This provides faster and simpler realization of the sensor without the need for masks and patterning by lithography. The extended gate sensors showed 475 mV/pH sensitivity which is superior to state of the art low power ISFETs. Finally, integration of the sensing functionality directly in the BEOL of the UTBB FDSOI devices was pursued. An experimental sensitivity of 730 mV/pH is obtained which is consistent with the mathematical model and the simulated response. This is more than 12-times higher than the Nernst limit, and superior to state of the art sensors. Sensors are also evaluated for stability, resolution, hysteresis, and drift in which excellent performances are demonstrated. A novel pH sensing architecture is also successfully demonstrated in which the detection is functionalized at the gate protection diode rather than the front gate of UTBB FDSOI devices. The abrupt current switching, as low as 9 mV/decade, has the potential to increase the fixed bias sensitivity to 6.6 decade/pH. We experimentally demonstrated a sensitivity of 1.25 decade/pH which is superior to the state of the art sensitivity

Characterization of 28 nm FDSOI MOS and application to the design of a low-power 2.4 GHz LNA

IoT is expected to connect billions of devices all over world in the next years, and in a near future, it is expected to use LR-WPAN in a wide variety of applications. Not all the devices will require of high performance but will require of low power hungry systems since most of them will be powered with a battery. Conventional CMOS technologies cannot cover these needs even scaling it to very small regimes, which appear other problems. Hence, new technologies are emerging to cover the needs of this devices. One promising technology is the UTBB FDSOI, which achieves good performance with very good energy efficiency. This project characterizes this technology to obtain a set of parameters of interest for analog/RF design. Finally, with the help of a low-power design methodology (gm/Id approach), a design of an ULP ULV LNA is performed to check the suitability of this technology for IoT

Caractérisation électrique et modélisation des transistors FDSOI sub-22nm

Silicon on insulator (SOI) transistors are among the best candidates for sub-22nm technology nodes. At this scale, the devices integrate extremely thin buried oxide layers (BOX) and body. They also integrate advanced high-k dielectric / metal gate stacks and strain engineering is used to improve transport properties with, for instance, the use of SiGe alloys in the channel of p-type MOS transistors. The optimization of such a technology requires precise and non-destructive experimental techniques able to provide information about the quality of electron transport and interface quality, as well as about the real values of physical parameters (dimensions and doping level) at the end of the process. Techniques for parameter extraction from electrical characteristics have been developed over time. The aim of this thesis work is to reconsider these methods and to further develop them to account for the extremely small dimensions used for sub-22nm SOI generations. The work is based on extended characterization and modelling in support. Among the original results obtained during this thesis, special notice should be put on the adaptation of the complete split CV method which is now able to extract the characteristic parameters for the entire stack, from the substrate and its doping level to the gate stack, as well as an extremely detailed analysis of electron transport based on low temperature characterization in back-gate electrostatic coupling conditions or the exploitation of channel magnetoresistance from the linear regime of operation to saturation. Finally, a detailed analysis of low-frequency noise closes this study.Parmi les architectures candidates pour les générations sub-22nm figurent les transistors sur silicium sur isolant (SOI). A cette échelle, les composants doivent intégrer des films isolants enterrés (BOX) et des canaux de conduction (Body) ultra-minces. A ceci s'ajoute l'utilisation d'empilements de grille avancés (diélectriques à haute permittivité / métal de grille) et une ingénierie de la contrainte mécanique avec l'utilisation d'alliages SiGe pour le canal des transistors de type P. La mise au point d'une telle technologie demande qu'on soit capable d'extraire de façon non destructive et avec précision la qualité du transport électronique et des interfaces, ainsi que les valeurs des paramètres physiques (dimensions et dopages), qui sont obtenues effectivement en fin de fabrication. Des techniques d'extraction de paramètres ont été développées au cours du temps. L'objectif de cette thèse est de reconsidérer et de faire évoluer ces techniques pour les adapter aux épaisseurs extrêmement réduites des composants étudiés. Elle combine mesures approfondies et modélisation en support. Parmi les résultats originaux obtenus au cours de cette thèse, citons notamment l'adaptation de la méthode split CV complète qui permet désormais d'extraire les paramètres caractérisant l'ensemble de l'empilement SOI, depuis le substrat et son dopage jusqu'à la grille, ainsi qu'une analyse extrêmement détaillée du transport grâce à des mesures en régime de couplage grille arrière à température variable ou l'exploitation de la magnétorésistance de canal depuis le régime linéaire jusqu'en saturation. Le mémoire se termine par une analyse détaillée du bruit basse fréquence

Compensation of Threshold Voltage for Process and Temperature Variations in 28nm UTBB FDSOI

As technology scales down in order to meet demands of more computing power per area, a variety of challenges emerge. Devices with channel lengths of a few nano meters require atomic precision when they are manufactured. Small irregularities in the equipment and manufacturing environment can cause large process variations from die--to--die, but also within--die variations. Along with the increasing density of transistors per die which has led to severe performance issues due to temperature variations, these effects may seriously impact operation and cause large deviations in frequency and power across a the chip. This thesis will present the analysis and design of a circuit with the goal of compensating the threshold voltage, by means of body biasing, in order to mitigate process and temperature variations. The compensation circuit is designed to provide adaptive body biasing for a large number of equally matched devices within the chip, which may be useful in digital systems with many repetitive instances. Its functionality and effect will be tested by designing it to be used with a 13--stage inverter based ring oscillator operating at 65.5MHz, and observing the improvement in frequency variation across processing corners and a temperature range from -40 degrees Celsius to 80 degrees Celsius. All circuits were designed using a commercially available 28nm fdsoi transistor technology because of its excellent susceptibility to body biasing, and its promise as a competitive technology to continue Moore`s law. Results obtained by post--layout simulations on the ring oscillator show that frequency variations across processing corners and temperature has been reduced from 18.69% down to 0.632% by utilising adaptive body biasing provided by the compensation circuit. Ring oscillator frequency temperature sensitivity in a range from -40 degrees Celsius to 80 degrees Celsius for the typical corner is shown to be as little as 29.4ppm per degree Celsiu

Strain integration and performance optimization in sub-20nm FDSOI CMOS technology

La technologie CMOS à base de Silicium complètement déserté sur isolant (FDSOI) est considérée comme une option privilégiée pour les applications à faible consommation telles que les applications mobiles ou les objets connectés. Elle doit cela à son architecture garantissant un excellent comportement électrostatique des transistors ainsi qu'à l'intégration de canaux contraints améliorant la mobilité des porteurs. Ce travail de thèse explore des solutions innovantes en FDSOI pour nœuds 20nm et en deçà, comprenant l'ingénierie de la contrainte mécanique à travers des études sur les matériaux, les dispositifs, les procédés d'intégration et les dessins des circuits. Des simulations mécaniques, caractérisations physiques (µRaman), et intégrations expérimentales de canaux contraints (sSOI, SiGe) ou de procédés générant de la contrainte (nitrure, fluage de l'oxyde enterré) nous permettent d'apporter des recommandations pour la technologie et le dessin physique des transistors en FDSOI. Dans ce travail de thèse, nous avons étudié le transport dans les dispositifs à canal court, ce qui nous a amené à proposer une méthode originale pour extraire simultanément la mobilité des porteurs et la résistance d'accès. Nous mettons ainsi en évidence la sensibilité de la résistance d'accès à la contrainte que ce soit pour des transistors FDSOI ou nanofils. Nous mettons en évidence et modélisons la relaxation de la contrainte dans le SiGe apparaissant lors de la gravure des motifs et causant des effets géométriques (LLE) dans les technologies FDSOI avancées. Nous proposons des solutions de type dessin ainsi que des solutions technologiques afin d'améliorer la performance des cellules standard digitales et de mémoire vive statique (SRAM). En particulier, nous démontrons l'efficacité d'une isolation duale pour la gestion de la contrainte et l'extension de la capacité de polarisation arrière, qui un atout majeur de la technologie FDSOI. Enfin, la technologie 3D séquentielle rend possible la polarisation arrière en régime dynamique, à travers une co-optimisation dessin/technologie (DTCO).The Ultra-Thin Body and Buried oxide Fully Depleted Silicon On Insulator (UTBB FDSOI) CMOS technology has been demonstrated to be highly efficient for low power and low leakage applications such as mobile, internet of things or wearable. This is mainly due to the excellent electrostatics in the transistor and the successful integration of strained channel as a carrier mobility booster. This work explores scaling solutions of FDSOI for sub-20nm nodes, including innovative strain engineering, relying on material, device, process integration and circuit design layout studies. Thanks to mechanical simulations, physical characterizations and experimental integration of strained channels (sSOI, SiGe) and local stressors (nitride, oxide creeping, SiGe source/drain) into FDSOI CMOS transistors, we provide guidelines for technology and physical circuit design. In this PhD, we have in-depth studied the carrier transport in short devices, leading us to propose an original method to extract simultaneously the carrier mobility and the access resistance and to clearly evidence and extract the strain sensitivity of the access resistance, not only in FDSOI but also in strained nanowire transistors. Most of all, we evidence and model the patterning-induced SiGe strain relaxation, which is responsible for electrical Local Layout Effects (LLE) in advanced FDSOI transistors. Taking into account these geometrical effects observed at the nano-scale, we propose design and technology solutions to enhance Static Random Access Memory (SRAM) and digital standard cells performance and especially an original dual active isolation integration. Such a solution is not only stress-friendly but can also extend the powerful back-bias capability, which is a key differentiating feature of FDSOI. Eventually the 3D monolithic integration can also leverage planar Fully-Depleted devices by enabling dynamic back-bias owing to a Design/Technology Co-Optimization

Design of a RF communication receiver front-end for ultra-low power and voltage applications in a FDSOI 28nm technology

The advances in the semiconductor and wireless industry have enabled the expansion of new paradigms, which have given rise to concepts like Internet of Things (IoT). Apart from qualities like size, speed or cost, the ever-increasing demand for autonomy focuses all design efforts in the minimization of power consumption. Scaling technologies and the request to reduce power consumption have pushed designers towards lower supply voltages. Despite the fact that technology scalability allows for faster transistors, radio-frequency (RF) integrated circuit (IC) design accuses the reduction of the voltage supply through frequency response degradation, which significantly deteriorates the overall performance. Analog and RF circuits in highend applications require substantial gate voltage overdrive to maintain device speed, which further complicates the design due to the reduction of voltage headroom. As a consequence, the necessity to develop circuit topologies capable to deal with low-power and low-voltage stringent constraints well suited to applications requiring long battery life and low cost emerges. This work aims to implement a low-noise amplifier and mixer stages of a radio-frequency receiver front-end working under an ultra-low power (< 100 ?W) and ultra-low voltage (< 0.8V) scenario while targeting decent overall performance. To cope with the stringent power requirements, 28nm FD-SOI technology will be used to take maximum profit of aggressive forward body bias and enhance transistor performance

Energy-Efficient Time-Based Encoders and Digital Signal Processors in Continuous Time

Continuous-time (CT) data conversion and continuous-time digital signal processing (DSP) are an interesting alternative to conventional methods of signal conversion and processing. This alternative proposes time-based encoding that may not suffer from aliasing; shows superior spectral properties (e.g. no quantization noise floor); and enables time-based, event-driven, flexible signal processing using digital circuits, thus scaling well with technology. Despite these interesting features, this approach has so far been limited by the CT encoder, due to both its relatively poor energy efficiency and the constraints it imposes on the subsequent CT DSP. In this thesis, we present three principles that address these limitations and help improve the CT ADC/DSP system. First, an adaptive-resolution encoding scheme that achieves first-order reconstruction with simple circuitry is proposed. It is shown that for certain signals, the scheme can significantly reduce the number of samples generated per unit of time for a given accuracy compared to schemes based on zero-order-hold reconstruction, thus promising to lead to low dynamic power dissipation at the system level. Presented next is a novel time-based CT ADC architecture, and associated encoding scheme, that allows a compact, energy-efficient circuit implementation, and achieves first-order quantization error spectral shaping. The design of a test chip, implemented in a 0.65-V 28-nm FDSOI process, that includes this CT ADC and a 10-tap programmable FIR CT DSP to process its output is described. The system achieves 32 dB – 42 dB SNDR over a 10 MHz – 50 MHz bandwidth, occupies 0.093 mm2, and dissipates 15 µW–163 µW as the input amplitude goes from zero to full scale. Finally, an investigation into the possibility of CT encoding using voltage-controlled oscillators is undertaken, and it leads to a CT ADC/DSP system architecture composed primarily of asynchronous digital delays. The latter makes the system highly digital and technology-scaling-friendly and, hence, is particularly attractive from the point of view of technology migration. The design of a test chip, where this delay-based CT ADC/DSP system architecture is used to implement a 16-tap programmable FIR filter, in a 1.2-V 28-nm FDSOI process, is described. Simulations show that the system will achieve a 33 dB – 40 dB SNDR over a 600 MHz bandwidth, while dissipating 4 mW

Monitor amb control strategies to reduce the impact of process variations in digital circuits

As CMOS technology scales down, Process, Voltage, Temperature and Ageing (PVTA) variations have an increasing impact on the performance and power consumption of electronic devices. These issues may hold back the continuous improvement of these devices in the near future. There are several ways to face the variability problem: to increase the operating margins of maximum clock frequency, the implementation of lithographic friendly layout styles, and the last one and the focus of this thesis, to adapt the circuit to its actual manufacturing and environment conditions by tuning some of the adjustable parameters once the circuit has been manufactured. The main challenge of this thesis is to develop a low-area variability compensation mechanism to automatically mitigate PVTA variations in run-time, i.e. while integrated circuit is running. This implies the development of a sensor to obtain the most accurate picture of variability, and the implementation of a control block to knob some of the electrical parameters of the circuit.A mesura que la tecnologia CMOS escala, les variacions de Procés, Voltatge, Temperatura i Envelliment (PVTA) tenen un impacte creixent en el rendiment i el consum de potència dels dispositius electrònics. Aquesta problemàtica podria arribar a frenar la millora contínua d'aquests dispositius en un futur proper. Hi ha diverses maneres d'afrontar el problema de la variabilitat: relaxar el marge de la freqüència màxima d'operació, implementar dissenys físics de xips més fàcils de litografiar, i per últim i com a tema principal d'aquesta tesi, adaptar el xip a les condicions de fabricació i d'entorn mitjançant la modificació d'algun dels seus paràmetres ajustables una vegada el circuit ja ha estat fabricat. El principal repte d'aquesta tesi és desenvolupar un mecanisme de compensació de variabilitat per tal de mitigar les variacions PVTA de manera automàtica en temps d'execució, és a dir, mentre el xip està funcionant. Això implica el desenvolupament d'un sensor capaç de mesurar la variabilitat de la manera més acurada possible, i la implementació d'un bloc de control que permeti l'ajust d'alguns dels paràmetres elèctrics dels circuits

Body bias generator design for ultra-low voltage applications in FDSOI technology

This thesis presents the derivation and validation processes of analytical models describing the dynamic and steady-state behaviors of CC-CP switched capacitor converters. The effects of FDSOI components in the implementation of such circuits is also addressed, studying their impact as compared to ideal models. Finally, the layout of a CMOS CC-CP in 28-nm UTBB-FDSOI technology is designed and tested against predicted functionality

Low Temperature Characterization and Modeling of FDSOI Transistors for Cryo CMOS Applications

The wide range of cryogenic applications, such as spatial, high performance computing or high-energy physics, has boosted the investigation of CMOS technology performance down to cryogenic temperatures. In particular, the readout electronics of quantum computers operating at low temperature requires larger bandwidth than spatial applications, so that advanced CMOS node has to be considered. FDSOI technology appears as a valuable solution for co-integration between qubits and consistent engineering of control and read-out. However, there is still lack of reports on literature concerning advanced CMOS nodes behavior at deep cryogenic operation, from devices electrostatics to mismatch and self-heating, all requested for the development of robust design tools. For these reasons, this chapter presents a review of electrical characterization and modeling results recently obtained on ultra-thin film FDSOI MOSFETs down to 4.2 K