Design of a Piezoelectric-actuated microgripper with a three-stage flexure-based amplification

This paper presents a novel microgripper mechanism for micromanipulation and assembly. The microgripper is driven by a piezoelectric actuator, and a three-stage flexure-based amplification has been designed to achieve large jaw displacements. The kinematic, static and dynamic models of the microgripper have been established and optimized considering the crucial parameters that determine the characteristics of the microgripper. Finite element analysis was conducted to evaluate the characteristics of the microgripper, and wire electro discharge machining technique was utilized to fabricate the monolithic structure of the microgripper mechanism. Experimental tests were carried out to investigate the performance of the microgripper and the results show that the microgripper can grasp microobjects with the maximum jaw motion stroke of 190 μm corresponding to the 100-V applied voltage. It has an amplification ratio of 22.8 and working mode frequency of 953 Hz

Frequency domain approach for dynamics identification of the actuator with asymmetric hysteresis

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On hysteresis modeling of a piezoelectric precise positioning system under variable temperature

We propose the modeling of hysteresis nonlinearities in a piezoelectric material-based tube actuator classically employed in precise positioning applications under different sur-rounding temperatures. Beyond the voltage-to-displacement hysteresis nonlinearities they exhibit, these actuators are sensitive to the surrounding temperature. Therefore, contrary to the existing works in the literature where the two phenomena were treated individually,this paper suggests to model the hysteresis nonlinearities and the temperature effects si-multaneously. First an experimental study was performed to investigate the effects of the surrounding temperature on the voltage-to-displacement hysteresis loops of the piezoelectric tube actuators. The experimental results show that increasing the input surrounding temperature contributes an increase in the voltage-to-displacement sensitivity of the piezoelectric tube actuator under the input voltage range considered in the experimental tests. Then, two different nonlinear temperature-dependent hysteresis models a temperature-dependent (TD) electromechanical model and a temperature-dependent Prandtl-Ishlinskii model (TD-PI) were proposed to account the temperature effects on the hysteresis nonlinearity. In first, the mathematical formulation of TD-electromechanical model was presented to describe the electrical and mechanical properties of piezoelectric tube actuator. This model integrates the temperature dependent electromechanical coupling factor to model the temperature effects, the Simscape library in MATLAB-Simulink software was used to develop a physical simulation for the TD-electromechanical model. In a second time, a TD-PI model was proposed to describe the voltage-to-displacement characteristic of piezoelectric tube actuator using a proposed temperature shape function. The parameters of the two proposed models were estimated using proposed optimization algorithms based on Grey Wolf Optimizer (GWO). The modeling results demonstrate that the two proposed models can account for the hysteresis nonlinearities of the piezoelectric tube actuators under different levels of the surrounding temperatures. Finally, the analytical inverse of TD-PI model was derived and applied in feed forward manner to compensate the hysteresis nonlinearities under different levels of the surrounding temperatures

Modeling and Control of Piezoelectric Actuators

Piezoelectric actuators (PEAs) utilize the inverse piezoelectric effect to generate fine displacement with a resolution down to sub-nanometers and as such, they have been widely used in various micro- and nanopositioning applications. However, the modeling and control of PEAs have proven to be challenging tasks. The main difficulties lie in the existence of various nonlinear or difficult-to-model effects in PEAs, such as hysteresis, creep, and distributive vibration dynamics. Such effects can seriously degrade the PEA tracking control performances or even lead to instability. This raises a great need to model and control PEAs for improved performance. This research is aimed at developing novel models for PEAs and on this basis, developing model-based control schemes for the PEA tracking control taking into account the aforementioned nonlinear effects. In the first part of this research, a model of a PEA for the effects of hysteresis, creep, and vibration dynamics was developed. Notably, the widely-used Preisach hysteresis model cannot represent the one-sided hysteresis of PEAs. To overcome this shortcoming, a rate-independent hysteresis model based on a novel hysteresis operator modified from the Preisach hysteresis operator was developed, which was then integrated with the models of creep and vibration dynamics to form a comprehensive model for PEAs. For its validation, experiments were carried out on a commercially-available PEA and the results obtained agreed with those from model simulations. By taking into account the linear dynamics and hysteretic behavior of the PEA as well as the presliding friction between the moveable platform and the end-effector, a model of the piezoelectric-driven stick-slip (PDSS) actuator was also developed in the first part of the research. The effectiveness of the developed model was illustrated by the experiments on the PDSS actuator prototyped in the author's lab. In the second part of the research, control schemes were developed based on the aforementioned PEA models for tracking control of PEAs. Firstly, a novel PID-based sliding mode (PIDSM) controller was developed. The rational behind the use of a sliding mode (SM) control is that the SM control can effectively suppress the effects of matched uncertainties, while the PEA hysteresis, creep, and external load can be represented by a lumped matched uncertainty based on the developed model. To solve the chattering and steady-state problems, associated with the ideal SM control and the SM control with boundary layer (SMCBL), the novel PIDSM control developed in the present study replaces the switching control term in the ideal SM control schemes with a PID regulator. Experiments were carried out on a commercially-available PEA and the results obtained illustrate the effectiveness of the PIDSM controller, and its superiorities over other schemes of PID control, ideal SM control, and the SMCBL in terms of steady state error elimination, chattering suppression, and tracking error suppression. Secondly, a PIDSM observer was also developed based on the model of PEAs to provide the PIDSM controller with state estimates of the PEA. And the PIDSM controller and the PIDSM observer were combined to form an integrated control scheme (PIDSM observer-controller or PIDSMOC) for PEAs. The effectiveness of the PIDSM observer and the PIDSMOC were also validated experimentally. The superiority of the PIDSMOC over the PIDSM controller with σ-β filter control scheme was also analyzed and demonstrated experimentally. The significance of this research lies in the development of novel models for PEAs and PDSS actuators, which can be of great help in the design and control of such actuators. Also, the development of the PIDSM controller, the PIDSM observer, and their integrated form, i.e., PIDSMOC, enables the improved performance of tracking control of PEAs with the presence of various nonlinear or difficult-to-model effects

Precision engineering center. 1988 Annual report, Volume VI

To reverse the downward trend in the balance of trade, American companies must concentrate on increasing research into new products, boosting productivity, and improving manufacturing processes. The Precision Engineering Center at North Carolina State University is a multidisciplinary research and graduate education program dedicated to providing the new technology necessary to respond to this challenge. One extremely demanding manufacturing area is the fabrication and assembly of optical systems. These systems are at the heart of such consumer products as cameras, lenses, copy machines, laser bar-code scanners, VCRs, and compact audio discs - products that the Japanese and other East Asian countries are building dominance. A second critical area is the fabrication of VLSI and ULSI circuits. The tolerances required to produce the next generation of components for such systems have created the need for new approaches - approaches that could either make or break America`s competitive position. This report contains individual reports on research projects grouped into three broad areas: measurement and actuation; real-time control; precision fabrication. Separate abstracts for these articles have been indexed into the energy database

Adaptation and Learning for Manipulators and Machining

This thesis presents methods for improving the accuracy and efficiency of tasks performed using different kinds of industrial manipulators, with a focus on the application of machining. Industrial robots offer a flexible and cost-efficient alternative to machine tools for machining, but cannot achieve as high accuracy out of the box. This is mainly caused by non-ideal properties in the robot joints such as backlash and compliance, in combination with the strong process forces that affect the robot during machining operations. In this thesis, three different approaches to improving the robotic machining accuracy are presented. First, a macro/micro-manipulator approach is considered, where an external compensation mechanism is used in combination with the robot, for compensation of high-frequency Cartesian errors. Two different milling scenarios are evaluated, where a significant increase in accuracy was obtained. The accuracy specification of 50 μm was reached for both scenarios. Because of the limited workspace and the higher bandwidth of the compensation mechanism compared to the robot, two different mid-ranging approaches for control of the relative position between the robot and the compensator are developed and evaluated. Second, modeling and identification of robot joints is considered. The proposed method relies on clamping the manipulator end effector and actuating the joints, while measuring joint motor torque and motor position. The joint stiffness and backlash can subsequently be extracted from the measurements, to be used for compensation of the deflections that occur during machining. Third, a model-based iterative learning control (ILC) approach is proposed, where feedback is provided from three different sensors of varying investment costs. Using position measurements from an optical tracking system, an error decrease of up to 84 % was obtained. Measurements of end-effector forces yielded an error decrease of 55 %, and a force-estimation method based on joint motor torques decreased the error by 38 %. Further investigation of ILC methods is considered for a different kind of manipulator, a marine vibrator, for the application of marine seismic acquisition. A frequency-domain ILC strategy is proposed, in order to attenuate undesired overtones and improve the tracking accuracy. The harmonics were suppressed after approximately 20 iterations of the ILC algorithm, and the absolute tracking error was r educed by a factor of approximately 50. The final problem considered in this thesis concerns increasing the efficiency of machining tasks, by minimizing cycle times. A force-control approach is proposed to maximize the feed rate, and a learning algorithm for path planning of the machining path is employed for the case of machining in non-isotropic materials, such as wood. The cycle time was decreased by 14 % with the use of force control, and on average an additional 28 % decrease was achieved by use of a learning algorithm. Furthermore, by means of reinforcement learning, the path-planning algorithm is refined to provide optimal solutions and to incorporate an increased number of machining directions