A new power MEMS component with variable capacitance

Autonomous devices such as wireless sensors and sensor networks need a long battery lifetime in a small volume. Incorporating micro-power generators based on ambient energy increases the lifetime of these systems while reducing the volume. This paper describes a new approach to the conversion of mechanical energy, available in vibrations, to electrical energy. The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters. These models show the possibility of generating up to 40 muW with a device of 10 mm 2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 muW at 1020 Hz is expected

Device modelling for bendable piezoelectric FET-based touch sensing system

Flexible electronics is rapidly evolving towards devices and circuits to enable numerous new applications. The high-performance, in terms of response speed, uniformity and reliability, remains a sticking point. The potential solutions for high-performance related challenges bring us back to the timetested silicon based electronics. However, the changes in the response of silicon based devices due to bending related stresses is a concern, especially because there are no suitable models to predict this behavior. This also makes the circuit design a difficult task. This paper reports advances in this direction, through our research on bendable Piezoelectric Oxide Semiconductor Field Effect Transistor (POSFET) based touch sensors. The analytical model of POSFET, complimented with Verilog-A model, is presented to describe the device behavior under normal force in planar and stressed conditions. Further, dynamic readout circuit compensation of POSFET devices have been analyzed and compared with similar arrangement to reduce the piezoresistive effect under tensile and compressive stresses. This approach introduces a first step towards the systematic modeling of stress induced changes in device response. This systematic study will help realize high-performance bendable microsystems with integrated sensors and readout circuitry on ultra-thin chips (UTCs) needed in various applications, in particular, the electronic skin (e-skin)

Field-effect based chemical and biological sensing : theory and implementation

Electrochemical sensors share many properties of an ideal (bio)chemical sensor. They can be easily miniaturized with high parallel sensing capabilities,with rugged structure and at low cost. The response obtained from thetarget analyte is directly in electrical form allowing convenient data post-processing and simple interfacing to standard electrical components. With field-effect transistor (FET) based sensors, the transducing principle relies on direct detection of interfacial charge allowing detection of various ions and charged macromolecules. This thesis investigates FET based sensors for biological and chemical sensing. First, an ion-sensitive floating gate FET (ISFGFET) structure is studied and modeled. The proposed model reveals novel abilities of the structure not found in conventional ion-sensitive FETs (ISFETs). With IS-FGFET, we can simultaneously optimize the transistor operating point and modulate the charging of the surface and the ionic screening layer via the field effect. This control is predicted to allow reduced electric double layer screening as well as the possibility to enhance charged molecule attachment to the sensing surface. The model can predict sensor characteristic curves in pH sensing in absolute terms and allows any potential to be computed in the sensor including the electrical part and the electrolyte solution. Furthermore, a compact ISFGFET variant is merged into electric circuit simulator, which allows it to be simulated as a standard electrical component with electrical simulations tools of high computational efficiency, and allows simple modifications such as addition of parasitic elements, temperature effects, or even temporal drifts. Next, another transistor based configuration, the extended-gate ISFET is studied. The simplicity of the proposed configuration allows a universal potentiometric approach where a wide variety of chemical and biological sensors can be constructed. The design philosophy for this sensing structure is to use the shelf electric components and standard electric manufacturing processes. Such an extended-gate structure is beneficial since the dry electronics can be completely separated from the wet sensing environment. The extended-gate allows simple functionalization towards chemical and biological sensing. A proof-of-concept of this structure was verified through organo modified gold platforms with ion-selective membranes. A comparison with standard open-circuit potentiometry reveals that the sensing elements in a disposable sensing platform arrays provide comparable performance to traditional electrodes. Finally, a universal battery operated hand-held electrical readout device is designed for multiplexed detection of the disposable sensors with wireless smartphone data plotting, control, and storage. Organic polymers play an important role in the interfacial properties of sensors studied in this thesis. The polymer coating is attractive in chemical sensing because of its redox sensitivity, bio-immobilization capability, ion-to-electron transducing capability, and applicability, for example via a simple low-cost drop-casting. This structure simplifies the design of the sensor substantially and the coating increases the amount of possible target applications.Siirretty Doriast

A Class-E Inductive Powering Link with Backward Data Communications for Implantable Sensor Systems

The design and implementation of a wireless power and data transfer system based on inductive coupling, having the potential to be used in numerous implantable bio-medical sensors and systems, is presented. The system consists of an external (primary) unit and an internal (secondary) unit. The external unit incorporates a high-efficiency switch-mode Class-E amplifier operating at ~200 kHz for driving the primary coil. The secondary unit consists of a parallel resonant coil followed by the power recovery circuitry. Means for backward data communication from the internal to the external unit over the same pair of coils has been realized using a simple FSK-based modulation scheme incorporated into the internal unit. FSK demodulation and associated filtering are integrated with the base inductive powering system. Prototype system test results indicate the inductive link efficiency can exceed 80% under optimum operating conditions with the overall power transfer efficiency of approximately 30%. The communication system is capable of transmitting up to 10kbps of data with the FSK carrier frequency (i.e., middle-frequency) being only 120kHz. The complete system functions reliably over an inter-coil distances exceeding 2.5cm with a 5V dc supply

Addressing the Smart Systems Design Challenge: The SMAC Platform

This article presents the concepts, the organization, and the preliminary application results of SMAC, a smart systems co-design platform. The SMAC platform, which has been developed as Integrated Project (IP) of the 7th ICT Call under the Objective 3.2 \u201cSmart components and Smart Systems integration\u201d addresses the challenges of the integration of heterogeneous and conflicting domains that emerge in the design of smart systems. SMAC includes methodologies and EDA tools enabling multi-disciplinary and multi-scale modelling and design, simulation of multidomain systems, subsystems and components at different levels of abstraction, system integration and exploration for optimization of functional and non-functional metrics. The article presents the preliminary results obtained by adopting the SMAC platform for the design of a limb tracking smart system

Millimeter-Scale and Energy-Efficient RF Wireless System

This dissertation focuses on energy-efficient RF wireless system with millimeter-scale dimension, expanding the potential use cases of millimeter-scale computing devices. It is challenging to develop RF wireless system in such constrained space. First, millimeter-sized antennae are electrically-small, resulting in low antenna efficiency. Second, their energy source is very limited due to the small battery and/or energy harvester. Third, it is required to eliminate most or all off-chip devices to further reduce system dimension. In this dissertation, these challenges are explored and analyzed, and new methods are proposed to solve them. Three prototype RF systems were implemented for demonstration and verification. The first prototype is a 10 cubic-mm inductive-coupled radio system that can be implanted through a syringe, aimed at healthcare applications with constrained space. The second prototype is a 3x3x3 mm far-field 915MHz radio system with 20-meter NLOS range in indoor environment. The third prototype is a low-power BLE transmitter using 3.5x3.5 mm planar loop antenna, enabling millimeter-scale sensors to connect with ubiquitous IoT BLE-compliant devices. The work presented in this dissertation improves use cases of millimeter-scale computers by presenting new methods for improving energy efficiency of wireless radio system with extremely small dimensions. The impact is significant in the age of IoT when everything will be connected in daily life.PHDElectrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/147686/1/yaoshi_1.pd

Analog System-on-a-Chip with Application to Biosensors

This dissertation facilitates the design and fabrication of analog systems-on-a-chip (SoCs). In this work an analog SoC is developed with application to organic fluid analysis. The device contains a built-in self-test method for performing on-chip analysis of analog macros. The analog system-on-a-chip developed in this dissertation can be used to evaluate the properties of fluids for medical diagnoses. The research herein described covers the development of: analog SoC models, an improved set of chemical sensor arrays, a self-contained system-on-a-chip for the determination of fluid properties, and a method of performing on-chip testing of analog SoC sub-blocks

GSM Based Health Assistant for People with Chronic Diseases

A GSM based health assistant for people with chronic diseases proposes and implements a prototype to help people with chronic diseases. The system is composed of two components namely, wearable body area network and a microprocessor unit with GSM and GPS. This project can track certain chronic diseases namely, heart problems, asthma, apart from the chronic diseases can also track blood pressure with sensors namely, electrocardiogram (ECG) sensor, temperature sensor, heart beatsensor and blood pressure sensor. This project keeps track of the readings from the sensors and if there are some abnormalities it would send messages via GSM stored in SIM.The location of the patient can be sent using GPS

Modeling and Fundamental Design Considerations for Portable, Wearable and Implantable Electronic Biosensors

Chronic diseases such as cancer, diabetes, acquired immune deficiency syndrome (AIDS), etc. are leading causes of mortality all over the world. Portable, wearable and implantable biosensors can go a long way in preventing these premature deaths by frequent or continuous self-monitoring of vital health parameters