3,582 research outputs found

    A review of data mining applications in semiconductor manufacturing

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    The authors acknowledge Fundacao para a Ciencia e a Tecnologia (FCT-MCTES) for its financial support via the project UIDB/00667/2020 (UNIDEMI).For decades, industrial companies have been collecting and storing high amounts of data with the aim of better controlling and managing their processes. However, this vast amount of information and hidden knowledge implicit in all of this data could be utilized more efficiently. With the help of data mining techniques unknown relationships can be systematically discovered. The production of semiconductors is a highly complex process, which entails several subprocesses that employ a diverse array of equipment. The size of the semiconductors signifies a high number of units can be produced, which require huge amounts of data in order to be able to control and improve the semiconductor manufacturing process. Therefore, in this paper a structured review is made through a sample of 137 papers of the published articles in the scientific community regarding data mining applications in semiconductor manufacturing. A detailed bibliometric analysis is also made. All data mining applications are classified in function of the application area. The results are then analyzed and conclusions are drawn.publishersversionpublishe

    Advanced Process Monitoring for Industry 4.0

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    This book reports recent advances on Process Monitoring (PM) to cope with the many challenges raised by the new production systems, sensors and “extreme data” conditions that emerged with Industry 4.0. Concepts such as digital-twins and deep learning are brought to the PM arena, pushing forward the capabilities of existing methodologies to handle more complex scenarios. The evolution of classical paradigms such as Latent Variable modeling, Six Sigma and FMEA are also covered. Applications span a wide range of domains such as microelectronics, semiconductors, chemicals, materials, agriculture, as well as the monitoring of rotating equipment, combustion systems and membrane separation processes

    A systematic mapping of the advancing use of machine learning techniques for predictive maintenance in the manufacturing sector

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    The increasing availability of data, gathered by sensors and intelligent machines, is chang-ing the way decisions are made in the manufacturing sector. In particular, based on predictive approach and facilitated by the nowadays growing capabilities of hardware, cloud-based solutions, and new learning approaches, maintenance can be scheduled—over cell engagement and resource monitoring—when required, for minimizing (or managing) unexpected equipment failures, improving uptime through less aggressive maintenance schedules, shortening unplanned downtime, reducing excess (direct and indirect) cost, reducing long-term damage to machines and processes, and improve safety plans. With access to increased levels of data (and over learning mechanisms), companies have the capability to conduct statistical tests using machine learning algorithms, in order to uncover root causes of problems previously unknown. This study analyses the maturity level and contributions of machine learning methods for predictive maintenance. An upward trend in publications for predictive maintenance using machine learning techniques was identified with the USA and China leading. A mapping study—steady set until early 2019 data—was employed as a formal and well-structured method to synthesize material and to report on pervasive areas of research. Type of equipment, sensors, and data are mapped to properly assist new researchers in positioning new research activities in the domain of smart maintenance. Hence, in this paper, we focus on data-driven methods for predictive maintenance (PdM) with a comprehensive survey on applications and methods until, for the sake of commenting on stable proposal, 2019 (early included). An equal repartition between evaluation and validation studies was identified, this being a symptom of an immature but growing research area. In addition, the type of contribution is mainly in the form of models and methodologies. Vibrational signal was marked as the most used data set for diagnosis in manufacturing machinery monitoring; furthermore, supervised learning is reported as the most used predictive approach (ensemble learning is growing fast). Neural networks, followed by random forests and support vector machines, were identified as the most applied methods encompassing 40% of publications, of which 67% related to deep neural network with long short-term memory predominance. Notwithstanding, there is no robust approach (no one reported optimal performance over different case tests) that works best for every problem. We finally conclude the research in this area is moving fast to gather a separate focused analysis over the last two years (whenever stable implementations will appear)

    Prognostic Algorithms for Condition Monitoring and Remaining Useful Life Estimation

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    To enable the benets of a truly condition-based maintenance philosophy to be realised, robust, accurate and reliable algorithms, which provide maintenance personnel with the necessary information to make informed maintenance decisions, will be key. This thesis focuses on the development of such algorithms, with a focus on semiconductor manufacturing and wind turbines. An introduction to condition-based maintenance is presented which reviews dierent types of maintenance philosophies and describes the potential benets which a condition- based maintenance philosophy will deliver to operators of critical plant and machinery. The issues and challenges involved in developing condition-based maintenance solutions are discussed and a review of previous approaches and techniques in fault diagnostics and prognostics is presented. The development of a condition monitoring system for dry vacuum pumps used in semi- conductor manufacturing is presented. A notable feature is that upstream process mea- surements from the wafer processing chamber were incorporated in the development of a solution. In general, semiconductor manufacturers do not make such information avail- able and this study identies the benets of information sharing in the development of condition monitoring solutions, within the semiconductor manufacturing domain. The developed solution provides maintenance personnel with the ability to identify, quantify, track and predict the remaining useful life of pumps suering from degradation caused by pumping large volumes of corrosive uorine gas. A comprehensive condition monitoring solution for thermal abatement systems is also presented. As part of this work, a multiple model particle ltering algorithm for prog- nostics is developed and tested. The capabilities of the proposed prognostic solution for addressing the uncertainty challenges in predicting the remaining useful life of abatement systems, subject to uncertain future operating loads and conditions, is demonstrated. Finally, a condition monitoring algorithm for the main bearing on large utility scale wind turbines is developed. The developed solution exploits data collected by onboard supervisory control and data acquisition (SCADA) systems in wind turbines. As a result, the developed solution can be integrated into existing monitoring systems, at no additional cost. The potential for the application of multiple model particle ltering algorithm to wind turbine prognostics is also demonstrated

    Data mining in manufacturing: a review based on the kind of knowledge

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    In modern manufacturing environments, vast amounts of data are collected in database management systems and data warehouses from all involved areas, including product and process design, assembly, materials planning, quality control, scheduling, maintenance, fault detection etc. Data mining has emerged as an important tool for knowledge acquisition from the manufacturing databases. This paper reviews the literature dealing with knowledge discovery and data mining applications in the broad domain of manufacturing with a special emphasis on the type of functions to be performed on the data. The major data mining functions to be performed include characterization and description, association, classification, prediction, clustering and evolution analysis. The papers reviewed have therefore been categorized in these five categories. It has been shown that there is a rapid growth in the application of data mining in the context of manufacturing processes and enterprises in the last 3 years. This review reveals the progressive applications and existing gaps identified in the context of data mining in manufacturing. A novel text mining approach has also been used on the abstracts and keywords of 150 papers to identify the research gaps and find the linkages between knowledge area, knowledge type and the applied data mining tools and techniques

    Online Novelty Detection System: One-Class Classification of Systemic Operation

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    Presented is an Online Novelty Detection System (ONDS) that uses Gaussian Mixture Models (GMMs) and one-class classification techniques to identify novel information from multivariate times-series data. Multiple data preprocessing methods are explored and features vectors formed from frequency components obtained by the Fast Fourier Transform (FFT) and Welch\u27s method of estimating Power Spectral Density (PSD). The number of features are reduced by using bandpower schemes and Principal Component Analysis (PCA). The Expectation Maximization (EM) algorithm is used to learn parameters for GMMs on feature vectors collected from only normal operational conditions. One-class classification is achieved by thresholding likelihood values relative to statistical limits. The ONDS is applied to two different applications from different application domains. The first application uses the ONDS to evaluate systemic health of Radio Frequency (RF) power generators. Four different models of RF power generators and over 400 unique units are tested, and the average robust true positive rate of 94.76% is achieved and the best specificity reported as 86.56%. The second application uses the ONDS to identify novel events from equine motion data and assess equine distress. The ONDS correctly identifies target behaviors as novel events with 97.5% accuracy. Algorithm implementation for both methods is evaluated within embedded systems and demonstrates execution times appropriate for online use

    Fault Detection and Isolation in Industrial Processes Using Deep Learning Approaches

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    Automated fault detection is an important part of a quality control system. It has the potential to increase the overall quality of monitored products and processes. The fault detection of automotive instrument cluster systems in computer- based manufacturing assembly lines is currently limited to simple boundary checking. The analysis of more complex non-linear signals is performed manually by trained operators, whose knowledge is used to supervise quality checking and manual detection of faults. In this paper, a novel approach for automated fault detection and isolation based on deep machine learning techniques is presented. The approach was tested on data generated by computer-based manufacturing systems equipped with local and remote sensing devices. The results show that the proposed approach models the different spatial / temporal patterns found in the data. The approach is also able to successfully diagnose and locate multiple classes of faults under real-time working conditions. The proposed method is shown to outperform other established fault detection and isolation methods
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